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Gookyi Dennis A. N.
SoC Design Lab.
BIOSENSOR SYSTEM IN
STANDARD CMOS
PROCESSES: FACT OR
FICTION?
BYUNGCHUL JANG,STUDENT MEMBER, IEEE,
AND
ARJANG HASSIBI, MEMBER, IEEE
June.05.2014
2
Contents
• Introduction
• Biosensor Systems
• CMOS Fabrication Process
• Integrated Biosensors
• Conclusion
3
Introduction: Affinity-Based Detection
• Affinity-Based detection as opposed to catalytic based
detection is a fundamental method in identifying and
measuring the abundance of biological and biochemical
analytes.
• As show below, in Affinity-Based detection, biological
analytes are specifically bound to immobilized capture
probes.
• The main aim of this detection platform is to produce
detectable signals based on the captured analytes
• The generated signal is directly proportion to the amount
of the target analyte in the sample.
4
Introduction: Challenges
• Analyte motion in biosensor settings is mainly due to diffusion
which from a microscopic point of view is a probalistic mass-transfer
process.
• This makes the analyte collision with the probes a probalistic
process.
• When the concentration of nonspecific species becomes higher than
that of the target analyte, nonspecific binding may dominate the
measured signal.
• This limits the minimum detectable level (MDL)
• These uncertainties lowers the accuracy of biosensors which does
not satisfy the requirements of many high performance
biotechnological applications.
• In addition, biosensors are not fully portable devices because their
detection platform consist of fluidic system and bulky detectors.
5
Introduction: Proposed Solution
• A proposed solution is to use semiconductor fabrication
technologies to build compact, high performance and cost-
efficient biosensor systems.
• Such system will include both the fluidic system and the
sample preparation process and the transduction process.
• The sample preparation processes in recent years have been
addressed in the form of microfluidic and has automated the
liquid handling systems.
• The integration of the detection and the read out circuitry
have not been addressed as of yet
• This is because of the technical challenges of manufacturing
transducers using custom surface and bulk MEMS procedures,
and also the performance and cost justification of monolithic
integration of all components.
6
Introduction: CMOS Solution
• CMOS fabrication processes, which is the most robust and
widely used fabrication processes in semiconductor industry
for biosensors has emerged
• CMOS beats MEMS in terms of yield, cost-efficiency and
integration capabilities
• From an electronic design point of view, CMOS offer huge
degree of flexibility and system level integration
7
Biosensor Systems
• Different functional blocks are integrated to measure analyte
specific signals in biosensors
• As shown below, biosensors not only consist of biochemical
systems but also electronic components
• The fundamental functional blocks in all biosensors include the
assay and the transducer
• This is because these components are necessary for the
functionality of the whole system
8
Biosensor Systems: Assay
• The assay in all affinity-based biosensors is a technique
used to facilitate binding of probe-target complexes to
produce a detectable signal which indicates the presence
of the targets and its amount in the sample
• Components required for affinity-based detection includes
molecular recognition layer and a transducer
9
Biosensor Systems: Assay
• Biosensors functions in solutions that comprised the target analytes
in addition to different biological and chemical molecules.
• The assaying procedure, may include label based detection
• Label-based detection is cumbersome and therefore efforts have
been made to detect target molecules using only their intrinsic
properties such as charge and mass
• Independent of the detection techniques, all measurements in
biosensor systems are counting processes
10
Biosensor Systems: Transducers
• To count the number of captured analytes, different
transducers can be used
• A transducer is a device that converts from one type of
energy to another
• The categories of transducers depend on the kind of
signal or parameter the biosensor system creates or
alters
Biosensor Systems: Transducers
• Electrochemical transducers exploit analyte capturing to
change the electrochemical characteristics of electrode
electrolyte systems.
• Mechanical transducers: an electromechanical parameter of
the system is changed by the additional mass of the captured
analytes.
• Optical transducers: create or selectively absorb certain
wavelength of light based on the captured analytes.
• Thermal transducers: measure the temperature change during
biological thermal reaction to detect the total number of
molecules involved in the reaction
11
12
CMOS Fabrication Process: Anatomy of
CMOS Integrated Systems
• CMOS fabrication technology is widely used in
microprocessors, microcontrollers and other digital logic
circuits
• Difference between CMOS and other fabrication processes
such as bipolar can clearly be seen in the structure of their
active devices
• The active devices in CMOS include p-type and n-type
MOSFETs
13
CMOS Fabrication Process: Anatomy of
CMOS Integrated Systems
• To electrically access the transistors and create a certain
circuit topology, multiple interconnect metals are fabricated
in the process
• These interconnect metals can be connected together and to
the transistor
14
CMOS Fabrication Process: Transducers in CMOS
• To implement biosensors in CMOS, we need to identify which
components can be fabricated using the process
• The interface circuitry, data converters and DSP blocks are all
electronic circuits and can be integrated in CMOS
• Building of transducers in CMOS is not as flexible as electronic
components because CMOS is optimized for digital circuits and not
so much for sensors
• Nonetheless, we can build transducers in CMOS and use them to
design high performance sensors
15
Transducers in CMOS: Electrochemical
Transducers
• Consist of electrodes where electrons are charge carriers
and electrolyte where ions are charge carriers
• The transducers extract information from the electrical
characteristics of the electrode-electrolyte systems
• Some of the characteristics include: potential, current,
impedance and I-V curves
• The main challenge is to create the system to connect
the electrode to the chip
• The only metal available in CMOS which can be exposed
the electrolyte is made up of aluminum which has
impurities
• A solution to this is to use post-fabrication processes to
create more robust electrode on top of the metal
16
CMOS Fabrication Process: Interface and
Packaging
• In standard IC package has CMOS chip electrically connected
to the pins of the package
• In general, signals can be coupled into CMOS ICs either
from the top or from the bottom of the chip
17
Integrated Biosensors
• In contrast to conventional biosensors where incubation
and detection are carried out independently, integrated
biosensors detect binding without separate hybridization
and detection processes
• The feasibility of combining those processes on a single
platform allows integrated biosensors to detect binding
in real time
18
Integrated Biosensors
• An example of an integrated biosensors is shown below:
• The detectors are integrated using CMOS and each
capturing spot has its own read out circuitry
• The figure above also shows an integrated fluorescence
biosensor
• Photo detectors are fabricated using standard CMOS
• Emission filter and FOF are integrated to the top surface
of the biosensor chip using post fabrication processes
19
Conclusion
• Recently, there have been trends to implement CMOS as a the
backbone fabrication method for biosensors
• Although CMOS is optimized for digital electronics, it still can
be used to realize transducers, readout circuitry and digital
signal processing blocks used in biosensors
• The challenge is essentially the interface design which couples
the assay to the IC chip
• This may require additional post fabrication processes

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Biosensors

  • 1. Gookyi Dennis A. N. SoC Design Lab. BIOSENSOR SYSTEM IN STANDARD CMOS PROCESSES: FACT OR FICTION? BYUNGCHUL JANG,STUDENT MEMBER, IEEE, AND ARJANG HASSIBI, MEMBER, IEEE June.05.2014
  • 2. 2 Contents • Introduction • Biosensor Systems • CMOS Fabrication Process • Integrated Biosensors • Conclusion
  • 3. 3 Introduction: Affinity-Based Detection • Affinity-Based detection as opposed to catalytic based detection is a fundamental method in identifying and measuring the abundance of biological and biochemical analytes. • As show below, in Affinity-Based detection, biological analytes are specifically bound to immobilized capture probes. • The main aim of this detection platform is to produce detectable signals based on the captured analytes • The generated signal is directly proportion to the amount of the target analyte in the sample.
  • 4. 4 Introduction: Challenges • Analyte motion in biosensor settings is mainly due to diffusion which from a microscopic point of view is a probalistic mass-transfer process. • This makes the analyte collision with the probes a probalistic process. • When the concentration of nonspecific species becomes higher than that of the target analyte, nonspecific binding may dominate the measured signal. • This limits the minimum detectable level (MDL) • These uncertainties lowers the accuracy of biosensors which does not satisfy the requirements of many high performance biotechnological applications. • In addition, biosensors are not fully portable devices because their detection platform consist of fluidic system and bulky detectors.
  • 5. 5 Introduction: Proposed Solution • A proposed solution is to use semiconductor fabrication technologies to build compact, high performance and cost- efficient biosensor systems. • Such system will include both the fluidic system and the sample preparation process and the transduction process. • The sample preparation processes in recent years have been addressed in the form of microfluidic and has automated the liquid handling systems. • The integration of the detection and the read out circuitry have not been addressed as of yet • This is because of the technical challenges of manufacturing transducers using custom surface and bulk MEMS procedures, and also the performance and cost justification of monolithic integration of all components.
  • 6. 6 Introduction: CMOS Solution • CMOS fabrication processes, which is the most robust and widely used fabrication processes in semiconductor industry for biosensors has emerged • CMOS beats MEMS in terms of yield, cost-efficiency and integration capabilities • From an electronic design point of view, CMOS offer huge degree of flexibility and system level integration
  • 7. 7 Biosensor Systems • Different functional blocks are integrated to measure analyte specific signals in biosensors • As shown below, biosensors not only consist of biochemical systems but also electronic components • The fundamental functional blocks in all biosensors include the assay and the transducer • This is because these components are necessary for the functionality of the whole system
  • 8. 8 Biosensor Systems: Assay • The assay in all affinity-based biosensors is a technique used to facilitate binding of probe-target complexes to produce a detectable signal which indicates the presence of the targets and its amount in the sample • Components required for affinity-based detection includes molecular recognition layer and a transducer
  • 9. 9 Biosensor Systems: Assay • Biosensors functions in solutions that comprised the target analytes in addition to different biological and chemical molecules. • The assaying procedure, may include label based detection • Label-based detection is cumbersome and therefore efforts have been made to detect target molecules using only their intrinsic properties such as charge and mass • Independent of the detection techniques, all measurements in biosensor systems are counting processes
  • 10. 10 Biosensor Systems: Transducers • To count the number of captured analytes, different transducers can be used • A transducer is a device that converts from one type of energy to another • The categories of transducers depend on the kind of signal or parameter the biosensor system creates or alters
  • 11. Biosensor Systems: Transducers • Electrochemical transducers exploit analyte capturing to change the electrochemical characteristics of electrode electrolyte systems. • Mechanical transducers: an electromechanical parameter of the system is changed by the additional mass of the captured analytes. • Optical transducers: create or selectively absorb certain wavelength of light based on the captured analytes. • Thermal transducers: measure the temperature change during biological thermal reaction to detect the total number of molecules involved in the reaction 11
  • 12. 12 CMOS Fabrication Process: Anatomy of CMOS Integrated Systems • CMOS fabrication technology is widely used in microprocessors, microcontrollers and other digital logic circuits • Difference between CMOS and other fabrication processes such as bipolar can clearly be seen in the structure of their active devices • The active devices in CMOS include p-type and n-type MOSFETs
  • 13. 13 CMOS Fabrication Process: Anatomy of CMOS Integrated Systems • To electrically access the transistors and create a certain circuit topology, multiple interconnect metals are fabricated in the process • These interconnect metals can be connected together and to the transistor
  • 14. 14 CMOS Fabrication Process: Transducers in CMOS • To implement biosensors in CMOS, we need to identify which components can be fabricated using the process • The interface circuitry, data converters and DSP blocks are all electronic circuits and can be integrated in CMOS • Building of transducers in CMOS is not as flexible as electronic components because CMOS is optimized for digital circuits and not so much for sensors • Nonetheless, we can build transducers in CMOS and use them to design high performance sensors
  • 15. 15 Transducers in CMOS: Electrochemical Transducers • Consist of electrodes where electrons are charge carriers and electrolyte where ions are charge carriers • The transducers extract information from the electrical characteristics of the electrode-electrolyte systems • Some of the characteristics include: potential, current, impedance and I-V curves • The main challenge is to create the system to connect the electrode to the chip • The only metal available in CMOS which can be exposed the electrolyte is made up of aluminum which has impurities • A solution to this is to use post-fabrication processes to create more robust electrode on top of the metal
  • 16. 16 CMOS Fabrication Process: Interface and Packaging • In standard IC package has CMOS chip electrically connected to the pins of the package • In general, signals can be coupled into CMOS ICs either from the top or from the bottom of the chip
  • 17. 17 Integrated Biosensors • In contrast to conventional biosensors where incubation and detection are carried out independently, integrated biosensors detect binding without separate hybridization and detection processes • The feasibility of combining those processes on a single platform allows integrated biosensors to detect binding in real time
  • 18. 18 Integrated Biosensors • An example of an integrated biosensors is shown below: • The detectors are integrated using CMOS and each capturing spot has its own read out circuitry • The figure above also shows an integrated fluorescence biosensor • Photo detectors are fabricated using standard CMOS • Emission filter and FOF are integrated to the top surface of the biosensor chip using post fabrication processes
  • 19. 19 Conclusion • Recently, there have been trends to implement CMOS as a the backbone fabrication method for biosensors • Although CMOS is optimized for digital electronics, it still can be used to realize transducers, readout circuitry and digital signal processing blocks used in biosensors • The challenge is essentially the interface design which couples the assay to the IC chip • This may require additional post fabrication processes