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An Integrated Capacitive Array
Biosensor for the Selective and 

Real-Time Detection of 

Whole Bacterial Cells
Numa Couniot, Laurent A. Francis, D. Flandre
laurent.francis@uclouvain.be
4th International Symposium on Sensor Science
July 13-15, 2015, Basel
Problem definition and Challenges
Matrix
 Detec+on  levels
 In  27  nL
Blood
 1  bacteria/mL
 1  bacterium  (p  =  0.003%)
Breast  milk
 103  bacteria/mL
 1  bacterium  (p  =  3%)
Urine  samples
 105  bacteria/mL
 3  bacteria
•  How can we detect such a little amount of bacteria?
For a 300 µm x 300 µm
sensor in a 300 µm-thick
channel
•  Selectivity?
•  How to deal with different solutions?
1 Staphylococcus aureus/mL
must be detected among:
•  109 red blood cells/mL
•  Possibly other non-pathogen bacteria
Known problem for electronic biosensors (FET, impedance, etc.):
à the screening from the surface properties (e.g. electrical double layer)
at high salinity
Problem definition and Challenges
Electrode
Double Layer (DL)
~ 1-30 nm
Bacterial cell
~ 1 µm
Electrolyte
•  How to deal with different type of solutions/electrolytes?
Electrical potential
---------
+ + + + + + + + + + + + +
--------
--- +++
Strongly depend
on the ionic strength!!!
Problem definition and Challenges
Electrode
Double Layer (DL)
~ 1-30 nm
Bacterial cell
~ 1 µm
Electrolyte
Surface effects
à Low sensitivity
Volume effects
à High sensitivity
Go  to  
High  Frequency!


1  bact.  =  ~70  aF
•  How to deal with different type of solutions/electrolytes?
Strongly depend
on the ionic strength!!!
1 µm
Bacteria
Transducer
Selective agent
Readout interface
Staphylococcus
epidermidis
à Similar to S. aureus
à Non-pathogenic
Interdigitated
microelectrodes
à High active area
à Similar size as bacteria
à Electric field in surface
Lysostaphin
à  Selectively destroys
bacterial cell wall
à  Extendable to most
bacteria with lysins
CMOS
à  Low-cost
à  Miniaturization
à  System integration
BIOLOGY
SENSOR
BIO/CHEM.
ELECTRONICS
CMOS capacitive
array biosensor
Our approach
Electrolyte capacitance
monitoring
Interdigitated
microelectrodes
(IDE)
Integrated
pixels
Integrated
oscillator
Electrokinetic
effects
Four steps to get to bacterium detection
1
2
 3
4
Interdigitated microelectrodes
Interdigitated microelectrodes (IDE)
[Couniot et al., Biosensors and Bioelectronics, 67, pp. 154-161, 2015]
TOP  VIEW
 CROSS  SECTION
+50 mV
-50 mV
+I0
-I0
+50 mV
-50 mV
Cins Rsol Cins
Csol
ALD-alumina passivated electrodes
Time [min]
Y/ω[pF]#Bacteria[#/mm2]
Optical
Electrical
[Couniot et al., Biosensors and Bioelectronics, 67, pp. 154-161, 2015]
Real-time monitoring of S. epidermidis
No background noise
Low-cost
Robust to wash
Advantages:
Selectivity based on lytic enzymes (lysostaphin)
[Couniot et al., Biosensors and Bioelectronics, 67, pp. 154-161, 2015]
Destroyed
S. epidermidis
causes decrease
in capacitance
Selectivity means based on lytic enzymes
Urine with S. epidermidis (target) and E. faecium (control -)
[Couniot et al., Biosensors and Bioelectronics, 67, pp. 154-161, 2015]
1.  Naked
 2.  Ef
 3.  Ef  +  Se
 4.  Ef  +  Se(killed)
Same number of
E. faecium, no
impedance shift
[Couniot et al., Biosensors and Bioelectronics, 67, pp. 154-161, 2015]
Selectivity means based on lytic enzymes
Urine with E. faecium only (control -)
1.  Naked
 2.  Ef
 3.  Ef(not  killed)
Selectivity means based on lytic enzymes
Reproducibility of the normalized shift
Integrating electrokinetic effects
~ 1% of bacteria captured
~ 99% of bacteria lost
~ 1% of bacteria captured
~ 99% of bacteria captured
Trap bacterial cells
with electrokinetics
How to decrease the LoD?
FLOW
FLOW
Macroelectrode
For electrokinetic actuation
Capacitive
Sensor
+7 V
- 7 V
50 mV
à  Generate
electrokinetics (EK)
effects
Design of the device
[Couniot et al., Lab on chip, submitted, 2015]
LoD : 3.5.105 CFU/mL in 20 min
à 11x better than without EK
AC-Electroosmosis @ 10 kHz
[Couniot et al., Lab on chip, in Press, 2015]
Bacterial incubation
0 20 40 60 80
3.15
3.2
3.25
3.3
3.35
Time [min]||Y/ω||[pF]
w/ AC-EO
w/o AC-EO
7.10 CFU/mL
6
1.6 . 10 CFU/mL
7
~5fF/min
~ 1 fF/min
PBS 1:1000 PBS 1:1000
LoD : 105 CFU/mL in 20 min
à 38x better than without EK
OFF/ON Steps
0 20 40 60 80
3.15
3.2
3.25
3.3
3.35
3.4
3.45
3.5
3.55
Time [min]||Y/ω||[pF]
w/ DEP & ET
w/o DEP & ET
Bacterial incubationPBS 1:1000 PBS 1:1000
7.10 CFU/mL
6
1.6 . 10 CFU/mL
7
Δ1
Δ2
Δ3
Δ4
Δ5
[Couniot et al., Lab on chip, in Press, 2015]
Electrothermal + Dielectrophoresis @ 63 MHz
à Flow-based method to direct bacteria from
edge to the sensor center
VHF Capacitance-to-Frequency converter
VHF Capacitance-to-Frequency converter
[Couniot et al., IEEE TCAS II, vol. 62, 2, 2015]
M5
VHF GND
M4
M3
M2
M1
CMOS
Al2O3
DL
Electrolyte
VIA45
VIA
Bacteria
VHF
CROSS  SECTION
Sensing
Part
Electronics
VHF Capacitance-to-Frequency converter
[Couniot et al., IEEE TCAS II, vol. 62, 2, 2015]
TOP  VIEW
VHF Capacitance-to-Frequency converter
en
Vdd
Vdd Vdd
Five-stage ring oscillator Ten-stag
Sub-interdigitated microelectrode arrays (M5)
fIDE
Five-stage ring oscillator
5 sub-interdigitated electrodes (M5)
[Couniot et al., IEEE TCAS II, vol. 62, 2, 2015]
Frequency divider
~  300  MHz
÷  1024
~  300  kHz
OUTPUT
0
 0
 0
1
1
1
 0
 1
 0
 1
Intrinsic
and extrinsic
capacitances
A factor 2 of difference despite the
same coverage…
f200 µm
−1
∝ 1pF + 0.77*Csol,200 µm( )
f100 µm
−1
∝ 0.8pF + 0.77*Csol,100 µm( )
3.5 ± 0.1 pF
1 ± 0.025 pF
The capacitance decreases
à  Assessed by simulations/models
since cytoplasm dominates @ VHF
à  εr,cyto ≈ 70 < εr,PBS = 80
Before After
Bacterial sensing in pure PBS
10
6
0
Sensitivity[%]
200 μm-sided: exp. #1
exp. #2
mean
100 μm-sided: exp. #1
exp. #2
mean
4
8
12
10
7
10
8
10
9
fIDE [Hz]
~ 150 MHz
[Couniot et al., IEEE TCAS II, vol. 62, 2, 2015]
Capacitive biosensor array
Single
bacterial cell
Reduce the
sensor size
Bacterial
binding
Δ1
Nominal sensor
capacitance: 100%
Single
bacterial cell
Δ2
[Couniot et al., IEEE TBCAS, in Press, 2015]
How to improve sensitivity & multiplexing?
Single
bacterial cell
Problem: the
bacterial cell can
be outside the
sensor
Bacterial
binding
Δ1
Nominal sensor
capacitance: 100%
How to improve sensitivity & multiplexing?
Single
bacterial cell
Δ2=0
[Couniot et al., IEEE TBCAS, in Press, 2015]
Single
bacterial cell
Solution: make
a sensor array
Bacterial
binding
Δ1
Nominal sensor
capacitance: 100%
Single
bacterial cell
Δ2
[Couniot et al., IEEE TBCAS, in Press, 2015]
How to improve sensitivity & multiplexing?
System architecture (Top view)
[Couniot et al., IEEE TBCAS, in Press, 2015]
System architecture (correlated double sampling)
[Couniot et al., IEEE TBCAS, in Press, 2015]
Vdd
Vdd
Vdd
MR
MBUF
MSELCIDE
CD
MC1 MC2
MINIT
Vc1 Vc2
MT
MSHR
Vshr
CSHR
MSHS
Vshs
CSHS
MB
Vb
Vsel
Vr
Pixel	(i,j)
Column
Amplifier	(j)
Columnbus
Vinit
VIDEVref
Vpix
VgT
Buffer
+ Row select.
Charge sharing
principle
Subthresh.
Gain
Csol
Cins
σsol
Ideal linearity
−50 0 50
0.12
0.16
0.2
0.24
0.28
Variation of parameters [%]
VgT
[V]
σsol = 1.8 mS/m
Csol = 55.6 fF
Cins = 500 fF
Rsol = 7 MΩ
CDL = 4.5 pF
Csol Rsol
Cins
CDL
Cins
CDL
CIDE
PIXEL
TOP  VIEW
0 10 20 30 40 50
−10
−5
0
5
Time [min]
Vout
[mV]
1
3
4
PBS 1:1000
w/ bacteria
PBS 1:1000
w/o bacteria
2
Pixel (2,7)
Pixel (2,6)
Pixel (2,8)
w/o bacteria w/ bacteria
Real-time monitoring
[Couniot et al., IEEE TBCAS, in Press, 2015]
w/o bacteria
w/ bacteria
Type 1
Type 2
w/o bacteria
w/ bacteria
Type 1
Type 2
*
w/o bacteria w/ bacteria
[Couniot et al., IEEE TBCAS, in Press, 2015]
Real-time monitoring
*
[Couniot et al., IEEE TBCAS, in Press, 2015]
Real-time monitoring
0
Number of bacteria
Simulation
2 4 6 8 10 12
0
10
20
30
0
0.23
0.46
0.69
ΔVout[mV]
ΔCsol[fF]
Number of bacteria
0
-20
Experimental
#5
ΔVout[mV]
5 10 15 20
0
20
40
#6
#7
#11
#11
#23
#13
#20
#12
#9
#10
#3
#8
#8
VIDE
Vgnd
VIDE
Vgnd
≠
ΔC  ≈  167  aF
ΔC  ≈  38  aF
[Couniot et al., Sensors and Actuators B, vol. 189, pp. 43-51, 2013]
VIDE
Vgnd
≠
ΔC  ≈  7  aF
CMOS capacitive
array biosensor
Interdigitated
microelectrodes
(IDE)
Integrated
pixels
Integrated
oscillator
Electrokinetic
effects
1
2
 3
4
High sensitivity
@ high salinity
High sensitivity
By bacterial trapping
Single Bacteria
Detection
Selectivity
F.R.S.-­‐FNRS  Funds
D.  Bol,  J.  Mahillon  &  J-­‐L.  Gala  for  their  supervision
T.  Vanzieleghem  &  J.  Mahillon  for  their  biological  exper+se
J.  Rasson  &  N.  Van-­‐Overstraeten  benefits  for  useful  discussions
O.  Poncelet  for  ALD  deposi+on
C.A.  Dutu  for  technical  help  with  PDMS  cap  micro-­‐fabrica+on
D.  Spôte  for  the  fabrica+on  of  the  pressure  tool
UCL  WINFAB  plaoorm  for  help  with  micro-­‐fabrica+on
UCL  WELCOME  plaoorm  for  help  with  measurement  setup
Thank you for your attention!
Questions?
laurent.francis@uclouvain.be
Acknowledgements

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An Integrated Capacitive Array Biosensor for the Selective and Real-Time Detection of Whole Bacterial Cells

  • 1. An Integrated Capacitive Array Biosensor for the Selective and 
 Real-Time Detection of 
 Whole Bacterial Cells Numa Couniot, Laurent A. Francis, D. Flandre laurent.francis@uclouvain.be 4th International Symposium on Sensor Science July 13-15, 2015, Basel
  • 2. Problem definition and Challenges Matrix Detec+on  levels In  27  nL Blood 1  bacteria/mL 1  bacterium  (p  =  0.003%) Breast  milk 103  bacteria/mL 1  bacterium  (p  =  3%) Urine  samples 105  bacteria/mL 3  bacteria •  How can we detect such a little amount of bacteria? For a 300 µm x 300 µm sensor in a 300 µm-thick channel •  Selectivity? •  How to deal with different solutions? 1 Staphylococcus aureus/mL must be detected among: •  109 red blood cells/mL •  Possibly other non-pathogen bacteria Known problem for electronic biosensors (FET, impedance, etc.): à the screening from the surface properties (e.g. electrical double layer) at high salinity
  • 3. Problem definition and Challenges Electrode Double Layer (DL) ~ 1-30 nm Bacterial cell ~ 1 µm Electrolyte •  How to deal with different type of solutions/electrolytes? Electrical potential --------- + + + + + + + + + + + + + -------- --- +++ Strongly depend on the ionic strength!!!
  • 4. Problem definition and Challenges Electrode Double Layer (DL) ~ 1-30 nm Bacterial cell ~ 1 µm Electrolyte Surface effects à Low sensitivity Volume effects à High sensitivity Go  to   High  Frequency! 1  bact.  =  ~70  aF •  How to deal with different type of solutions/electrolytes? Strongly depend on the ionic strength!!!
  • 5. 1 µm Bacteria Transducer Selective agent Readout interface Staphylococcus epidermidis à Similar to S. aureus à Non-pathogenic Interdigitated microelectrodes à High active area à Similar size as bacteria à Electric field in surface Lysostaphin à  Selectively destroys bacterial cell wall à  Extendable to most bacteria with lysins CMOS à  Low-cost à  Miniaturization à  System integration BIOLOGY SENSOR BIO/CHEM. ELECTRONICS CMOS capacitive array biosensor Our approach
  • 8. Interdigitated microelectrodes (IDE) [Couniot et al., Biosensors and Bioelectronics, 67, pp. 154-161, 2015] TOP  VIEW CROSS  SECTION +50 mV -50 mV +I0 -I0 +50 mV -50 mV Cins Rsol Cins Csol ALD-alumina passivated electrodes
  • 9. Time [min] Y/ω[pF]#Bacteria[#/mm2] Optical Electrical [Couniot et al., Biosensors and Bioelectronics, 67, pp. 154-161, 2015] Real-time monitoring of S. epidermidis
  • 10. No background noise Low-cost Robust to wash Advantages: Selectivity based on lytic enzymes (lysostaphin) [Couniot et al., Biosensors and Bioelectronics, 67, pp. 154-161, 2015]
  • 11. Destroyed S. epidermidis causes decrease in capacitance Selectivity means based on lytic enzymes Urine with S. epidermidis (target) and E. faecium (control -) [Couniot et al., Biosensors and Bioelectronics, 67, pp. 154-161, 2015] 1.  Naked 2.  Ef 3.  Ef  +  Se 4.  Ef  +  Se(killed)
  • 12. Same number of E. faecium, no impedance shift [Couniot et al., Biosensors and Bioelectronics, 67, pp. 154-161, 2015] Selectivity means based on lytic enzymes Urine with E. faecium only (control -) 1.  Naked 2.  Ef 3.  Ef(not  killed)
  • 13. Selectivity means based on lytic enzymes Reproducibility of the normalized shift
  • 15. ~ 1% of bacteria captured ~ 99% of bacteria lost ~ 1% of bacteria captured ~ 99% of bacteria captured Trap bacterial cells with electrokinetics How to decrease the LoD? FLOW FLOW
  • 16. Macroelectrode For electrokinetic actuation Capacitive Sensor +7 V - 7 V 50 mV à  Generate electrokinetics (EK) effects Design of the device [Couniot et al., Lab on chip, submitted, 2015]
  • 17. LoD : 3.5.105 CFU/mL in 20 min à 11x better than without EK AC-Electroosmosis @ 10 kHz [Couniot et al., Lab on chip, in Press, 2015] Bacterial incubation 0 20 40 60 80 3.15 3.2 3.25 3.3 3.35 Time [min]||Y/ω||[pF] w/ AC-EO w/o AC-EO 7.10 CFU/mL 6 1.6 . 10 CFU/mL 7 ~5fF/min ~ 1 fF/min PBS 1:1000 PBS 1:1000
  • 18. LoD : 105 CFU/mL in 20 min à 38x better than without EK OFF/ON Steps 0 20 40 60 80 3.15 3.2 3.25 3.3 3.35 3.4 3.45 3.5 3.55 Time [min]||Y/ω||[pF] w/ DEP & ET w/o DEP & ET Bacterial incubationPBS 1:1000 PBS 1:1000 7.10 CFU/mL 6 1.6 . 10 CFU/mL 7 Δ1 Δ2 Δ3 Δ4 Δ5 [Couniot et al., Lab on chip, in Press, 2015] Electrothermal + Dielectrophoresis @ 63 MHz à Flow-based method to direct bacteria from edge to the sensor center
  • 20. VHF Capacitance-to-Frequency converter [Couniot et al., IEEE TCAS II, vol. 62, 2, 2015] M5 VHF GND M4 M3 M2 M1 CMOS Al2O3 DL Electrolyte VIA45 VIA Bacteria VHF CROSS  SECTION Sensing Part Electronics
  • 21. VHF Capacitance-to-Frequency converter [Couniot et al., IEEE TCAS II, vol. 62, 2, 2015] TOP  VIEW
  • 22. VHF Capacitance-to-Frequency converter en Vdd Vdd Vdd Five-stage ring oscillator Ten-stag Sub-interdigitated microelectrode arrays (M5) fIDE Five-stage ring oscillator 5 sub-interdigitated electrodes (M5) [Couniot et al., IEEE TCAS II, vol. 62, 2, 2015] Frequency divider ~  300  MHz ÷  1024 ~  300  kHz OUTPUT 0 0 0 1 1 1 0 1 0 1
  • 23. Intrinsic and extrinsic capacitances A factor 2 of difference despite the same coverage… f200 µm −1 ∝ 1pF + 0.77*Csol,200 µm( ) f100 µm −1 ∝ 0.8pF + 0.77*Csol,100 µm( ) 3.5 ± 0.1 pF 1 ± 0.025 pF The capacitance decreases à  Assessed by simulations/models since cytoplasm dominates @ VHF à  εr,cyto ≈ 70 < εr,PBS = 80 Before After Bacterial sensing in pure PBS 10 6 0 Sensitivity[%] 200 μm-sided: exp. #1 exp. #2 mean 100 μm-sided: exp. #1 exp. #2 mean 4 8 12 10 7 10 8 10 9 fIDE [Hz] ~ 150 MHz [Couniot et al., IEEE TCAS II, vol. 62, 2, 2015]
  • 25. Single bacterial cell Reduce the sensor size Bacterial binding Δ1 Nominal sensor capacitance: 100% Single bacterial cell Δ2 [Couniot et al., IEEE TBCAS, in Press, 2015] How to improve sensitivity & multiplexing?
  • 26. Single bacterial cell Problem: the bacterial cell can be outside the sensor Bacterial binding Δ1 Nominal sensor capacitance: 100% How to improve sensitivity & multiplexing? Single bacterial cell Δ2=0 [Couniot et al., IEEE TBCAS, in Press, 2015]
  • 27. Single bacterial cell Solution: make a sensor array Bacterial binding Δ1 Nominal sensor capacitance: 100% Single bacterial cell Δ2 [Couniot et al., IEEE TBCAS, in Press, 2015] How to improve sensitivity & multiplexing?
  • 28. System architecture (Top view) [Couniot et al., IEEE TBCAS, in Press, 2015]
  • 29. System architecture (correlated double sampling) [Couniot et al., IEEE TBCAS, in Press, 2015] Vdd Vdd Vdd MR MBUF MSELCIDE CD MC1 MC2 MINIT Vc1 Vc2 MT MSHR Vshr CSHR MSHS Vshs CSHS MB Vb Vsel Vr Pixel (i,j) Column Amplifier (j) Columnbus Vinit VIDEVref Vpix VgT Buffer + Row select. Charge sharing principle Subthresh. Gain Csol Cins σsol Ideal linearity −50 0 50 0.12 0.16 0.2 0.24 0.28 Variation of parameters [%] VgT [V] σsol = 1.8 mS/m Csol = 55.6 fF Cins = 500 fF Rsol = 7 MΩ CDL = 4.5 pF Csol Rsol Cins CDL Cins CDL CIDE PIXEL TOP  VIEW
  • 30. 0 10 20 30 40 50 −10 −5 0 5 Time [min] Vout [mV] 1 3 4 PBS 1:1000 w/ bacteria PBS 1:1000 w/o bacteria 2 Pixel (2,7) Pixel (2,6) Pixel (2,8) w/o bacteria w/ bacteria Real-time monitoring [Couniot et al., IEEE TBCAS, in Press, 2015] w/o bacteria w/ bacteria Type 1 Type 2 w/o bacteria w/ bacteria Type 1 Type 2 *
  • 31. w/o bacteria w/ bacteria [Couniot et al., IEEE TBCAS, in Press, 2015] Real-time monitoring *
  • 32. [Couniot et al., IEEE TBCAS, in Press, 2015] Real-time monitoring 0 Number of bacteria Simulation 2 4 6 8 10 12 0 10 20 30 0 0.23 0.46 0.69 ΔVout[mV] ΔCsol[fF] Number of bacteria 0 -20 Experimental #5 ΔVout[mV] 5 10 15 20 0 20 40 #6 #7 #11 #11 #23 #13 #20 #12 #9 #10 #3 #8 #8 VIDE Vgnd VIDE Vgnd ≠ ΔC  ≈  167  aF ΔC  ≈  38  aF [Couniot et al., Sensors and Actuators B, vol. 189, pp. 43-51, 2013] VIDE Vgnd ≠ ΔC  ≈  7  aF
  • 33. CMOS capacitive array biosensor Interdigitated microelectrodes (IDE) Integrated pixels Integrated oscillator Electrokinetic effects 1 2 3 4 High sensitivity @ high salinity High sensitivity By bacterial trapping Single Bacteria Detection Selectivity
  • 34. F.R.S.-­‐FNRS  Funds D.  Bol,  J.  Mahillon  &  J-­‐L.  Gala  for  their  supervision T.  Vanzieleghem  &  J.  Mahillon  for  their  biological  exper+se J.  Rasson  &  N.  Van-­‐Overstraeten  benefits  for  useful  discussions O.  Poncelet  for  ALD  deposi+on C.A.  Dutu  for  technical  help  with  PDMS  cap  micro-­‐fabrica+on D.  Spôte  for  the  fabrica+on  of  the  pressure  tool UCL  WINFAB  plaoorm  for  help  with  micro-­‐fabrica+on UCL  WELCOME  plaoorm  for  help  with  measurement  setup Thank you for your attention! Questions? laurent.francis@uclouvain.be Acknowledgements