MEMS is a technique of combining electrical and mechanical components together on a chip. It produces a system of miniature dimensions i.e the system having thickness less than the thickness of human hair. The components are integrated on a single chip using micro fabrication technology which allows the microsystem to both sense & control the environment.
MEMS technology consist of micro electronic elements actuators, sensors and mechanical structures built onto a substrate which is usually “Silicon”. They are developed using microfabrication techniques : deposition, patterning, etching.
The most common forms of MEMS production are :
Bulk micromachine, surface micromachine etc.
The benefits of this small scale integrated device brings the technology of nanometers to a vast no. of devices.
Micro-Electro-Mechanical Systems, or MEMS, is a technology that in its most general form can be defined as miniaturized mechanical and electro-mechanical elements that are made using the techniques of micro fabrication. The critical physical dimensions of MEMS devices can vary from well below one micron on the lower end of the dimensional spectrum, all the way to several millimeters.
MEMS = Micro Electro Mechanical System
Any engineering system that performs electrical (switching ,deciding) and mechanical functions (sensing,moving,heating) with components in micrometers is a MEMS.
MEMS technology consist of micro electronic elements actuators, sensors and mechanical structures built onto a substrate which is usually “Silicon”. They are developed using microfabrication techniques : deposition, patterning, etching.
The most common forms of MEMS production are :
Bulk micromachine, surface micromachine etc.
The benefits of this small scale integrated device brings the technology of nanometers to a vast no. of devices.
Micro-Electro-Mechanical Systems, or MEMS, is a technology that in its most general form can be defined as miniaturized mechanical and electro-mechanical elements that are made using the techniques of micro fabrication. The critical physical dimensions of MEMS devices can vary from well below one micron on the lower end of the dimensional spectrum, all the way to several millimeters.
MEMS = Micro Electro Mechanical System
Any engineering system that performs electrical (switching ,deciding) and mechanical functions (sensing,moving,heating) with components in micrometers is a MEMS.
Microelectromechanical Systems (MEMS) are miniature devices comprising of integrated mechanical (levers, springs, deformable membranes, vibrating structures, etc.) and electrical (resistors, capacitors, inductors, etc.) components designed to work in concert to sense and report on the physical properties of their immediate or local environment, or, when signaled to do so, to perform some kind of controlled physical interaction or actuation with their immediate or local environment
It was a review project that is typically more focused on mechanical parts and microfabrication technologies made suitable for biological applications.
The interdisciplinary nature of bio-MEMS combines material sciences, clinical sciences, medicine, surgery, electrical engineering, mechanical engineering, optical engineering, chemical engineering and biomedical engineering.
Some of its major applications include genomics, proteomics, molecular diagnostics, point-of-care diagnostics, tissue engineering and implantable microdevices. MEMS techniques were originally developed in the microelectronics industry.
MEMS are a class of miniature devices and systems fabricated by micromachining processes. MEMS devices have critical dimensions in the range of 100nm to 1000um (or 1mm).
MEMS technology is a precursor to the relatively more popular field of Nanotechnology, which refers to science, engineering and technology below 100nm down to the atomic scale.
Occasionally, MEMS devices with dimensions in the millimetre-range are referred to as meso-scale MEMS devices. as drug delivery systems improve, the components of the systems continue to decrease in size.
Currently, most drug delivery systems are based upon devices and drug carrier elements that are on a micro-scale. Many of the future and developing technologies are based on the nano-scale.
Micro electro mechanical systems (MEMS, also written as micro-electro-mechanical, Micro Electro Mechanical or micro electronic and micro electro mechanical systems and the related micromechatronics) is the technology of microscopic devices, particularly those with moving parts. It merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology. MEMS are also referred to as micromachines in Japan, or micro systems technology.
Micro Electromechanical systems or MEMS, represent an extraordinary technology that promises to transform whole industries and drive the next technological revolution. These devices can replace bulky actuators and sensors with micron-scale equivalent that can be produced in large quantities by fabrication processes used in integrated circuits photolithography. This reduces cost, bulk, weight and power consumption while increasing performance, production volume, and functionality by orders of magnitude. For example, one well known MEMS device is the accelerometer (it’s now being manufactured using mems low cost, small size, more reliability). Furthermore, it is clear that current MEMS products are simply precursors to greater and more pervasive applications to come, including genetic and disease testing, guidance and navigation systems, power generation, RF devices (especially for cell phone technology), weapon systems, biological and chemical agent detection, and data storage. Micro mirror based optical switches have already proven their value; several start-up companies specializing in their development have already been sold to large network companies for hundreds of millions of dollars. The promise of MEMS is increasingly capturing the attention of new and old industries alike, as more and more of their challenges are solved with MEMS.
After extensive development, todays commercial MEMS – also known as Micro System Technologies (MST), Micro Machines (MM) have proven to be more manufactural, reliable and accurate, dollar for dollar, than their conventional counterparts. However the technical hurdles to attain these accomplishments were often costly and time- consuming, and current advances in this technology introduce newer challenges still. Because this field is still in its infancy, very little data on design, manufacturing processes or liability are common or shared.
Microelectromechanical Systems (MEMS) are miniature devices comprising of integrated mechanical (levers, springs, deformable membranes, vibrating structures, etc.) and electrical (resistors, capacitors, inductors, etc.) components designed to work in concert to sense and report on the physical properties of their immediate or local environment, or, when signaled to do so, to perform some kind of controlled physical interaction or actuation with their immediate or local environment
It was a review project that is typically more focused on mechanical parts and microfabrication technologies made suitable for biological applications.
The interdisciplinary nature of bio-MEMS combines material sciences, clinical sciences, medicine, surgery, electrical engineering, mechanical engineering, optical engineering, chemical engineering and biomedical engineering.
Some of its major applications include genomics, proteomics, molecular diagnostics, point-of-care diagnostics, tissue engineering and implantable microdevices. MEMS techniques were originally developed in the microelectronics industry.
MEMS are a class of miniature devices and systems fabricated by micromachining processes. MEMS devices have critical dimensions in the range of 100nm to 1000um (or 1mm).
MEMS technology is a precursor to the relatively more popular field of Nanotechnology, which refers to science, engineering and technology below 100nm down to the atomic scale.
Occasionally, MEMS devices with dimensions in the millimetre-range are referred to as meso-scale MEMS devices. as drug delivery systems improve, the components of the systems continue to decrease in size.
Currently, most drug delivery systems are based upon devices and drug carrier elements that are on a micro-scale. Many of the future and developing technologies are based on the nano-scale.
Micro electro mechanical systems (MEMS, also written as micro-electro-mechanical, Micro Electro Mechanical or micro electronic and micro electro mechanical systems and the related micromechatronics) is the technology of microscopic devices, particularly those with moving parts. It merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology. MEMS are also referred to as micromachines in Japan, or micro systems technology.
Micro Electromechanical systems or MEMS, represent an extraordinary technology that promises to transform whole industries and drive the next technological revolution. These devices can replace bulky actuators and sensors with micron-scale equivalent that can be produced in large quantities by fabrication processes used in integrated circuits photolithography. This reduces cost, bulk, weight and power consumption while increasing performance, production volume, and functionality by orders of magnitude. For example, one well known MEMS device is the accelerometer (it’s now being manufactured using mems low cost, small size, more reliability). Furthermore, it is clear that current MEMS products are simply precursors to greater and more pervasive applications to come, including genetic and disease testing, guidance and navigation systems, power generation, RF devices (especially for cell phone technology), weapon systems, biological and chemical agent detection, and data storage. Micro mirror based optical switches have already proven their value; several start-up companies specializing in their development have already been sold to large network companies for hundreds of millions of dollars. The promise of MEMS is increasingly capturing the attention of new and old industries alike, as more and more of their challenges are solved with MEMS.
After extensive development, todays commercial MEMS – also known as Micro System Technologies (MST), Micro Machines (MM) have proven to be more manufactural, reliable and accurate, dollar for dollar, than their conventional counterparts. However the technical hurdles to attain these accomplishments were often costly and time- consuming, and current advances in this technology introduce newer challenges still. Because this field is still in its infancy, very little data on design, manufacturing processes or liability are common or shared.
A Biosensor is a device for the detection of an analyte that combines a biological component with a physio-chemical detector component.
Download: https://www.topicsforseminar.com/2014/10/biosensors-ppt.html
Biosensor is the Talk of The Day. It made possible, the conversion of yesteryear's cumbersome experiments to an easier, faster all the while improving its sensitivity and specificity. This article will help you to gain an acquaintance about it, its properties, etc.
MEMS or Micro-Electro Mechanical System is a technique of combining Electrical and Mechanical components together on a chip, to produce a system of miniature dimensions. MEMS is the integration of a number of micro-components on a single chip which allows the microsystem to both sense and control the environment.
This article discusses MEMS, i.e. Micro-Electro Mechanical Systems.
It gives a rudimentry idea of MEMS technology, its block diagram, applications, advantages and disadvantages. It also gives a brief idea on the working principle of MEMS devices.
Micro-Electro-Mechanical Systems, or MEMS, is a technology that in its most general form can be defined as miniaturized mechanical and electro-mechanical elements (i.e., devices and structures) that are made using the techniques of microfabrication. The critical physical dimensions of MEMS devices can vary from well below one micron on the lower end of the dimensional spectrum, all the way to several millimeters. Likewise, the types of MEMS devices can vary from relatively simple structures having no moving elements, to extremely complex electromechanical systems with multiple moving elements under the control of integrated microelectronics. The one main criterion of MEMS is that there are at least some elements having some sort of mechanical functionality whether or not these elements can move. The term used to define MEMS varies in different parts of the world. In the United States they are predominantly called MEMS, while in some other parts of the world they are called “Microsystems Technology” or “micromachined devices”.
MEMS Technology & its application for Miniaturized Space SystemIJSRD
MEMS- Micro electro mechanical system. Over the last decade Micro-Electro-Mechanical System (MEMS) have evoked great interest in the scientific and engineering communities. They are formed by integration of electronic and mechanical components at micron level. MEMS has gained acceptance as viable products for many commercial and government applications. This paper will give an introduction to these exciting developments of MEMS, the fabrication technology used and application in various fields. Future applications of miniaturized space systems will have special needs on MEMS components. This paper addresses the needs, status and perspectives of the MEMS Technology for miniaturized space system from the perspectives of a spacecraft developer. First, the needs of the future space missions on MEMS components are discussed. Then, the state-of-the-art MEMS technologies are reviewed based upon these needs. Finally, perspectives of space-based MEMS technology will be addressed based on the analysis of both future mission needs and technological trends. Lastly, it concludes saying that MEMS have enough potential to establish a second technological revolution of miniaturization.
At a time, it can convert large amount of BMP/PNG/GIF images to JPG/JPEG image format with same dimension and resolution.
When bmp images are converted to JPG images, its size extensively reduced but dimension and resolution remains unchanged.
You can convert image to Byte Array & store in Database and whenever require, it can be retrieved.
Slack (or Teams) Automation for Bonterra Impact Management (fka Social Soluti...Jeffrey Haguewood
Sidekick Solutions uses Bonterra Impact Management (fka Social Solutions Apricot) and automation solutions to integrate data for business workflows.
We believe integration and automation are essential to user experience and the promise of efficient work through technology. Automation is the critical ingredient to realizing that full vision. We develop integration products and services for Bonterra Case Management software to support the deployment of automations for a variety of use cases.
This video focuses on the notifications, alerts, and approval requests using Slack for Bonterra Impact Management. The solutions covered in this webinar can also be deployed for Microsoft Teams.
Interested in deploying notification automations for Bonterra Impact Management? Contact us at sales@sidekicksolutionsllc.com to discuss next steps.
Epistemic Interaction - tuning interfaces to provide information for AI supportAlan Dix
Paper presented at SYNERGY workshop at AVI 2024, Genoa, Italy. 3rd June 2024
https://alandix.com/academic/papers/synergy2024-epistemic/
As machine learning integrates deeper into human-computer interactions, the concept of epistemic interaction emerges, aiming to refine these interactions to enhance system adaptability. This approach encourages minor, intentional adjustments in user behaviour to enrich the data available for system learning. This paper introduces epistemic interaction within the context of human-system communication, illustrating how deliberate interaction design can improve system understanding and adaptation. Through concrete examples, we demonstrate the potential of epistemic interaction to significantly advance human-computer interaction by leveraging intuitive human communication strategies to inform system design and functionality, offering a novel pathway for enriching user-system engagements.
Essentials of Automations: Optimizing FME Workflows with ParametersSafe Software
Are you looking to streamline your workflows and boost your projects’ efficiency? Do you find yourself searching for ways to add flexibility and control over your FME workflows? If so, you’re in the right place.
Join us for an insightful dive into the world of FME parameters, a critical element in optimizing workflow efficiency. This webinar marks the beginning of our three-part “Essentials of Automation” series. This first webinar is designed to equip you with the knowledge and skills to utilize parameters effectively: enhancing the flexibility, maintainability, and user control of your FME projects.
Here’s what you’ll gain:
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- Optimization Strategies in FME Flow: Explore the creation and strategic deployment of parameters in FME Flow, including the use of deployment and geometry parameters, to maximize workflow efficiency.
- Pro Tips for Success: Gain insights on parameterizing connections and leveraging new features like Conditional Visibility for clarity and simplicity.
We’ll wrap up with a glimpse into future webinars, followed by a Q&A session to address your specific questions surrounding this topic.
Don’t miss this opportunity to elevate your FME expertise and drive your projects to new heights of efficiency.
Accelerate your Kubernetes clusters with Varnish CachingThijs Feryn
A presentation about the usage and availability of Varnish on Kubernetes. This talk explores the capabilities of Varnish caching and shows how to use the Varnish Helm chart to deploy it to Kubernetes.
This presentation was delivered at K8SUG Singapore. See https://feryn.eu/presentations/accelerate-your-kubernetes-clusters-with-varnish-caching-k8sug-singapore-28-2024 for more details.
Transcript: Selling digital books in 2024: Insights from industry leaders - T...BookNet Canada
The publishing industry has been selling digital audiobooks and ebooks for over a decade and has found its groove. What’s changed? What has stayed the same? Where do we go from here? Join a group of leading sales peers from across the industry for a conversation about the lessons learned since the popularization of digital books, best practices, digital book supply chain management, and more.
Link to video recording: https://bnctechforum.ca/sessions/selling-digital-books-in-2024-insights-from-industry-leaders/
Presented by BookNet Canada on May 28, 2024, with support from the Department of Canadian Heritage.
GraphRAG is All You need? LLM & Knowledge GraphGuy Korland
Guy Korland, CEO and Co-founder of FalkorDB, will review two articles on the integration of language models with knowledge graphs.
1. Unifying Large Language Models and Knowledge Graphs: A Roadmap.
https://arxiv.org/abs/2306.08302
2. Microsoft Research's GraphRAG paper and a review paper on various uses of knowledge graphs:
https://www.microsoft.com/en-us/research/blog/graphrag-unlocking-llm-discovery-on-narrative-private-data/
UiPath Test Automation using UiPath Test Suite series, part 4DianaGray10
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The UiPath Test Manager overview with SAP heatmap webinar offers a concise yet comprehensive exploration of the role of a Test Manager within SAP environments, coupled with the utilization of heatmaps for effective testing strategies.
Participants will gain insights into the responsibilities, challenges, and best practices associated with test management in SAP projects. Additionally, the webinar delves into the significance of heatmaps as a visual aid for identifying testing priorities, areas of risk, and resource allocation within SAP landscapes. Through this session, attendees can expect to enhance their understanding of test management principles while learning practical approaches to optimize testing processes in SAP environments using heatmap visualization techniques
What will you get from this session?
1. Insights into SAP testing best practices
2. Heatmap utilization for testing
3. Optimization of testing processes
4. Demo
Topics covered:
Execution from the test manager
Orchestrator execution result
Defect reporting
SAP heatmap example with demo
Speaker:
Deepak Rai, Automation Practice Lead, Boundaryless Group and UiPath MVP
Connector Corner: Automate dynamic content and events by pushing a buttonDianaGray10
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Create a campaign using Mailchimp with merge tags/fields
Send an interactive Slack channel message (using buttons)
Have the message received by managers and peers along with a test email for review
But there’s more:
In a second workflow supporting the same use case, you’ll see:
Your campaign sent to target colleagues for approval
If the “Approve” button is clicked, a Jira/Zendesk ticket is created for the marketing design team
But—if the “Reject” button is pushed, colleagues will be alerted via Slack message
Join us to learn more about this new, human-in-the-loop capability, brought to you by Integration Service connectors.
And...
Speakers:
Akshay Agnihotri, Product Manager
Charlie Greenberg, Host
State of ICS and IoT Cyber Threat Landscape Report 2024 previewPrayukth K V
The IoT and OT threat landscape report has been prepared by the Threat Research Team at Sectrio using data from Sectrio, cyber threat intelligence farming facilities spread across over 85 cities around the world. In addition, Sectrio also runs AI-based advanced threat and payload engagement facilities that serve as sinks to attract and engage sophisticated threat actors, and newer malware including new variants and latent threats that are at an earlier stage of development.
The latest edition of the OT/ICS and IoT security Threat Landscape Report 2024 also covers:
State of global ICS asset and network exposure
Sectoral targets and attacks as well as the cost of ransom
Global APT activity, AI usage, actor and tactic profiles, and implications
Rise in volumes of AI-powered cyberattacks
Major cyber events in 2024
Malware and malicious payload trends
Cyberattack types and targets
Vulnerability exploit attempts on CVEs
Attacks on counties – USA
Expansion of bot farms – how, where, and why
In-depth analysis of the cyber threat landscape across North America, South America, Europe, APAC, and the Middle East
Why are attacks on smart factories rising?
Cyber risk predictions
Axis of attacks – Europe
Systemic attacks in the Middle East
Download the full report from here:
https://sectrio.com/resources/ot-threat-landscape-reports/sectrio-releases-ot-ics-and-iot-security-threat-landscape-report-2024/
Builder.ai Founder Sachin Dev Duggal's Strategic Approach to Create an Innova...Ramesh Iyer
In today's fast-changing business world, Companies that adapt and embrace new ideas often need help to keep up with the competition. However, fostering a culture of innovation takes much work. It takes vision, leadership and willingness to take risks in the right proportion. Sachin Dev Duggal, co-founder of Builder.ai, has perfected the art of this balance, creating a company culture where creativity and growth are nurtured at each stage.
LF Energy Webinar: Electrical Grid Modelling and Simulation Through PowSyBl -...DanBrown980551
Do you want to learn how to model and simulate an electrical network from scratch in under an hour?
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During the webinar, you will discover the PowSyBl ecosystem as well as handle and study an electrical network through an interactive Python notebook.
PowSyBl is an open source project hosted by LF Energy, which offers a comprehensive set of features for electrical grid modelling and simulation. Among other advanced features, PowSyBl provides:
- A fully editable and extendable library for grid component modelling;
- Visualization tools to display your network;
- Grid simulation tools, such as power flows, security analyses (with or without remedial actions) and sensitivity analyses;
The framework is mostly written in Java, with a Python binding so that Python developers can access PowSyBl functionalities as well.
What you will learn during the webinar:
- For beginners: discover PowSyBl's functionalities through a quick general presentation and the notebook, without needing any expert coding skills;
- For advanced developers: master the skills to efficiently apply PowSyBl functionalities to your real-world scenarios.
Leading Change strategies and insights for effective change management pdf 1.pdf
Micro Electromechanical System (MEMS)
1.
2. Outline
MEMS Introduction
Sensor and its type
Fabrication
MEMS Manufacturing Technology
Applications
Conclusion
References
3. What is MEMS?
MEMS or Micro-Electro Mechanical System is a
technique of combining Electrical and Mechanical
components together on a chip, to produce a system
of miniature dimensions.
MEMS is the integration of a number of microcomponents on a single chip which allows the
microsystem to both sense and control the
environment.
The components are integrated on a single chip
using micro fabrication technologies.
4. What is a Sensor?
A device used to measure a physical quantity(such as
temperature) and convert it into an electronic signal of
some kind(e.g. a voltage), without modifying the
environment.
What can be sensed?
Almost Everything!!!
Commonly sensed parameters are:
Pressure
Temperature
Flow rate
Radiation
Chemicals
Pathogens
N
W
E
S
2 Axis Magnetic
Sensor
2 Axis
Accelerometer
Light Intensity
Sensor
Humidity Sensor
Pressure Sensor
Temperature Sensor
5. But why MEMS for sensors?
Smaller in size
Have lower power consumption
More sensitive to input variations
Cheaper due to mass production
Less invasive than larger devices
8. Basic Process of Fabrication
Deposition
Deposition that happen because of a chemical reaction or physical reaction.
Patterning
The pattern is transfer to a photosensitive material by selective exposure to a radiation source such as
light. If the resist is placed in a developer solution after selective exposure to a light source, it will etch
away.
Etching
Etching is the process of using strong acid to cut into the unprotected parts of a metal surface to create
a design in.
There are two classes of etching processes:
Wet Etching
Dry Etching.
10. MEMS Manufacturing Technology
Bulk Micromachining
This technique involves the selective removal of the
substrate material in order to realize miniaturized
mechanical components.
A widely used bulk micromachining technique in
MEMS is chemical wet etching, which involves the
immersion of a substrate into a solution of reactive
chemical that will etch exposed regions of the
substrate at very high rates.
Etched grooves using
(a) Anisotropic etchants,
(b) Isotropic etchants,
(c) Reactive Ion Etching (RIE)
11. MEMS Manufacturing Technology
Surface Micromachining
In surface micromachining, the MEMS sensors are formed on top of the wafer
using deposited thin film materials.
(a)
Spacer layer deposition.
(b)
Pattering of the spacer layer.
(c)
Deposition of the microstructure layer.
(d)
Patterning of desired structure.
(e)
Stripping of the spacer layer resolves final
structure.
12. MEMS Manufacturing Technology
High Aspect Ratio (HAR) Silicon Micromachining
HAR combines aspects of both surface and bulk
micromachining to allow for silicon structures with
extremely high aspect ratios through thick layers of
silicon (hundreds of nanometers, up to hundreds of
micrometers).
HAR MEMS technology enables a high degree of
immunity to high-frequency, high-amplitude parasitic
vibrations.
13. Applications in Medical Science
Biocavity Laser : This device distinguishes
cancerous from non cancerous cells thus aiding the
surgeons in operations.
Smart Pill :
Implanted in the body
Automatic drug delivery (on demand)
Sight for the blind : MEMS based array that may
be inserted in the retina of a blind person to provide
partial sight
14. Applications in Marine Science
Sensing in marine environment maybe done for
various reasons:
Oil exploration and related applications
Global weather predictions
Monitor water quality for any contamination
Measure parameters detrimental to the “health” of
structures in the sea ( like oil rigs and ships )
Study of aquatic plants and animals
In military operations
15. Applications in Marine Military Operations
An array of MEMS sensors spread on the ocean
floor could detect the presence of enemy
submarines.
MEMS sensors (pressure sensors, accelerometers
etc.) are being used in anti-torpedo weapons on
submarines and ships.
MEMS sensors in torpedoes are responsible for
Detonating the torpedo at the right time
Hitting the target in a crowded environment
Prevent any premature explosion
16. CONCLUSION
MEMS promises to be an effective technique of producing sensors of high quality, at lower costs.
Thus we can conclude that the MEMS can create a proactive computing world, connected
computing nodes automatically, acquire and act on real-time data about a physical environment,
helping to improve lives, promoting a better understanding of the world and enabling people to
become more productive.
17. References
X. Wang, J. Engel, C. Liu, J. Micromech. Microeng. 2003, 13, 628.
Christian A. Zorman, Mehran Mehregany, MEMS Design and Fabrication, 2nd Ed. 2,16.
Ms. Santoshi Gupta, MEMS and Nanotechnology IJSER, Vol 3, Issue 5,2012
Stephen Beeby, MEMS Mechanical Sensor, PP. 7
Lenz, J., Edelstein, A.S., "Magnetic sensors and their applications." IEEE Sensors J. 2006, 6,
631-649.
Sinclair M J 2000 A high force low area MEMS thermal actuator Proc. 7th Intersociety Conf. on
Thermal and Thermomechanical Phenomena (Las Vegas, NV) pp 127–32
R. Ghodssi, P. Lin (2011). MEMS Materials and Processes Handbook. Berlin: Springer.
Chang, Floy I. (1995).Gas-phase silicon micromachining with xenon difluoride. 2641. pp. 117.
Editor's Notes
The question that arises in our mind is what is mems or micro elctro-mechanical system?It is a technique of combining electrical and mechanical components together on a chip. It produce a system of miniature dimensions i.e the system having thickness less than the thickness of human hair. The components are integrated on a single chip using micro fabrication technology which allows the microsystem to both sense & control the environment.
Wet Etching: where the material is dissolved when immersed in a chemical solution.Dry Etching: where the material is sputtered or dissolved using reactive ions or an etching agent.
The MEMS devices, in marine sensing maybe attached to: Ships Floating devices (buoys) in the sea Fixed sea structures (like oil rigs) Sea bed using links AUVs(Autonomous Underwater Vehicle)