micro-electro-mechanical systems micro-sized components working together as a syste to extremely complex electromechanical systems wit communicate and act. some systems can do all of th think integrated is a technology that in its most general form can plus scavenge for power. or mems self-aware stand-alone products that can sense these devices are referred to as microelectromecha devices and structures) that are made using the te the types of mems devices can vary from relatively all the way to several millimeters. likewise
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