MEMS stands for micro-electro-mechanical systems, which involves integrating sensors, actuators, and electronics onto a common silicon substrate using microfabrication technology. MEMS can be made from materials like gallium arsenide, titanium nickel, and piezoelectric materials. The main steps in fabricating MEMS are deposition, lithography, and etching - which allow for creating thin films and precisely etching patterns. In the future, MEMS technology is expected to enable cost reduction, increased functionality, improved reliability, decreased size, and decreased mass compared to conventional technologies.

1. MEMSMEMS
Micro-Electo-MechanicalMicro-Electo-Mechanical
SystemsSystems

2. What is MEMS?What is MEMS?
 Micro-Electro-Mechanical SystemsMicro-Electro-Mechanical Systems
 is the integration of elements, sensors, actuators, andis the integration of elements, sensors, actuators, and
electronics on a common silicon substrate through micro-electronics on a common silicon substrate through micro-
fabrication technology, a manufacturing technology for makingfabrication technology, a manufacturing technology for making
microscopic devicesmicroscopic devices
Other Materials used in MEMSOther Materials used in MEMS
 Gallium ArsinideGallium Arsinide
 Titanium NickelTitanium Nickel
 Piezoelectric MaterialsPiezoelectric Materials

3. How MEMS are made!How MEMS are made!
 There are three main building blocks in MEMSThere are three main building blocks in MEMS
 Deposition processDeposition process
 The ability to deposit thin films ofThe ability to deposit thin films of
materialmaterial
 LithographyLithography
 is typically the transfer of a pattern to ais typically the transfer of a pattern to a
photosensitive material by selectivephotosensitive material by selective
exposure to a radiation source such asexposure to a radiation source such as
lightlight
 Etching ProcessEtching Process
 Wet etching where the material isWet etching where the material is
dissolved when immersed in a chemicaldissolved when immersed in a chemical
solutionsolution
 Dry etching where the material isDry etching where the material is
sputtered or dissolved using reactivesputtered or dissolved using reactive
ions or a vapor phase etchantions or a vapor phase etchant

4. Pictures of MEMSPictures of MEMS

5. ExpectedExpected
Characteristics of MEMSCharacteristics of MEMS
 In the future, MEMSIn the future, MEMS
Technology compared toTechnology compared to
Conventional TechnologyConventional Technology
should have theseshould have these
effects:effects:
 Cost reductionCost reduction
 Increase functionalityIncrease functionality
 Improve reliabilityImprove reliability
 Decrease sizeDecrease size
 Decrease massDecrease mass

6. ExpectedExpected
Characteristics of MEMSCharacteristics of MEMS
 In the future, MEMSIn the future, MEMS
Technology compared toTechnology compared to
Conventional TechnologyConventional Technology
should have theseshould have these
effects:effects:
 Cost reductionCost reduction
 Increase functionalityIncrease functionality
 Improve reliabilityImprove reliability
 Decrease sizeDecrease size
 Decrease massDecrease mass