Micromachined Electro-Mechanical Systems, also called microfabricated Systems, have evoked great interest in the scientific and engineering communities. This is primarily due to several substantive advantages that MEMS offer: orders of magnitude smaller size, better performance than other solutions, possibilities for batch fabrication and cost-effective integration with electronics, virtually zero dc power consumption and potentially large reduction in power consumption, etc.
This Seminar would give an introduction to these exciting developments and the technology and design approaches for the realization of these integrated systems. It would be followed with an introduction to the design of microsensors, such as the pressure sensor and the accelerometer, which began the MEMS revolution.
A systematic approach is developed to select manufacturing Process Chains for the generic elements of a MEMS device. A database of MEMS Process Chains and their attendant process attributes is developed from the existing literature, and used to construct Process Attribute charts. The performance requirements of MEMS beams and trenches are translated into the same set of Process Attributes. This allows for a screening of the Process Chains to obtain a list of candidate manufacturing methods.
I begin with a quick introduction to MEMS technology, micron scale and show that silicon is eminently suited for micromechanical devices and therefore the possibility of integrating MEMS with VLSI electronics. Smart cell phones and wireless enabled devices are poised to become commercial engines for the next generation of MEMS, since MEMS provide not only better functionality with smaller chip area, but also alternative transceiver architectures for improved functionality, performance and reliability.
The application domains cover microsensors and actuators for physical quantities, of which MEMS for automobile & consumer electronics forms a large segment; microfabricated subsystems for communications and computer systems.
Micromachined Electro-Mechanical Systems, also called microfabricated Systems, have evoked great interest in the scientific and engineering communities. This is primarily due to several substantive advantages that MEMS offer: orders of magnitude smaller size, better performance than other solutions, possibilities for batch fabrication and cost-effective integration with electronics, virtually zero dc power consumption and potentially large reduction in power consumption, etc.
This Seminar would give an introduction to these exciting developments and the technology and design approaches for the realization of these integrated systems. It would be followed with an introduction to the design of microsensors, such as the pressure sensor and the accelerometer, which began the MEMS revolution.
A systematic approach is developed to select manufacturing Process Chains for the generic elements of a MEMS device. A database of MEMS Process Chains and their attendant process attributes is developed from the existing literature, and used to construct Process Attribute charts. The performance requirements of MEMS beams and trenches are translated into the same set of Process Attributes. This allows for a screening of the Process Chains to obtain a list of candidate manufacturing methods.
I begin with a quick introduction to MEMS technology, micron scale and show that silicon is eminently suited for micromechanical devices and therefore the possibility of integrating MEMS with VLSI electronics. Smart cell phones and wireless enabled devices are poised to become commercial engines for the next generation of MEMS, since MEMS provide not only better functionality with smaller chip area, but also alternative transceiver architectures for improved functionality, performance and reliability.
The application domains cover microsensors and actuators for physical quantities, of which MEMS for automobile & consumer electronics forms a large segment; microfabricated subsystems for communications and computer systems.
MEMS is the emerging field of current technology. this powerpoint presentation helps the beginners who want to know about the introduction to mems technology
MEMS Technology & its application for Miniaturized Space SystemIJSRD
MEMS- Micro electro mechanical system. Over the last decade Micro-Electro-Mechanical System (MEMS) have evoked great interest in the scientific and engineering communities. They are formed by integration of electronic and mechanical components at micron level. MEMS has gained acceptance as viable products for many commercial and government applications. This paper will give an introduction to these exciting developments of MEMS, the fabrication technology used and application in various fields. Future applications of miniaturized space systems will have special needs on MEMS components. This paper addresses the needs, status and perspectives of the MEMS Technology for miniaturized space system from the perspectives of a spacecraft developer. First, the needs of the future space missions on MEMS components are discussed. Then, the state-of-the-art MEMS technologies are reviewed based upon these needs. Finally, perspectives of space-based MEMS technology will be addressed based on the analysis of both future mission needs and technological trends. Lastly, it concludes saying that MEMS have enough potential to establish a second technological revolution of miniaturization.
MEMS = Micro Electro Mechanical System
Any engineering system that performs electrical (switching ,deciding) and mechanical functions (sensing,moving,heating) with components in micrometers is a MEMS.
These slides contains basic information about ELECTRO-MECHANICAL sensors as future trends.As our future technology is depend upon the automotive components and inventions the low space occupier MEMS based devices are reliable and convenient.Hope you like it and it is useful in your study and knowledge.
Micro-Electro-Mechanical Systems, or MEMS, is a technology that in its most general form can be defined as miniaturized mechanical and electro-mechanical elements (i.e., devices and structures) that are made using the techniques of microfabrication. The critical physical dimensions of MEMS devices can vary from well below one micron on the lower end of the dimensional spectrum, all the way to several millimeters. Likewise, the types of MEMS devices can vary from relatively simple structures having no moving elements, to extremely complex electromechanical systems with multiple moving elements under the control of integrated microelectronics. The one main criterion of MEMS is that there are at least some elements having some sort of mechanical functionality whether or not these elements can move. In other words Microsystems are miniaturized integrated systems in a small package or more specifically, micro-sized components working together as a system and assembled into a package that fits on a pinhead. In the United States, these devices are referred to as microelectromechanical systems or MEMS. European countries referred to such devices as microsystems or MST. These two terms – MEMS and MST – are often used interchangeably. Microsystems are microscopic, integrated, self-aware, stand-alone products that can sense, think, communicate and act. Some systems can do all of these things, plus scavenge for power.
MEMS is the emerging field of current technology. this powerpoint presentation helps the beginners who want to know about the introduction to mems technology
MEMS Technology & its application for Miniaturized Space SystemIJSRD
MEMS- Micro electro mechanical system. Over the last decade Micro-Electro-Mechanical System (MEMS) have evoked great interest in the scientific and engineering communities. They are formed by integration of electronic and mechanical components at micron level. MEMS has gained acceptance as viable products for many commercial and government applications. This paper will give an introduction to these exciting developments of MEMS, the fabrication technology used and application in various fields. Future applications of miniaturized space systems will have special needs on MEMS components. This paper addresses the needs, status and perspectives of the MEMS Technology for miniaturized space system from the perspectives of a spacecraft developer. First, the needs of the future space missions on MEMS components are discussed. Then, the state-of-the-art MEMS technologies are reviewed based upon these needs. Finally, perspectives of space-based MEMS technology will be addressed based on the analysis of both future mission needs and technological trends. Lastly, it concludes saying that MEMS have enough potential to establish a second technological revolution of miniaturization.
MEMS = Micro Electro Mechanical System
Any engineering system that performs electrical (switching ,deciding) and mechanical functions (sensing,moving,heating) with components in micrometers is a MEMS.
These slides contains basic information about ELECTRO-MECHANICAL sensors as future trends.As our future technology is depend upon the automotive components and inventions the low space occupier MEMS based devices are reliable and convenient.Hope you like it and it is useful in your study and knowledge.
Micro-Electro-Mechanical Systems, or MEMS, is a technology that in its most general form can be defined as miniaturized mechanical and electro-mechanical elements (i.e., devices and structures) that are made using the techniques of microfabrication. The critical physical dimensions of MEMS devices can vary from well below one micron on the lower end of the dimensional spectrum, all the way to several millimeters. Likewise, the types of MEMS devices can vary from relatively simple structures having no moving elements, to extremely complex electromechanical systems with multiple moving elements under the control of integrated microelectronics. The one main criterion of MEMS is that there are at least some elements having some sort of mechanical functionality whether or not these elements can move. In other words Microsystems are miniaturized integrated systems in a small package or more specifically, micro-sized components working together as a system and assembled into a package that fits on a pinhead. In the United States, these devices are referred to as microelectromechanical systems or MEMS. European countries referred to such devices as microsystems or MST. These two terms – MEMS and MST – are often used interchangeably. Microsystems are microscopic, integrated, self-aware, stand-alone products that can sense, think, communicate and act. Some systems can do all of these things, plus scavenge for power.
This is a ppt on speech recognition system or automated speech recognition system. I hope that it would be helpful for all the people searching for a presentation on this technology
AWS re:Invent 2016: Workshop: Build an Alexa-Enabled Product with Raspberry P...Amazon Web Services
Fascinated by Alexa, and want to build your own device with Alexa built in? This workshop will walk you through to how to build your first Alexa-powered device step by step, using a Raspberry Pi. No experience with Raspberry Pi or Alexa Voice Service is required. We will provide you with the hardware and the software required to build this project, and at the end of the workshop, you will be able to walk out with a working prototype of Alexa on a Pi.
Please bring a WiFi capable laptop.
Soumith Chintala at AI Frontiers: A Dynamic View of the Deep Learning WorldAI Frontiers
In this short talk, you will get an overview of Torch – a deep learning framework, and you will learn about how Torch offers certain valuable features for research that no other framework focuses on. You will also learn about new features introduced in a refreshed version of Torch.
AWS re:Invent 2016: Workshop: Creating Voice Experiences with Alexa Skills: F...Amazon Web Services
This workshop teaches you how to build your first voice skill with Alexa. You bring a skill idea and we’ll show you how to bring it to life. This workshop will walk you through how to build an Alexa skill, including Node.js setup, how to implement an intent, deploying to AWS Lambda, and how to register and test a skill. You’ll walk out of the workshop with a working prototype of your skill idea.
Prerequisites:
Participants should have an AWS account established and available for use during the workshop.
Please bring your own laptop.
Neural networks have a long and rich history in automatic speech recognition. In this talk, we present a brief primer on the origin of deep learning in spoken language, and then explore today’s world of Alexa. Alexa is the AWS service that understands spoken language and powers Amazon Echo. Alexa relies heavily on machine learning and deep neural networks for speech recognition, text-to-speech, language understanding, and more. We also discuss the Alexa Skills Kit, which lets any developer teach Alexa new skills.
Nikko Ström at AI Frontiers: Deep Learning in AlexaAI Frontiers
Alexa is the service that understands spoken language in Amazon Echo and other voice enabled devices. Alexa relies heavily on machine learning and deep neural networks for speech recognition, text-to-speech, language understanding, skill selection, and more. In this talk Nikko presents an overview of deep learning in Alexa and gives a few illustrating examples.
Micro-electro-mechanical systems (MEMS) have been identified as one of the most promising technologies and will continue to revolutionize the industry as well as the industrial and consumer products by combining silicon-based microelectronics with micro-machining technology. All the spheres of industrial application including robots conception and development will be impacted by this new technology. If semiconductor microfabrication was contemplated to be the first micro-manufacturing revolution, MEMS is the second revolution. The paper reflects the results of a study about the state of the art of this technology and its future influence in the development of the construction industry. The interdisciplinary nature of MEMS utilizes design, engineering and manufacturing expertise from a wide and diverse range of technical areas including integrated circuit fabrication technology, mechanical engineering, materials science, electrical engineering, chemistry and chemical engineering, as well as fluid engineering, optics, instrumentation and packaging.
This article discusses MEMS, i.e. Micro-Electro Mechanical Systems.
It gives a rudimentry idea of MEMS technology, its block diagram, applications, advantages and disadvantages. It also gives a brief idea on the working principle of MEMS devices.
Micro-Electro-Mechanical Systems, or MEMS, is a technology that in its most general form can be defined as miniaturized mechanical and electro-mechanical elements (i.e., devices and structures) that are made using the techniques of microfabrication. The critical physical dimensions of MEMS devices can vary from well below one micron on the lower end of the dimensional spectrum, all the way to several millimeters. Likewise, the types of MEMS devices can vary from relatively simple structures having no moving elements, to extremely complex electromechanical systems with multiple moving elements under the control of integrated microelectronics. The one main criterion of MEMS is that there are at least some elements having some sort of mechanical functionality whether or not these elements can move. The term used to define MEMS varies in different parts of the world. In the United States they are predominantly called MEMS, while in some other parts of the world they are called “Microsystems Technology” or “micromachined devices”.
MEMS technology consist of micro electronic elements actuators, sensors and mechanical structures built onto a substrate which is usually “Silicon”. They are developed using microfabrication techniques : deposition, patterning, etching.
The most common forms of MEMS production are :
Bulk micromachine, surface micromachine etc.
The benefits of this small scale integrated device brings the technology of nanometers to a vast no. of devices.
Micro-Electro-Mechanical Systems, or MEMS, is a technology that in its most general form can be defined as miniaturized mechanical and electro-mechanical elements that are made using the techniques of micro fabrication. The critical physical dimensions of MEMS devices can vary from well below one micron on the lower end of the dimensional spectrum, all the way to several millimeters.
MEMS micro electro mechanical systems is an advanced field of engineering which has many scientific applications.
This PPT summarizes about mems, the materials used in mems, materials used in mems, their uses, pros and cons, advantages disadvantages etc..
Operation “Blue Star” is the only event in the history of Independent India where the state went into war with its own people. Even after about 40 years it is not clear if it was culmination of states anger over people of the region, a political game of power or start of dictatorial chapter in the democratic setup.
The people of Punjab felt alienated from main stream due to denial of their just demands during a long democratic struggle since independence. As it happen all over the word, it led to militant struggle with great loss of lives of military, police and civilian personnel. Killing of Indira Gandhi and massacre of innocent Sikhs in Delhi and other India cities was also associated with this movement.
2024.06.01 Introducing a competency framework for languag learning materials ...Sandy Millin
http://sandymillin.wordpress.com/iateflwebinar2024
Published classroom materials form the basis of syllabuses, drive teacher professional development, and have a potentially huge influence on learners, teachers and education systems. All teachers also create their own materials, whether a few sentences on a blackboard, a highly-structured fully-realised online course, or anything in between. Despite this, the knowledge and skills needed to create effective language learning materials are rarely part of teacher training, and are mostly learnt by trial and error.
Knowledge and skills frameworks, generally called competency frameworks, for ELT teachers, trainers and managers have existed for a few years now. However, until I created one for my MA dissertation, there wasn’t one drawing together what we need to know and do to be able to effectively produce language learning materials.
This webinar will introduce you to my framework, highlighting the key competencies I identified from my research. It will also show how anybody involved in language teaching (any language, not just English!), teacher training, managing schools or developing language learning materials can benefit from using the framework.
Introduction to AI for Nonprofits with Tapp NetworkTechSoup
Dive into the world of AI! Experts Jon Hill and Tareq Monaur will guide you through AI's role in enhancing nonprofit websites and basic marketing strategies, making it easy to understand and apply.
The French Revolution, which began in 1789, was a period of radical social and political upheaval in France. It marked the decline of absolute monarchies, the rise of secular and democratic republics, and the eventual rise of Napoleon Bonaparte. This revolutionary period is crucial in understanding the transition from feudalism to modernity in Europe.
For more information, visit-www.vavaclasses.com
The Roman Empire A Historical Colossus.pdfkaushalkr1407
The Roman Empire, a vast and enduring power, stands as one of history's most remarkable civilizations, leaving an indelible imprint on the world. It emerged from the Roman Republic, transitioning into an imperial powerhouse under the leadership of Augustus Caesar in 27 BCE. This transformation marked the beginning of an era defined by unprecedented territorial expansion, architectural marvels, and profound cultural influence.
The empire's roots lie in the city of Rome, founded, according to legend, by Romulus in 753 BCE. Over centuries, Rome evolved from a small settlement to a formidable republic, characterized by a complex political system with elected officials and checks on power. However, internal strife, class conflicts, and military ambitions paved the way for the end of the Republic. Julius Caesar’s dictatorship and subsequent assassination in 44 BCE created a power vacuum, leading to a civil war. Octavian, later Augustus, emerged victorious, heralding the Roman Empire’s birth.
Under Augustus, the empire experienced the Pax Romana, a 200-year period of relative peace and stability. Augustus reformed the military, established efficient administrative systems, and initiated grand construction projects. The empire's borders expanded, encompassing territories from Britain to Egypt and from Spain to the Euphrates. Roman legions, renowned for their discipline and engineering prowess, secured and maintained these vast territories, building roads, fortifications, and cities that facilitated control and integration.
The Roman Empire’s society was hierarchical, with a rigid class system. At the top were the patricians, wealthy elites who held significant political power. Below them were the plebeians, free citizens with limited political influence, and the vast numbers of slaves who formed the backbone of the economy. The family unit was central, governed by the paterfamilias, the male head who held absolute authority.
Culturally, the Romans were eclectic, absorbing and adapting elements from the civilizations they encountered, particularly the Greeks. Roman art, literature, and philosophy reflected this synthesis, creating a rich cultural tapestry. Latin, the Roman language, became the lingua franca of the Western world, influencing numerous modern languages.
Roman architecture and engineering achievements were monumental. They perfected the arch, vault, and dome, constructing enduring structures like the Colosseum, Pantheon, and aqueducts. These engineering marvels not only showcased Roman ingenuity but also served practical purposes, from public entertainment to water supply.
Instructions for Submissions thorugh G- Classroom.pptxJheel Barad
This presentation provides a briefing on how to upload submissions and documents in Google Classroom. It was prepared as part of an orientation for new Sainik School in-service teacher trainees. As a training officer, my goal is to ensure that you are comfortable and proficient with this essential tool for managing assignments and fostering student engagement.
Francesca Gottschalk - How can education support child empowerment.pptxEduSkills OECD
Francesca Gottschalk from the OECD’s Centre for Educational Research and Innovation presents at the Ask an Expert Webinar: How can education support child empowerment?
June 3, 2024 Anti-Semitism Letter Sent to MIT President Kornbluth and MIT Cor...Levi Shapiro
Letter from the Congress of the United States regarding Anti-Semitism sent June 3rd to MIT President Sally Kornbluth, MIT Corp Chair, Mark Gorenberg
Dear Dr. Kornbluth and Mr. Gorenberg,
The US House of Representatives is deeply concerned by ongoing and pervasive acts of antisemitic
harassment and intimidation at the Massachusetts Institute of Technology (MIT). Failing to act decisively to ensure a safe learning environment for all students would be a grave dereliction of your responsibilities as President of MIT and Chair of the MIT Corporation.
This Congress will not stand idly by and allow an environment hostile to Jewish students to persist. The House believes that your institution is in violation of Title VI of the Civil Rights Act, and the inability or
unwillingness to rectify this violation through action requires accountability.
Postsecondary education is a unique opportunity for students to learn and have their ideas and beliefs challenged. However, universities receiving hundreds of millions of federal funds annually have denied
students that opportunity and have been hijacked to become venues for the promotion of terrorism, antisemitic harassment and intimidation, unlawful encampments, and in some cases, assaults and riots.
The House of Representatives will not countenance the use of federal funds to indoctrinate students into hateful, antisemitic, anti-American supporters of terrorism. Investigations into campus antisemitism by the Committee on Education and the Workforce and the Committee on Ways and Means have been expanded into a Congress-wide probe across all relevant jurisdictions to address this national crisis. The undersigned Committees will conduct oversight into the use of federal funds at MIT and its learning environment under authorities granted to each Committee.
• The Committee on Education and the Workforce has been investigating your institution since December 7, 2023. The Committee has broad jurisdiction over postsecondary education, including its compliance with Title VI of the Civil Rights Act, campus safety concerns over disruptions to the learning environment, and the awarding of federal student aid under the Higher Education Act.
• The Committee on Oversight and Accountability is investigating the sources of funding and other support flowing to groups espousing pro-Hamas propaganda and engaged in antisemitic harassment and intimidation of students. The Committee on Oversight and Accountability is the principal oversight committee of the US House of Representatives and has broad authority to investigate “any matter” at “any time” under House Rule X.
• The Committee on Ways and Means has been investigating several universities since November 15, 2023, when the Committee held a hearing entitled From Ivory Towers to Dark Corners: Investigating the Nexus Between Antisemitism, Tax-Exempt Universities, and Terror Financing. The Committee followed the hearing with letters to those institutions on January 10, 202
Honest Reviews of Tim Han LMA Course Program.pptxtimhan337
Personal development courses are widely available today, with each one promising life-changing outcomes. Tim Han’s Life Mastery Achievers (LMA) Course has drawn a lot of interest. In addition to offering my frank assessment of Success Insider’s LMA Course, this piece examines the course’s effects via a variety of Tim Han LMA course reviews and Success Insider comments.
Acetabularia Information For Class 9 .docxvaibhavrinwa19
Acetabularia acetabulum is a single-celled green alga that in its vegetative state is morphologically differentiated into a basal rhizoid and an axially elongated stalk, which bears whorls of branching hairs. The single diploid nucleus resides in the rhizoid.
TESDA TM1 REVIEWER FOR NATIONAL ASSESSMENT WRITTEN AND ORAL QUESTIONS WITH A...
Mems project by abhishek mahajan
1. MICRO- ELECTRO-MECHANICAL STSTEM
Author1- AbhishekMahajan
Line 1 – Electronics and Communication
Line 2 – Shreejee Institute of Technology and
Management
Line 3 – Khargone
Line 4 – Abhishekmahajan6991@gmail.com
I Introduction
Micro-electro-mechanical system, also written
as MEMS is the technology of very small
devices; it merges at the Nano-scale into
nanoelectromechnical system (NEMS) and
nanotechnology. MEMS are separate and
distinct from the hypothetical vision of
molecular nanotechnology or molecular
electronics. MEMS are made up of components
between 1 to 100 micro meters in size and
MEMS devices generally range in size from 20
micrometers to a millimeter. They usually
consist of a central unit that processes data (the
microprocessor) and several components that
interact with the surroundings such as micro
sensors. At these size scales, the standard
constructs of classical physics are not always
useful. Because of the large surface area to
volume ratio of MEMS, surface effects such as
electrostatics and wetting dominate over
volume effects such as inertia or thermal mass.
MEMS became practical once they could be
fabricated using modified semiconductor device
fabrication technologies, normally used to make
electronics. These include molding and plating,
wet etching and dry etching, electro discharge
machining (EDM), and other technologies
capable of manufacturing small devices. An
early example of a MEMS device is the
resonistor – an electromechanical monolithic
resonator.
II History of MEMS:-
The physicist Richard Feynman delivered a talk
at Caltech in December 1959 with the title
“There’s Plenty of Roomat the Bottom.” “What
I want to talk about,” said Feynman “is the
problem of manipulating and controlling things
on a small scale.”
In one sense, a real sense Feynman laid the
roots for today’s MEMS industry.
From those very early days and origins, MEMS
has enjoyed classic hockey stick growth: i.e.
dramatic increases in sales revenue or unit
shipment growth over time that started at a
normal, linear pace from the 1960s through to
the 1990s, hit an inflection point and took off in
the 2000s and sustained its considerable
momentum into the 2010s, fueled by such
MEMS-enabled killer apps as the Nintendo
Wii, the Apple iPhone, Bosch airbag systems,
Epson ink jet print heads, microphones from
Knowles Electronics, and blood pressure
sensors fromAcuity, Merit sensor, and others.
III Material used for MEMS
manufacturing:-
The fabrication of MEMS evolved from the
process technology in semiconductor device
fabrication, i.e. the basic techniques are
deposition of material layers, pattering by
photolithography and etching to produce the
required shapes.
a) Silicon: - Silicon is the material used to
create most integrated circuits used in consumer
electronics in the modern industry. The
economics of scale ready availability of
inexpensive high-quality materials, and ability
to incorporate electronic functionality make
silicon attractive for a wide variety of MEMS
applications. Silicon also has significant
advantages engendered through its material
properties. In single crystal form, silicon is an
almost perfect Hookean material, meaning that
when it is fixed there is virtually no hysteresis
and hence almost no energy dissipation. As well
as making for highly repeatable motion, this
also makes silicon very reliable as it suffers
very little fatigue and can have service lifetime
in the range of billions to trillions of cycle
without breaking.
b) Polymers: - Even though the electronics
industry provides an economy of scale for the
silicon industry, crystalline silicon is still a
complex and relatively expensive material to be
produced. Polymers on the other hand can be
2. produced in huge volumes, with a great variety
of material characteristics. MEMS devices can
be made from polymers by processes such as
injection molding, embossing or stereo
lithography and are especially well suited to
microfluidic applications such as disposable
blood testing cartridges.
c) Metals: - Metals can also be used to create
MEMS elements. While metals do not have
some of the advantages displayed by silicon in
terms of mechanical properties, when used
within their limitations, metals can exhibit very
high degrees of reliability. Metals can be
deposited by electroplating, evaporation, and
sputtering processes. Commonly used metals
include gold, nickel, aluminum, copper, chromi
um, titanium, tungsten, platinum, and silver.
d) Ceramic: - The nitrides of silicon, aluminum
and titanium as well as silicon carbide and
other ceramics are increasingly applied in
MEMS fabrication due to advantageous
combinations of material
properties. AiN crystallizes in the wurtzite
structure and thus shows pyroelectric
and piezoelectric properties enabling sensors,
for instance, with sensitivity to normal and
shear forces. TiN, on the other hand, exhibits a
high electrical conductivities and large elastic
modulas allowing realizing electrostatic MEMS
actuation schemes with ultrathin
membranes. Moreover, the high resistance of
TiN against bio corrosion qualifies the material
for applications in biogenic environments and
in biosensors.
IV MEMS basic processes:-
a) Deposition processes: - One of the basic
building blocks in MEMS processing is the
ability to deposit thin films of material with a
thickness anywhere between a few nanometers
to about 100 micrometers. There are two types
of deposition processes, as follows
i) Physical deposition: - Physical vapor
deposition ("PVD") consists of a process in
which a material is removed from a target, and
deposited on a surface. Techniques to do this
include the process of sputtering, in which an
ion beam liberates atoms from a target,
allowing them to move through the intervening
space and deposit on the desired substrate,
and evaporation, in which a material is
evaporated from a target using either heat
(thermal evaporation) or an electron beam (e-
beam evaporation) in a vacuumsystem.
ii) Chemical deposition: - Chemical deposition
techniques include chemical vapor deposition
("CVD"), in which a stream of source gas reacts
on the substrate to grow the material desired.
This can be further divided into categories
depending on the details of the technique, for
example, LPCVD (Low Pressure chemical
vapor deposition) and PECVD (Plasma
Enhanced chemical vapor deposition).
Oxide films can also be grown by the technique
of thermal oxidation, in which the (typically
silicon) wafer is exposed to oxygen and/or
steam, to grow a thin surface layer of silicon
dioxide.
b) Patterning: - Patterning in MEMS is the
transfer of a pattern into a material.
i) Lithography
ii) Electron beam lithography
iii) Ion beam lithography
iv) Ion track technology
v) X-ray lithography
vi) Diamond patterning
c) Die preparation: - After preparing a large
number of MEMS devices on a silicon wafer,
individual dies have to be separated, which is
called die preparation in semiconductor
technology. For some applications, the
separation is preceded by wafer back
grinding in order to reduce the wafer
thickness. Wafer dicing may then be performed
either by sawing using a cooling liquid or a dry
laser process called stealth dicing.
V Applications:-
Some common commercial applications of
MEMS include:
Inkjet printers, which use piezoelectric or
thermal bubble ejection to deposit ink on
paper.
Accelerometers in modern cars for a large
number of purposes
including airbag deployment and electronic
stability control.
Accelerometers and MEMS gyroscopes in
remote controlled, or autonomous,
helicopters, planes and multirotors (also
known as drones), used for automatically
sensing and balancing flying
characteristics of roll, pitch and yaw.
3. Accelerometers in consumer electronics
devices such as game controllers
(Nintendo Wii), personal media players /
cell phones (Apple iPhone, various Nokia
mobile) phone models, various HTC PDA
models and a number of Digital Cameras
(various Canon Digital IXUS models).
Also used in PCs to park the hard disk
head when free-fall is detected, to prevent
damage and data loss.
MEMS gyroscopes used in modern cars
and other applications to detect yaw; e.g.,
to deploy a roll over bar or
trigger electronic stability control
MEMS microphones in portable devices,
e.g., mobile phones, head sets and laptops.
Silicon pressure sensors e.g.,
car tire pressure sensors, and
disposable blood pressure sensors
Displays e.g., the digital micro mirror
device (DMD) chip in a projector based
on DLP technology, which has a surface
with several hundred thousand micro
mirrors or single micro-scanning-mirrors
also called micro scanners
Optical switching technology, which is
used for switching technology and
alignment for data communications
Bio-MEMS applications in medical and
health related technologies from Lab-On-
Chip to MicroTotalAnalysis
(biosensor, chemo sensor), or embedded in
medical devices e.g. stents.
Interferometric modulator display (IMOD)
applications in consumer electronics
(primarily displays for mobile devices),
used to create interferometric modulation −
reflective display technology as found in
mirasol displays
Fluid acceleration such as for micro-
cooling
Micro-scale energy harvesting including
piezoelectric, electrostatic and
electromagnetic micro harvesters.
Micro machined ultrasound transducers.
VI Current Challenges:-
Some of the obstacles facing organizations in
the development of MEMS and
Nanotechnology devices include
a) Access to fabrication: - Most organizations
who wish to explore the potential of MEMS
and Nanotechnology have little or no internal
resources for designing, prototyping, or
manufacturing devices, as well as little to no
expertise among their staff in developing these
technologies. Few organizations will build their
own fabrication facilities or establish technical
development teams because of the prohibitive
cost. Therefore, these organizations will benefit
greatly from the availability of MNX’s
fabrication services, which offers its customers
affordable access to the best MEMS and Nano
fabrication technologies available.
b) Packaging:- MEMS packaging is more
challenging than IC packaging due to the
diversity of MEMS devices and the requirement
that many of these devices need to be
simultaneously in contact with their
environment as well as protected from the
environment. Frequently, many MEMS and
Nano device development efforts must develop
a new and specialized package for the device to
meet the application requirements. As a result,
packaging can often be one of the single most
expensive and time consuming tasks in an
overall product development program. The
MNX staffs are experts in packaging solutions
for devices for any application.
c) Fabrication Knowledge Required: - MEMS
device developers must have a high level of
fabrication knowledge and practical experience
coupled with a significant amount of innovative
engineering skill in order to create and
implement successful device designs. Often the
development of even the most mundane MEMS
device requires very specialized skills. Without
this expertise and knowledge, at best device
development projects can cost far more and
take much longer. At worst, they can result in
failure. The MNX has more expertise and
knowledge in device design and fabrication
than anyone in the world.
4. VII Future of the MEMS:-
The future of MEMS is rich with commercial
possibilities, including the trillions of MEMS
sensors envisioned to be used as the eyes and
ears of the Internet of Things (IoT); the future
of MEMS also includes local MEMS-based
environmental monitoring devices;
deployments in the MEMS-enabled quantified
self movement and in personalized medicine
applications; MEMS-containing wearables; and
MEMS-reliant drones and other small personal
robots.