MEMS can be defined as the combination of micro sensors and/or micro actuators and electronic devices integrated on a single chip. MEMS have many functions that make life easier, including actuators which move or control mechanisms, and sensors which respond to physical stimuli. Some applications of MEMS include biosensors for medical technologies, autofocus actuators in cameras, disposable blood pressure sensors, and gyroscopes used in modern cars. MEMS have numerous potential applications as they allow new synergies between fields like biology and microelectronics.

1. APPLICATIONS OF MEMS
By: mohd azrin bin razali
POLITEKNIK SULTAN HAJI AHMAD SHAH,
Pahang, MALAYSIA

2.  MEMS can be defined as the combination of
micro sensors and/or micro actuators and
electronic devices integrated on a single
chip.
 MEMS have many function that make our life
easier.

3.  MEMS can be divided into two
 >ACTUATOR
-A type of motor for moving or controlling a
mechanism or system
 >SENSOR
-a device that responds to a physical stimulus
such as heat, light and sound

4.  Bio-MEMS
-use in medical and health related
technologies
 DOC’s OptiML Autofocus (AF) actuator
-utilize electrostatic forces to move a lens
with optimal positioning precision and
repeatability.

5.  MEMS disposable sensor
-used to monitor blood pressure in IV lines of
patients in intensive care
 MEMS pressure sensors
-used to measure intrauterine pressure
during birth

6.  MEMS gyroscopes
-used in modern cars and other applications
 INKJET PRINTERS
-use piezoelectric or thermal bubble ejection
to deposit ink on paper
 DISPLAYS
-DMD chip in a projector based on DLP
technology

7.  Biotechnology
-MEMS and Nanotechnology is enabling new
discoveries in science and engineering such
as the Polymerase Chain Reaction (PCR)
Microsystems for DNA amplification and
identification
-Biochips for detection of hazardous
chemical and biological agents

8.  Medicine/MEDICAL
-MEMS pressure sensors are used for eye
surgery to measure and control the vacuum
level used to remove fluid from the eye,
-MEMS pressure sensors are used to measure
intrauterine pressure during birth.

9.  Communications
-RF-MEMS technology, by using this
technology, performance of communication
circuits will improve, while the total circuit
area, power consumption and cost will be
reduced

10.  Inertial Sensing
 - specifically accelerometers and gyroscopes
-MEMS accelerometers have displaced
conventional accelerometers for crash air-
bag deployment systems in automobiles

11.  Thereare numerous possible applications for
MEMS and Nanotechnology. As a breakthrough
technology, allowing unparalleled synergy
between previously unrelated fields such as
biology and microelectronics, many new
MEMS and Nanotechnology applications will
emerge.