ICE 4010: Micro Electro Mechanical Systems: Introduction to MEMS

1. Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
ICE 4010: MICRO ELECTRO
MECHANICAL SYSTEMS (MEMS)
Lecture #01
Introduction to MEMS
Dr. S. Meenatchi Sundaram
Email: meenasundar@gmail.com

2. “MEMS and Microsystems: design, manufacture, and nanoscale
engineering,” 2nd Edition, Tai-Ran Hsu, John Wiley & Sons, Inc., 2008.
Chang Liu, Foundations of MEMS, 2nd Edition, Prentice Hall, 2012.
M. Bao, Analysis and Design Principles of MEMS Devices, 1st Edition,
Elsevier, 2005.
S. Beebey, G. Ensell and N. White, MEMS Mechanical Sensors,
Boston: Artech House, 2004.
Stephen D Senturia, Microsystem Design, Springer, 2001.
An Introduction to MEMS, Prime Faraday Technology Watch – January
2002
(https://www.academia.edu/5077471/Prime_Faraday_Technology_Watch
_ISBN_1-84402-020-7_An_Introduction_to_MEMS_An_Introduction_
to_MEMS_Micro-electromechanical_Systems_PRIME_Faraday_
Partnership_PRIME_Faraday_Partnership?auto=download)
Reference Books & Materials
Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal 2

3. Micro-Electro-Mechanical Systems (MEMS) is the integration
of mechanical elements, sensors, actuators, and electronics on a
common silicon substrate through micro fabrication technology.
A technology to create any integrated devices or systems that
combine mechanical and electrical components. These devices
have the ability to sense, control and actuate on a micro scale
and generate effects on macro scale.
A device that consists of micro machines and microelectronics
where micro machines are controlled by microelectronics.
A system or a device that has static and movable components
with some dimension on the scale of micron.
What is MEMS?
Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal 3

4. By combining IC’s with mechanical parts, MEMS are
complete systems on a chip.
What is MEMS?
Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal 4

5. In the most general form, MEMS consist of mechanical
microstructures, microsensors, microactuators and
microelectronics, all integrated onto the same silicon chip.
5
What is MEMS?
Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal

6. 6Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
How small are they?

7. 7Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
Visual Examples

8. Micro Flying Robot
8Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
Visual Examples

9. 9Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
Visual Examples

10. 10Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
Visual Examples

11. World’s Smallest Guitar
11Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
Visual Examples

12. Pressure Sensors
12Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
Visual Examples

13. Low cost coplanar waveguide
13Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
Visual Examples

14. 14Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
Visual Examples

15. 15Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
Visual Examples