- Micro Electro Mechanical Systems (MEMS) is a technology that miniaturizes components between 1 to 100 micrometers in size to combine both electrical and mechanical functions on a single chip using microfabrication technology. - MEMS devices are fabricated using deposition, patterning, and etching processes. Deposition is used to deposit materials onto the substrate through physical or chemical methods. Patterning transfers patterns onto the materials using lithography techniques. Etching then removes material using wet or dry etching. - MEMS have applications in areas like automotive, biomedical, military, sensors and more. They are used in airbags, inertial sensors, biomedical implants, inkjet printers, gyroscopes and

1. MEMS
-Micro Electro Mechanical Systems
- A way to miniaturize our life style
BY-
K.ANEESHA RANI
K.SREE NAVYA
Y.ANUSHA
2ND YEAR ECE
DR.L.B.COLLEGE OF ENGINEERING (FOR WOMEN)

2. What is MEMS?
• Mems is a technology of very small devices. It is a combination of
mechanical functions and electrical functions on the same chip
using micro fabrication technology.
• MEMS are made up of components between 1 to 100 micrometers
in size
• MEMS devices generally range in size from 20 micrometers to a
millimeter

3. Fabrication of mems
Deposition Patterning Etching
Physical Chemical Lithography Dry Wet
Photolithography
Electron beam lithography
Ion beam lithography
Ion track technology
X-ray lithography.

4.  Deposition –
Physical deposition :
Physical deposition consists of a process in which a material is removed from a
target, and deposited on a surface
Chemical deposition :
Chemical deposition techniques include chemical vapor deposition, in which a
stream of source gas reacts on the substrate to grow the material desired.
 Patterning –
• Patterning of mems is the transfer of a pattern into a material.
• Lithography is a widely used process in patterning of mems .
• Examples of lithography are– Photolithography, Electron beam lithography, Ion
beam lithography, Ion track technology, X-ray lithography.

5. Etching
Wet Etching : Dry Etching :
• Wet chemical etching • Dry etching can be done in
consists in selective removal three ways and they are –
of material by dipping a a) Reactive ion etching (RIE)
substrate into a solution b) Sputter etching
that dissolves it. c) Vapor phase etching.
• The chemical nature of this
etching process provides a
good selectivity

6. Applications of mems

7. • In medicine
• A MEMS is a device that can be
implanted in the human body.
• MEMS surgical tools provide the
flexibility and accuracy to perform
surgery.
• Biomems
• Bio-mems are used to refer to the science
and technology of operating at the micro
scale for biological and biomedical
applications.

8. • In automotives :
Heavy use of mems is found in air
bag systems, vehicle security
system, inertial brake lights, rollover
detection, automatic door locks etc.
• As gyroscope:
Inexpensive vibrating structure
gyroscopes manufactured with
mems technology have become widely
available. These are
packaged similarly to other integrated
circuits and may provide either
analog or digital outputs.

9. • In microphones:
The mems microphone also called as
microphone Chip is widely used in
the present day communication
world.
• In military :
Micro-electro mechanical system (MEMS)
technology help projectiles to reach their
targets accurately .

10. • In accelerometers:
• MEMS accelerometers are widely used in cars
for airbag deployment and in consumer
electronics applications such as smart
phones, gaming devices for sensing motion
• In sensors:
• A sensor is a device which receives and
responds to a signal when touched.A micro
sensor reaches a significantly higher speed
and sensitivity compared with
microscopic approaches.

11. • Apart from these applications mems are also used in many
fields in the present world
• They are used to detect earth quakes, in gas shut off, in
shock and tilt sensing
• Inkjet printers and micro scanners also involve the use of
mems.
• Mems is used in Optical switching technology in
which, switching technology and alignment for data
communications is done.

12. Advantages and disadvantages
 Minimize energy and  Farm establishment
materials. requires huge
Improved investments.
reproducibility.  Micro-components are
 Improved accuracy and costly compared to
reliability. macro components.
 Increased selectivity  Design includes very
and sensitivity. much complex
procedures

13. Conclusion
• This enabling
technology promises to
create entirely new
categories of products.
• Mems will be the
indispensible factor in
advancing technology
• As with all emerging
technologies had been
predicted to
revolutionize
technology and our lives

15. Queries???