The document discusses micro-electro-mechanical systems (MEMS) and their evolution. It provides definitions of MEMS, describes their key components and manufacturing processes. MEMS applications are found in various fields like automotive, healthcare, instrumentation and consumer products. The document traces the history of MEMS from their inception in the late 1940s to more recent developments. It also outlines the advantages and disadvantages of MEMS and discusses their increasing role in systems that can sense and interact with their environment.
MEMS is a technique of combining electrical and mechanical components together on a chip. It produces a system of miniature dimensions i.e the system having thickness less than the thickness of human hair. The components are integrated on a single chip using micro fabrication technology which allows the microsystem to both sense & control the environment.
MEMS = Micro Electro Mechanical System
Any engineering system that performs electrical (switching ,deciding) and mechanical functions (sensing,moving,heating) with components in micrometers is a MEMS.
MEMS is a technique of combining electrical and mechanical components together on a chip. It produces a system of miniature dimensions i.e the system having thickness less than the thickness of human hair. The components are integrated on a single chip using micro fabrication technology which allows the microsystem to both sense & control the environment.
MEMS = Micro Electro Mechanical System
Any engineering system that performs electrical (switching ,deciding) and mechanical functions (sensing,moving,heating) with components in micrometers is a MEMS.
Microelectromechanical Systems (MEMS) are miniature devices comprising of integrated mechanical (levers, springs, deformable membranes, vibrating structures, etc.) and electrical (resistors, capacitors, inductors, etc.) components designed to work in concert to sense and report on the physical properties of their immediate or local environment, or, when signaled to do so, to perform some kind of controlled physical interaction or actuation with their immediate or local environment
MEMS technology consist of micro electronic elements actuators, sensors and mechanical structures built onto a substrate which is usually “Silicon”. They are developed using microfabrication techniques : deposition, patterning, etching.
The most common forms of MEMS production are :
Bulk micromachine, surface micromachine etc.
The benefits of this small scale integrated device brings the technology of nanometers to a vast no. of devices.
Micro-Electro-Mechanical Systems, or MEMS, is a technology that in its most general form can be defined as miniaturized mechanical and electro-mechanical elements that are made using the techniques of micro fabrication. The critical physical dimensions of MEMS devices can vary from well below one micron on the lower end of the dimensional spectrum, all the way to several millimeters.
Piezoresistive pressure sensors are one of the very-first products of MEMS technology. Those products are widely used in biomedical applications, automotive industry and household appliances.
The sensing material in a piezoresistive pressure sensor is a diaphragm formed on a silicon substrate, which bends with applied pressure. A deformation occurs in the crystal lattice of the diaphragm because of that bending. This deformation causes a change in the band structure of the piezoresistors that are placed on the diaphragm, leading to a change in the resistivity of the material. This change can be an increase or a decrease according to the orientation of the resistors.
Microelectromechanical Systems (MEMS) are miniature devices comprising of integrated mechanical (levers, springs, deformable membranes, vibrating structures, etc.) and electrical (resistors, capacitors, inductors, etc.) components designed to work in concert to sense and report on the physical properties of their immediate or local environment, or, when signaled to do so, to perform some kind of controlled physical interaction or actuation with their immediate or local environment
MEMS technology consist of micro electronic elements actuators, sensors and mechanical structures built onto a substrate which is usually “Silicon”. They are developed using microfabrication techniques : deposition, patterning, etching.
The most common forms of MEMS production are :
Bulk micromachine, surface micromachine etc.
The benefits of this small scale integrated device brings the technology of nanometers to a vast no. of devices.
Micro-Electro-Mechanical Systems, or MEMS, is a technology that in its most general form can be defined as miniaturized mechanical and electro-mechanical elements that are made using the techniques of micro fabrication. The critical physical dimensions of MEMS devices can vary from well below one micron on the lower end of the dimensional spectrum, all the way to several millimeters.
Piezoresistive pressure sensors are one of the very-first products of MEMS technology. Those products are widely used in biomedical applications, automotive industry and household appliances.
The sensing material in a piezoresistive pressure sensor is a diaphragm formed on a silicon substrate, which bends with applied pressure. A deformation occurs in the crystal lattice of the diaphragm because of that bending. This deformation causes a change in the band structure of the piezoresistors that are placed on the diaphragm, leading to a change in the resistivity of the material. This change can be an increase or a decrease according to the orientation of the resistors.
Micro-electro-mechanical systems (MEMS) have been identified as one of the most promising technologies and will continue to revolutionize the industry as well as the industrial and consumer products by combining silicon-based microelectronics with micro-machining technology. All the spheres of industrial application including robots conception and development will be impacted by this new technology. If semiconductor microfabrication was contemplated to be the first micro-manufacturing revolution, MEMS is the second revolution. The paper reflects the results of a study about the state of the art of this technology and its future influence in the development of the construction industry. The interdisciplinary nature of MEMS utilizes design, engineering and manufacturing expertise from a wide and diverse range of technical areas including integrated circuit fabrication technology, mechanical engineering, materials science, electrical engineering, chemistry and chemical engineering, as well as fluid engineering, optics, instrumentation and packaging.
Micromachined Electro-Mechanical Systems, also called microfabricated Systems, have evoked great interest in the scientific and engineering communities. This is primarily due to several substantive advantages that MEMS offer: orders of magnitude smaller size, better performance than other solutions, possibilities for batch fabrication and cost-effective integration with electronics, virtually zero dc power consumption and potentially large reduction in power consumption, etc.
This Seminar would give an introduction to these exciting developments and the technology and design approaches for the realization of these integrated systems. It would be followed with an introduction to the design of microsensors, such as the pressure sensor and the accelerometer, which began the MEMS revolution.
A systematic approach is developed to select manufacturing Process Chains for the generic elements of a MEMS device. A database of MEMS Process Chains and their attendant process attributes is developed from the existing literature, and used to construct Process Attribute charts. The performance requirements of MEMS beams and trenches are translated into the same set of Process Attributes. This allows for a screening of the Process Chains to obtain a list of candidate manufacturing methods.
I begin with a quick introduction to MEMS technology, micron scale and show that silicon is eminently suited for micromechanical devices and therefore the possibility of integrating MEMS with VLSI electronics. Smart cell phones and wireless enabled devices are poised to become commercial engines for the next generation of MEMS, since MEMS provide not only better functionality with smaller chip area, but also alternative transceiver architectures for improved functionality, performance and reliability.
The application domains cover microsensors and actuators for physical quantities, of which MEMS for automobile & consumer electronics forms a large segment; microfabricated subsystems for communications and computer systems.
Micro-Electro-Mechanical Systems, or MEMS, is a technology that in its most general form can be defined as miniaturized mechanical and electro-mechanical elements (i.e., devices and structures) that are made using the techniques of microfabrication. The critical physical dimensions of MEMS devices can vary from well below one micron on the lower end of the dimensional spectrum, all the way to several millimeters. Likewise, the types of MEMS devices can vary from relatively simple structures having no moving elements, to extremely complex electromechanical systems with multiple moving elements under the control of integrated microelectronics. The one main criterion of MEMS is that there are at least some elements having some sort of mechanical functionality whether or not these elements can move. The term used to define MEMS varies in different parts of the world. In the United States they are predominantly called MEMS, while in some other parts of the world they are called “Microsystems Technology” or “micromachined devices”.
This article discusses MEMS, i.e. Micro-Electro Mechanical Systems.
It gives a rudimentry idea of MEMS technology, its block diagram, applications, advantages and disadvantages. It also gives a brief idea on the working principle of MEMS devices.
Democratizing Fuzzing at Scale by Abhishek Aryaabh.arya
Presented at NUS: Fuzzing and Software Security Summer School 2024
This keynote talks about the democratization of fuzzing at scale, highlighting the collaboration between open source communities, academia, and industry to advance the field of fuzzing. It delves into the history of fuzzing, the development of scalable fuzzing platforms, and the empowerment of community-driven research. The talk will further discuss recent advancements leveraging AI/ML and offer insights into the future evolution of the fuzzing landscape.
Cosmetic shop management system project report.pdfKamal Acharya
Buying new cosmetic products is difficult. It can even be scary for those who have sensitive skin and are prone to skin trouble. The information needed to alleviate this problem is on the back of each product, but it's thought to interpret those ingredient lists unless you have a background in chemistry.
Instead of buying and hoping for the best, we can use data science to help us predict which products may be good fits for us. It includes various function programs to do the above mentioned tasks.
Data file handling has been effectively used in the program.
The automated cosmetic shop management system should deal with the automation of general workflow and administration process of the shop. The main processes of the system focus on customer's request where the system is able to search the most appropriate products and deliver it to the customers. It should help the employees to quickly identify the list of cosmetic product that have reached the minimum quantity and also keep a track of expired date for each cosmetic product. It should help the employees to find the rack number in which the product is placed.It is also Faster and more efficient way.
Water scarcity is the lack of fresh water resources to meet the standard water demand. There are two type of water scarcity. One is physical. The other is economic water scarcity.
Welcome to WIPAC Monthly the magazine brought to you by the LinkedIn Group Water Industry Process Automation & Control.
In this month's edition, along with this month's industry news to celebrate the 13 years since the group was created we have articles including
A case study of the used of Advanced Process Control at the Wastewater Treatment works at Lleida in Spain
A look back on an article on smart wastewater networks in order to see how the industry has measured up in the interim around the adoption of Digital Transformation in the Water Industry.
Automobile Management System Project Report.pdfKamal Acharya
The proposed project is developed to manage the automobile in the automobile dealer company. The main module in this project is login, automobile management, customer management, sales, complaints and reports. The first module is the login. The automobile showroom owner should login to the project for usage. The username and password are verified and if it is correct, next form opens. If the username and password are not correct, it shows the error message.
When a customer search for a automobile, if the automobile is available, they will be taken to a page that shows the details of the automobile including automobile name, automobile ID, quantity, price etc. “Automobile Management System” is useful for maintaining automobiles, customers effectively and hence helps for establishing good relation between customer and automobile organization. It contains various customized modules for effectively maintaining automobiles and stock information accurately and safely.
When the automobile is sold to the customer, stock will be reduced automatically. When a new purchase is made, stock will be increased automatically. While selecting automobiles for sale, the proposed software will automatically check for total number of available stock of that particular item, if the total stock of that particular item is less than 5, software will notify the user to purchase the particular item.
Also when the user tries to sale items which are not in stock, the system will prompt the user that the stock is not enough. Customers of this system can search for a automobile; can purchase a automobile easily by selecting fast. On the other hand the stock of automobiles can be maintained perfectly by the automobile shop manager overcoming the drawbacks of existing system.
Final project report on grocery store management system..pdfKamal Acharya
In today’s fast-changing business environment, it’s extremely important to be able to respond to client needs in the most effective and timely manner. If your customers wish to see your business online and have instant access to your products or services.
Online Grocery Store is an e-commerce website, which retails various grocery products. This project allows viewing various products available enables registered users to purchase desired products instantly using Paytm, UPI payment processor (Instant Pay) and also can place order by using Cash on Delivery (Pay Later) option. This project provides an easy access to Administrators and Managers to view orders placed using Pay Later and Instant Pay options.
In order to develop an e-commerce website, a number of Technologies must be studied and understood. These include multi-tiered architecture, server and client-side scripting techniques, implementation technologies, programming language (such as PHP, HTML, CSS, JavaScript) and MySQL relational databases. This is a project with the objective to develop a basic website where a consumer is provided with a shopping cart website and also to know about the technologies used to develop such a website.
This document will discuss each of the underlying technologies to create and implement an e- commerce website.
Event Management System Vb Net Project Report.pdfKamal Acharya
In present era, the scopes of information technology growing with a very fast .We do not see any are untouched from this industry. The scope of information technology has become wider includes: Business and industry. Household Business, Communication, Education, Entertainment, Science, Medicine, Engineering, Distance Learning, Weather Forecasting. Carrier Searching and so on.
My project named “Event Management System” is software that store and maintained all events coordinated in college. It also helpful to print related reports. My project will help to record the events coordinated by faculties with their Name, Event subject, date & details in an efficient & effective ways.
In my system we have to make a system by which a user can record all events coordinated by a particular faculty. In our proposed system some more featured are added which differs it from the existing system such as security.
About
Indigenized remote control interface card suitable for MAFI system CCR equipment. Compatible for IDM8000 CCR. Backplane mounted serial and TCP/Ethernet communication module for CCR remote access. IDM 8000 CCR remote control on serial and TCP protocol.
• Remote control: Parallel or serial interface.
• Compatible with MAFI CCR system.
• Compatible with IDM8000 CCR.
• Compatible with Backplane mount serial communication.
• Compatible with commercial and Defence aviation CCR system.
• Remote control system for accessing CCR and allied system over serial or TCP.
• Indigenized local Support/presence in India.
• Easy in configuration using DIP switches.
Technical Specifications
Indigenized remote control interface card suitable for MAFI system CCR equipment. Compatible for IDM8000 CCR. Backplane mounted serial and TCP/Ethernet communication module for CCR remote access. IDM 8000 CCR remote control on serial and TCP protocol.
Key Features
Indigenized remote control interface card suitable for MAFI system CCR equipment. Compatible for IDM8000 CCR. Backplane mounted serial and TCP/Ethernet communication module for CCR remote access. IDM 8000 CCR remote control on serial and TCP protocol.
• Remote control: Parallel or serial interface
• Compatible with MAFI CCR system
• Copatiable with IDM8000 CCR
• Compatible with Backplane mount serial communication.
• Compatible with commercial and Defence aviation CCR system.
• Remote control system for accessing CCR and allied system over serial or TCP.
• Indigenized local Support/presence in India.
Application
• Remote control: Parallel or serial interface.
• Compatible with MAFI CCR system.
• Compatible with IDM8000 CCR.
• Compatible with Backplane mount serial communication.
• Compatible with commercial and Defence aviation CCR system.
• Remote control system for accessing CCR and allied system over serial or TCP.
• Indigenized local Support/presence in India.
• Easy in configuration using DIP switches.
1. MEHRAN UNIVERSITY
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MEMS &
MicrosystemsMICRO-ELECTRO-MECHANICAL SYSTEMS
”Machine on a chip” / “Micro-machine”
Or
”Anything designed and produced using Microelectronics toolset ”
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Contents
• MEMS Introduction
• MEMS Applications
• MEMS Examples
• MEMS in Daily life
• MEMS History
• MEMS Evolution
• MEMS Components
• MEMS Advantages and Disadvantages
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MEM
S
• “MEMS is a way of making things”. These “things”
merge the functions of sensing and actuation with
computation and communication to locally control
physical parameters at the micro-scale, yet cause
effects at much grander scales.
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MEMS system: It is a technology that combines
processor or computers with sensors and
other mechanical parts such as valves,
gears, mirrors and actuators, that are
essentially embedded in semiconductor
chips.
MEMS Technology: It is a technology, used to create
tiny integrated devices, micro components,
micro structures.
MEMS
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MEMS
• They are miniature embedded systems involving one
or many micro-machined components or structures.
They enable higher level functions.
• MEMS System differ from computer chips as they not
only move electrons but also small mechanical
components. MEMS sensors need to connect with the
environment requiring fluidic, gas, light input/output
channels as well as electrical connections.
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MEMS Applications• Automotive System
• Health Care
• Automated Manufacturing
• Instrumentation
• Environmental Monitoring & Control
• Consumer Products
• Aerospace
• Mass data storage systems
• RF and wireless electronics
electromechanical
Micro-switch
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MEMS Example
• Integrated Features
• - Control
• - Microcontroller
• - Power Management
• - Communication
• - RF Transceiver
• - Sensing
• - Pressure
• - Humidity
• - Temperature
• - Vibration
• - Packaging “Micro Cluster”
Environmental Monitoring Micro-instrument
A medical device that can be implanted into a tumor to
monitor how it responds to treatment. (Boston)
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nano-fighter jet (F-35B) with a wing
span of about 15 micrometer
micro-car (Formula 1)
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MEMS
in
Daily
Life
The average person uses MEMS every day.
10. MEHRAN UNIVERSITY
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MEMS in Daily
Life
The average person uses MEMS every day.
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MEMS History
1948 Invention of the Germanium transistor at Bell Labs (William Shockley)
A TRANSISTOR is a semiconductor device used to amplify or switch
electronic signals and electrical power. It is composed of
semiconductor material usually with at least three terminals for
connection to an external circuit.
1954 Piezoresistive effect in Germanium and Silicon (C.S. Smith). The
PIEZORESISTIVE EFFECT is a change in the electrical resistivity
of a semiconductor or metal when mechanical strain is applied. In
contrast to the piezoelectric effect, the piezoresistive effect causes a
change only in electrical resistance, not in electric potential.
1958 First integrated circuit (IC) (J.S.Kilby 1958 / Robert Noyce 1959). IC is
a set of electronic circuits on one small flat piece of material.
1959 First silicon pressure sensor demonstrated (Kulite). SILICON
PRESSURE SENSORS have silicon based sensing diaphragms which
have a very high elasticity and semiconductor strain gauges implanted
in the silicon substrate which produce a high span sensitivity.
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MEMS History
1967 Anisotropic deep silicon etching (H.A. Waggener et al.). This process
used to create deep penetration, steep-sided holes and trenches in
wafers/substrates.
1968 Resonant Gate Transistor Patented (Surface Micromachining Process)
(H.Nathanson)
1970 Bulk etched silicon wafers used as pressure sensors (Bulk
Micromachining Process)
1971 The microprocessor is invented
1979 HP micromachined ink - jet nozzle
1982 "Silicon as a Structural Material," K. Petersen
1982 LIGA process (KfK, Germany)
1982 Disposable blood pressure transducer (Honeywell)
1983 Integrated pressure sensor (Honeywell)
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MEMS History
1985 The "Buckyball" is discovered. A buckyball is a molecule called
Buckminsterfullerene. Composed of 60 carbon atoms formed in the
shape of a hollow ball
1986 The atomic force microscope is invented.
1986 Silicon wafer bonding (M. Shimbo)
1988 Batch fabricated pressure sensors via wafer bonding (Nova Sensor)
1988 Rotary electrostatic side drive motors (Fan, Tai, Muller)
1991 Polysilicon hinge (Pister, Judy, Burgett, Fearing)
1991 The carbon nanotube is discovered
1992 Grating light modulator (Solgaard, Sandejas, Bloom)
1992 Bulk micromachining (SCREAM process, Cornell)
1993 Digital mirror display (Texas Instruments)
1993 MCNC creates MUMPS foundry service
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MEMS History
1993 First surface micromachined accelerometer in high volume production
(Analog Devices)
1994 Bosch process for Deep Reactive Ion Etching is patented
1996 Richard Smalley develops a technique for producing carbon nanotubes
of uniform diameter
1999 Optical network switch (Lucent)
2000s Optical MEMS boom
2000s BioMEMS proliferate
2000s The number of MEMS devices and applications continually increases
2000s onwards
NEMS applications and technology grows
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MEMS History
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MEMS Evaluation
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MEMS Key Components
Transducer:
It convert one form of energy into an other form of energy.
Sensor:
It sense or detect the level of energy.
Actuator:
An actuator is a device or set of mechanism that actuate or
respond mechanically by converting electrical
signals or processed data.
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MEMS Components
• It typically comprises components from one or
more of three classes:
1. Micro-sensors to detect changes in the system’s
environment, these are input devices.
2. An intelligent component that makes decisions based
on changes detected by the sensors, and
3. Micro-actuators by which the system changes its
environment, these are output devices.
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MEMS
MEMS Devices and Structures
– transducers
• micro-sensors and micro-actuators
– mechanically functional microstructures
• micro-fluidics: valves, pumps, flow channels
• micro-engines: gears, turbines, combustion engines
Integrated Micros-ystems
– integrated circuitry and transducers combined to perform a task
autonomously or with the aid of a host computer autonomously or with the aid
of a host computer.
– MEMS components provide interface to non-electrical world
• sensors provide inputs from non-electronic events
• actuators provide outputs to non-electronic events
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MEMS Advantages
• Suitable for high-volume and low-cost production
• Reduced size
• Light weight
• Low power consumption
• High functionality
• Improved reliability
• Novel solutions and new applications
• Low cost
• Minimize Materials
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MEMS Disadvantages
• It requires huge investment.
• Micro-components are costly as compared to
Macro-components.
• Design includes very much complex procedures or
Complex fabrication procedures
• Test masses (and thus inertial forces) tend to be
small.
• They cannot be loaded with large forces.
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EVOLUTION OF MEMS
• We have clear image that what is MEMS systems and MEMS
Technology.
• The next ambitious goal is to fabricate monolithic/huge/integrated chips
that can not only sense (with microsensors) but also actuate (with micro-
actuators), that is, to create a microsystem that encompasses the
information-processing art.
• The technology employed to make such a microsystem is commonly
referred to as MST (Micro-System-Technology) or (MEMS-Technology).
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EVOLUTION OF MEMS
• This figure provides an overview of MST together with some of the
application areas.
Overview of
microsystems
technology
and the
elements of a
MEMS chip
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EVOLUTION OF
MEMS
• Some of the many fundamental
techniques required to make
MEMS devices.
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EVOLUTION OF MEMS
• Work to achieve the goal of MST, started in the late 1980s, and there has
been enormous effort to fabricate micro-electro-mechanical systems
(MEMS) using MST.
• The reason for the relatively slow emergence of a complete MEMS has
been the complexity of the manufacturing process.
• Figure details some new materials for MEMS and the various micro-
technologies that need to be developed.
• For best MEMS, some of the new materials for MEMS should be
introduced and their fundamental properties should be compatible with
manufacturing processes.
• One attractive solution to the development of MEMS is to make all the
techniques compatible with silicon processing. In other words,
conventional complementary metal oxide semiconductor (CMOS)
processing is combined with a pre-CMOS or post-CMOS MST.
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EVOLUTION OF MEMS
• The major growth areas were identified as microfluidics, photonics and
communications.
• There have been some exciting developments in methods to fabricate
true three-dimensional structures on the micron scale.
• There are different techniques can be used to make a variety of three-
dimensional microparts, such as micro-springs, micro-gears,
microturbines, and so on.
27. MEHRAN UNIVERSITY
OF ENGINEERING & TECHNOLOGY, JAMSHORO
MASTERS IN MANUFACTURING
MEHRAN UNIVERSITY
OF ENGINEERING & TECHNOLOGY, JAMSHORO
MASTERS IN MANUFACTURING
EVOLUTION OF MEMS
• There are two major challenges facing us today:
• FIRST, to develop methods that will manufacture microparts in high
volume at low cost and,
• SECOND, to develop micro-assembly techniques.
• To meet these challenges, certain industries have moved away from the
use of silicon to the use of glasses and plastics, and it can be seen that
the emergence of chips in biotechnology that include microfluidic
systems which can truly be regarded as MEMS devices.
28. MEHRAN UNIVERSITY
OF ENGINEERING & TECHNOLOGY, JAMSHORO
MASTERS IN MANUFACTURING
MEHRAN UNIVERSITY
OF ENGINEERING & TECHNOLOGY, JAMSHORO
MASTERS IN MANUFACTURING
EMERGENCE OF
MICROMACHINES• Natural evolution will then lead to MEMS devices that move around by
themselves.
• Such chips are commonly referred to as micro-machines and the
concepts of micro-planes, micro-robots, micro-cars, and micro-
submarines.
• Micromachines, if developed, will need sophisticated microsensors so
that they can determine their location and orientation in space and
proximity to other objects.
• They should also be able to communicate with a remote operator and
hence will require a wireless communication link - especially if they are
asked to enter the human body.
• Wireless communication has already been realised in certain acoustic
microsensors, and MEMS devices.
29. MEHRAN UNIVERSITY
OF ENGINEERING & TECHNOLOGY, JAMSHORO
MASTERS IN MANUFACTURING
MEHRAN UNIVERSITY
OF ENGINEERING & TECHNOLOGY, JAMSHORO
MASTERS IN MANUFACTURING
EMERGENCE OF
MICROMACHINES• Associated with this development, there is a further major problem to
solve, namely, miniaturization of a suitable power source.
• Moving a micromachine through space requires significant energy.
• If it is to then do something useful, such as removing a blood clot in an
artery, even more power will be required.
• Consequently, the future of MEMS devices may ultimately be limited by
the communication link and the size of its 'battery pack!'
• The road to practicable micromachines appears to be long and hard but
the first steps toward microsensors and MEMS devices have been taken.
30. MEHRAN UNIVERSITY
OF ENGINEERING & TECHNOLOGY, JAMSHORO
MASTERS IN MANUFACTURING
MEHRAN UNIVERSITY
OF ENGINEERING & TECHNOLOGY, JAMSHORO
MASTERS IN MANUFACTURING
EMERGENCE OF
MICROMACHINES• Dimensions of microsensors, MEMS,
and micromachines; they are
compared with some everyday
objects.
• The horizontal axis has a logarithmic
scale.
31. MEHRAN UNIVERSITY
OF ENGINEERING & TECHNOLOGY, JAMSHORO
MASTERS IN MANUFACTURING
MEHRAN UNIVERSITY
OF ENGINEERING & TECHNOLOGY, JAMSHORO
MASTERS IN MANUFACTURING
Essay Questions
• What are basic three challenges for MEMS fabrication?
• Give overview of MST with neat diagram?
• Enlist fundamental techniques required to make MEMS devices?
• Differentiate MEMS Systems and MEMS Technology?
32. MEHRAN UNIVERSITY
OF ENGINEERING & TECHNOLOGY, JAMSHORO
MASTERS IN MANUFACTURING
MEHRAN UNIVERSITY
OF ENGINEERING & TECHNOLOGY, JAMSHORO
MASTERS IN MANUFACTURING
SHORT QUESTIONS
• What are MEMS?
• Why MEMS technology is growing fast?
• How MEMS affect on our daily life?
• What is difference between Transducer and Sensors?
• What materials are used for MEMS?
• What is Difference between IC and MEMS?
33. MEHRAN UNIVERSITY
OF ENGINEERING & TECHNOLOGY, JAMSHORO
MASTERS IN MANUFACTURING
MEHRAN UNIVERSITY
OF ENGINEERING & TECHNOLOGY, JAMSHORO
MASTERS IN MANUFACTURING
ESSAY TYPE QUESTIONS
• Explain advantages and disadvantages of MEMS in
detail?
• Define MEMS key components in detail?
• How do you explain MEMS History & Evolution?
• Explain MEMS future?