- MEMS (Micro-Electro-Mechanical Systems) technology involves creating small structures on the micrometer scale using integrated circuit fabrication techniques. It combines electrical and mechanical components to create integrated electro-mechanical systems. - There are three basic building blocks in MEMS technology: deposition, lithography, and etching. These allow for thin films to be deposited and patterned on substrates. - MEMS have a wide range of applications including sensors, biomedical devices, optical and fluidic systems. They promise benefits for industries like healthcare, wireless technologies, and more. However, designing and manufacturing MEMS can also involve high costs and complex procedures.

1. Micro-Electro-Mechanical Systems -The Future Technology, but Today’s choice Presented by… Vinayak Hegde Guide: Mrs. Priti Mishra

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