Microelectromechanical Systems (MEMS) are miniature devices comprising of integrated mechanical (levers, springs, deformable membranes, vibrating structures, etc.) and electrical (resistors, capacitors, inductors, etc.) components designed to work in concert to sense and report on the physical properties of their immediate or local environment, or, when signaled to do so, to perform some kind of controlled physical interaction or actuation with their immediate or local environment
Introduction to Micro Sensors and Transducers. Application of MEMS in industries and their basic architecture. MEMS accelerometer and gyroscope explored a bit i.e. their structures and their applications.
Piezoresistive pressure sensors are one of the very-first products of MEMS technology. Those products are widely used in biomedical applications, automotive industry and household appliances.
The sensing material in a piezoresistive pressure sensor is a diaphragm formed on a silicon substrate, which bends with applied pressure. A deformation occurs in the crystal lattice of the diaphragm because of that bending. This deformation causes a change in the band structure of the piezoresistors that are placed on the diaphragm, leading to a change in the resistivity of the material. This change can be an increase or a decrease according to the orientation of the resistors.
MEMS is a technique of combining electrical and mechanical components together on a chip. It produces a system of miniature dimensions i.e the system having thickness less than the thickness of human hair. The components are integrated on a single chip using micro fabrication technology which allows the microsystem to both sense & control the environment.
MEMS = Micro Electro Mechanical System
Any engineering system that performs electrical (switching ,deciding) and mechanical functions (sensing,moving,heating) with components in micrometers is a MEMS.
Introduction to Micro Sensors and Transducers. Application of MEMS in industries and their basic architecture. MEMS accelerometer and gyroscope explored a bit i.e. their structures and their applications.
Piezoresistive pressure sensors are one of the very-first products of MEMS technology. Those products are widely used in biomedical applications, automotive industry and household appliances.
The sensing material in a piezoresistive pressure sensor is a diaphragm formed on a silicon substrate, which bends with applied pressure. A deformation occurs in the crystal lattice of the diaphragm because of that bending. This deformation causes a change in the band structure of the piezoresistors that are placed on the diaphragm, leading to a change in the resistivity of the material. This change can be an increase or a decrease according to the orientation of the resistors.
MEMS is a technique of combining electrical and mechanical components together on a chip. It produces a system of miniature dimensions i.e the system having thickness less than the thickness of human hair. The components are integrated on a single chip using micro fabrication technology which allows the microsystem to both sense & control the environment.
MEMS = Micro Electro Mechanical System
Any engineering system that performs electrical (switching ,deciding) and mechanical functions (sensing,moving,heating) with components in micrometers is a MEMS.
It was a review project that is typically more focused on mechanical parts and microfabrication technologies made suitable for biological applications.
The interdisciplinary nature of bio-MEMS combines material sciences, clinical sciences, medicine, surgery, electrical engineering, mechanical engineering, optical engineering, chemical engineering and biomedical engineering.
Some of its major applications include genomics, proteomics, molecular diagnostics, point-of-care diagnostics, tissue engineering and implantable microdevices. MEMS techniques were originally developed in the microelectronics industry.
MEMS are a class of miniature devices and systems fabricated by micromachining processes. MEMS devices have critical dimensions in the range of 100nm to 1000um (or 1mm).
MEMS technology is a precursor to the relatively more popular field of Nanotechnology, which refers to science, engineering and technology below 100nm down to the atomic scale.
Occasionally, MEMS devices with dimensions in the millimetre-range are referred to as meso-scale MEMS devices. as drug delivery systems improve, the components of the systems continue to decrease in size.
Currently, most drug delivery systems are based upon devices and drug carrier elements that are on a micro-scale. Many of the future and developing technologies are based on the nano-scale.
Accelerometer introduction, working, types, advantages and diadvantages are well explained for all the types of accelerometer focusing on automobile applications
These slides will give you a brief discussion on history, working and applications of Piezoelectric sensors and transducers.
The slides have been made by me and other 3 members during 2nd yr of college.
This Presentation provides some basics of Sensors Technology.........
It gives few ideas to learn about sensors which are as normally used as electrical & electronics applications.......
MEMS technology consist of micro electronic elements actuators, sensors and mechanical structures built onto a substrate which is usually “Silicon”. They are developed using microfabrication techniques : deposition, patterning, etching.
The most common forms of MEMS production are :
Bulk micromachine, surface micromachine etc.
The benefits of this small scale integrated device brings the technology of nanometers to a vast no. of devices.
Micro-Electro-Mechanical Systems, or MEMS, is a technology that in its most general form can be defined as miniaturized mechanical and electro-mechanical elements that are made using the techniques of micro fabrication. The critical physical dimensions of MEMS devices can vary from well below one micron on the lower end of the dimensional spectrum, all the way to several millimeters.
In this slide there is all about the digital transducer and its types.Its is very helpful in making short notes of transducer. There is a simple description.
It was a review project that is typically more focused on mechanical parts and microfabrication technologies made suitable for biological applications.
The interdisciplinary nature of bio-MEMS combines material sciences, clinical sciences, medicine, surgery, electrical engineering, mechanical engineering, optical engineering, chemical engineering and biomedical engineering.
Some of its major applications include genomics, proteomics, molecular diagnostics, point-of-care diagnostics, tissue engineering and implantable microdevices. MEMS techniques were originally developed in the microelectronics industry.
MEMS are a class of miniature devices and systems fabricated by micromachining processes. MEMS devices have critical dimensions in the range of 100nm to 1000um (or 1mm).
MEMS technology is a precursor to the relatively more popular field of Nanotechnology, which refers to science, engineering and technology below 100nm down to the atomic scale.
Occasionally, MEMS devices with dimensions in the millimetre-range are referred to as meso-scale MEMS devices. as drug delivery systems improve, the components of the systems continue to decrease in size.
Currently, most drug delivery systems are based upon devices and drug carrier elements that are on a micro-scale. Many of the future and developing technologies are based on the nano-scale.
Accelerometer introduction, working, types, advantages and diadvantages are well explained for all the types of accelerometer focusing on automobile applications
These slides will give you a brief discussion on history, working and applications of Piezoelectric sensors and transducers.
The slides have been made by me and other 3 members during 2nd yr of college.
This Presentation provides some basics of Sensors Technology.........
It gives few ideas to learn about sensors which are as normally used as electrical & electronics applications.......
MEMS technology consist of micro electronic elements actuators, sensors and mechanical structures built onto a substrate which is usually “Silicon”. They are developed using microfabrication techniques : deposition, patterning, etching.
The most common forms of MEMS production are :
Bulk micromachine, surface micromachine etc.
The benefits of this small scale integrated device brings the technology of nanometers to a vast no. of devices.
Micro-Electro-Mechanical Systems, or MEMS, is a technology that in its most general form can be defined as miniaturized mechanical and electro-mechanical elements that are made using the techniques of micro fabrication. The critical physical dimensions of MEMS devices can vary from well below one micron on the lower end of the dimensional spectrum, all the way to several millimeters.
In this slide there is all about the digital transducer and its types.Its is very helpful in making short notes of transducer. There is a simple description.
This presentation outlines some of the most exciting medical MEMS and sensors devices that were introduced to the marketplace in the past few years. Some of the devices are already in volume production, and some are still being commercialized.
Gas Sensor Technology and Market - 2016 Report by Yole DeveloppementYole Developpement
Gas sensors on the verge of massive market adoption
Air quality is becoming a major concern, and therefore gas sensors are increasingly attracting interest. Gas sensing technologies are not new. Gas sensors embedded in gas detectors for defense and industrial safety applications form a highly regulated and mature market. But the growing awareness of the air quality challenge humankind faces is creating new applications and opportunities. These include gas sensors in consumer products like home devices, wearables and smartphones, or for buildings and cars, including indoor/in-cabin air quality monitoring.
Yole Développement’s Gas Sensor report estimates that the gas sensor market is currently growing, driven by Heating, Ventilation Air Conditioning (HVAC) and future consumer applications. It was worth $560M in 2014 and will reach almost $920M in 2021, at 7.3% CAGR. An upside market of almost $65M in 2021 is possible if gas sensors are widely adopted in consumers products.
There are numerous market drivers that will contribute to the growth:
• Driven by better energy management, the building market will experience 13.6% CAGR for a total market estimated at $237M in 2021.
• The medical industry is looking for very high sensitivity for asthma attack sensors or oxygen sensors for breath control.
• Consumer applications such as wearables and smartphones are driving the development of new gas sensors to reduce cost, power consumption and size with MEMS technologies.
• Driven by the desire for better outdoor air quality control, the environmental market will grow at almost 19% CAGR.
• The transport market is driven by oxygen sensors and future depollution applications.
The consumer market is very attractive as it can drive very large volumes depending on user case adoption, cost and technical maturity. The smartphone industry has revolutionized the sensor industry as mobile applications today aggregate ever more sensors. Gas sensors could be the next to be integrated in smart phones and/or wearables. As we believe that user cases are crucial for wide adoption of gas sensors in consumer products, we have built a list of potential applications and benchmarked them.
To deal with various technologies which provide smart sensing in healthcare and compare them for their energy usage and battery life and discuss the format of communication to the database of these devices. To put forward devices which use smart sensors in advanced medical check-ups. To discuss the prospects of upcoming technology called Smart Dust in e-health and its advantages and effects for better deployment of trustworthy services in healthcare keeping in mind all the capabilities of the Smart Sensor.
A sensor (also called detector) is a converter that measures a physical quantity and converts it into a signal which can be read by an observer or by an (today mostly electronic instrument.
MEMS or Micro-Electro Mechanical System is a technique of combining Electrical and Mechanical components together on a chip, to produce a system of miniature dimensions. MEMS is the integration of a number of micro-components on a single chip which allows the microsystem to both sense and control the environment.
Welcome to International Journal of Engineering Research and Development (IJERD)IJERD Editor
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journal publishing, how to publish research paper, Call For research paper, international journal, publishing a paper, IJERD, journal of science and technology, how to get a research paper published, publishing a paper, publishing of journal, publishing of research paper, reserach and review articles, IJERD Journal, How to publish your research paper, publish research paper, open access engineering journal, Engineering journal, Mathemetics journal, Physics journal, Chemistry journal, Computer Engineering, Computer Science journal, how to submit your paper, peer reviw journal, indexed journal, reserach and review articles, engineering journal, www.ijerd.com, research journals,
yahoo journals, bing journals, International Journal of Engineering Research and Development, google journals, hard copy of journal
This article discusses MEMS, i.e. Micro-Electro Mechanical Systems.
It gives a rudimentry idea of MEMS technology, its block diagram, applications, advantages and disadvantages. It also gives a brief idea on the working principle of MEMS devices.
This is research work carried out by Dr. Preeta sharan and her student Kavya Ullal. It was live streaming international conference. The organizer appreciated her work at the end of the show.
Capacitive micro-machined ultrasonic transducer (CMUT) is a transducer where the energy transduction is due to modify in capacitance. This paper
anticipated an oscillator based ultrasonic sensors can be mainly used to intravascular applications and other medical field applications such as liver,
stomach, liver, heart, tendons, muscles, and joints. The readout circuits are validated with a capacitive micro machined ultrasonic transducer and a
current-to-frequency chip. The CMOS CMUTs are integrated with a current amplifier circuit on the same chip and current-to-frequency chip that
provides the current-to frequency readout interface. Ultrasound waves does not use any ionizing radiation, has no known harmful effects, and
presents an clear images of soft tissues that don’t show up well on x-ray images, thus there is no radiation exposure to the patient. The ultrasound is
usually between 2 and 18MHz and also higher frequencies present better and clear quality images. The ultrasound images are captured in real-time;
they can show the structure and movement of the body's internal organs, as well as blood flowing through blood vessels. These devices work on a
principle related to that of transducers used in radar and sonar systems. Also, the instance-based output signal can be further digitized with a time-to
digital converter. Both chips are fabricated in an 180nm CMOS MEMS process technology. The CMUTs are designed with 1MHz to 4MHz cells for
intravascular diagnosis applications.
Immunizing Image Classifiers Against Localized Adversary Attacksgerogepatton
This paper addresses the vulnerability of deep learning models, particularly convolutional neural networks
(CNN)s, to adversarial attacks and presents a proactive training technique designed to counter them. We
introduce a novel volumization algorithm, which transforms 2D images into 3D volumetric representations.
When combined with 3D convolution and deep curriculum learning optimization (CLO), itsignificantly improves
the immunity of models against localized universal attacks by up to 40%. We evaluate our proposed approach
using contemporary CNN architectures and the modified Canadian Institute for Advanced Research (CIFAR-10
and CIFAR-100) and ImageNet Large Scale Visual Recognition Challenge (ILSVRC12) datasets, showcasing
accuracy improvements over previous techniques. The results indicate that the combination of the volumetric
input and curriculum learning holds significant promise for mitigating adversarial attacks without necessitating
adversary training.
Quality defects in TMT Bars, Possible causes and Potential Solutions.PrashantGoswami42
Maintaining high-quality standards in the production of TMT bars is crucial for ensuring structural integrity in construction. Addressing common defects through careful monitoring, standardized processes, and advanced technology can significantly improve the quality of TMT bars. Continuous training and adherence to quality control measures will also play a pivotal role in minimizing these defects.
Water scarcity is the lack of fresh water resources to meet the standard water demand. There are two type of water scarcity. One is physical. The other is economic water scarcity.
Event Management System Vb Net Project Report.pdfKamal Acharya
In present era, the scopes of information technology growing with a very fast .We do not see any are untouched from this industry. The scope of information technology has become wider includes: Business and industry. Household Business, Communication, Education, Entertainment, Science, Medicine, Engineering, Distance Learning, Weather Forecasting. Carrier Searching and so on.
My project named “Event Management System” is software that store and maintained all events coordinated in college. It also helpful to print related reports. My project will help to record the events coordinated by faculties with their Name, Event subject, date & details in an efficient & effective ways.
In my system we have to make a system by which a user can record all events coordinated by a particular faculty. In our proposed system some more featured are added which differs it from the existing system such as security.
Welcome to WIPAC Monthly the magazine brought to you by the LinkedIn Group Water Industry Process Automation & Control.
In this month's edition, along with this month's industry news to celebrate the 13 years since the group was created we have articles including
A case study of the used of Advanced Process Control at the Wastewater Treatment works at Lleida in Spain
A look back on an article on smart wastewater networks in order to see how the industry has measured up in the interim around the adoption of Digital Transformation in the Water Industry.
Automobile Management System Project Report.pdfKamal Acharya
The proposed project is developed to manage the automobile in the automobile dealer company. The main module in this project is login, automobile management, customer management, sales, complaints and reports. The first module is the login. The automobile showroom owner should login to the project for usage. The username and password are verified and if it is correct, next form opens. If the username and password are not correct, it shows the error message.
When a customer search for a automobile, if the automobile is available, they will be taken to a page that shows the details of the automobile including automobile name, automobile ID, quantity, price etc. “Automobile Management System” is useful for maintaining automobiles, customers effectively and hence helps for establishing good relation between customer and automobile organization. It contains various customized modules for effectively maintaining automobiles and stock information accurately and safely.
When the automobile is sold to the customer, stock will be reduced automatically. When a new purchase is made, stock will be increased automatically. While selecting automobiles for sale, the proposed software will automatically check for total number of available stock of that particular item, if the total stock of that particular item is less than 5, software will notify the user to purchase the particular item.
Also when the user tries to sale items which are not in stock, the system will prompt the user that the stock is not enough. Customers of this system can search for a automobile; can purchase a automobile easily by selecting fast. On the other hand the stock of automobiles can be maintained perfectly by the automobile shop manager overcoming the drawbacks of existing system.
Vaccine management system project report documentation..pdfKamal Acharya
The Division of Vaccine and Immunization is facing increasing difficulty monitoring vaccines and other commodities distribution once they have been distributed from the national stores. With the introduction of new vaccines, more challenges have been anticipated with this additions posing serious threat to the already over strained vaccine supply chain system in Kenya.
3. What is MEMS?
MEMS or Micro-Electro Mechanical System is a
technique of combining Electrical and
Mechanical components together on a chip, to
produce a system of miniature dimensions.
MEMS is the integration of a number of micro-
components on a single chip which allows the
microsystem to both sense and control the
environment.
The components are integrated on a single chip
using micro fabrication technologies.
4. What is a Sensor?
A device used to measure a physical
quantity(such as temperature) and convert it
into an electronic signal of some kind(e.g. a
voltage), without modifying the environment.
What can be sensed?
Almost Everything!!!
Commonly sensed parameters are:
Pressure
Temperature
Flow rate
Radiation
Chemicals
N
S
EW
2 Axis Magnetic
Sensor
2 Axis
Accelerometer
Light Intensity
Sensor
Humidity Sensor
Pressure Sensor
Temperature Sensor
5. But why MEMS for sensors?
Smaller in size
Have lower power consumption
More sensitive to input variations
Cheaper due to mass production
Less invasive than larger devices
10. MEMS-based accelerometer with capacitors is typically a structure that uses
two capacitors formed by a moveable plate held between two fixed plates.
Under zero net force the two capacitors are equal but a change in force will
cause the moveable plate to shift closer to one of the fixed plates, increasing
the capacitance, and further away from the other fixed reducing that
capacitance.
This difference in capacitance is detected and amplified to produce a voltage
proportional to the acceleration
11.
12. Pressure Sensors
Pressure sensors are required in all walks of life, irrespective of civilian,
defence, aerospace, biomedical, automobile, Oceanography or domestic
applications.
Among the various devices, pressure sensors using MEMS technology have
received great attention because the pressure sensors find applications in
everyday life involving sensing, monitoring and controlling pressure.
Pressure sensors are categorized as
a) Absolute Pressure Sensors
b) Gauge Pressure sensors
c) Differential Pressure Sensors
13. a) Absolute Pressure Sensors
Measure the pressure relative to a reference vacuum
encapsulated within the sensor Such devices are used for
atmospheric pressure measurement and as manifold
absolute pressure (MAP) sensors for automobile ignition
and airflow control systems.
Pressure sensors used for cabin pressure control, launch
vehicles, and satellites also belong to this category.
15. b) Gauge Pressure sensors
Measure pressure relative to atmospheric pressure. One
side of the diaphragm is vented to atmospheric pressure.
Blood pressure (BP), intra-cranial pressure (ICP), gas
cylinder pressure and most of ground-based pressure
measurements are gauge pressure sensors.
17. c) Differential Pressure Sensors
Measure accurately the difference ΔP between two
pressures P1 and P2 across the diaphragm (with ΔP << P1
or P2 ), and hence need two pressure ports.
They find applications in airplanes used in warfare. They
are also used in high pressure oxidation systems.
19. In almost all types of pressure sensors, the basic sensing element is the
diaphragm, which deflects in response to the pressure.
As the deflections in diaphragm-based sensors are small they cannot be
directly measured. This mechanical deflection or the resulting strain in the
diaphragm is converted ultimately into electrical signals using suitable
transduction mechanisms, namely,
1) Capacitive
2) Piezoresistive or piezo-electric
20. Capacitive Pressure Sensor
This approach uses the diaphragm as one electrode of a parallel
plate capacitor structure and diaphragm displacement causes a
change in capacitance with respect to a fixed electrode.
The merits of capacitive pressure sensors are their high sensitivity,
which is practically invariant with temperature.
An electronic circuit is used to convert the capacitance change into
an electrical output.
22. Microphone
Microphone is transducer that converts acoustic energy into electrical energy. The
microphones are widely used in voice communications devices, hearing aids,
surveillance and military aims, ultrasonic and acoustic distinction under water, noise
and vibration control.
23. Basically the microphone MEMS sensor is a variable capacitor where the
transduction principle is the coupled capacitance change between a fixed plate
(back plate) and a movable plate (membrane) caused by the incoming wave of
the sound.
24. Gyroscopes
A gyroscope is a device for measuring or maintaining the
orientation, based on the principles of the conservation of
momentum.
It uses vibrating mechanical element to sense the rotation.
Transfer of energy between two vibrating resonator is by
coriolis acceleration.
26. The rotation of tines causes the Coriolis Force.
Forces detected through either electrostatic, electromagnetic or piezoelectric.
Displacements are measured in the Comb drive.
27. Applications of Gyroscope
Yaw rate sensor for skid control in antilock braking applications for
automobiles.
Inertial navigation systems.
Smart cruise control.
Guiding gun launched munitions.
Detection of roll over detections.
28. Applications in Medical Science
Biocavity Laser : This device
distinguishes cancerous from non
cancerous cells thus aiding the surgeons
in operations.
Smart Pill :
Implanted in the body
Automatic drug delivery (on
demand)
Sight for the blind : MEMS based array
that may be inserted in the retina of a
blind person to provide partial sight
29. Applications in Marine Science
Sensing in marine environment maybe done for
various reasons:
Oil exploration and related applications
Global weather predictions
Monitor water quality for any contamination
Measure parameters detrimental to the “health” of
structures in the sea ( like oil rigs and ships )
Study of aquatic plants and animals
In military operations
30. Applications in Marine Military Operations
An array of MEMS sensors spread on the ocean floor
could detect the presence of enemy submarines.
MEMS sensors (pressure sensors, accelerometers etc.)
are being used in anti-torpedo weapons on submarines
and ships.
MEMS sensors in torpedoes are responsible for
Detonating the torpedo at the right time
Hitting the target in a crowded environment
Prevent any premature explosion
31. References
X. Wang, J. Engel, C. Liu, J. Micromech. Microeng. 2003, 13, 628.
Christian A. Zorman, Mehran Mehregany, MEMS Design and Fabrication, 2nd Ed. 2,16.
Ms. Santoshi Gupta, MEMS and Nanotechnology IJSER, Vol 3, Issue 5,2012
Stephen Beeby, MEMS Mechanical Sensor, PP. 7
Lenz, J., Edelstein, A.S., "Magnetic sensors and their applications." IEEE Sensors J. 2006, 6, 631-
649.
Sinclair M J 2000 A high force low area MEMS thermal actuator Proc. 7th Intersociety Conf. on
Thermal and Thermomechanical Phenomena (Las Vegas, NV) pp 127–32
R. Ghodssi, P. Lin (2011). MEMS Materials and Processes Handbook. Berlin: Springer.
Chang, Floy I. (1995).Gas-phase silicon micromachining with xenon difluoride. 2641. pp. 117.
Editor's Notes
The MEMS devices, in marine sensing maybe attached to:
Ships
Floating devices (buoys) in the sea
Fixed sea structures (like oil rigs)
Sea bed using links
AUVs(Autonomous Underwater Vehicle)