These slides contains basic information about ELECTRO-MECHANICAL sensors as future trends.As our future technology is depend upon the automotive components and inventions the low space occupier MEMS based devices are reliable and convenient.Hope you like it and it is useful in your study and knowledge.

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The
Technology
for
Everything!
presented by-Godwin Lobo
Micro Electro Mechanical System
[MEMS]

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Outlines
 Introduction
 History
 Components
 Fabrication Of MEMS
 Typical Applications
 Advantages Of MEMS
 Relationship To Other Topics
 Automotive MEMS Summery

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Introduction
Microelectromechanical systems
(MEMS) are micron-size devices
that can sense or manipulate the
physical world.
MEMS are made up of
components between 10 to 100
micrometers in size (i.e. 0.01 to
0.1 mm) and MEMS devices
generally range in size from a 20
micrometers (20 millionth of a
meter) to a millimeter
(thousandth of a meter).
Miniaturized System

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History....
 Transister invention: 1947
 IC Invention:1958
 Micromachining :1982
 Turning Point Of Machine
World :1987-1988
 First MEMS :1990s

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Components
 MEMS can include two or
more
 of the following
subsystems: sensors,
actuators, a power supply,
a central processing unit
(CPU)
 Also microprocessor,
and/or a communication
interface.

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Fabrication Of MEMS
Bulk
Micromachining :
Bulk micromachining is
the oldest paradigm of
silicon based MEMS.
The whole thickness of a
substrate is used for
building the micro-
mechanical structures.
Bulk micromachining has
been essential in enabling
high performance sensors.
Can be formed by wet
and dry etching of Si
substrate.

7. LIGA :
 LIGA, a German acronym for
(X-ray) lithography
(Lithographie), Electroplating
(Galvanoformung), and
Molding (Abformung), is a
process in microtechnology.
 LIGA is a relatively
inexpensive fabrication
technology.
 LIGA is a technology which
creates small, but relatively
high aspect ratio devices
using x-ray lithography
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Typical Applications
 Accelerometer
 Magnetometer
 Microphone
 Bridge To
Nanotechnology

9. Advantage Of MEMS
 Improved Performance
 Reduced Manufacturing Cost & Time
 Ruggedness
 Low Power Consumption
 Easily Maintained & Replaced

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MEMS Current
Challenges Young Industry-
MEMS Industry in many
aspects is still young
industry.
 More Devolopment-
Long Development cycle.
 Training-
MEMS engineers are need
to be trained.

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Automotive MEMS
Summery

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THANK YOU !!!