A hybrid MEMS sensor is described that uses inductive telemetry for contactless, high-temperature measurements in harsh environments. The passive sensor uses a bent beam structure connected to interdigitated combs to change capacitance with temperature. It communicates wirelessly with a readout unit through coupled inductors. Testing showed the sensor's capacitance and the measured temperatures agreed well with a reference sensor up to 350 degrees C, demonstrating its effectiveness for remote, high-temperature industrial monitoring.