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[object Object],[object Object],[object Object]
[object Object],[object Object]
[object Object],[object Object],[object Object]
[object Object]
[object Object],[object Object],[object Object],[object Object],[object Object]
Components of  MEMS
Image of the hybrid telemetric MEMS.
[object Object],[object Object],[object Object],[object Object]
Microscope image  of  interdigitated capacitor
[object Object],[object Object],[object Object],[object Object]
Bent Beam structure .
[object Object],[object Object],[object Object],(left) at 298 K and (right) at 500 K .
Equivalent model of the interdigitated capacitor and an impedance diagram measured at 270  ◦C [(a) modulus and (b) phase].
Impedance module of the interdigitated capacitor measured at different Temperatures(100  ◦C to 330  ◦C.)
[object Object],[object Object],[object Object],[object Object],[object Object]
Microscope image of the inductor A1 realized by thick-film deposition on alumina.
Microscope image of the inductor B1 realized by photolithography
Equivalent model of the planar inductor and impedance diagrams at different temperatures.(23  ◦C to 340  ◦C)
[object Object],[object Object],[object Object],[object Object]
[object Object],[object Object],[object Object],[object Object],[object Object]
[object Object],[object Object]
BLOCK DIAGRAM OF INDUCTIVE TELEMETRY
[object Object],[object Object],[object Object],[object Object]
Modulus and phase of the impedance measured from the terminals of the readout inductor.
[object Object],[object Object],[object Object]
[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]
Modules of hybrid sensor measured using impedance analyzer at different temperatures.
Phase of hybrid sensor measured using impedance analyzer at different temperatures
[object Object],[object Object]
Capacitance sensor values directly measured and compared with the calculated ones.
Temperature values measured with the Pt100 and compared with the Min-Phase and 3-Resonances calculated values.
[object Object],[object Object],[object Object]
[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]
Passive Hybrid MEMS for High-Temperature Telemetric Measurements
Passive Hybrid MEMS for High-Temperature Telemetric Measurements

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