2. What are MEMS?
Micro(small)
Electro(electric components/functionality)
Mechanical(mechanical components/functionality)
Systems(integrated, system-like functionality)
http://eed.gsfc.nasa.gov/562/SA_MEMs.htm
http://www.memx.com/
http://www.memx.com/
http://www.forbes.com/2008/04/22/mems-apple-nintendo_leadership_clayton_in_jw_0421claytonchristensen_inl_slide.html
3. Where do you find MEMs?
Printers
*High DPI inkjets
Projectors
*Micro-Mirrors from Texas Instruments
Cell Phones
*Knowles Microphones used in most new cell phones
Automobiles
4. LIMITATIONS OF EXISTING :
Photovoltaic cells and wind power harvesting
have several technical barriers.
In solar cells, the inherent physical limits, the
black body energy conversion loss, optical loss, and
internal resistance prevent their efficiency from
reaching >20%
5. Why MEMS…?
Small
*Typically .1-100um feature size
Human Hair thickness ~ 50um
http://www.vendian.org/envelope/dir2/scaling_construct.html http://singularityhub.com/wp-content/uploads/2008/08/red-blood-cells.bmp
Red Blood Cells ~ 10um
Low cost, High yield
*Use existing IC fabrication
technology
*Made primarily on Silicon Wafers
6. Why MEMS…?
Favorable scaling for a lot of applications
*F l o w -r a t e s e n s o r s
*E l e c t r o s t a t i c s
*M a g n e t i s m
*M a n y o t h e r s
Not all applications
*S o l a r P o w e r
*T u r b u l e n t B o u n d a r y
E n e r g y H a r v e s t i n g
7. Where it Began…?
1979 - First recorded use of MEMs in automobiles
Federal emission standards required monitoring the air-to-fuel ratio of the engine
Density of air value was needed
Many different sensor technologies were introduced to solve this problem
MAP (manifold absolute pressure) and MAT (manifold air temperature) sensors
were developed using MEMS
Silicon based MEMS sensors became the device of choice due to low cost and
high yield
MAP Sensor
8. Who Developed It…?
Two groups
*Delco Electronics Group(General Motors)
*Used piezo resistive sensing
Ford
*Used capacitive sensing
10. RF-MEMS Switches
Types :-
* Capacitive shunt switch:
1.OFF state with capacitive coupling
2.Isolation dependent on capacitive ratio between
ON and OFF state
3.Longer contact lifetime
11. * Direct Contact Series Switch:
1.ON state with metal-to-metal ohmic contact
2. Insertion loss dependent on the contact
resistance
3. Broad frequency coverage
12. Mobile Communications
Fully Integrated Tunable RF
* If you put your finger on an RF MEMS antenna it can
automatically re-tune itself so that no calls are dropped.
*Furthermore, RF MEMS can react to atmospheric conditions and
re-tune your phone’s radio to improve 3G and LTE data
throughout.
* Most importantly, though, RF MEMS paves the way towards
devices with just a single antenna and transceiver.
13. Number of radios in smart
phones:
*GSM
*3G
*CDMA, W-CDMA
*Bluetooth, Wi-Fi
14. * New approach to ohmic switching.
* It can be integrated with capacitors using
wafer-level thin-film packaging.
* Multiband (800-to-2200-MHz), low-loss
(0.3-dB) chips measure just 3.5 x 4.2 x 1.1
mm.
16. Advantages :
*cost about 2 to 2.5 cents/switch throw—in SPST and SPDT
configurations
*High precision, High reliability, Linearity
*Simplicity of principle
*Compatible with conventional IC’s
*Low weight
*60% reduction in board space.
Limitations:
*Slower switching speed
*Potential lifetime limitations
*Packaging
17. CONCLUSION
MEMS technology provides
powerful tools to the RF
technology. Replace conventional
solid state circuit devices on size.
Overall MEMS field is not much
more than 10 years old, and the RF
MEMS field has really been shaped
within the past 5-6 years.