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RF MEMS
 The solution to power hungry smart phones
What are MEMS?
 Micro(small)
 Electro(electric components/functionality)
 Mechanical(mechanical components/functionality)
 Systems(integrated, system-like functionality)
http://eed.gsfc.nasa.gov/562/SA_MEMs.htm
http://www.memx.com/
http://www.memx.com/
http://www.forbes.com/2008/04/22/mems-apple-nintendo_leadership_clayton_in_jw_0421claytonchristensen_inl_slide.html
Where do you find MEMs?
Printers
*High DPI inkjets
Projectors
*Micro-Mirrors from Texas Instruments
Cell Phones
*Knowles Microphones used in most new cell phones
Automobiles
LIMITATIONS OF EXISTING :
 Photovoltaic cells and wind power harvesting
have several technical barriers.
 In solar cells, the inherent physical limits, the
black body energy conversion loss, optical loss, and
internal resistance prevent their efficiency from
reaching >20%
Why MEMS…?
Small
*Typically .1-100um feature size
Human Hair thickness ~ 50um
http://www.vendian.org/envelope/dir2/scaling_construct.html http://singularityhub.com/wp-content/uploads/2008/08/red-blood-cells.bmp
Red Blood Cells ~ 10um
Low cost, High yield
*Use existing IC fabrication
technology
*Made primarily on Silicon Wafers
Why MEMS…?
Favorable scaling for a lot of applications
*F l o w -r a t e s e n s o r s
*E l e c t r o s t a t i c s
*M a g n e t i s m
*M a n y o t h e r s
Not all applications
*S o l a r P o w e r
*T u r b u l e n t B o u n d a r y
E n e r g y H a r v e s t i n g
Where it Began…?
1979 - First recorded use of MEMs in automobiles
Federal emission standards required monitoring the air-to-fuel ratio of the engine
Density of air value was needed
Many different sensor technologies were introduced to solve this problem
MAP (manifold absolute pressure) and MAT (manifold air temperature) sensors
were developed using MEMS
Silicon based MEMS sensors became the device of choice due to low cost and
high yield
MAP Sensor
Who Developed It…?
Two groups
*Delco Electronics Group(General Motors)
*Used piezo resistive sensing
Ford
*Used capacitive sensing
Typical Applications
* Accelerometers
* Microphones
* RF-MEMS Switches
* Bridge to Nanotechnology
* Mobile Communications
RF-MEMS Switches
Types :-
* Capacitive shunt switch:
1.OFF state with capacitive coupling
2.Isolation dependent on capacitive ratio between
ON and OFF state
3.Longer contact lifetime
* Direct Contact Series Switch:
1.ON state with metal-to-metal ohmic contact
2. Insertion loss dependent on the contact
resistance
3. Broad frequency coverage
Mobile Communications
Fully Integrated Tunable RF
* If you put your finger on an RF MEMS antenna it can
automatically re-tune itself so that no calls are dropped.
*Furthermore, RF MEMS can react to atmospheric conditions and
re-tune your phone’s radio to improve 3G and LTE data
throughout.
* Most importantly, though, RF MEMS paves the way towards
devices with just a single antenna and transceiver.
Number of radios in smart
phones:
*GSM
*3G
*CDMA, W-CDMA
*Bluetooth, Wi-Fi
* New approach to ohmic switching.
* It can be integrated with capacitors using
wafer-level thin-film packaging.
* Multiband (800-to-2200-MHz), low-loss
(0.3-dB) chips measure just 3.5 x 4.2 x 1.1
mm.
STATISTICS….
Advantages :
*cost  about 2 to 2.5 cents/switch throw—in SPST and SPDT
configurations
*High precision, High reliability, Linearity
*Simplicity of principle
*Compatible with conventional IC’s
*Low weight
*60% reduction in board space.
Limitations:
*Slower switching speed
*Potential lifetime limitations
*Packaging
CONCLUSION
 MEMS technology provides
powerful tools to the RF
technology. Replace conventional
solid state circuit devices on size.
 Overall MEMS field is not much
more than 10 years old, and the RF
MEMS field has really been shaped
within the past 5-6 years.
By
Sai Chand
Surya
Thank U.........!
Any
Queries
….

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RF MEMS-The solution to power hungry smart phones

  • 1. RF MEMS  The solution to power hungry smart phones
  • 2. What are MEMS?  Micro(small)  Electro(electric components/functionality)  Mechanical(mechanical components/functionality)  Systems(integrated, system-like functionality) http://eed.gsfc.nasa.gov/562/SA_MEMs.htm http://www.memx.com/ http://www.memx.com/ http://www.forbes.com/2008/04/22/mems-apple-nintendo_leadership_clayton_in_jw_0421claytonchristensen_inl_slide.html
  • 3. Where do you find MEMs? Printers *High DPI inkjets Projectors *Micro-Mirrors from Texas Instruments Cell Phones *Knowles Microphones used in most new cell phones Automobiles
  • 4. LIMITATIONS OF EXISTING :  Photovoltaic cells and wind power harvesting have several technical barriers.  In solar cells, the inherent physical limits, the black body energy conversion loss, optical loss, and internal resistance prevent their efficiency from reaching >20%
  • 5. Why MEMS…? Small *Typically .1-100um feature size Human Hair thickness ~ 50um http://www.vendian.org/envelope/dir2/scaling_construct.html http://singularityhub.com/wp-content/uploads/2008/08/red-blood-cells.bmp Red Blood Cells ~ 10um Low cost, High yield *Use existing IC fabrication technology *Made primarily on Silicon Wafers
  • 6. Why MEMS…? Favorable scaling for a lot of applications *F l o w -r a t e s e n s o r s *E l e c t r o s t a t i c s *M a g n e t i s m *M a n y o t h e r s Not all applications *S o l a r P o w e r *T u r b u l e n t B o u n d a r y E n e r g y H a r v e s t i n g
  • 7. Where it Began…? 1979 - First recorded use of MEMs in automobiles Federal emission standards required monitoring the air-to-fuel ratio of the engine Density of air value was needed Many different sensor technologies were introduced to solve this problem MAP (manifold absolute pressure) and MAT (manifold air temperature) sensors were developed using MEMS Silicon based MEMS sensors became the device of choice due to low cost and high yield MAP Sensor
  • 8. Who Developed It…? Two groups *Delco Electronics Group(General Motors) *Used piezo resistive sensing Ford *Used capacitive sensing
  • 9. Typical Applications * Accelerometers * Microphones * RF-MEMS Switches * Bridge to Nanotechnology * Mobile Communications
  • 10. RF-MEMS Switches Types :- * Capacitive shunt switch: 1.OFF state with capacitive coupling 2.Isolation dependent on capacitive ratio between ON and OFF state 3.Longer contact lifetime
  • 11. * Direct Contact Series Switch: 1.ON state with metal-to-metal ohmic contact 2. Insertion loss dependent on the contact resistance 3. Broad frequency coverage
  • 12. Mobile Communications Fully Integrated Tunable RF * If you put your finger on an RF MEMS antenna it can automatically re-tune itself so that no calls are dropped. *Furthermore, RF MEMS can react to atmospheric conditions and re-tune your phone’s radio to improve 3G and LTE data throughout. * Most importantly, though, RF MEMS paves the way towards devices with just a single antenna and transceiver.
  • 13. Number of radios in smart phones: *GSM *3G *CDMA, W-CDMA *Bluetooth, Wi-Fi
  • 14. * New approach to ohmic switching. * It can be integrated with capacitors using wafer-level thin-film packaging. * Multiband (800-to-2200-MHz), low-loss (0.3-dB) chips measure just 3.5 x 4.2 x 1.1 mm.
  • 16. Advantages : *cost  about 2 to 2.5 cents/switch throw—in SPST and SPDT configurations *High precision, High reliability, Linearity *Simplicity of principle *Compatible with conventional IC’s *Low weight *60% reduction in board space. Limitations: *Slower switching speed *Potential lifetime limitations *Packaging
  • 17. CONCLUSION  MEMS technology provides powerful tools to the RF technology. Replace conventional solid state circuit devices on size.  Overall MEMS field is not much more than 10 years old, and the RF MEMS field has really been shaped within the past 5-6 years.