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Surround Gate MOSFET
An Intelligent Technique To
Reduce Short Channel Effect
Presenter: Koushik Guha
Dept. of Electronics & Communication
Engineering
National Institute of Technology Silchar, India
Outline
 Basic MOSFET Operation
 Historical Perspective and Motivation
 Downscaling of MOSFET
 Brief of Short Channel Effect
 Introduction of SOI Technology
 Double Gate Technology
 Multi Gate Technology and its features
 DMDG-SG ………An Innovative Technology
 2D Modeling of DMDG-SG MOSFET
 Model Validation with Simulated Results
 Conclusion
 References
The Metal Oxide Semiconductor Field-Effect Transistor
(MOSFET)
In layman terms, MOSFET
acts like a switch
A Historical Perspective
Moore’s Law
• Number of Transistors on an integrated circuit
chip doubles every 1.5 years.
Motivation
• Silicon-only planar transistors are
fast approaching their scaling
limit.
• Short channel effects limiting
scaling into sub nanometer regime.
• Oxide thickness cannot be scaled
down further, problems of
tunneling.
• Need to keep Silicon technology
as the base technology while
innovating future devices; cost is
an important factor.
• Performance and power
dissipation need to be improved.
• Smaller is faster !!
Why Scale?
Decrease the gate length
Increase speed
Increase Packing density
Decrease Costs?
MOSFET Scaling Trends
Scaling limits of BULK MOSFET
• Limit for supply voltage (<0.6V)
•
Limit for further scaling of tox (<2nm)
• Minimum channel length Lg= 50nm
• Discrete dopant fluctuations
• Dramatic short-channels effects (SCE)
How can we follow Moore’s law?
 By moving to Multiple Gate MOSFETs
MG might be the unique viable alternative
to build nano MOSFETs when Lg<50nm
Because:
- Better control of the channel from the gates
- Reduced short-channel effects
- Better Ion/Ioff
- Improved sub-threshold slope
(60mV/decade)
- No discrete dopant fluctuations
Short Channel Effect
Short Channel Effect in bulk-MOS
n+ drain
n+ source
p substrate
n+ poly gate
Gate
Vdd
n+ drain
n+ source
p substrate
n+ poly gate
Gate
Vdd
Short channel effect in bulk-CMOS devices is
a major barrier to scaling
Drain Induced Barrier Lowering
SOI – The technology of the future
Welcome to the world of Silicon On Insulator
Highlights
• Reduced junction capacitance.
• Absence of latch up.
• Ease in scaling (buried oxide need not
be scaled).
• Compatible with conventional Silicon
processing
• Sometimes requires fewer steps to
fabricate.
• Reduced leakage.
• Improvement in the soft error rate.
Drawbacks
• Drain Current Overshoot.
• Kink effect
• Thickness control (fully depleted
operation).
• Surface states.
SOI Technology
Silicon-on-Insulator (SOI) Approach
 Silicon channel layer grown on a layer
of oxide.
 Absence of junction capacitance makes
this an attractive option.
 Low leakage currents and compatible
fabrication technology.
Silicon-on-Insulator (SOI) Approach
 Silicon channel layer grown on a layer
of oxide.
 Absence of junction capacitance makes
this an attractive option.
 Low leakage currents and compatible
fabrication technology.
Classification of SOI MOSFETs
Conventional MOSFET Partially depleted SOI
MOSFET
Fully depleted SOI
MOSFET
• Silicon film thickness greater than bulk depletion width for a partially-depleted
MOSFET and less than the gate depletion width for a fully-depleted MOSFET.
• Partially depleted MOSFETs often plagued by KINK effects, fully depleted devices
virtually free from such effects.
• Partially depleted devices can be faster than fully depleted devices under certain
operating conditions.
Why Several Gates?
Advantages of Double Gate Devices
Front Gate
Back Gate
DrainSource
body
n+
source
n+
drain
Gate
(metal/poly)
Gate
(metal/poly)
Front Gate
Back Gate
DrainSource
body
n+
source
n+
drain
Gate
(metal/poly)
Gate
(metal/poly)
• Short channel effect control
– Better scalability
– Lower sub threshold
current
• Higher On Current
• Near-Ideal Sub threshold
slope
• Lower Gate Leakage
• Elimination of Vt variation
due to Random dopant
fluctuation
DG devices are very
promising for circuit
design in sub-50nm
technology
Field Lines for Single-Gate & Double-Gate SOI
MOSFETs
S D
G
S D
G
G
E-Fieldlines
Regular SOI MOSFET Double-gate MOSFET
Double gates
electrically shield
the channel
To reduce SCE’s,
aggressively
reduce Si layer
thickness
Single-Gate SOI Double-Gate
BOX BOX
Double Gate Device
n+ drain
n+ source
p substrate
n+ poly gate
Gate
Vdd
n+ drain
n+ source
p substrate
n+ poly gate
Gate
Vdd
n+
source
n+
drain
Gate
Gate
Vdd
n+
source
n+
drain
Gate
Gate
Vdd
• Single Gate to Double Gates
–Better short-channel effect control
–More Scalable
Why Multi-Gate SOI MOSFETs ?
• Higher current drive => better performance
• Prophesized to show higher tolerance to scaling.
• Better integration feasibility, raised source-drain structure, ease in integration.
• Larger number of parameters to tailor device performance
Multi-Gate SOI MOSFETs (3-D Views)
Double Gate/FinFET TriGate
QuadGateΩ-Gate
Gate All Around MOSFET- 3D View
VG
VDVS
L
DRAINSOURCE CHANNEL
VG
Gates
Gates
Oxide
W
X
Z
Y
VG
VDVS
L
DRAINSOURCE CHANNEL
VG
Gates
Gates
Oxide
W
X
Z
Y
X
Z
Y
Si TSi
SiO2
TOX
Si TSi
SiO2
TOX
Si TSi
SiO2
TOX
Si TSi
SiO2
TOX
a) b)
VG
VDVS
L
DRAINSOURCE CHANNEL
VG
Gates
Gates
Oxide
W
X
Z
Y
VG
VDVS
L
DRAINSOURCE CHANNEL
VG
Gates
Gates
Oxide
W
X
Z
Y
X
Z
Y
Si TSi
SiO2
TOX
Si TSi
SiO2
TOX
Si TSi
SiO2
TOX
Si TSi
SiO2
TOX
a) b)
WSi
VG
VDVS
L
DRAINSOURCE CHANNEL
VG
Gates
Gates
Oxide
W
X
Z
Y
VG
VDVS
L
DRAINSOURCE CHANNEL
VG
Gates
Gates
Oxide
W
X
Z
Y
X
Z
Y
Si TSi
SiO2
TOX
Si TSi
SiO2
TOX
Si TSi
SiO2
TOX
Si TSi
SiO2
TOX
a) b)
VG
VDVS
L
DRAINSOURCE CHANNEL
VG
Gates
Gates
Oxide
W
X
Z
Y
VG
VDVS
L
DRAINSOURCE CHANNEL
VG
Gates
Gates
Oxide
W
X
Z
Y
X
Z
Y
Si TSi
SiO2
TOX
Si TSi
SiO2
TOX
Si TSi
SiO2
TOX
Si TSi
SiO2
TOX
a) b)
WSi
VG
VDVS
L
DRAINSOURCE CHANNEL
VG
Gates
Gates
Oxide
W
X
Z
Y
VG
VDVS
L
DRAINSOURCE CHANNEL
VG
Gates
Gates
Oxide
W
X
Z
Y
X
Z
Y
Si TSi
SiO2
TOX
Si TSi
SiO2
TOX
Si TSi
SiO2
TOX
Si TSi
SiO2
TOX
a) b)
VG
VDVS
L
DRAINSOURCE CHANNEL
VG
Gates
Gates
Oxide
W
X
Z
Y
VG
VDVS
L
DRAINSOURCE CHANNEL
VG
Gates
Gates
Oxide
W
X
Z
Y
X
Z
Y
Si TSi
SiO2
TOX
Si TSi
SiO2
TOX
Si TSi
SiO2
TOX
Si TSi
SiO2
TOX
a) b)
WSi
Cylindrical Dual Material Surround Gate
MOSFET(CDMSG-MOS)
Cross section view of CDSG
3D structure of CDSG
Structure of n
channel FD-DMSG
MOSFET
DMDG-SG MOSFET- A Potential competitor
Dual-material gate (DMG) structure employs “gate-material engineering” instead of
“doping engineering” with different work functions to introduce a potential step in the
channel. This leads to a suppression of SCEs and an enhanced source side
electric field resulting in increased carrier transport efficiency in the channel region.
Vertical DMSG structure Cross section view through channel
2D Surface Potential Modeling of Our Structure
In conventional Surrounding Gate MOSFET (C-SG)
MOSFET, the gate is made of only one material, but in
the Double material isolated Surround Gate (DMISG)
MOSFET structure, we have two gates with different
work functions and doping density under them along
with a gap in the considered structure.
Simulated structure of DMSIG
After solving 2D Poisson equation at different
surfaces and satisfying boundary conditions at
interfaces we obtained mathematical function of
Electric Field and Electrostatic Potential at different
interfaces and along the channel region.
Model Validation with Simulation Results
Fig. 1 shows the variation of the surface electrostatic potential for the typical device parameters with gate
voltages of M1 and M2 fixed at 0.0 V. The drain voltage is varied from 0.0 to 1.5 V. As can be observed from the
Fig. 2 that the model is able predict the surface potential in agreement with the 2D simulation results for the
different drain voltages.
It is observed that the variation in the drain voltage is not changing the minimum potential under the gate M1. It
means that the gate M1 is “screened” from the variations in the drain voltage and all the drain voltage is dropped
under M2 only. This reduces the DIBL and threshold voltage roll off effects.
Figure:1
Figure.2 shows the Electric Field variation along the channel. It is observed that field
remains almost constant under Metal 1 and peak field occurs at the gap region.
Figure:2
Figure 3 shows the electrostatic potential comparison of simulation results for different L1
/L2
ratios,
VGS1
=0.1 V, VGS2
=0.8 V and VDS
=0.5 V. It is observed that when the L1
is larger than the L2
, then
potential under M1
is less affected due to the VDS
voltage whereas when the L1
is lower than the L2
,
then the drain voltage influences the potential under M1
. In the case when L1
=L2
then this looks to be
optimum case and the potential under M1
is also not much affected by VDS
, reducing the DIBL effect.
Figure:3
Conclusions
• DMDG-SG devices are promising for low power and high frequency circuit design
– Better scalability
• DMDG-SG technologies provide unique opportunities for designers
– Proper use of different types of devices can maximize the advantage of the DG
technologies.
– A new physics based surface potential model for the double material double gate
surrounding gate (DMDG-SG) SOI MOSFET has been successfully derived and
validated with the TCAD Device simulation results.
– It has been found that our model is in well agreement with different drain biasing
voltages and other device parameters.
– The usefulness of this device against the SCEs and HCEs has also been demonstrated
through the simulations results.
Surround Gate technologies with proper design
parameters are attractive for circuit design in
nanometer era
References
1. A. Breed and K.P. Roenker, “Dual-gate (FinFET) and TriGate MOSFETs: Simulation
and design,” Proceedings of the International Semiconductor Device Research
Symposium (ISDRS-2003), pp. 150-151, December 2003.
2. J-T. Park and J-P Colinge, “Multiple-Gate SOI MOSFETs: Device Design
Guidelines,” IEEE Transactions on Electron Devices, pp. 2222-2228, vol. 49, no. 12,
Dec. 2002.
3. Aniket Breed and Kenneth P. Roenker, “A Small-signal, RF Simulation Study of
Multiple-gate MOSFET Devices,” IEEE Topical Meeting on Silicon Monolithic ICs
in RF Systems, Atlanta, GA, Sept. 2004.
4. Biswajit Ray , Santanu Mahapatra “A New Threshold Voltage Model for Omega
Gate Cylindrical Nanowire Transistor”, 21st International Conference on VLSI
Design, 1063-9667/08, DOI 10.1109/VLSI.2008.52, page 447-452.
5. Cong Li, Yiqi Zhuang, Ru Han “Cylindrical surrounding-gate MOSFETs with
electrically induced source/drain extension”, Microelectronics Journal
P1121110526

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P1121110526

  • 1. Surround Gate MOSFET An Intelligent Technique To Reduce Short Channel Effect Presenter: Koushik Guha Dept. of Electronics & Communication Engineering National Institute of Technology Silchar, India
  • 2. Outline  Basic MOSFET Operation  Historical Perspective and Motivation  Downscaling of MOSFET  Brief of Short Channel Effect  Introduction of SOI Technology  Double Gate Technology  Multi Gate Technology and its features  DMDG-SG ………An Innovative Technology  2D Modeling of DMDG-SG MOSFET  Model Validation with Simulated Results  Conclusion  References
  • 3. The Metal Oxide Semiconductor Field-Effect Transistor (MOSFET) In layman terms, MOSFET acts like a switch
  • 4. A Historical Perspective Moore’s Law • Number of Transistors on an integrated circuit chip doubles every 1.5 years.
  • 5. Motivation • Silicon-only planar transistors are fast approaching their scaling limit. • Short channel effects limiting scaling into sub nanometer regime. • Oxide thickness cannot be scaled down further, problems of tunneling. • Need to keep Silicon technology as the base technology while innovating future devices; cost is an important factor. • Performance and power dissipation need to be improved. • Smaller is faster !!
  • 6. Why Scale? Decrease the gate length Increase speed Increase Packing density Decrease Costs?
  • 8. Scaling limits of BULK MOSFET • Limit for supply voltage (<0.6V) • Limit for further scaling of tox (<2nm) • Minimum channel length Lg= 50nm • Discrete dopant fluctuations • Dramatic short-channels effects (SCE)
  • 9. How can we follow Moore’s law?  By moving to Multiple Gate MOSFETs MG might be the unique viable alternative to build nano MOSFETs when Lg<50nm Because: - Better control of the channel from the gates - Reduced short-channel effects - Better Ion/Ioff - Improved sub-threshold slope (60mV/decade) - No discrete dopant fluctuations
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  • 18. Short Channel Effect in bulk-MOS n+ drain n+ source p substrate n+ poly gate Gate Vdd n+ drain n+ source p substrate n+ poly gate Gate Vdd Short channel effect in bulk-CMOS devices is a major barrier to scaling
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  • 24. SOI – The technology of the future Welcome to the world of Silicon On Insulator Highlights • Reduced junction capacitance. • Absence of latch up. • Ease in scaling (buried oxide need not be scaled). • Compatible with conventional Silicon processing • Sometimes requires fewer steps to fabricate. • Reduced leakage. • Improvement in the soft error rate. Drawbacks • Drain Current Overshoot. • Kink effect • Thickness control (fully depleted operation). • Surface states.
  • 25. SOI Technology Silicon-on-Insulator (SOI) Approach  Silicon channel layer grown on a layer of oxide.  Absence of junction capacitance makes this an attractive option.  Low leakage currents and compatible fabrication technology.
  • 26. Silicon-on-Insulator (SOI) Approach  Silicon channel layer grown on a layer of oxide.  Absence of junction capacitance makes this an attractive option.  Low leakage currents and compatible fabrication technology.
  • 27. Classification of SOI MOSFETs Conventional MOSFET Partially depleted SOI MOSFET Fully depleted SOI MOSFET • Silicon film thickness greater than bulk depletion width for a partially-depleted MOSFET and less than the gate depletion width for a fully-depleted MOSFET. • Partially depleted MOSFETs often plagued by KINK effects, fully depleted devices virtually free from such effects. • Partially depleted devices can be faster than fully depleted devices under certain operating conditions.
  • 29. Advantages of Double Gate Devices Front Gate Back Gate DrainSource body n+ source n+ drain Gate (metal/poly) Gate (metal/poly) Front Gate Back Gate DrainSource body n+ source n+ drain Gate (metal/poly) Gate (metal/poly) • Short channel effect control – Better scalability – Lower sub threshold current • Higher On Current • Near-Ideal Sub threshold slope • Lower Gate Leakage • Elimination of Vt variation due to Random dopant fluctuation DG devices are very promising for circuit design in sub-50nm technology
  • 30. Field Lines for Single-Gate & Double-Gate SOI MOSFETs S D G S D G G E-Fieldlines Regular SOI MOSFET Double-gate MOSFET Double gates electrically shield the channel To reduce SCE’s, aggressively reduce Si layer thickness Single-Gate SOI Double-Gate BOX BOX
  • 31. Double Gate Device n+ drain n+ source p substrate n+ poly gate Gate Vdd n+ drain n+ source p substrate n+ poly gate Gate Vdd n+ source n+ drain Gate Gate Vdd n+ source n+ drain Gate Gate Vdd • Single Gate to Double Gates –Better short-channel effect control –More Scalable
  • 32. Why Multi-Gate SOI MOSFETs ? • Higher current drive => better performance • Prophesized to show higher tolerance to scaling. • Better integration feasibility, raised source-drain structure, ease in integration. • Larger number of parameters to tailor device performance
  • 33. Multi-Gate SOI MOSFETs (3-D Views) Double Gate/FinFET TriGate QuadGateΩ-Gate
  • 34. Gate All Around MOSFET- 3D View VG VDVS L DRAINSOURCE CHANNEL VG Gates Gates Oxide W X Z Y VG VDVS L DRAINSOURCE CHANNEL VG Gates Gates Oxide W X Z Y X Z Y Si TSi SiO2 TOX Si TSi SiO2 TOX Si TSi SiO2 TOX Si TSi SiO2 TOX a) b) VG VDVS L DRAINSOURCE CHANNEL VG Gates Gates Oxide W X Z Y VG VDVS L DRAINSOURCE CHANNEL VG Gates Gates Oxide W X Z Y X Z Y Si TSi SiO2 TOX Si TSi SiO2 TOX Si TSi SiO2 TOX Si TSi SiO2 TOX a) b) WSi VG VDVS L DRAINSOURCE CHANNEL VG Gates Gates Oxide W X Z Y VG VDVS L DRAINSOURCE CHANNEL VG Gates Gates Oxide W X Z Y X Z Y Si TSi SiO2 TOX Si TSi SiO2 TOX Si TSi SiO2 TOX Si TSi SiO2 TOX a) b) VG VDVS L DRAINSOURCE CHANNEL VG Gates Gates Oxide W X Z Y VG VDVS L DRAINSOURCE CHANNEL VG Gates Gates Oxide W X Z Y X Z Y Si TSi SiO2 TOX Si TSi SiO2 TOX Si TSi SiO2 TOX Si TSi SiO2 TOX a) b) WSi VG VDVS L DRAINSOURCE CHANNEL VG Gates Gates Oxide W X Z Y VG VDVS L DRAINSOURCE CHANNEL VG Gates Gates Oxide W X Z Y X Z Y Si TSi SiO2 TOX Si TSi SiO2 TOX Si TSi SiO2 TOX Si TSi SiO2 TOX a) b) VG VDVS L DRAINSOURCE CHANNEL VG Gates Gates Oxide W X Z Y VG VDVS L DRAINSOURCE CHANNEL VG Gates Gates Oxide W X Z Y X Z Y Si TSi SiO2 TOX Si TSi SiO2 TOX Si TSi SiO2 TOX Si TSi SiO2 TOX a) b) WSi
  • 35. Cylindrical Dual Material Surround Gate MOSFET(CDMSG-MOS) Cross section view of CDSG 3D structure of CDSG Structure of n channel FD-DMSG MOSFET
  • 36. DMDG-SG MOSFET- A Potential competitor Dual-material gate (DMG) structure employs “gate-material engineering” instead of “doping engineering” with different work functions to introduce a potential step in the channel. This leads to a suppression of SCEs and an enhanced source side electric field resulting in increased carrier transport efficiency in the channel region. Vertical DMSG structure Cross section view through channel
  • 37. 2D Surface Potential Modeling of Our Structure In conventional Surrounding Gate MOSFET (C-SG) MOSFET, the gate is made of only one material, but in the Double material isolated Surround Gate (DMISG) MOSFET structure, we have two gates with different work functions and doping density under them along with a gap in the considered structure. Simulated structure of DMSIG After solving 2D Poisson equation at different surfaces and satisfying boundary conditions at interfaces we obtained mathematical function of Electric Field and Electrostatic Potential at different interfaces and along the channel region.
  • 38. Model Validation with Simulation Results Fig. 1 shows the variation of the surface electrostatic potential for the typical device parameters with gate voltages of M1 and M2 fixed at 0.0 V. The drain voltage is varied from 0.0 to 1.5 V. As can be observed from the Fig. 2 that the model is able predict the surface potential in agreement with the 2D simulation results for the different drain voltages. It is observed that the variation in the drain voltage is not changing the minimum potential under the gate M1. It means that the gate M1 is “screened” from the variations in the drain voltage and all the drain voltage is dropped under M2 only. This reduces the DIBL and threshold voltage roll off effects. Figure:1
  • 39. Figure.2 shows the Electric Field variation along the channel. It is observed that field remains almost constant under Metal 1 and peak field occurs at the gap region. Figure:2
  • 40. Figure 3 shows the electrostatic potential comparison of simulation results for different L1 /L2 ratios, VGS1 =0.1 V, VGS2 =0.8 V and VDS =0.5 V. It is observed that when the L1 is larger than the L2 , then potential under M1 is less affected due to the VDS voltage whereas when the L1 is lower than the L2 , then the drain voltage influences the potential under M1 . In the case when L1 =L2 then this looks to be optimum case and the potential under M1 is also not much affected by VDS , reducing the DIBL effect. Figure:3
  • 41. Conclusions • DMDG-SG devices are promising for low power and high frequency circuit design – Better scalability • DMDG-SG technologies provide unique opportunities for designers – Proper use of different types of devices can maximize the advantage of the DG technologies. – A new physics based surface potential model for the double material double gate surrounding gate (DMDG-SG) SOI MOSFET has been successfully derived and validated with the TCAD Device simulation results. – It has been found that our model is in well agreement with different drain biasing voltages and other device parameters. – The usefulness of this device against the SCEs and HCEs has also been demonstrated through the simulations results. Surround Gate technologies with proper design parameters are attractive for circuit design in nanometer era
  • 42. References 1. A. Breed and K.P. Roenker, “Dual-gate (FinFET) and TriGate MOSFETs: Simulation and design,” Proceedings of the International Semiconductor Device Research Symposium (ISDRS-2003), pp. 150-151, December 2003. 2. J-T. Park and J-P Colinge, “Multiple-Gate SOI MOSFETs: Device Design Guidelines,” IEEE Transactions on Electron Devices, pp. 2222-2228, vol. 49, no. 12, Dec. 2002. 3. Aniket Breed and Kenneth P. Roenker, “A Small-signal, RF Simulation Study of Multiple-gate MOSFET Devices,” IEEE Topical Meeting on Silicon Monolithic ICs in RF Systems, Atlanta, GA, Sept. 2004. 4. Biswajit Ray , Santanu Mahapatra “A New Threshold Voltage Model for Omega Gate Cylindrical Nanowire Transistor”, 21st International Conference on VLSI Design, 1063-9667/08, DOI 10.1109/VLSI.2008.52, page 447-452. 5. Cong Li, Yiqi Zhuang, Ru Han “Cylindrical surrounding-gate MOSFETs with electrically induced source/drain extension”, Microelectronics Journal