The document summarizes research on fabricating through-silicon vias (TSVs) using copper electroplating in an electrolyte mixed with supercritical carbon dioxide. It describes the TSV fabrication process, the experimental setup using supercritical CO2, and the results of testing different fabrication parameters. The best hermeticity was found at 2500 psi pressure, the lowest electrical resistance at 1100 psi and 3 A/dm2 current density, and the fastest electroplating time of 3 hours was at 2000 psi and 7 A/dm2. Supercritical CO2 electroplating offers benefits over traditional methods by providing complete filling of structures using a simple setup without additives in less time.