Shulze - Surface and Thin Film Characterization of Superconducting Multilayer...thinfilmsworkshop
http://www.surfacetreatments.it/thinfilms
Surface and Thin Film Characterization of Superconducting Multilayer films for application in RF (Roland Schulze - 30')
Speaker: Roland Schulze - Los Alamos National Laboratory | Duration: 30 min.
Abstract
The use of multilayer ultra-thin films on the interior surfaces of Nb superconducting RF cavities shows great promise in substantially improving the performance characteristics of superconducting RF cavities into the 100 MV/m range by increasing the RF critical magnetic field, HRF, through careful choice of new materials and thin film structures. However, there are substantial materials science challenges associated with producing such complex film structures, particularly for conformal application of uniform thin films on the interior surfaces of RF cavities. Here we present surface and thin film analysis of ultra-thin films of two candidate materials, MgB2 and NbN superconductors, deposited through several different methods, along with multilayers produced with alternating superconductor and dielectric films. We report on the analysis methods and techniques, using primarily x-ray photoelectron spectroscopy and Auger spectroscopy with ion sputter depth profiling, and describe results from variety of thin film samples. The materials stability, microstructure, chemistry, and thin film morphology are highly dependent on methods and parameters used in the thin film deposition. From our analysis, important factors for producing quality superconducting and dielectric films include chemical stoichiometry, impurity content, deposition temperature, substrate choice and conditioning, choice of dielectric material, and the nature of the thin film interfaces. These factors will be discussed in the context of the production methods used for these ultra-thin superconducting films.
Synthesis and charaterization of la1 x srxmno3 perovskite nanoparticlesMai Trần
In recent times perovskite materials are extensively studied and have attracted much attention because they exhibit interesting the properties, showing potential applications in commercial, technical and biomedical. In Vietnam, perovskite materials be of interest research and applications are strong but with major research direction is to go deep into the electrical properties and the magnetic properties. The Lanthanum Strontium manganite is a perovskite-based crystal-structured ceramic material with the formula of La1-xSrxMnO3, where x describes the doping ratio. It has attracted much attention due to its good magnetic, electrical, and catalytic properties and is becoming an attractive possibility material in several biomedical applications, particularly with nano-size. In industry, this material is commonly used in as a cathode material in commercially produced solid oxide fuel cells. In this thesis, we present the Perovskite nanoparticles La1-xSrxMnO3 were successfully synthesized of the nanosize La1-xSrxMnO3 at x = 0; 0.1; 0.2; 0.3 and 0.4 which prepared by a modified sol-gel method. Structure and magnetic properties of them were systematically investigated in dependence on doped Sr ratio x. The structure was investigated by XRD and show slightly changed but magnetic properties varied strongly with changing the doping ratio x. Magnetic properties of samples were studied by Vibrating Sample Mode of Physical Properties Measurement System show at the room temperature, the samples show superparamagnetic properties with high saturated magnetization MS of 57 emu/g which strongly dependents on the doped Sr ratio x.
Anne marie valente feliciano - nucleation of nb films on cu substratesthinfilmsworkshop
In the pursuit of niobium (Nb) films with similar performance with the commonly used bulk Nb surfaces for Superconducting RF (SRF) applications, significant progress has been made with the development of energetic condensation deposition techniques. The controlled incoming ion energy enables a number of processes such as desorption of adsorbed species, enhanced mobility of surface atoms and sub-implantation of impinging ions, thus producing improved film structures at lower process temperatures. All these along with the quality of the Cu substrate have an important influence on the nucleation and subsequent growth of the Nb film, creating a favorable template for growing the final surface exposed to SRF fields. This contribution shows how the structure and defect density thus electron mean free path (represented by residual resistance ratio values) of Nb films can be tailored on Cu substrates, by varying the ion energy and thermal energy provided to the substrate, favoring the hetero-epitaxial or the fiber growth mode.
Band gap engineering of hybrid perovskites for solar cellsKiriPo
The research was conducted in summer 2014 under supervision of professor David Cahen at Optoelectronics Materials Group in Department of Materials and Interfaces at Weizmann Institute of Science (Rehovot, Israel).
Shulze - Surface and Thin Film Characterization of Superconducting Multilayer...thinfilmsworkshop
http://www.surfacetreatments.it/thinfilms
Surface and Thin Film Characterization of Superconducting Multilayer films for application in RF (Roland Schulze - 30')
Speaker: Roland Schulze - Los Alamos National Laboratory | Duration: 30 min.
Abstract
The use of multilayer ultra-thin films on the interior surfaces of Nb superconducting RF cavities shows great promise in substantially improving the performance characteristics of superconducting RF cavities into the 100 MV/m range by increasing the RF critical magnetic field, HRF, through careful choice of new materials and thin film structures. However, there are substantial materials science challenges associated with producing such complex film structures, particularly for conformal application of uniform thin films on the interior surfaces of RF cavities. Here we present surface and thin film analysis of ultra-thin films of two candidate materials, MgB2 and NbN superconductors, deposited through several different methods, along with multilayers produced with alternating superconductor and dielectric films. We report on the analysis methods and techniques, using primarily x-ray photoelectron spectroscopy and Auger spectroscopy with ion sputter depth profiling, and describe results from variety of thin film samples. The materials stability, microstructure, chemistry, and thin film morphology are highly dependent on methods and parameters used in the thin film deposition. From our analysis, important factors for producing quality superconducting and dielectric films include chemical stoichiometry, impurity content, deposition temperature, substrate choice and conditioning, choice of dielectric material, and the nature of the thin film interfaces. These factors will be discussed in the context of the production methods used for these ultra-thin superconducting films.
Synthesis and charaterization of la1 x srxmno3 perovskite nanoparticlesMai Trần
In recent times perovskite materials are extensively studied and have attracted much attention because they exhibit interesting the properties, showing potential applications in commercial, technical and biomedical. In Vietnam, perovskite materials be of interest research and applications are strong but with major research direction is to go deep into the electrical properties and the magnetic properties. The Lanthanum Strontium manganite is a perovskite-based crystal-structured ceramic material with the formula of La1-xSrxMnO3, where x describes the doping ratio. It has attracted much attention due to its good magnetic, electrical, and catalytic properties and is becoming an attractive possibility material in several biomedical applications, particularly with nano-size. In industry, this material is commonly used in as a cathode material in commercially produced solid oxide fuel cells. In this thesis, we present the Perovskite nanoparticles La1-xSrxMnO3 were successfully synthesized of the nanosize La1-xSrxMnO3 at x = 0; 0.1; 0.2; 0.3 and 0.4 which prepared by a modified sol-gel method. Structure and magnetic properties of them were systematically investigated in dependence on doped Sr ratio x. The structure was investigated by XRD and show slightly changed but magnetic properties varied strongly with changing the doping ratio x. Magnetic properties of samples were studied by Vibrating Sample Mode of Physical Properties Measurement System show at the room temperature, the samples show superparamagnetic properties with high saturated magnetization MS of 57 emu/g which strongly dependents on the doped Sr ratio x.
Anne marie valente feliciano - nucleation of nb films on cu substratesthinfilmsworkshop
In the pursuit of niobium (Nb) films with similar performance with the commonly used bulk Nb surfaces for Superconducting RF (SRF) applications, significant progress has been made with the development of energetic condensation deposition techniques. The controlled incoming ion energy enables a number of processes such as desorption of adsorbed species, enhanced mobility of surface atoms and sub-implantation of impinging ions, thus producing improved film structures at lower process temperatures. All these along with the quality of the Cu substrate have an important influence on the nucleation and subsequent growth of the Nb film, creating a favorable template for growing the final surface exposed to SRF fields. This contribution shows how the structure and defect density thus electron mean free path (represented by residual resistance ratio values) of Nb films can be tailored on Cu substrates, by varying the ion energy and thermal energy provided to the substrate, favoring the hetero-epitaxial or the fiber growth mode.
Band gap engineering of hybrid perovskites for solar cellsKiriPo
The research was conducted in summer 2014 under supervision of professor David Cahen at Optoelectronics Materials Group in Department of Materials and Interfaces at Weizmann Institute of Science (Rehovot, Israel).
A presentation on Molecular Beam Epitaxy made by Deepak Rajput. It was presented as a course requirement at the University of Tennessee Space Institute in Fall 2008.
Ultra-optical characterization of thin film solar cells materials using core...IJECEIAES
This paper investigates on new design of heterojunction quantum dot (HJQD) photovoltaics solar cells CdS/PbS that is based on quantum dot metallics PbS core/shell absorber layer and quantum dot window layer. It has been enhanced the performance of traditional HJQD thin film solar cells model based on quantum dot absorber layer and bulk window layer. The new design has been used sub-micro absorber layer thickness to achieve high efficiency with material reduction, low cost, and time. Metallicssemiconductor core/shell absorber layer has been succeeded for improving the optical characteristics such energy band gap and the absorption of absorber layer materials, also enhancing the performance of HJQD ITO/CdS/QDPbS/Au, sub micro thin film solar cells. Finally, it has been formulating the quantum dot (QD) metallic cores concentration effect on the absorption, energy band gap and electron-hole generation rate in absorber layers, external quantum efficiency, energy conversion efficiency, fill factor of the innovative design of HJQD cells.
Different Generation Solar Cells
CIGS and CZTS Based Technology
Ink Based Technology
CIGS Device Structure
Making more efficient solar cells
Developing thin film technologies using alternative less costly materials and methods
Incorporate innovative cheaper deposition methods such as electrodeposition and printing technology
This paper presents a Dye sensitized solar cell (DYSSC), which is called as future generation solar cell. It is a
new class of green photovoltaic cell based on photosynthesis principle in nature. DYSSCs are fabricated using
two different natural dyes as sensitizers, which extracted from the materials existing in nature and our life, such
as flowers, leaves, fruits, traditional Chinese medicines, and beverages. The use of sensitizers having a broad
absorption band in conjunction with oxide films of nanocrystalline morphology permits to harvest a large
fraction of sunlight. There are good prospects to produce these cells at lower cost and much better efficiency
than conventional semiconductor devices by introducing various chemical and natural dyes. DYSSC are
implemented with simple and new technique to overcome the energy crisis and excess cost of semiconductor
solar cells.
A perovskite solar cell is a type of solar cell which includes a perovskite structured compound, most commonly a hybrid organic-inorganic lead or tin halide-based material, as the light-harvesting active layer.
Electrochemical Supercapacitive Performance of Sprayed Co3O4 ElectrodesIJERA Editor
Nanocrystalline cobalt oxide (Co3O4) thin film electrodes were fabricated by spray pyrolysis method on conducting fluorine doped tin oxide (FTO) substrates using ammonia complexed with cobalt chloride (CoCl2. 6H2O) solution. The structural and morphological properties of Co3O4electrodes were studied using X-ray diffraction (XRD) and scanning electron microscopy (SEM).The surface morphology study showed the film formation of porous surface with clusters. The electrochemical supercapacitive properties ofCo3O4 electrodes were evaluated using cyclic voltammetry and galvanostatic charge-discharge method. The Co3O4electrodes showed maximum specific capacitance of 168 F/g in 1 M aqueous KOH electrolyte at the scan rate of 20 mV/s. The maximum specific energy and specific power of the cell are 2.2Wh/kg and 0.23 kW/kg, respectively.
Welcome to TechSoup New Member Orientation and Q&A (May 2024).pdfTechSoup
In this webinar you will learn how your organization can access TechSoup's wide variety of product discount and donation programs. From hardware to software, we'll give you a tour of the tools available to help your nonprofit with productivity, collaboration, financial management, donor tracking, security, and more.
2024.06.01 Introducing a competency framework for languag learning materials ...Sandy Millin
http://sandymillin.wordpress.com/iateflwebinar2024
Published classroom materials form the basis of syllabuses, drive teacher professional development, and have a potentially huge influence on learners, teachers and education systems. All teachers also create their own materials, whether a few sentences on a blackboard, a highly-structured fully-realised online course, or anything in between. Despite this, the knowledge and skills needed to create effective language learning materials are rarely part of teacher training, and are mostly learnt by trial and error.
Knowledge and skills frameworks, generally called competency frameworks, for ELT teachers, trainers and managers have existed for a few years now. However, until I created one for my MA dissertation, there wasn’t one drawing together what we need to know and do to be able to effectively produce language learning materials.
This webinar will introduce you to my framework, highlighting the key competencies I identified from my research. It will also show how anybody involved in language teaching (any language, not just English!), teacher training, managing schools or developing language learning materials can benefit from using the framework.
Operation “Blue Star” is the only event in the history of Independent India where the state went into war with its own people. Even after about 40 years it is not clear if it was culmination of states anger over people of the region, a political game of power or start of dictatorial chapter in the democratic setup.
The people of Punjab felt alienated from main stream due to denial of their just demands during a long democratic struggle since independence. As it happen all over the word, it led to militant struggle with great loss of lives of military, police and civilian personnel. Killing of Indira Gandhi and massacre of innocent Sikhs in Delhi and other India cities was also associated with this movement.
Unit 8 - Information and Communication Technology (Paper I).pdfThiyagu K
This slides describes the basic concepts of ICT, basics of Email, Emerging Technology and Digital Initiatives in Education. This presentations aligns with the UGC Paper I syllabus.
How to Create Map Views in the Odoo 17 ERPCeline George
The map views are useful for providing a geographical representation of data. They allow users to visualize and analyze the data in a more intuitive manner.
Students, digital devices and success - Andreas Schleicher - 27 May 2024..pptxEduSkills OECD
Andreas Schleicher presents at the OECD webinar ‘Digital devices in schools: detrimental distraction or secret to success?’ on 27 May 2024. The presentation was based on findings from PISA 2022 results and the webinar helped launch the PISA in Focus ‘Managing screen time: How to protect and equip students against distraction’ https://www.oecd-ilibrary.org/education/managing-screen-time_7c225af4-en and the OECD Education Policy Perspective ‘Students, digital devices and success’ can be found here - https://oe.cd/il/5yV
This is a presentation by Dada Robert in a Your Skill Boost masterclass organised by the Excellence Foundation for South Sudan (EFSS) on Saturday, the 25th and Sunday, the 26th of May 2024.
He discussed the concept of quality improvement, emphasizing its applicability to various aspects of life, including personal, project, and program improvements. He defined quality as doing the right thing at the right time in the right way to achieve the best possible results and discussed the concept of the "gap" between what we know and what we do, and how this gap represents the areas we need to improve. He explained the scientific approach to quality improvement, which involves systematic performance analysis, testing and learning, and implementing change ideas. He also highlighted the importance of client focus and a team approach to quality improvement.
Ethnobotany and Ethnopharmacology:
Ethnobotany in herbal drug evaluation,
Impact of Ethnobotany in traditional medicine,
New development in herbals,
Bio-prospecting tools for drug discovery,
Role of Ethnopharmacology in drug evaluation,
Reverse Pharmacology.
Synthetic Fiber Construction in lab .pptxPavel ( NSTU)
Synthetic fiber production is a fascinating and complex field that blends chemistry, engineering, and environmental science. By understanding these aspects, students can gain a comprehensive view of synthetic fiber production, its impact on society and the environment, and the potential for future innovations. Synthetic fibers play a crucial role in modern society, impacting various aspects of daily life, industry, and the environment. ynthetic fibers are integral to modern life, offering a range of benefits from cost-effectiveness and versatility to innovative applications and performance characteristics. While they pose environmental challenges, ongoing research and development aim to create more sustainable and eco-friendly alternatives. Understanding the importance of synthetic fibers helps in appreciating their role in the economy, industry, and daily life, while also emphasizing the need for sustainable practices and innovation.
Instructions for Submissions thorugh G- Classroom.pptxJheel Barad
This presentation provides a briefing on how to upload submissions and documents in Google Classroom. It was prepared as part of an orientation for new Sainik School in-service teacher trainees. As a training officer, my goal is to ensure that you are comfortable and proficient with this essential tool for managing assignments and fostering student engagement.
2. Research history of the lecturer.
1. Thin film capacitor
Sputtering
Chemical Solution Deposition (CSD)
Chemical Vapor Deposition (CVD)
O
O e
2
Electric Current
(From top electrode)
Electric Current
(From botom electrode)
Dielectric material
Magnetic Ffux
Solder ball
+ - +
-
2. Thin film oxygen sensor
Electron-Beam Evaporation
Sputtering
Pulsed Laser Deposition (PLD)
Atomic Layer Deposition (ALD)
Sr
O
Sr
O
O
Sr
O
Sr
Sr
O
Sr
O
Ti
O
Ti
3. Novel batteries (in progress)
Plating
Electrospray Deposition
Polaron diameter
Larger polaron diameter:
Higher conductance
(Lower resistance)
Smaller polaron diameter:
Lower conductance
(Higher resistance)
Film
thickness
TiO6 unit cell
3. Why thin film?
3
Flexible Solar Cell
Smaller Electronic Circuit
퐶 = ε0ε푟
퐴
푑
C, Capacitance;
ε0, vacuum permittivity;
εr, relative dielectric constant of a material;
A, electrode area;
d: thickness of a dielectric material.
The thinner the dielectric layer, the higher
the capacitance even small capacitors can
give great enough capacitance.
Polaron diameter
Larger polaron diameter:
Higher conductance
(Lower resistance)
Smaller polaron diameter:
Lower conductance
(Higher resistance)
Film
thickness
TiO6 unit cell
New functional device
4. Contents.
Definition of thin films.
General applications & Required theory.
Brief introduction on each application.
Thin film deposition technique as an advanced
materials synthesis method
Research topics.
4
5. Definition of thin films.
General applications & Required theory.
Brief introduction on each application.
Thin film deposition technique as an advanced
materials synthesis method
Research topics.
5
6. Definition of thin films.
A thin film is a layer of material ranging from
fractions of a sub-nanometer to several micrometers in
thickness.
Help for imagining.
Bulk: 1022-1023 atoms exist in 1.0*1.0*1.0 cm3
Thin Film: 1015-1016 atoms exist in 1.0*1.0 cm2
(one-atom-thick thin film)
6
7. Definition of thin films.
General applications & Required theory.
Brief introduction on each application.
Thin film deposition technique as an advanced
materials synthesis method
Research topics.
7
8. General applications & Required theory.
1. Electronic semiconductor devices
Band engineering
2. Optical coatings
Refractive indices engineering
3. Optoelectronic semiconductor devices
Band engineering &
Refractive indices engineering
4. Quantum devices
Quantum dynamics/design
8
9. 1. Electronic semiconductor devices
Band engineering
It uses semiconductor alloys, in which a wide-gap
semiconductor and a narrow-gap semiconductor are combined
to give a substance with a desired intermediate band gap.
The left figure shows the
band gaps and lattice
parameters for some of the
more common elemental and
binary semiconductors.
*The practical band
engineering involves making
ternary alloys such as
(Ga,Al)As and (Hg,Cd)Te.
9
10. 2. Optical coatings
Refractive indices engineering
Optical transmission/reflection can be modulated by refractive
indices engineering (destructive/constructive interferences).
10
http://www.intechopen.com/books/electromagnetic-waves/propagation-of-electromagnetic-
waves-in-thin-dielectric-and-metallic-films
11. 3. Optoelectronic semiconductor devices
Band engineering & Refractive indices engineering
Band gap modulation causes the refractive indices modulation
at the same time, resulting in “optical guide.”
http://www.tf.uni-kiel.de/matwis/amat/semitech_en/kap_2/backbone/r2_3_1.html
http://optipedia.info/lsource-index/fiberlaser-index/fiber/parameters/numerical_aperture/
11
12. 4. Quantum devices Quantum dynamics/design
(L) Quantum well structure is made by the combination of a layer of a wider gap
material such as (Ga,Al)As, and a very thin layer of a narrower gap material such as
(GaAs). The narrower-gap material forms a one-dimensional potential well in the
conduction and valence bands; thus, the electron and hole levels are bound states of the
well, known as subbands. The well will contain three sets of subbands, the electron
subbands, the light hole subbands and the heavy hole subbands. By intersubband
absorption/emission of light realizes the use of long-wavelength light. The merits of
quantum well structure are (1) all of the transitions are excitonic (i.e. sharp features at a
well-defined energy, rather than broad edges), even at 300 K; (2) electrons and holes are
held in close proximity, to encourage more efficient recombination in lasers and LEDs.
(R) A superlattice contains a set of quantum wells which are sufficiently closely spaced
for the carriers to tunnel between wells. The subbands will broaden out to form
minibands with minigaps, resulting in the longer-wavelength (far-infrared) light
12
response.
13. Definition of thin films.
General applications & Required theory.
Brief introduction on each application.
Thin film deposition technique as an advanced
materials synthesis method
Research topics.
13
14. Brief introduction on each application.
1. Electronic semiconductor devices
Schematic diagrams of a GaAs metal-semiconductor
field effect transistor (MESFET). Si3N4 is deposited by using
Chemical Vapor deposition (CVD) in order to passivate the
single-crystal-based GaAs electronic device.
A. R. Barron, CVD of Nonmetals, Ed. W. S. Rees, Jr., Wiley, NY (1996).
14
15. Brief introduction on each application.
2. Optical coatings
Optical coating films are deposited onto the substrate,
which is a usually optically transparent glass, in order to
modulate the optical reflection. Electron beam physical vapor
deposition is often used in order to modulate the optical
reflection.
http://www.calctool.org/CALC/phys/optics/thin_film
15
16. Brief introduction on each application.
3. Optoelectronic semiconductor devices
One of the most famous application is probably Light
Emitting Diodes (LEDs) application. Each layer is deposited
by Chemical Vapor Deposition (CVD).
http://creativentechno.wordpress.com/2012/01/07/how-led-works/
16
17. Brief introduction on each application.
17
4. Quantum devices
One of the important
concept in order to realize
quantum devices is the concept,
“Superlattice.” This is a periodic
structure of layers of two or more
materials; the thickness of one
layer is typically several
nanometers. Molecular beam
epitaxy (MBE) is a popular
deposition technique in order to
make superlattice structures.
http://www.semiconductor-today.
com/news_items/2011/FEB/MEIJO_0202
11.htm
18. Definition of thin films.
General applications & Required theory.
Brief introduction on each application.
Thin film deposition technique as an advanced
materials synthesis method
Research topics.
18
19. Thin film deposition technique as an advanced
materials synthesis method
1. Chemical deposition
2. Physical deposition
19
20. Thin film deposition technique as an advanced
materials synthesis method
1. Chemical deposition
Fluid/Gas precursor undergoes a chemical change at a
solid surface, leaving a solid layer.
20
21. Thin film deposition technique as an advanced
materials synthesis method
Various types of chemical deposition technique
- Plating
- Chemical Solution Deposition (CSD)
- Chemical Vapor Deposition (CVD)
- Atomic Layer Deposition (ALD)
21
22. Plating
(1)Liquid precursors (a solution of water with a salt of
the metal to be deposited) are used.
(2) Some plating processes are driven by reagents,
e.g., reducing agents, in the solution.
(3) Electroplating is done through the use of an
external electron supply. Electroplating is a process in
which a metal or two or more metals is/are reductively
deposited onto the surface of a negatively biased
electrode.
22
23. http://worldofsecrets.org/en/2014/06/batte
rie-von-bagdad/
This is the world oldest
electroplating equipment that
found in an ancient tomb in
Bagdad in 1936. It consists of a
14-centimeter-high egg-shaped
clay jar with an asphalt stopper.
An iron rod protruding out of
the asphalt is the anode, which
is surrounded by a copper
cylinder used as the cathode.
Filled with vinegar as an
electrolytic solution.
23
25. In today's nanoscience researches, electroplating is quite
popular. This is the picture of electroelectroplated patterned
surface.
P. Kim et al., Nano Lett. ,12 (2012) 527–533.
25
5 μm
26. Electroplating can be used for novel battery research. At the
conductive carbon fiber surface, nano-sized electrochemically
active materials are directly plated: highly durable (expected
life = 25 years) battery will be realized.
http://toruhara.page.tl/_-Research-plan-
26
1.htm
For this purpose, nano-crystals are
preferred rather than thin films.
27. Chemical Solution Deposition (CSD)
Chemical Bath Deposition (CBD)
(1)Liquid precursor, usually a solution of
organometallic powders dissolved in an organic
solvent, are used in order to gain thin films.
(2)This is a relatively inexpensive, simple thin film
process that is able to produce stoichiometrically
accurate crystalline phases.
(3)This technique is also known as the sol-gel method
because the 'sol' (or solution) gradually evolves
towards the formation of a gel-like system.
27
28. K Sarkar et al., J. Mater. Chem. A, 2
(2014) 6945-6951.
This is a schematic of the sol-gel
process for zinc-oxide-based
28
solar cell. Onto the
silicon substrate, a solution is
spin-coated; then, dehydrated;
and finally, calcinated.
29. Chemical vapor deposition (CVD)
It uses a gas-phase precursor, often a halide or hydride
of the element to be deposited. In the case of
MOCVD, an organometallic gas is used. Commercial
techniques often use very low pressures of precursor
gas.
29
30. This shows the schematic mechanism of CVD. Precursors
deposit onto the substrate surface; then, surface reaction takes
place; and finally, reaction products form thin films.
http://cnx.org/contents/1096167b-8518-4159-a88d-3b2ae4df6645@9.4:35
30
31. Atomic layer deposition (ALD)
It uses gaseous precursor to deposit conformal thin
films one layer at a time. The process is split up into
two half reactions, run in sequence and repeated for
each layer, in order to ensure total layer saturation
before beginning the next layer. Therefore, one
reactant is deposited first, and then the second reactant
is deposited, during which a chemical reaction occurs
on the substrate, forming the desired composition.
31
32. This shows ALD process of Strontium Titanate thin film, (20-
nm-thick) which is used for novel oxygen sensor [T. Hara et
al., Sens. Actuators B 136 (2009) 489.].
32
33. Thin film deposition technique as an advanced
materials synthesis method
2. Physical deposition
Mechanical, electromechanical or thermodynamic
energy is used in order to produce a thin film of solid.
Since most engineering materials are held together by
relatively high energies, and chemical reactions are not
used to store these energies, commercial physical
deposition systems tend to require a low-pressure
vapor environment to function properly; most can be
classified as physical vapor deposition (PVD).
33
34. Thin film deposition technique as an advanced
materials synthesis method
Various types of physical deposition technique
- Thermal Evaporation
- Electron-Beam Evaporation
- Molecular Beam Epitaxy (MBE)
- Sputtering
- Pulsed Laser Deposition (PLD)
- Cathodic Arc Deposition
- Electrospray Deposition
34
35. Thermal Evaporation
It uses an electric resistance heater to melt the material
and raise its vapor pressure to a useful range. This is
done in a high vacuum, both to allow the vapor to
reach the substrate without reacting with or scattering
against other gas-phase atoms in the chamber, and
reduce the incorporation of impurities from the
residual gas in the vacuum chamber.
35
36. This is the schematic of
thermal evaporation
equipment. Under the high
vacuum atmosphere, heated
material will evaporate and
deposit onto the substrate.
http://www.ece.utep.edu/research/cdte/Fab
rication/index.htm
36
37. Electron-Beam Evaporation
It fires a high-energy beam from an electron gun to
boil a small spot of material; since the heating is not
uniform, lower vapor pressure materials can be
deposited. The beam is usually bent through an angle
of 270° in order to ensure that the gun filament is not
directly exposed to the evaporant flux.
37
38. This is the schematic of
electron-beam evaporation
equipment. Under the high
vacuum atmosphere, heated
material will evaporate and
deposit onto the substrate. The
difference between the
thermal evaporation and
electron-beam evaporation is
the heating method.
http://www.optics.rochester.edu/workgrou
ps/cml/opt307/spr13/greg/
38
39. Molecular Beam Epitaxy (MBE)
Slow streams of an element can be directed at the
substrate, so that material deposits one atomic layer at
a time. Compounds such as gallium arsenide are
usually deposited by repeatedly applying a layer of
one element (i.e., gallium), then a layer of the other
(i.e., arsenic), so that the process is chemical, as well
as physical. The beam of material can be generated by
either physical means (that is, by a furnace) or by a
chemical reaction (chemical beam epitaxy).
39
40. This is the schematic of
molecular beam epitaxy
equipment.
http://en.rusnano.com/portfolio/com
panies/semiteq
40
41. Sputtering
It relies on a plasma (usually a noble gas, such as
argon) to knock material from a "target" a few atoms
at a time. The target can be kept at a relatively low
temperature, since the process is not one of
evaporation, making this one of the most flexible
deposition techniques. It is especially useful for
compounds or mixtures, where different components
would otherwise tend to evaporate at different rates.
41
42. This is the schematic of
sputtering equipment.
Argon atom is ionized
into argon cation under
static and/or alternative
electric field; argon cation
knocks the target surface;
knocked atoms will be
deposited onto the
substrte.
http://en.wikipedia.org/wiki/File:Spu
ttering.gif
42
43. Pulsed Laser Deposition
This systems work by an ablation process. Pulses of
focused laser light vaporize the surface of the target
material and convert it to plasma; this plasma usually
reverts to a gas before it reaches the substrate.
43
44. This is the schematic of
pulsed laser deposition
equipment. Target
materials are knocked by
laser irraduiation, then,
deposited onto the
substrte.
http://groups.ist.utl.pt/rschwarz/rsch
warzgroup_files/PLD_files/PLD.ht
m
44
45. Cathodic Arc Deposition
It is a kind of ion beam deposition where an electrical
arc is created that literally blasts ions from the
cathode. The arc has an extremely high power density
resulting in a high level of ionization (30–100%),
multiply charged ions, neutral particles, clusters and
macro-particles (droplets).
45
46. This is the schematic of
pulsed laser deposition
equipment. Target
materials are set as a part
of electrode, and
evaporated by a plasma-induced
excitation, then
deposited onto the
substrate.
http://groups.ist.utl.pt/rschwarz/rsch
warzgroup_files/PLD_files/PLD.ht
m
46
47. Electrospray deposition
The liquid to be deposited, either in the form of nano-particle
solution or simply a solution, is fed to a small capillary nozzle
(usually metallic) which is connected to a high voltage. The
substrate on which the film has to be deposited is connected to
ground. Through the influence of electric field, the liquid
coming out of the nozzle takes a conical shape and at the apex
of the cone a thin jet emanates which disintegrates into very
fine and small positively charged droplets. The droplets keep
getting smaller and smaller and ultimately get deposited on the
substrate as a uniform thin layer.
47
48. This is the schematic of electrospray deposition equipment. (1)
Precursors are fed to the nozzle. (2) The substrate is connected to ground.
(3) Through the influence of electric field, the liquid coming out of the
nozzle. (4) The liquid disintegrates into very fine and small positively
charged droplets. The droplets keep getting smaller and smaller and (5)
ultimately get deposited on the substrate as a uniform thin layer.
http://www.nanowerk.com/spotlight/spotid=9685.php
48
(1)
(4) (3)
(2)
(5)
49. Definition of thin films.
General applications & Required theory.
Brief introduction on each application.
Thin film deposition technique as an advanced
materials synthesis method
Research topics.
49
50. 50
Research Topics.
L. Bovo et al., “Restoration of the third law in spin ice thin films,” Nat. Commun. DOI:
10.1038/ncomms4439.
Spin liquid found in the pyrochlore structure is the apparent violation of the third law of
thermodynamics. The authors found that even in a pyrochlore compound the third law
can be restored by fabricating thin epitaxial films: this restoration results from strain-induced
(the lattice constant difference between the substrate and the film deposited
onto the substrate) ordering of the spins. showing how the physics of frustrated
pyrochlore magnets such as spin ice may be significantly modified in thin-film samples.
51. 51
Research Topics.
http://phys.org/news204201232.html
The third law of thermodynamics
is sometimes stated as follows,
regarding the properties of
systems in equilibrium at absolute
zero temperature: the entropy of a
perfect crystal, at absolute zero
(zero kelvins), is exactly equal to
zero. However, the large quantum
fluctuation of the magnetic spins
(see, it is tetrahedral) melt the spin
ice structure and form the spin
liquid (or spin liquid-crystal).
52. 52
Research Topics.
T. Hara et al., “Effect of Oxygen Adsorption on Polaron Conduction in Nanometer-
Scale Nb5+-, Fe3+-, and Cr3+-Doped SrTiO3 Thin Films,” Jpn. J. Appl. Phys., 50 (2011)
065807.
The polaron diameter in SrTiO3-based epitaxial thin films decreases owing to oxygen
adsorption, resulting in the decrease in electronic conductivity; this can be understood
by assuming that oxygen adsorbates induce local distortions of TiO6 unit cells at which
conduction electrons are frequently trapped.
54. 54
Research Topics.
What was new?
Although SrTiO3 is
paraelectric,
near the surface of STO
adsorbed oxygen can
induce the
ferroelectric-like
Ionic displacement.
Sr
O
Sr
O
O
Sr
O
Sr
Sr
O
Sr
O
O e
O
Ti
O
Ti