Micro electro mechanical systems (MEMS, also written as micro-electro-mechanical, Micro Electro Mechanical or micro electronic and micro electro mechanical systems and the related micromechatronics) is the technology of microscopic devices, particularly those with moving parts. It merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology. MEMS are also referred to as micromachines in Japan, or micro systems technology. Micro Electromechanical systems or MEMS, represent an extraordinary technology that promises to transform whole industries and drive the next technological revolution. These devices can replace bulky actuators and sensors with micron-scale equivalent that can be produced in large quantities by fabrication processes used in integrated circuits photolithography. This reduces cost, bulk, weight and power consumption while increasing performance, production volume, and functionality by orders of magnitude. For example, one well known MEMS device is the accelerometer (it’s now being manufactured using mems low cost, small size, more reliability). Furthermore, it is clear that current MEMS products are simply precursors to greater and more pervasive applications to come, including genetic and disease testing, guidance and navigation systems, power generation, RF devices (especially for cell phone technology), weapon systems, biological and chemical agent detection, and data storage. Micro mirror based optical switches have already proven their value; several start-up companies specializing in their development have already been sold to large network companies for hundreds of millions of dollars. The promise of MEMS is increasingly capturing the attention of new and old industries alike, as more and more of their challenges are solved with MEMS. After extensive development, todays commercial MEMS – also known as Micro System Technologies (MST), Micro Machines (MM) have proven to be more manufactural, reliable and accurate, dollar for dollar, than their conventional counterparts. However the technical hurdles to attain these accomplishments were often costly and time- consuming, and current advances in this technology introduce newer challenges still. Because this field is still in its infancy, very little data on design, manufacturing processes or liability are common or shared.

1. MEMS (Micro Electro
Mechanical Systems)
BY,
S.MICHAEL JOSHUA
III Year Mechatronics,
PSG Polytechnic College, Coimbatore

2. Introduction
 MEMS (Micro Electro Mechanical
Systems) is a technology that in its
most general form can be defined
as miniaturized mechanical and
electro mechanical elements (i.e.,
devices and structures) that are
made using the techniques of
microfabrication.

3. Why MEMS
 MEMS can miniaturize electronics
 MEMS makes it cost-effective
 MEMS makes it reliable
 MEMS opens up new opportunities

4. History and Development of MEMS
 The first MEMS device is invented by
an American Electrical Engineer
Harvey C. Nathanson in 1965 and he
invented a Tuner for Micro Electronic
Radios
 In later the MEMS was developed in
step by step process in First
generation, Second generation and
Third generation

5. Flow Chart of MEMS Process
Design Fabrication Testing Packaging

6. Bulk Micromachining Surface Micromachining LIGA Process
Micro Machining Technology in MEMS

7. Materials for MEMS
 Silicon
 Germanium
 Gallium Arsenide
 Quartz
 Plastics and Polymers
 Ceramics
 Metals

8. Applications

9. Applications

10. Applications

11. Future MEMS
 In future, the each and every product based on electronics is
manufactured under the MEMS technology
 The industry challenges is to:
 Access to Foundries
 Design, Simulation and Modelling
 Packaging and Testing
 Standardization
 Education and Training

12. References
 MEMS Journal (www.memsjournal.com)
 www.memsnet.org
 wikipedia