it will help you describe mems tech.

1. MEMS
Micro-Electro-Mechanical
Systems
By:-
Vikas poonia
(2013btec001L)

2. What is MEMS?
 Micro-Electro-Mechanical Systems
◦ is the integration of elements, sensors, actuators, and
electronics on a common silicon substrate through micro-
fabrication technology, a manufacturing technology for
making microscopic devices
◦ Other Materials used in MEMS
 Gallium Arsinide
 Titanium Nickel
 Piezoelectric Materials

3. Micro Electro Mechanical Systems
 Electrical
sensing/actuation
◦ Capacitive
◦ Piezoelectric
◦ Piezoresistive
 Mechanical devices with a
third dimension
 Systems
◦ Multiple functions on one piece
of silicon
IMD
AMFitzgerald
AMFitzgerald

4. Size of MEMS

5. Birth of MEMS
 1970’s: using silicon
processing to make
mechanical devices, not
transistors
◦ Accelerometers
◦ Pressure sensors
◦ Inkjet nozzles
 1982: Petersen’s
“Silicon as a
Mechanical Material”
Popular Science, June 1984

6. How MEMS are made!
 There are three main building blocks in
MEMS
 Deposition process
 The ability to deposit thin films of
material
 Lithography
 is typically the transfer of a
pattern to a photosensitive
material by selective exposure to
a radiation source such as light
 Etching Process
 Wet etching where the material is
dissolved when immersed in a
chemical solution
 Dry etching where the material is
sputtered or dissolved using
reactive ions or a vapor phase
etchant

7. MEMS is a miniaturization
technology
Airbag sensors (1980) Airbag sensors (2005)

8. MEMS belong where
miniaturization is needed
 Applications using MEMS devices:
◦ Automotive: pressure, motion, sound, light, heat
◦ Consumer: motion, sound, pressure, compass
◦ RF: filters, resonators, switches, inductors
◦ Optical: network components, displays, switches,
mirrors
◦ Medical devices: needles, cell scaffolds,
ultrasound, implantables
◦ Printing: inkjet, large format nozzles
◦ Biotech: lab-on-chip microfluidics
◦ Industrial: Atomic force microscopy, chemical
sensors

9.  Smaller, better, cheaper
◦ But not always all three!
 Sophisticated capabilities
in small form factor:
◦ Multiple sensors
◦ Signal processing and
analysis
◦ Telemetry capability
◦ Low power
Why MEMS are exciting for so
many applications
Integrated
Pressure
Sensor
MEMS
sensor
Stacked MEMS
and ASIC chips,
wirebonded

10. Applications of MEMS
• MEMS-based sensors are a crucial
component in automotive electronics,
medical equipment, smart portable
electronics such as cell phones.
• PDAs, and hard disk drives, computer
peripherals, and wireless devices.
• These sensors began in the automotive
industry especially for crash detection in
airbag systems.

11. Explosion of MEMS in
consumer devices
 Sophisticated capability in small form
factor enabling new functions
◦ Motion sensing -> gesture input,
navigation
◦ Microphone arrays -> noise cancellation
◦ Pressure sensing -> height detection
 At the right price!
◦ MEMS took off when chip price <$3

12. MEMS enable exciting new
products

15. MEMS are not like ICs
 Yes, both are made on silicon wafers
 No building block technology, i.e. no
transistor
◦ Moore’s law does not apply
◦ No standardization of design, processes,
or materials
◦ Each MEMS is custom-crafted
 “One product, one process, one package”

16. What this implies
 MEMS prices will not decrease as fast
as IC chips did
 MEMS sensor performance will not
improve as fast as microprocessors,
memory chips did
 Chip packaging usually critical to
MEMS performance
 System integration can be more
challenging

17. Expected
Characteristics of MEMS
 In the future, MEMS
Technology compared
to Conventional
Technology should have
these effects:
◦ Cost reduction
◦ Increase functionality
◦ Improve reliability
◦ Decrease size
◦ Decrease mass

18. THANK YOU