This document summarizes the process of microelectromechanical systems (MEMS). It discusses that MEMS involve integrating mechanical and electrical components on a chip using microfabrication techniques. The fabrication process involves deposition, patterning through lithography, and etching. Common materials used include metals, polymers, ceramics and semiconductors. MEMS have applications in medical devices, automobiles, sensors, and more. They provide benefits of small size, low power consumption and cost advantages, but complex design and high initial costs.

1. Swami Keshvanand Institute of Technology M & G
JAIPUR
Supervisor:-
Mr. Trivendra Sharma
Submitted to :
Mr. Dinesh Kumar Sharma
Mr. Ankit Agarwal
Submitted By:
Govind Ram Kumawat
15ESKME052
Sec. A VIII sem
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2. CONTENTS
• Introduction
• Mems process
• Fabrication
• Materials for mems
• Application of mems
• Advantages and Disadvantages
• Conclusion
• Reference
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3. Introduction
• Micro electro mechanical system is a technology of very small
devices.
• It is a combination of a mechanical function (sensing, moving,
heating) and electrical function (switching, deciding) on the
same chip using micro fabrication technology.
• MEMS are made up of components between 1 to 100 micro
meter in size.
• MEMS devices generally range in size from 20 micrometer to a
millimeter.
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4. Mems process
MEMS DESIGN
FABRICATION
TESTING
PACKING
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5. Fabrication
Fabrication of mems
Deposition Patterning Etching
Physical Chemical Lithography Dry Wet
Photolithography
Electron beam lithography
Ion beam lithography
Ion track technology
X-ray lithography. 5

6. Fabrication Process
Fig. 1 : Fabrication Process 6

7.  Deposition
1. Physical Deposition: Physical deposition consists of a
process in which a material is removed from a target and
deposited on a surface.
2. Chemical Deposition: Chemical deposition techniques
include chemical vapor deposition in which a stress of
source gas reacts on the substrate to grow the material
desired.
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8.  Patterning
• Patterning of mems is the transfer of a pattern into a
material.
• Lithography is a widely used process.
• Example of lithography are - Photolithography, Electron
beam lithography, Ion beam lithography, Ion track
technology, X-ray lithography.
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9. Cont...
Fig. 2: Patterning 9

10. Etching
• Etching is the process of using strong acid to cut the
unprotected parts of a metal surface to create a design in.
• There are to classes of etching processes:
1. Wet Etching.
2. Dry Etching.
Fig. 3 : Etching
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11. Materials for mems
• Materials are the basic things required to develop micro
sensors.
• Metals
• Polymers
• Ceramic materials
• Semiconductors
• Composite materials
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12. Application of mems
1. In Medical Field:
• A MEMS device can be
implanted in the human
body.
• MEMS surgical tools
provide the flexibility and
accuracy to perform
surgery.
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13. 2. In Automotives:
• Air bag system.
• Vehicle security system.
• Inertial brake lights.
• Rollover detection.
• Automatic door locks.
3. As Gyroscope
4. In Microphone
5. As Sensors
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14. 6. In Accelerometers:
MEMS accelerometers are widely used in
• Cars for airbad deployment.
• Smart phone.
• Gaming devices for sensing motion.
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15. Advantages of mems
• Minimize energy and materials used in manufacturing.
• Improved reproducibility.
• Improved accuracy and reliability.
• Increased selectivity and sensitivity.
• Cost and performance advantage.
• Very small size, mass, volume.
• Very low power consumption.
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16. Disadvantages of mems
• Very complex design procedure.
• Micro-component are costly compared to the macro
components.
• Farm establishment requires huge investments.
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17. Conclusion
• MEMS promises to be an effective technique of producing
sensors of high quality, at lower costs.
• This enabling technology promises to create entirely new
categories of products.
• MEMS will be the indispensible factor in advancing
technology.
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18. Reference
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19. THANK YOU !
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