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Optical nanoantennas
Studenti:
Federico Zavanella
Betis Zeneli
Antonella Zito
Bio micro and nano systems
POLITECNICO DI TORINO
CORSO DI LAURA MAGISTRALE IN
INGEGNERIA BIOMEDICA
Overview
INTRODUCTION
WORKING PRINCIPLES
FABRICATION METHODS:  Electron-beam lithography
 Focused ion-beam milling
 Nanoimprint lithography
GEOMETRIES
APPLICATIONS:  Biological and biomedical applications
 Exemplifying application for tumor ablation
 Self and AFM based assembly
SIMULATIONS:  Coventor
 Comsol
 Results
CONCLUSIONS AND COMMENTS
Working Principle
 Traditoinal antennas can
EXCHANGE ENERGY WITH
ITS SURROUNDINGS as well
as information by means of EM
fields
 Shrinking dimensions to NANOSCALE allows enhenced
interaction between IR or visible light and nanoscale matter,
enabling several kind of applications
Working Principle
 LOCALIZED SURFACE PLASMON RESONANCE
 For certain
materials, such as
gold and silver, it
happens to appear
close to the visible
spectral range
 Thanks to LSPR we
can consider
plasmonic
nanostructures as
nanoantennas
Fabrication Methods
 The resonance of optical antennas strongly depends on the
exact geometry and dimensions. In order to obtain high-
definition nanostructures (required <10nm), a combination of
both TOP-DOWN and BOTTOM-UP approaches can be used.
Some of the most popular techniques to fabricate nano
antennas:
 Electron-beam lithography (EBL)
 Focused ion-beam milling (FIB)
 Nanoimprint lithography (NIL)
 Self and AFM based assembly
Fabrication Methods
 Direct patterning by a focused beam
on flat surfaces covered with an
electron sensitive material (i.e.
PMMA)
 Resolutions below 5nm
 Adhesion layer required
 Low throughput and high costs
 ELECTRON-BEAM LITHOGRAPHY
Fabrication Methods
 Localized sputtering of conductive
material (by means of a focused Ga
ion beam) for a direct pattern
 Resolution: 10-15 nm
 Sputtered material contamination
and ion implantation issues
 FOCUSED ION-BEAM MILLING
Fabrication Methods
 Pattern created by
mechanically deformed
resist layer
 Resolution:
10 up to 5 nm
 Variations:
UV nanoimprinting
lithography and soft
nanoimprinting
techniques
 NANOIMPRINTING LITHOGRAPHY
 High throughput and low cost, suitable for large areas
Fabrication Methods
 Chemically grown
nanostructures: controlled
shape, purity and
cristallinity
 Pattern obtained by
(AFM)nanomanipulation,
electrophoresis, fluidic
alignment or micro-
contact printing
 SELF AND AFM BASED ASSEMBLY
 Less perfect than lithographed strucures, but narrow (1nm) gaps
can be achieved, depending on the surfactant layer used
 High throughput
Geometries
 Since the aim is to exploit plasmon resonance effects, size,
shape and surface properties must be well defined
 The geometry strongly influence antennas’ characteristics
 Several designs are being analyzed in order to optimize its
characteristics
Geometries
 A much intense near field can be obteined by coupling these
elementary shapes into nanospheres and nanorods DIMERS.
 In the most simple case, a SINGLE METAL NANOSPHERE
can constitute a nanoantenna
 An elongated particles (NANORODS) may enhance the e.f.
near its ends.
Geometries
 Losses issues related to the volume.
 BOW-TIE nanoantennas possess
broad band width and high field
enhancement in the gap
 the radius of curvature at the apex
strongly influences its behavior
 YAGI-UDA structures, whose
parameters are designed as in their
RF counterparts
Geometries
 Better field localization
 CROSS nanoantennas consist of two
perpendicular dipole sharing a common
gap
 The two field components coherently add
up in the gap region
Applications
Lots of possible applications can take advantage of optical
antennas properties:
 Optical DETECTORS
 SOLAR CELLS
 …
 BIOLOGICAL and BIOMEDICAL applications NEXT>
Applications
Applications
 LSPR depends on the
dielectric constant of the
surrounding medium
 Varying Ɛm, the SPR
wavelength changes
 Nanoparticles can be
detected as an Ɛm
variation
 Thanks to their high
value shape factor, gold
NANORODS are suited
for this application
 BIOSENSING
Applications
 Nanoantennas could be exploited as imaging probes or
contrast agents due to their optical, elecrtronic, magnetic and
structural properties
 MRI, MSR, PET and SPECT could be enhanced, as well as
fluorescent emission and Raman spectroscopy
 An example shows targeted molecules within the cell
enviroment:
 BIOMOLECULES IMAGING
Applications
 An example: array of gold
nanoantennas laced into
an artificial membrane
enhances the fluorescence
intensity of three different
molecules (blue, green
and red flashes)
 This minimally invasive
technique allows to
observe molecule’s
movements and
interaction within the
cellular environment
 BIOMOLECULES IMAGING
Applications
 An example: array of gold
nanoantennas laced into
an artificial membrane
enhances the fluorescence
intensity of three different
molecules (blue, green
and red flashes)
 This minimally invasive
technique allows to
observe molecule’s
movements and
interaction within the
cellular environment
 BIOMOLECULES IMAGING
Applications
Nanoparticles like nanosphere, nanorods and nanoshells can
improve the SPECIFICITY of traditional cancer ablation
practices:
 PHOTO-THERMAL THERAPY
Tumors can be TARGETED by a remote control process
NIR light is absorbed by the antennas
SPR allows efficient photo-thermal conversion to HEAT
Exemplifying Application
 Gold nanorods
coated with
PEG for
biocompatibility
and drug
release
 Tumors were induced in mice
 and PEG-NRs injected into them
 PEG-NRs behavior was analized during the study
 Photo thermal theraphy was delivered
 Nanoshalls and Nanorods was compared, then the latters were
optimazed for near IR plasmon resonance
Exemplifying Application
 Irradiation regimens was arranged by investigating the ability of
PEG-NRs to act as X-ray absorbing agents (X-ray contrast ∝ NR
concentration)
RESULTS depends on:
 Material characteristics and external parameters
 Shape of nanoparticles, which gives absorption efficacy and
circulation times (for nanoparticle accumulation in tumor)
 Irradiation protocol and nanoantenna dosing regimen
Exemplifying Application
Quantitative bio-
distribution data,
incorporated into
COMPUTATIONAL
MODELING could
provide a priori
personalization of
irradiation regimens,
thanks to a rapid photo
thermal temperature
gradients calculation.
Exemplifying Application
Simulations
 In COVENTOR
 In COMSOL 4.3
Simulations
 BOW-TIE NANOANTENNA MODEL in COVENTOR:
Simulations
 BOW-TIE NANOANTENNA MODEL in COVENTOR:
Start from a 100 nm of silica substrate as bottom layer
Phisical vapour deposition of a 70 nm layer of ITO
90 nm PMMA resist layer by spin casting and soft baking
PRODUCTION STEPS:
EBL patterning
Resist development in MIBK:IPA for 70’’ and rinse with IPA
PVD of 50 nm golden film
Lift off in ultrasonic acetone bath for approx. 3’
Simulations
 antenna designed in terms of gap
size, flare angle, height of the arms
 supposed to be done in perfect
electric conductor on FR4 substrate
 BOW-TIE NANOANTENNA MODEL in COMSOL:
 Analysis conducted thanks to the
radio-frequency and heat transfer
modules provided infos about :
Behavior of EM waves
Bioheat transfer in human tissues
Simulations
 A sphere of uman tissue around the
anntenna were considered, phisical
properties of human liver follows:
Electrical cond. σ 0.333 S/m
Thermal cond. k 0.512 W/(m*K)
Density ρ 1060 kg/m³
Heat cap. Cp 3600 J/(kg*K)
Rel. Permitt. 1
Rel. Permeab. μ 1
 BOW-TIE NANOANTENNA MODEL in COMSOL:
Simulations
Exitation frequency 250-350 GHz
Gap size 1-10 μm
Flare angle 30-90°
Antenna height 100-500 μm
Time of exposure 60 s
 The blood flow effects
have been considerated
throw the following
parameters:
Blood Temp. 37°C
B. Specific Heat 4180 J/(kg*K)
B. Perfusion rate 6.4*10
B. Density 1000kg/m³
 So the best values for
antenna’s parameters
were figured out starting
from these ranges:
 BOW-TIE NANOANTENNA MODEL in COMSOL:
Results
 THERMAL BEHAVIOR of the system (HEATING exploited as
tumor ablation technique requires T > 45°C/50°C)
 EMISSION PATTERNS
Results
 TEMPERATURE Vs TIME
Results
0.01 s 1 s 30 s
 TEMPERATURE Vs TIME
ISOTHERMAL SURFACE: 50°C
Results
 TEMPERATURE as a function of FREQUENCY
f0
Results
 TEMPERATURE as a function of FREQUENCY
T Vs fo
Results
 TEMPERATURE as a function of FREQUENCY
Results
 TEMPERATURE as a function of GAP
Gap size
Results
 TEMPERATURE as a function of GAP
T Vs Gap size
Results
 TEMPERATURE as a function of FREQUENCY
Results
 TEMPERATURE as a function of the ARM LENGTH
T Vs arm length
Results
 TEMPERATURE as a function of the FLARE ANGLE
T Vs θ
θ
Results
 EMISSION PATTERNS
Electric field Vs fo
Results
 EMISSION PATTERNS
Electric field Vs gap size
Results
 EMISSION PATTERNS
Electric field Vs
arm length
Results
 EMISSION PATTERNS
Electric field Vs
flare angle
Results
 EMISSION PATTERNS
Results
 OPTIMIZATION OF THE VARIABLES
fo 300 GHz
Gap 5 μm
θ 70°
ho 350 μm
TEMPERATURE Vs TIME
Results
 OPTIMIZATION OF THE VARIABLES
Isosurface at 50°C Temperature distribution
- THERMAL BEHAVIOR -
Results
 OPTIMIZATION OF THE VARIABLES
- EMISSION PATTERN -
Electric field
Conclusion and comments
 At 200 GHz
resonation
occurs, for a
λ = 1.5 mm
(comparable with
device’s length)
Conclusion and comments
 A 300 GHz wave successfully induces an electric field strongly
localized in the gap, which in turn produce heat, warming up
the tissue above 50° C
 A temperature above 50°C is enough to cause cells
apoptosis, especially in tumors, due to their disorganized
vascular system
 A compromise was necessary to be found for the frequency
value, taking into consideration required heating and
interaction with tissues
Thankyou for the attention

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  • 1. Optical nanoantennas Studenti: Federico Zavanella Betis Zeneli Antonella Zito Bio micro and nano systems POLITECNICO DI TORINO CORSO DI LAURA MAGISTRALE IN INGEGNERIA BIOMEDICA
  • 2. Overview INTRODUCTION WORKING PRINCIPLES FABRICATION METHODS:  Electron-beam lithography  Focused ion-beam milling  Nanoimprint lithography GEOMETRIES APPLICATIONS:  Biological and biomedical applications  Exemplifying application for tumor ablation  Self and AFM based assembly SIMULATIONS:  Coventor  Comsol  Results CONCLUSIONS AND COMMENTS
  • 3. Working Principle  Traditoinal antennas can EXCHANGE ENERGY WITH ITS SURROUNDINGS as well as information by means of EM fields  Shrinking dimensions to NANOSCALE allows enhenced interaction between IR or visible light and nanoscale matter, enabling several kind of applications
  • 4. Working Principle  LOCALIZED SURFACE PLASMON RESONANCE  For certain materials, such as gold and silver, it happens to appear close to the visible spectral range  Thanks to LSPR we can consider plasmonic nanostructures as nanoantennas
  • 5. Fabrication Methods  The resonance of optical antennas strongly depends on the exact geometry and dimensions. In order to obtain high- definition nanostructures (required <10nm), a combination of both TOP-DOWN and BOTTOM-UP approaches can be used. Some of the most popular techniques to fabricate nano antennas:  Electron-beam lithography (EBL)  Focused ion-beam milling (FIB)  Nanoimprint lithography (NIL)  Self and AFM based assembly
  • 6. Fabrication Methods  Direct patterning by a focused beam on flat surfaces covered with an electron sensitive material (i.e. PMMA)  Resolutions below 5nm  Adhesion layer required  Low throughput and high costs  ELECTRON-BEAM LITHOGRAPHY
  • 7. Fabrication Methods  Localized sputtering of conductive material (by means of a focused Ga ion beam) for a direct pattern  Resolution: 10-15 nm  Sputtered material contamination and ion implantation issues  FOCUSED ION-BEAM MILLING
  • 8. Fabrication Methods  Pattern created by mechanically deformed resist layer  Resolution: 10 up to 5 nm  Variations: UV nanoimprinting lithography and soft nanoimprinting techniques  NANOIMPRINTING LITHOGRAPHY  High throughput and low cost, suitable for large areas
  • 9. Fabrication Methods  Chemically grown nanostructures: controlled shape, purity and cristallinity  Pattern obtained by (AFM)nanomanipulation, electrophoresis, fluidic alignment or micro- contact printing  SELF AND AFM BASED ASSEMBLY  Less perfect than lithographed strucures, but narrow (1nm) gaps can be achieved, depending on the surfactant layer used  High throughput
  • 10. Geometries  Since the aim is to exploit plasmon resonance effects, size, shape and surface properties must be well defined  The geometry strongly influence antennas’ characteristics  Several designs are being analyzed in order to optimize its characteristics
  • 11. Geometries  A much intense near field can be obteined by coupling these elementary shapes into nanospheres and nanorods DIMERS.  In the most simple case, a SINGLE METAL NANOSPHERE can constitute a nanoantenna  An elongated particles (NANORODS) may enhance the e.f. near its ends.
  • 12. Geometries  Losses issues related to the volume.  BOW-TIE nanoantennas possess broad band width and high field enhancement in the gap  the radius of curvature at the apex strongly influences its behavior  YAGI-UDA structures, whose parameters are designed as in their RF counterparts
  • 13. Geometries  Better field localization  CROSS nanoantennas consist of two perpendicular dipole sharing a common gap  The two field components coherently add up in the gap region
  • 14. Applications Lots of possible applications can take advantage of optical antennas properties:  Optical DETECTORS  SOLAR CELLS  …  BIOLOGICAL and BIOMEDICAL applications NEXT>
  • 16. Applications  LSPR depends on the dielectric constant of the surrounding medium  Varying Ɛm, the SPR wavelength changes  Nanoparticles can be detected as an Ɛm variation  Thanks to their high value shape factor, gold NANORODS are suited for this application  BIOSENSING
  • 17. Applications  Nanoantennas could be exploited as imaging probes or contrast agents due to their optical, elecrtronic, magnetic and structural properties  MRI, MSR, PET and SPECT could be enhanced, as well as fluorescent emission and Raman spectroscopy  An example shows targeted molecules within the cell enviroment:  BIOMOLECULES IMAGING
  • 18. Applications  An example: array of gold nanoantennas laced into an artificial membrane enhances the fluorescence intensity of three different molecules (blue, green and red flashes)  This minimally invasive technique allows to observe molecule’s movements and interaction within the cellular environment  BIOMOLECULES IMAGING
  • 19. Applications  An example: array of gold nanoantennas laced into an artificial membrane enhances the fluorescence intensity of three different molecules (blue, green and red flashes)  This minimally invasive technique allows to observe molecule’s movements and interaction within the cellular environment  BIOMOLECULES IMAGING
  • 20. Applications Nanoparticles like nanosphere, nanorods and nanoshells can improve the SPECIFICITY of traditional cancer ablation practices:  PHOTO-THERMAL THERAPY Tumors can be TARGETED by a remote control process NIR light is absorbed by the antennas SPR allows efficient photo-thermal conversion to HEAT
  • 21. Exemplifying Application  Gold nanorods coated with PEG for biocompatibility and drug release  Tumors were induced in mice  and PEG-NRs injected into them  PEG-NRs behavior was analized during the study
  • 22.  Photo thermal theraphy was delivered  Nanoshalls and Nanorods was compared, then the latters were optimazed for near IR plasmon resonance Exemplifying Application
  • 23.  Irradiation regimens was arranged by investigating the ability of PEG-NRs to act as X-ray absorbing agents (X-ray contrast ∝ NR concentration) RESULTS depends on:  Material characteristics and external parameters  Shape of nanoparticles, which gives absorption efficacy and circulation times (for nanoparticle accumulation in tumor)  Irradiation protocol and nanoantenna dosing regimen Exemplifying Application
  • 24. Quantitative bio- distribution data, incorporated into COMPUTATIONAL MODELING could provide a priori personalization of irradiation regimens, thanks to a rapid photo thermal temperature gradients calculation. Exemplifying Application
  • 27. Simulations  BOW-TIE NANOANTENNA MODEL in COVENTOR: Start from a 100 nm of silica substrate as bottom layer Phisical vapour deposition of a 70 nm layer of ITO 90 nm PMMA resist layer by spin casting and soft baking PRODUCTION STEPS: EBL patterning Resist development in MIBK:IPA for 70’’ and rinse with IPA PVD of 50 nm golden film Lift off in ultrasonic acetone bath for approx. 3’
  • 28. Simulations  antenna designed in terms of gap size, flare angle, height of the arms  supposed to be done in perfect electric conductor on FR4 substrate  BOW-TIE NANOANTENNA MODEL in COMSOL:  Analysis conducted thanks to the radio-frequency and heat transfer modules provided infos about : Behavior of EM waves Bioheat transfer in human tissues
  • 29. Simulations  A sphere of uman tissue around the anntenna were considered, phisical properties of human liver follows: Electrical cond. σ 0.333 S/m Thermal cond. k 0.512 W/(m*K) Density ρ 1060 kg/m³ Heat cap. Cp 3600 J/(kg*K) Rel. Permitt. 1 Rel. Permeab. μ 1  BOW-TIE NANOANTENNA MODEL in COMSOL:
  • 30. Simulations Exitation frequency 250-350 GHz Gap size 1-10 μm Flare angle 30-90° Antenna height 100-500 μm Time of exposure 60 s  The blood flow effects have been considerated throw the following parameters: Blood Temp. 37°C B. Specific Heat 4180 J/(kg*K) B. Perfusion rate 6.4*10 B. Density 1000kg/m³  So the best values for antenna’s parameters were figured out starting from these ranges:  BOW-TIE NANOANTENNA MODEL in COMSOL:
  • 31. Results  THERMAL BEHAVIOR of the system (HEATING exploited as tumor ablation technique requires T > 45°C/50°C)  EMISSION PATTERNS
  • 33. Results 0.01 s 1 s 30 s  TEMPERATURE Vs TIME ISOTHERMAL SURFACE: 50°C
  • 34. Results  TEMPERATURE as a function of FREQUENCY f0
  • 35. Results  TEMPERATURE as a function of FREQUENCY T Vs fo
  • 36. Results  TEMPERATURE as a function of FREQUENCY
  • 37. Results  TEMPERATURE as a function of GAP Gap size
  • 38. Results  TEMPERATURE as a function of GAP T Vs Gap size
  • 39. Results  TEMPERATURE as a function of FREQUENCY
  • 40. Results  TEMPERATURE as a function of the ARM LENGTH T Vs arm length
  • 41. Results  TEMPERATURE as a function of the FLARE ANGLE T Vs θ θ
  • 47. Results  OPTIMIZATION OF THE VARIABLES fo 300 GHz Gap 5 μm θ 70° ho 350 μm TEMPERATURE Vs TIME
  • 48. Results  OPTIMIZATION OF THE VARIABLES Isosurface at 50°C Temperature distribution - THERMAL BEHAVIOR -
  • 49. Results  OPTIMIZATION OF THE VARIABLES - EMISSION PATTERN - Electric field
  • 50. Conclusion and comments  At 200 GHz resonation occurs, for a λ = 1.5 mm (comparable with device’s length)
  • 51. Conclusion and comments  A 300 GHz wave successfully induces an electric field strongly localized in the gap, which in turn produce heat, warming up the tissue above 50° C  A temperature above 50°C is enough to cause cells apoptosis, especially in tumors, due to their disorganized vascular system  A compromise was necessary to be found for the frequency value, taking into consideration required heating and interaction with tissues
  • 52. Thankyou for the attention