Photonics Applications - Silicon - Nanonics
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Integrated Characterization of Silicon Photonic & Nanophotonic Devices. A presentation by Prof. Aaron Lewis, Founder of Nanonics Imaging ltd.
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Photonics Applications - Silicon - Nanonics
- 1. Integrated Characterization of Silicon Photonic & Nanophotonic Devices Nanonics Imaging Ltd WWW.nanonics.co.il The Next Evolution Integrated Optical CharacterizationTM
- 2. THE SYSTEM Unique Combination of AFM and Optics Singular Fiber Optic Probes Leading To A World Of Optical Characterization For THE CENTURY OF PHOTONICS In The Near and Far-field Structurally Correlated & Integrated With Electrical & Thermal Measurements The Next Evolution Integrated Optical CharacterizationTM
- 3. The System The Next Evolution Integrated Optical CharacterizationTM
- 4. Simple Placement The Next Evolution Integrated Optical CharacterizationTM
- 5. Unparalleled Simple Integration The Next Evolution Integrated Optical CharacterizationTM
- 6. Unparalleled Simple Integration The Next Evolution Integrated Optical CharacterizationTM
- 7. 3D Flat Scanner Technology Permits Scanning with the Probe Tip Up Or Down The Next Evolution Integrated Optical CharacterizationTM
- 8. The Probes The Next Evolution Integrated Optical CharacterizationTM
- 9. With FC/PC Adaptor/Connector The connection from the nano to micro world The Nano World The Micro World The Next Evolution Integrated Optical CharacterizationTM
- 10. Interconnects near-field optics with the worlds of nanoalignment & tests & measurements The Next Evolution Integrated Optical CharacterizationTM
- 11. NanoOptical Probes Glass Insulated Coaxial NanoElectrical NanoWire Probes NanoHeaters or Nanothermocouples Nanopipette Fountain Pens for On-line Gas Based NanoDeposition Single Nanoparticle Scattering Probes With A Variety of Metal Nanoparticles Such As Co, Au, Ni All Probes Are Non-Obscuring With Probe Tips Exposed From Above Unlike Standard Silicon Probes All Probes are Multiprobe friendly A NanoToolKitTM of Unique Multiprobe Friendly and Optically Friendly Probes The Next Evolution Integrated Optical CharacterizationTM
- 12. Simply Change The Probe To Change The Function The Next Evolution Integrated Optical CharacterizationTM
- 13. Specialized Lens fibers produced by Nanonics and nanocharacterized by NSOM Nanonics 3D Collage of AFM Topography and Collection Mode NSOM of an Integral Fiber MicroLens The Next Evolution Integrated Optical CharacterizationTM
- 14. Obviously Unprecedented Profiling Can Be Done In The Near-field and Far-field By Collecting With the Tip In What Is Called Collection Mode The Next Evolution Integrated Optical CharacterizationTM
- 15. 3D representation of the optical signal measured at the surface The Next Evolution Integrated Optical CharacterizationTM
- 16. Line scan of the NSOM image ΔX=0.7 μm 2.521.510.50 2.5 2 1.5 1 0.5 0 X[µm] Z[MHz] The Next Evolution Integrated Optical CharacterizationTM
- 17. 3D NSOM distribution of the optical signal transmitted from the surface at different distances from the sample surface 60μm contact contact 5μm 15μm 20μm 30μm 40μm 50μm 60μm 10μm The Next Evolution Integrated Optical CharacterizationTM
- 18. Spot width at different heights from the surface – Normalized intensity Contact =0.5um 5um lift =2.5um 10um lift =5.1um 15um lift =9um The Next Evolution Integrated Optical CharacterizationTM
- 19. contact 5um 10um 20um15um 25um Profile as a function of distance The Next Evolution Integrated Optical CharacterizationTM
- 20. More Complex Collection Mode Tasks With Edge Emitters The Next Evolution Integrated Optical CharacterizationTM
- 21. And The Optometronic 4000 also allows for injection top and the bottom injection as with all Nanonics platforms The Next Evolution Integrated Optical CharacterizationTM
- 22. And hybrid structures are being devised all the time in continuous developments APL 2010 plasmonics integration The Next Evolution Integrated Optical CharacterizationTM Studied With Collection Mode
- 23. Near-field phase mapping exploiting intrinsic oscillations of NSOM aperture probe OPTICS EXPRESS 12014, 20 June 2011 / Vol. 19, No. 13 The Next Evolution Integrated Optical CharacterizationTM
- 24. Fiber Lens NanoAlignment & Light Injection Into a Silicon Waveguide lying flat on the sample stage The Next Evolution Integrated Optical CharacterizationTM
- 25. Simultaneous injection into a silicon waveguide & evanescent field collection The Next Evolution Integrated Optical CharacterizationTM
- 26. Simultaneous injection and evanescent field imaging collection near-field imaging 8.0µm 8.0µm AFM Collection NSOM The Next Evolution Integrated Optical CharacterizationTM
- 27. Collection NSOM NSOM/AFM Collage Collage of the structure and evanescent field photon distribution The Next Evolution Integrated Optical CharacterizationTM
- 28. Evanescent wave decay as a function of height from waveguide surface • Single point measurement The Next Evolution Integrated Optical CharacterizationTM
- 29. But often injection and imaging the evanescent field is not enough The Next Evolution in SPMTM Injection & Collection From the Side
- 30. Nanonics NSOM/AFM Probes With Exposed Tips Allow For Effective Side Wall Imaging Both Optically and Structurally The Next Evolution in SPMTM
- 31. The Scanners & Probes Also Allow For Deep Trench Imaging Exemplary Structures Are Shown Can Be Imaged By Nanonics Due To Availability of:: • Large Z Scanning Range 85µ • The Long Tip Length of 100µ • The Very High 10:1 Aspect Ratio Of Nanonics Tips • And STFMTM Which Allows A Soft Touch AC Mode To Keep These Large Particles In Place 10µ x 10µ AFM Image of a 0µ deep and 2µ wide trench For Comparison Similar Imaging With Silicon Cantilever FIB Etched Trench The Next Evolution in SPMTM
- 32. Illumination Mode Apertured NSOM: With One of the First Nanonics Instruments Built Near-field illumination producing all k vectors for exciting plasmonic energy transport at will Lens Maier et al at Cal Tech Used Nanonics’ First System Introduced 18 years Ago In This Highly Cited NSOM Measurement. This, Opened NSOM Application For Plasmon Characterization. The Instrumentation As With All Nanonics Instrumentation Allowed For A Completely Free Optical Axis From Above Allowing Independent Placement of the Microscope Lens and NSOM probe To Allow the Detection of Plasmon Propagation. The Paper Has Been Cited Over 1800 Times The Next Evolution Integrated Optical CharacterizationTM
- 33. Other Applications Active Photonic Sources & Unique Multiprobe Capabilities The Next Evolution Integrated Optical CharacterizationTM
- 34. AFM AFM Collage AFM/Light Distribution Light Distribution 20.5 mA AFM & light distribution Nortel DFB laser 20mA injection current Stamdard Active Device Characterization The Next Evolution Integrated Optical CharacterizationTM
- 35. Distributed feedback laser AFM & NSOM image at higher injection currents 22.5mA Collage of AFM with Light Distribution 2D NSOM The Next Evolution Integrated Optical CharacterizationTM
- 36. High current 50 mA NSOM & AFM AFM Collage of AFM with Light Distribution AFM 20.5 mA for comparison The Next Evolution Integrated Optical CharacterizationTM
- 37. Laser cavity height as a function of injection current The Next Evolution Integrated Optical CharacterizationTM
- 38. Near-field Scanning Optical Microscopy of the Distribution of Light from a Quantum Wire Laser And now for the more esoteric but of increasing importance The Next Evolution Integrated Optical CharacterizationTM
- 39. 1. Correlation of the light distribution and geometric structure of the v groove laser 2. Notice the 150 nm offset 3. Such information critical to understand the distribution of light as compared to the material associated with the gain medium 4. QA of maximizing gain The Next Evolution Integrated Optical CharacterizationTM
- 40. Mode distribution with GHz alteration in wavelength The Next Evolution in SPMTM
- 41. Spectroscopic mode NSOM imaging The Next Evolution Integrated Optical CharacterizationTM
- 42. Dual wire glass insulated thermal conductivity probes AFM / Thermoresistive Probe AFM Thermal Conductivity The Next Evolution in SPMTM
- 43. T 0 1 mµ1 mµ Q W R 2 9 3 - N S O M Q W R 2 9 4 - T e m p e r a t u r e Correlation of light distribution with thermal characteristics The Next Evolution in SPMTM
- 44. The Nanonics Optometronic 4000 An Integrated Platform For Optical Electrical & Thermal Micro/Nanocharacterization For Integrated Photonics In The 21st Century The Century of Photonics The Next Evolution Integrated Optical CharacterizationTM
Editor's Notes
- Nanonics systems interconnecting cantilevered fiber optic probes with nanometric sample scanning stages can also be transparently integrated into light wave measuring systems.
- Emphasize the separation of the probe and the lens
- Distributed feedback laser structure, light distribution and collage of structure and light distribution at a low injection current
- As the injection current is increased the laser heats up and there is an alteration in the topography of the laser which alters the light distribution.
- Collection of light emitted by an electrically excited quantum wire laser. The difference between the left and right image is 0.8 nm in wavelength and this changes the mode structure of the laser. Such a mode structure change could only be detected with near-field optics The individual pixels in these images are about 70 nm. The spectrally selective methodology used to obtain these images is seen on the next slide.
- The collection mode image was collected by the near-field optical fiber and passed through a monochromator or spectrograph to a detector. The image was then made at either 805 nm or 805.8 nm. This small wavelength change caused a large change in the distribution of light. The far-field optical resolution in this case is approximately equal to the 0.5 micron bar on the image and such a pixel size would have completely missed the possibility to image this change in light distribution with wavelength from this nanophotonic active device.
- Dual-NanoWire Thermo-Resistance In the Dual Wire Thermo-Resistance probe, two platinum wires are stretched through the nanopipette and fused together at their tips. This fused junction has a resistance that is temperature-dependent. This unique tip allows simultaneous measurement of surface topography and thermal conductivity even in intermittent contact mode. With multiple probes heat can be introduced at specific locations and detected at other locations. The probes can also be used for resistance measurements and this is indicated on the next slide.
- The light distribution and the thermal imaging shows that the thermal characteristics are related to the p injection current rather than the light intensity. Such thermal and optical characterization are ideal for multiprobe systems.