This document discusses electron beam lithography. It begins with an introduction and overview of electron beam lithography, explaining that it uses a beam of electrons to selectively expose and develop a resist film in order to create very small structures. It then provides a schematic of the electron beam lithography process and describes the lithography process steps. The document also covers the advantages of high resolution and no diffraction limit but disadvantages of low throughput and high costs. It includes details on electron beam sources and lenses used.
This presentation includes basis of lithography i.e. (photo-lithography e-beam lithography) in nano-lithography includes (AFM, Soft, NIL and DPN lithography)
A brief overview of the processes involved in nanolithography & nanopatterning. It mainly discusses the steps, mechanism & instrumentation of the electron beam lithography in detail. It also gives a small view on other technologies as well.
This presentation includes basis of lithography i.e. (photo-lithography e-beam lithography) in nano-lithography includes (AFM, Soft, NIL and DPN lithography)
A brief overview of the processes involved in nanolithography & nanopatterning. It mainly discusses the steps, mechanism & instrumentation of the electron beam lithography in detail. It also gives a small view on other technologies as well.
Electron beam lithography (often abbreviated as e-beam lithography or EBL) is the process of transferring a pattern onto the surface of a substrate by first scanning a thin layer of organic film (called resist) on the surface by a tightly focused and precisely controlled electron beam (exposure) and then selectively removing the exposed or nonexposed regions of the resist in a solvent (developing). The process allows patterning of very small features, often with the dimensions of submicrometer down to a few nanometers, either covering the selected areas of the surface by the resist or exposing otherwise resist-covered areas. The exposed areas could be further processed for etching or thin-film deposition while the covered parts are protected during these processes. The advantage of e-beam lithography stems from the shorter wavelength of accelerated electrons compared to the wavelength of ultraviolet (UV) light used in photolithography.
In EBL, a resist layer is directly patterned by scanning with an electron beam electronically. Modern EBL systems have very good depth of focus (several hundred nanometres) and are able to correct for large-scale height variations of the wafer (of several hundred microns), and so are able to cope well with the rough surface topology of typical GaN wafers and associated wafer bow. EBL also has the advantage of allowing multiple designs to be fabricated together on one wafer. EBL is, however, a slow and expensive process, which is not practical for production. Substrate charging and proximity error effects must be taken into account to get good quality devices. Charging effects can be overcome by application of a sub-nanoscale removable conductive layer on top of the resist. Proximity error correction effects are overcome using specialised design correction software.
Lithography is the process of transferring patterns of geometric shapes in a mask to a radiation sensitive material called resist,which cover the surface of semiconductor wafer.
Transmission electron microscope, high resolution tem and selected area elect...Nano Encryption
The transmission electron microscope is a very powerful tool for material science. A high energy beam of electrons is shone through a very thin sample, and the interactions between the electrons and the atoms can be used to observe features such as the crystal structure and features in the structure like dislocations and grain boundaries. Chemical analysis can also be performed. TEM can be used to study the growth of layers, their composition and defects in semiconductors. High resolution can be used to analyze the quality, shape, size and density of quantum wells, wires and dots.
Different types of Nanolithography technique.
Types: Electron beam lithography, Photolithography, electron-beam writing, ion- lithography, X-ray lithography, and related images, concepts and graphical views.
I hope this presentation helpful for you.
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Photolithography, also called optical lithography or UV lithography, is a process used in microfabrication to pattern parts on a thin film or the bulk of a substrate (also called a wafer). It uses light to transfer a geometric pattern from a photomask (also called an optical mask) to a photosensitive (that is, light-sensitive) chemical photoresist on the substrate. A series of chemical treatments then either etches the exposure pattern into the material or enables deposition of a new material in the desired pattern upon the material underneath the photoresist. In complex integrated circuits, a CMOS wafer may go through the photolithographic cycle as many as 50 times.
Photolithography shares some fundamental principles with photography in that the pattern in the photoresist etching is created by exposing it to light, either directly (without using a mask) or with a projected image using a photomask. This procedure is comparable to a high precision version of the method used to make printed circuit boards. Subsequent stages in the process have more in common with etching than with lithographic printing. This method can create extremely small patterns, down to a few tens of nanometers in size. It provides precise control of the shape and size of the objects it creates and can create patterns over an entire surface cost-effectively. Its main disadvantages are that it requires a flat substrate to start with, it is not very effective at creating shapes that are not flat, and it can require extremely clean operating conditions. Photolithography is the standard method of printed circuit board (PCB) and microprocessor fabrication. Directed self-assembly is being evaluated as an alternative to photolithography
Photonic crystals are periodic dielectric structures that have a band gap that forbids propagation of a certain frequency range of light. This property enables one to control light with amazing facility and produce effects that are impossible with conventional optics.Photonic crystals can be fabricated for one, two, or three dimensions. One-dimensional photonic crystals can be made of layers deposited or stuck together. Two-dimensional ones can be made by photolithography, or by drilling holes in a suitable substrate. Fabrication methods for three-dimensional ones include drilling under different angles, stacking multiple 2-D layers on top of each other, direct laser writing, or, for example, instigating self-assembly of spheres in a matrix and dissolving the spheres
Electron beam lithography (often abbreviated as e-beam lithography or EBL) is the process of transferring a pattern onto the surface of a substrate by first scanning a thin layer of organic film (called resist) on the surface by a tightly focused and precisely controlled electron beam (exposure) and then selectively removing the exposed or nonexposed regions of the resist in a solvent (developing). The process allows patterning of very small features, often with the dimensions of submicrometer down to a few nanometers, either covering the selected areas of the surface by the resist or exposing otherwise resist-covered areas. The exposed areas could be further processed for etching or thin-film deposition while the covered parts are protected during these processes. The advantage of e-beam lithography stems from the shorter wavelength of accelerated electrons compared to the wavelength of ultraviolet (UV) light used in photolithography.
In EBL, a resist layer is directly patterned by scanning with an electron beam electronically. Modern EBL systems have very good depth of focus (several hundred nanometres) and are able to correct for large-scale height variations of the wafer (of several hundred microns), and so are able to cope well with the rough surface topology of typical GaN wafers and associated wafer bow. EBL also has the advantage of allowing multiple designs to be fabricated together on one wafer. EBL is, however, a slow and expensive process, which is not practical for production. Substrate charging and proximity error effects must be taken into account to get good quality devices. Charging effects can be overcome by application of a sub-nanoscale removable conductive layer on top of the resist. Proximity error correction effects are overcome using specialised design correction software.
Lithography is the process of transferring patterns of geometric shapes in a mask to a radiation sensitive material called resist,which cover the surface of semiconductor wafer.
Transmission electron microscope, high resolution tem and selected area elect...Nano Encryption
The transmission electron microscope is a very powerful tool for material science. A high energy beam of electrons is shone through a very thin sample, and the interactions between the electrons and the atoms can be used to observe features such as the crystal structure and features in the structure like dislocations and grain boundaries. Chemical analysis can also be performed. TEM can be used to study the growth of layers, their composition and defects in semiconductors. High resolution can be used to analyze the quality, shape, size and density of quantum wells, wires and dots.
Different types of Nanolithography technique.
Types: Electron beam lithography, Photolithography, electron-beam writing, ion- lithography, X-ray lithography, and related images, concepts and graphical views.
I hope this presentation helpful for you.
https://www.linkedin.com/in/preeti-choudhary-266414182/
https://www.instagram.com/chaudharypreeti1997/
https://www.facebook.com/profile.php?id=100013419194533
https://twitter.com/preetic27018281
Please like, share, comment and follow.
stay connected
If any query then contact:
chaudharypreeti1997@gmail.com
Thanking-You
Preeti Choudhary
Photolithography, also called optical lithography or UV lithography, is a process used in microfabrication to pattern parts on a thin film or the bulk of a substrate (also called a wafer). It uses light to transfer a geometric pattern from a photomask (also called an optical mask) to a photosensitive (that is, light-sensitive) chemical photoresist on the substrate. A series of chemical treatments then either etches the exposure pattern into the material or enables deposition of a new material in the desired pattern upon the material underneath the photoresist. In complex integrated circuits, a CMOS wafer may go through the photolithographic cycle as many as 50 times.
Photolithography shares some fundamental principles with photography in that the pattern in the photoresist etching is created by exposing it to light, either directly (without using a mask) or with a projected image using a photomask. This procedure is comparable to a high precision version of the method used to make printed circuit boards. Subsequent stages in the process have more in common with etching than with lithographic printing. This method can create extremely small patterns, down to a few tens of nanometers in size. It provides precise control of the shape and size of the objects it creates and can create patterns over an entire surface cost-effectively. Its main disadvantages are that it requires a flat substrate to start with, it is not very effective at creating shapes that are not flat, and it can require extremely clean operating conditions. Photolithography is the standard method of printed circuit board (PCB) and microprocessor fabrication. Directed self-assembly is being evaluated as an alternative to photolithography
Photonic crystals are periodic dielectric structures that have a band gap that forbids propagation of a certain frequency range of light. This property enables one to control light with amazing facility and produce effects that are impossible with conventional optics.Photonic crystals can be fabricated for one, two, or three dimensions. One-dimensional photonic crystals can be made of layers deposited or stuck together. Two-dimensional ones can be made by photolithography, or by drilling holes in a suitable substrate. Fabrication methods for three-dimensional ones include drilling under different angles, stacking multiple 2-D layers on top of each other, direct laser writing, or, for example, instigating self-assembly of spheres in a matrix and dissolving the spheres
Transmission Electron Microscope (TEM), RESOLVING POWER, Scanning Electron Microscope, PRINCIPLE AND WORKING OF SEM, SEM SAMPLE PREPARATION, Limitations of Scanning Electron Microscopy (SEM), ADVANTAGES & DISADVANTAGES OF SEM, APPLICATIONS OF SEM, PRINCIPLE, AND WORKING OF TEM, SAMPLE PREPARATION FOR TEM, ADVANTAGES & DISADVANTAGES OF TEM, APPLICATIONS OF TEM, Differences between SEM and TEM.
5. Microsocope ELECTRON MICROSCOPE (TEM & SEM ) - BasicsNethravathi Siri
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Electron beam is the source of illumination.
Image is produced by magnetic field.
Contrasting features between light microscope and electron microscope are
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room (vacuum chamber).
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Interested in deploying notification automations for Bonterra Impact Management? Contact us at sales@sidekicksolutionsllc.com to discuss next steps.
Epistemic Interaction - tuning interfaces to provide information for AI supportAlan Dix
Paper presented at SYNERGY workshop at AVI 2024, Genoa, Italy. 3rd June 2024
https://alandix.com/academic/papers/synergy2024-epistemic/
As machine learning integrates deeper into human-computer interactions, the concept of epistemic interaction emerges, aiming to refine these interactions to enhance system adaptability. This approach encourages minor, intentional adjustments in user behaviour to enrich the data available for system learning. This paper introduces epistemic interaction within the context of human-system communication, illustrating how deliberate interaction design can improve system understanding and adaptation. Through concrete examples, we demonstrate the potential of epistemic interaction to significantly advance human-computer interaction by leveraging intuitive human communication strategies to inform system design and functionality, offering a novel pathway for enriching user-system engagements.
Neuro-symbolic is not enough, we need neuro-*semantic*Frank van Harmelen
Neuro-symbolic (NeSy) AI is on the rise. However, simply machine learning on just any symbolic structure is not sufficient to really harvest the gains of NeSy. These will only be gained when the symbolic structures have an actual semantics. I give an operational definition of semantics as “predictable inference”.
All of this illustrated with link prediction over knowledge graphs, but the argument is general.
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This presentation was delivered at K8SUG Singapore. See https://feryn.eu/presentations/accelerate-your-kubernetes-clusters-with-varnish-caching-k8sug-singapore-28-2024 for more details.
GraphRAG is All You need? LLM & Knowledge GraphGuy Korland
Guy Korland, CEO and Co-founder of FalkorDB, will review two articles on the integration of language models with knowledge graphs.
1. Unifying Large Language Models and Knowledge Graphs: A Roadmap.
https://arxiv.org/abs/2306.08302
2. Microsoft Research's GraphRAG paper and a review paper on various uses of knowledge graphs:
https://www.microsoft.com/en-us/research/blog/graphrag-unlocking-llm-discovery-on-narrative-private-data/
GDG Cloud Southlake #33: Boule & Rebala: Effective AppSec in SDLC using Deplo...James Anderson
Effective Application Security in Software Delivery lifecycle using Deployment Firewall and DBOM
The modern software delivery process (or the CI/CD process) includes many tools, distributed teams, open-source code, and cloud platforms. Constant focus on speed to release software to market, along with the traditional slow and manual security checks has caused gaps in continuous security as an important piece in the software supply chain. Today organizations feel more susceptible to external and internal cyber threats due to the vast attack surface in their applications supply chain and the lack of end-to-end governance and risk management.
The software team must secure its software delivery process to avoid vulnerability and security breaches. This needs to be achieved with existing tool chains and without extensive rework of the delivery processes. This talk will present strategies and techniques for providing visibility into the true risk of the existing vulnerabilities, preventing the introduction of security issues in the software, resolving vulnerabilities in production environments quickly, and capturing the deployment bill of materials (DBOM).
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Bob Boule
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Gopinath Rebala
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The latest edition of the OT/ICS and IoT security Threat Landscape Report 2024 also covers:
State of global ICS asset and network exposure
Sectoral targets and attacks as well as the cost of ransom
Global APT activity, AI usage, actor and tactic profiles, and implications
Rise in volumes of AI-powered cyberattacks
Major cyber events in 2024
Malware and malicious payload trends
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Vulnerability exploit attempts on CVEs
Attacks on counties – USA
Expansion of bot farms – how, where, and why
In-depth analysis of the cyber threat landscape across North America, South America, Europe, APAC, and the Middle East
Why are attacks on smart factories rising?
Cyber risk predictions
Axis of attacks – Europe
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Download the full report from here:
https://sectrio.com/resources/ot-threat-landscape-reports/sectrio-releases-ot-ics-and-iot-security-threat-landscape-report-2024/
1. Group 2: Trần Phúc Thành.
Cao Văn Phước.
Tống Văn Khoa.
2. Introduction.
Why E-beam lithography?
Schematic of e-beam lithography.
Lithography Process
Advantages and disadvantages.
Summary.
References.
3. - Electron beam lithography (often abbreviated as e-beam
lithography) is the practice of emitting a beam of electrons in
a patterned fashion across a surface covered with a film (called
the resist), ("exposing" the resist) and of selectively removing
either exposed or non-exposed regions of the resist
("developing").
- The purpose, as with photolithography, is to create very small
structures in the resist that can subsequently be transferred to
the substrate material, often by etching. It was developed for
manufacturing integrated circuits, and is also used for
creating nanotechnology architectures.
4.
5.
6. Lower resolution
systems can
use thermionic
sources, which are
usually formed from
LaB6. However,
systems with higher
resolution
requirements need to
use field electron
emission sources,
such as heated
W/ZrO2 for lower
energy spread and
enhanced brightness.
7. A magnetic lens is
a device for the
focusing or
deflection of
moving charged
particles, such
as electrons or ions
, by use of the
magnetic Lorentz
force. Its strength
can often be varied
by usage
of electromagnets.
8. - Sometime we aslo
use electrostatic lens
however, electrostatic
lenses have more
aberrations and so are
not used for fine
focusing.
-Systems of
electrostatic lenses can
be designed in the
same way as optical
lenses.
-Electrostatic lenses in
an electron diffraction
experiment.
9. Clean sample
◦ Remove
oils, organics, etc
(Acetone, IPA, ultraso
nic)
Spin coating of
photoresist on
surface of film
(positive or negative
resist) substrate
Deposited film
Photoresist
10. E-beam lithography
and develop
Etching
(multi-step
processes)
Evaporate metal
contacts
substrate
film
substrate
Deposited film
substrate
film
substrate
film
11. Direct writing with narrow beam
Electron projection lithography using a mask
:EPL
12. oIssues:
oThroughput of direct writing is very low : research
tool or low pattern density manufacturing
oProjection stepper (EPL) is in development stage
only (primarily by Nikon).
oMask making is the biggest challenge for the
projection method
oBack-scattering and second electron result in
proximity effect –reduce resolution with dense
patterns there is also the proximity effect
oOperates in high vacuum (10-6 –10-10 torr) –slow
and expensive
13. Raster Scan
The e-beam is swept across
the entire surface, pixel by
pixel
Beam is turned on and off
Beam is scanned across the
entire surface
14. Vector Scan
◦ The e-beam “jumps” from
one patterned area to the
next
◦ Adjustments to the beam
can also be made relatively
easily
◦ It takes longer for the
beam to settle, making it
more difficult to
◦ maintain accurate placing
for the beam
16. o Diffraction is not a limitation on resolution ( < 1 Å for
10-50 keV electrons)
o Resolution depends on electron scattering and beam
optics the size of the beam, can reach ~ 5 nm
17. 17
In EBL the resolution is not
limited by diffraction
In EBL backscattering
causes the electron beam
to broaden and expose a
large volume of resist then
expected.
The proximity effect places
a limit on the minimum
spacing between pattern
feature.
18. • The pattern is written directly onto the
electron-sensitive resist (no mask is used)
• More precise than photolithography or X-
Ray lithography
• Used to make high-resolution masks for
photolithography and X-Ray lithography
• Beats the diffraction limit of light,
minimum feature size around 5 nm
19. Very slow. Takes over 10 hours to scan
across the entire surface of a wafer
• Very costly. One e-beam system costs
upwards of 5 to 10 MILLION dollars
• Potential problems with electron
scattering:
–Electron energy: 100eV -> very slow,
inefficient, damage the substrate
–Electron energy: 10eV -> lower
penetration depth and lower resolution
20. S.M. Sze, Semiconductor Devices, Physics and
Technology, Willey, 2002.
C.Y. Chang and S.M. Sze, Eds., ULSI
Technology, McGraw-Hill, 1996.
S.M. Sze, Ed., VLSI Technology, McGraw-Hill,
1988.
Nguyễn Đức Chiến, Nguyễn Văn Hiếu, Công
nghệ chế tạo mạch vi điện tử, NXB Bách khoa,
2007.