Invited talk in SPICE Workshop of Bad Metal Behavior in Mett Systems at Mainz, Germany, on 1st July 2015.
(Invited talk in Superstripes2015 at Ischia, Italy on 16th July.)
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Enormous electrostatic carrier doping of SrTiO3: negative capacitance?
1. 1
Isao H. Inoue Neeraj Kumar Ai Kitou
Enormous
electrostatic carrier doping of SrTiO3:
negative capacitance?
National Institute of Advanced Industrial Science & Technology (AIST) (Tsukuba, Japan)
18. isaocaius@gmail.com http://staff.aist.go.jp/i.inoue/
Isao H. Inoue, Invited Talk @ SPICE Workshop, Mainz, Germany 2 July 2015 20
Capacitance of the gate insulator
50
49
C(pF)
10.50
Time (Hours)
VG = 0 V
VG = 8 V
VAC = 0.1 V
f = 1 kHz
50
49
VG=8V
VG=0V
Vac=0.1V
1kHz
0 1Time (hours)
Cins
(pF)
Cexp=CO+Area×C□
C□ = 0.47 µF cm-2
60
50
40
30
20
10
0
Cexp(pF)
100806040200
Area (10
-6
cm
2
)
Cexp(pF)
Area(10-6 cm-2)
100×100µm2
VG=1V T=300K
0
10
20
30
1/C(ω)(10
9
F
-1
)
10
2
10
3
10
4
10
5
10
6
ω/2π (Hz)
-90
-60
-30
0
θ(degree)
1/C(109F-1)
θ(deg)
100×100µm2
Ti (electrode)
Parylene-C (6nm)
HfO2 (20nm)
Au (electrode)
almostNOchangeinC
forelongatedVG application
19. isaocaius@gmail.com http://staff.aist.go.jp/i.inoue/
Isao H. Inoue, Invited Talk @ SPICE Workshop, Mainz, Germany 2 July 2015 21
FET characteristics
210
VD (V)
0.15
0.10
0.05
0
ID(µA)
1.6 V
VG =
1.7 V
1.5 V
10
13
10
14
VD = 1 V
T = 300 K
(a) (b)
(c) (d)
10
-14
10
-13
10
-12
10
-11
10
-10
10
-9
10
-8
10
-7
ID(A)
3210
VG (V)
0.02 V
0.1 V
0.5 V
VD =
6
5
m)
VD = 1 V
eff
ID(µA)
VD (V)
VG = 1.7V
VG = 1.6V
VG = 1.5V
Drastic modulation of the drain current
4µm
G
S D
210
VD (V)
0.15
0.10
0.05
0
ID(µA)
1.6 V
VG =
1.7 V
1.5 V
11
10
12
10
13
10
14
)
VD = 1 V
T = 300 K
(a) (b)
(c) (d)
10
-14
10
-13
10
-12
10
-11
10
-10
10
-9
10
-8
10
-7
ID(A)
3210
VG (V)
0.02 V
0.1 V
0.5 V
VD =
6
5
4
8
Ω-cm)
VD = 1 V
VG
= 0.5 V
DS
G
L
W
eff
VG (V)
ID(A)
20. isaocaius@gmail.com http://staff.aist.go.jp/i.inoue/
Isao H. Inoue, Invited Talk @ SPICE Workshop, Mainz, Germany 2 July 2015 22
5
Subthreshold swing
GateMetal4 µm
1.2 mV
10
-13
10
-12
10
-11
10
-10
10
-9
10
-8
210
9 µm
0.8 mV
10
-13
10
-12
10
-11
10
-10
10
-9
10
-8
10
-7
2 µm
1.1 mV
3210
20 µm
0.6 mV
VG (V)
ID(A)
ISD(A)
VG (V)
L = 2µm L = 4µm
L = 9µm L = 20µm
S = 189 mV/dec S = 172 mV/dec
S = 200 mV/decS = 200 mV/dec
Therefore
1
transport
factor
body factor
Subthreshold swing of an insulator (and semiconductor)
…… only the thermally excited
carriers can contribute the
transport.
…… definition
…… φ is the surface potential
C□
…… because = (1/ +1/ )-1n□ VGCSTO
□
CSTO
□φ = / = (1+ / )-1n□ CSTO
□ C□ VG
This does not depend whether
SrTiO3 is metallic, semiconducting,
or insulating.
Very small sub-threshold swing
S=170mV/dec is extremely small !
(~100mV/dec even for Si FET).
Small S means
very clean channel !!
21. isaocaius@gmail.com http://staff.aist.go.jp/i.inoue/
Isao H. Inoue, Invited Talk @ SPICE Workshop, Mainz, Germany 2 July 2015 23
1pA
1nA
1µA
ID
0
0
0.5
(µF/cm2)
2
subthreshold
region
metallic
region
exoticmetal
region
unchanged
Apossible scenario of gating SrTiO3
22. isaocaius@gmail.com http://staff.aist.go.jp/i.inoue/
Isao H. Inoue, Invited Talk @ SPICE Workshop, Mainz, Germany 2 July 2015 24
1pA
1nA
1µA
ID
0
0
0.5
(µF/cm2)
2
subthreshold
region
metallic
region
exoticmetal
region
unchanged
Apossible scenario of gating SrTiO3
23. isaocaius@gmail.com http://staff.aist.go.jp/i.inoue/
Isao H. Inoue, Invited Talk @ SPICE Workshop, Mainz, Germany 2 July 2015 25
1pA
1nA
1µA
ID
0
0
0.5
(µF/cm2)
2
subthreshold
region
metallic
region
exoticmetal
region
unchanged
negative!
bigdeviation
canbeexplained?
Apossible scenario of gating SrTiO3
24. isaocaius@gmail.com http://staff.aist.go.jp/i.inoue/
Isao H. Inoue, Invited Talk @ SPICE Workshop, Mainz, Germany 2 July 2015 26
Negative C in LaAlO3/SrTiO3
Negative C (negative charge
compressibility) is not a
strange phenomenon.
There have been many
reports in literature so far.
Even SrTiO3 shows it in the
LaAlO3/SrTiO3 interface.
g
proportional to f and is constant over a broad range of –0.05 V ≤ Vg ≤ 0.05
V. For Vg < –0.18 V, Iy/f displays a frequency dependence, which is
probably caused by effects of current leakage through the LAO layer. (C)
terface overscreens
0.37 V, again a f-d
current leakage th
5
8
7
A B
f
f
f
Fig. 4. The inverse of compressibility dm/dn determined from penetration
field measurements on (A) device 1 and (B) device 2. The electron density
at the interface is determined by integrating the C versus Vg curve at the
lowest frequency achieved. (C) The density n dependence of the lateral re-
sistivity of a differ
wafer. The device d
the frequency depe
S2) (16).
www.sciencemag.org SCIENCE VOL 332
Lu Li et al. Science 332, 825 (2011)
5
-100
0
30
0
0 1.5
0
10
26. isaocaius@gmail.com http://staff.aist.go.jp/i.inoue/
Isao H. Inoue, Invited Talk @ SPICE Workshop, Mainz, Germany 2 July 2015 28
Only for dilute carrier density
g
proportional to f and is constant over a broad range of –0.05 V ≤ Vg ≤ 0.05
V. For Vg < –0.18 V, Iy/f displays a frequency dependence, which is
probably caused by effects of current leakage through the LAO layer. (C)
terface overscreens
0.37 V, again a f-d
current leakage th
5
8
7
A B
f
f
f
Fig. 4. The inverse of compressibility dm/dn determined from penetration
field measurements on (A) device 1 and (B) device 2. The electron density
at the interface is determined by integrating the C versus Vg curve at the
lowest frequency achieved. (C) The density n dependence of the lateral re-
sistivity of a differ
wafer. The device d
the frequency depe
S2) (16).
www.sciencemag.org SCIENCE VOL 332
Lu Li et al. Science 332, 825 (2011)
5
-100
0
30
0
0 1.5
0
10
27. isaocaius@gmail.com http://staff.aist.go.jp/i.inoue/
Isao H. Inoue, Invited Talk @ SPICE Workshop, Mainz, Germany 2 July 2015 29
10
11
10
12
10
13
10
14
10
15
n(cm
-2
)
-6
-3
0
3
1/C
STO
(10
6
cm
2
/F)
6420
VG (V)
Our carrier density is too large?!
Our data
negative C case
g
proportional to f and is constant over a broad range of –0.05 V ≤ Vg ≤ 0.05
V. For Vg < –0.18 V, Iy/f displays a frequency dependence, which is
probably caused by effects of current leakage through the LAO layer. (C)
terface overscreens
0.37 V, again a f-d
current leakage th
5
8
7
A B
f
f
f
Fig. 4. The inverse of compressibility dm/dn determined from penetration
field measurements on (A) device 1 and (B) device 2. The electron density
at the interface is determined by integrating the C versus Vg curve at the
lowest frequency achieved. (C) The density n dependence of the lateral re-
sistivity of a differ
wafer. The device d
the frequency depe
S2) (16).
www.sciencemag.org SCIENCE VOL 332
Lu Li et al. Science 332, 825 (2011)
5
-100
0
30
0
0 1.5
0
10
normal metal case
28. isaocaius@gmail.com http://staff.aist.go.jp/i.inoue/
Isao H. Inoue, Invited Talk @ SPICE Workshop, Mainz, Germany 2 July 2015 30
µ
Rigid band shift
ω
Correlation gap closure
D(ω)
µ
ω
ρ(ω)
spectral weight
transfer
quasi-particle spectra
~ DOS
Other mechanisms of negative C
29. isaocaius@gmail.com http://staff.aist.go.jp/i.inoue/
Isao H. Inoue, Invited Talk @ SPICE Workshop, Mainz, Germany 2 July 2015 31
µ
Rigid band shift
ω
D(ω)
Other mechanisms of negative C
Rashba splitting
µ
ω
ρ(ω)
spectral weight
transfer
quasi-particle spectra
~ DOS