Ultrasonic machining (USM) is a mechanical process that uses high frequency vibrations and an abrasive slurry to erode fine holes and cavities in hard or brittle materials. It is well-suited for machining brittle materials like glass, ceramics, and semiconductors. The material removal occurs through abrasion by the particles in the slurry, with no thermal or chemical changes to the workpiece. USM produces intricate shapes and profiles with good surface finish and integrity.