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GLIMPSES
AJAL.A.J
Fabrication Equipment
Molecular Beam Epitaxy
(MBE)
Fabrication Equipment
Photoresist Spinner Bake-out Ovens
Fabrication Equipment
Mask Aligner Reactive Ion Etching (RIE)
Fabrication Equipment
Chemical Vapor Deposition
(CVD)
Plasma Quest Sputter
Fabrication Equipment
Plasma Sputter Perkin-Elmer MBE
Aligned Wafer-Bonding System
PCB Manufacture
Types of PCB's
single-side, double-side and multi-layer
Which type to use ?
(a) Circuit complexity
(b) Available space
(c) Cost
Typical PCB
insulated substrate
copper connections
protective covering
Packaging
Dual Inline Package and its lead-frame
Steps in Lead Frame Manufacture:
(1) Cut copper strips
(2) Clean in a chemical bath
(3) laminate a layer of photoresist
(4) Expose photoresist through mask
(5) Develop and etch
(6) Remove lamination
(7) Plate internal regions with gold/silver
Dual Inline Package and its lead-frame
Steps in Lead Frame Manufacture:
(1) Cut copper strips
(2) Clean in a chemical bath
(3) laminate a layer of photoresist
(4) Expose photoresist through mask
(5) Develop and etch
(6) Remove lamination
(7) Plate internal regions with gold/silver
- Make leadframe
- Die attachment (chip bonded to leadframe using epoxy)
- Wire bonding (ultrasonic welding)
- Encapsulation (moisture resistant coating)
- Molding (plastic package)
- Marking (chip number, co. name, marked on package [laser, silkscreen])
- DTFS: deflash, trim the leadframe, form the leads, singulate (cut dambars)
- Leadfinishing: electroplating the leads
Integrated Circuit (IC) Manufacture
- Slicing the Silicon ingot
- Fabrication of IC’s (Lithography, Sputtering, diffused junction, …)
- Testing each IC on the slice
[source: www.towajapan.co.jp]
- Dicing (cutting each chip out with a diamond saw)
- Packaging
Images of the CLEAN ROOM MONITORING
UNIT
Schematic of Ion Beam Sculpting Apparatus
Sculpting of Nanopores:
Sputtering versus Lateral Mass Transport
Fabrication Equipment
Probe Station Scanning Electron
Microscope (SEM)
We’re all searchers now…search
smarter, not harder ? ( AJAL.A.J )
The ultimate passion of searching…
References
• Carter, Ronald. “Lecture 9 – EE 5342” UTA
• Cheung, Nathan “ Lecture 17 – EE 143” UC Berkeley
• http: //et.nmso.edu/ETCLASSES/vlsi/files/CRYSTAL.HTM
• Hastings, Alan “The Art of Analog Layout”, Prentice Hall, New
Jersey, 2001
• Campbell, Stephen A. , “The Science and Engineering of
Microelectronic Fabrication”, Oxford University Press, New York,
2001
• Alvarez, Antonio, “BiCMOS Technology and Applications”, Prentice
Hall, New Jersey, 2001
The End

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Molecular Beam Epitaxy (MBE)

  • 4. Fabrication Equipment Mask Aligner Reactive Ion Etching (RIE)
  • 5. Fabrication Equipment Chemical Vapor Deposition (CVD) Plasma Quest Sputter
  • 7.
  • 9.
  • 10.
  • 11.
  • 12.
  • 13. PCB Manufacture Types of PCB's single-side, double-side and multi-layer Which type to use ? (a) Circuit complexity (b) Available space (c) Cost Typical PCB insulated substrate copper connections protective covering
  • 14. Packaging Dual Inline Package and its lead-frame Steps in Lead Frame Manufacture: (1) Cut copper strips (2) Clean in a chemical bath (3) laminate a layer of photoresist (4) Expose photoresist through mask (5) Develop and etch (6) Remove lamination (7) Plate internal regions with gold/silver Dual Inline Package and its lead-frame Steps in Lead Frame Manufacture: (1) Cut copper strips (2) Clean in a chemical bath (3) laminate a layer of photoresist (4) Expose photoresist through mask (5) Develop and etch (6) Remove lamination (7) Plate internal regions with gold/silver - Make leadframe - Die attachment (chip bonded to leadframe using epoxy) - Wire bonding (ultrasonic welding) - Encapsulation (moisture resistant coating) - Molding (plastic package) - Marking (chip number, co. name, marked on package [laser, silkscreen]) - DTFS: deflash, trim the leadframe, form the leads, singulate (cut dambars) - Leadfinishing: electroplating the leads
  • 15.
  • 16. Integrated Circuit (IC) Manufacture - Slicing the Silicon ingot - Fabrication of IC’s (Lithography, Sputtering, diffused junction, …) - Testing each IC on the slice [source: www.towajapan.co.jp] - Dicing (cutting each chip out with a diamond saw) - Packaging
  • 17. Images of the CLEAN ROOM MONITORING UNIT
  • 18. Schematic of Ion Beam Sculpting Apparatus
  • 19. Sculpting of Nanopores: Sputtering versus Lateral Mass Transport
  • 20. Fabrication Equipment Probe Station Scanning Electron Microscope (SEM)
  • 21. We’re all searchers now…search smarter, not harder ? ( AJAL.A.J )
  • 22. The ultimate passion of searching…
  • 23.
  • 24. References • Carter, Ronald. “Lecture 9 – EE 5342” UTA • Cheung, Nathan “ Lecture 17 – EE 143” UC Berkeley • http: //et.nmso.edu/ETCLASSES/vlsi/files/CRYSTAL.HTM • Hastings, Alan “The Art of Analog Layout”, Prentice Hall, New Jersey, 2001 • Campbell, Stephen A. , “The Science and Engineering of Microelectronic Fabrication”, Oxford University Press, New York, 2001 • Alvarez, Antonio, “BiCMOS Technology and Applications”, Prentice Hall, New Jersey, 2001