This document summarizes an in-situ monitoring system for MOCVD semiconductor processes. It discusses the principles of measuring growth rate, temperature, and wafer curvature during deposition. Experiments were conducted to validate the system, including simulating thin film deposition with displaced mirrors, depositing and characterizing a ZnO thin film, and measuring the temperature of a heated silicon wafer. The system achieved high accuracy in measurements compared to commercial tools. Future work will focus on improving dynamic measurement capabilities and developing a modular and compatible design.
Atomic Layer Deposition solutions for SiC Power ElectronicsBeneq
Power Electronics International
Brussels, Belgium
19.04.2023
Atomic Layer Deposition solutions for SiC Power Electronics
Integrated ALD passivation/gate dielectric stack for SiC MOSFET
Presented by Mikko Söderlund from Beneq Oy
Atomic Layer Deposition solutions for SiC Power ElectronicsBeneq
Power Electronics International
Brussels, Belgium
19.04.2023
Atomic Layer Deposition solutions for SiC Power Electronics
Integrated ALD passivation/gate dielectric stack for SiC MOSFET
Presented by Mikko Söderlund from Beneq Oy
NANO106 is UCSD Department of NanoEngineering's core course on crystallography of materials taught by Prof Shyue Ping Ong. For more information, visit the course wiki at http://nano106.wikispaces.com.
Daniel adrien franco lespinasse - status of magnetron sputtered qwrthinfilmsworkshop
The objective of this research is the deposition of a superconductive thin film onto copper Quarter Wave Resonator cavities that can be used in the HIE-ISOLDE facility at CERN. To do this, it was developed an innovative magnetron configuration source. Our experience has shown the efficiency of this particular configuration in order to deposit a uniform thin film, and also improve the superconductive properties of the niobium (Residual Resistance Ratio and Critical Temperature). This presentation presents the recent improvement of the niobium thin film properties and the procedure used to deposit and measure the first resonator at LNL of HIE-ISOLDE type.
NANO106 is UCSD Department of NanoEngineering's core course on crystallography of materials taught by Prof Shyue Ping Ong. For more information, visit the course wiki at http://nano106.wikispaces.com.
Daniel adrien franco lespinasse - status of magnetron sputtered qwrthinfilmsworkshop
The objective of this research is the deposition of a superconductive thin film onto copper Quarter Wave Resonator cavities that can be used in the HIE-ISOLDE facility at CERN. To do this, it was developed an innovative magnetron configuration source. Our experience has shown the efficiency of this particular configuration in order to deposit a uniform thin film, and also improve the superconductive properties of the niobium (Residual Resistance Ratio and Critical Temperature). This presentation presents the recent improvement of the niobium thin film properties and the procedure used to deposit and measure the first resonator at LNL of HIE-ISOLDE type.
Analysis Of Carbon Nanotubes And Quantum Dots In A Photovoltaic Device Slide ...M. Faisal Halim
Francis' presentation to Louis Stokes Association for Minority Participation. Since I co-authored this work I think I have the right to a copy. I was the graduate student Francis was working with.
> Discovery of LaCl3:Ce, LaBr3:Ce led to a new era in halide scintillator research
- CeBr3, SrI2:Eu, Tl2LaCl5:Ce, others
- Elpasolites (CLYC, CLLBC, Tl-elpasolites)
Li-containing elpasolites provide combined gamma-neutron detection, with chlorides adding fast neutron spectroscopic capabilities
> Several new scintillators provide gamma-resolution of ≤3% (FWHM)
> Modulation of proportionality a new trend in scintillator optimization
> Organic crystals, plastics and organic-inorganic composites with gamma-neutron PSD attractive for multimode, low cost, large systems
> Ceramic scintillators promising for high energy radiography and PET
> Commercialization of some of the promising candidates underway.
ChemFET fabrication, device physics and sensing mechanismRichard Yang
Ph.D. thesis work at UCSD. Developed ChemFET from Si substrate to functioning device, bluetooth enabled handheld package. The integrated nanosensor concept 10yrs could come to live on wearable electronics train.
Consistently High Voc Values in p-i-n Type Perovskite Solar Cells Using Ni3+-...Pawan Kumar
Leading edge p-i-n type halide perovskite solar cells (PSCs) severely underperform n-i-p PSCs. p-i-n type PSCs that use PEDOT:PSS hole transport layers (HTLs) struggle to generate open-circuit photovoltage values higher than 1 V. NiO HTLs have shown greater promise in achieving high Voc values albeit inconsistently. In this report, a NiO nanomesh with Ni3+ defect grown by the hydrothermal method was used to obtain PSCs with Voc values that consistently exceeded 1.10 V (champion Voc = 1.14 V). A champion device photoconversion efficiency of 17.75% was observed. Density functional theory modeling was used to understand the interfacial properties of the NiO/perovskite interface. The PCE of PSCs constructed using the Ni3+-doped NiO nanomesh HTL was ∼34% higher than that of conventional compact NiO-based perovskite solar cells. A suite of characterization techniques such as transmission electron microscopy, field emission scanning electron microscopy, intensity-modulated photocurrent spectroscopy, intensity-modulated photovoltage spectroscopy, time-resolved photoluminescence, steady-state photoluminescence, and Kelvin probe force microscopy provided evidence of better film quality, enhanced charge transfer, and suppressed charge recombination in PSCs based on hydrothermally grown NiO nanostructures.
UiPath Test Automation using UiPath Test Suite series, part 4DianaGray10
Welcome to UiPath Test Automation using UiPath Test Suite series part 4. In this session, we will cover Test Manager overview along with SAP heatmap.
The UiPath Test Manager overview with SAP heatmap webinar offers a concise yet comprehensive exploration of the role of a Test Manager within SAP environments, coupled with the utilization of heatmaps for effective testing strategies.
Participants will gain insights into the responsibilities, challenges, and best practices associated with test management in SAP projects. Additionally, the webinar delves into the significance of heatmaps as a visual aid for identifying testing priorities, areas of risk, and resource allocation within SAP landscapes. Through this session, attendees can expect to enhance their understanding of test management principles while learning practical approaches to optimize testing processes in SAP environments using heatmap visualization techniques
What will you get from this session?
1. Insights into SAP testing best practices
2. Heatmap utilization for testing
3. Optimization of testing processes
4. Demo
Topics covered:
Execution from the test manager
Orchestrator execution result
Defect reporting
SAP heatmap example with demo
Speaker:
Deepak Rai, Automation Practice Lead, Boundaryless Group and UiPath MVP
Key Trends Shaping the Future of Infrastructure.pdfCheryl Hung
Keynote at DIGIT West Expo, Glasgow on 29 May 2024.
Cheryl Hung, ochery.com
Sr Director, Infrastructure Ecosystem, Arm.
The key trends across hardware, cloud and open-source; exploring how these areas are likely to mature and develop over the short and long-term, and then considering how organisations can position themselves to adapt and thrive.
Search and Society: Reimagining Information Access for Radical FuturesBhaskar Mitra
The field of Information retrieval (IR) is currently undergoing a transformative shift, at least partly due to the emerging applications of generative AI to information access. In this talk, we will deliberate on the sociotechnical implications of generative AI for information access. We will argue that there is both a critical necessity and an exciting opportunity for the IR community to re-center our research agendas on societal needs while dismantling the artificial separation between the work on fairness, accountability, transparency, and ethics in IR and the rest of IR research. Instead of adopting a reactionary strategy of trying to mitigate potential social harms from emerging technologies, the community should aim to proactively set the research agenda for the kinds of systems we should build inspired by diverse explicitly stated sociotechnical imaginaries. The sociotechnical imaginaries that underpin the design and development of information access technologies needs to be explicitly articulated, and we need to develop theories of change in context of these diverse perspectives. Our guiding future imaginaries must be informed by other academic fields, such as democratic theory and critical theory, and should be co-developed with social science scholars, legal scholars, civil rights and social justice activists, and artists, among others.
Neuro-symbolic is not enough, we need neuro-*semantic*Frank van Harmelen
Neuro-symbolic (NeSy) AI is on the rise. However, simply machine learning on just any symbolic structure is not sufficient to really harvest the gains of NeSy. These will only be gained when the symbolic structures have an actual semantics. I give an operational definition of semantics as “predictable inference”.
All of this illustrated with link prediction over knowledge graphs, but the argument is general.
Connector Corner: Automate dynamic content and events by pushing a buttonDianaGray10
Here is something new! In our next Connector Corner webinar, we will demonstrate how you can use a single workflow to:
Create a campaign using Mailchimp with merge tags/fields
Send an interactive Slack channel message (using buttons)
Have the message received by managers and peers along with a test email for review
But there’s more:
In a second workflow supporting the same use case, you’ll see:
Your campaign sent to target colleagues for approval
If the “Approve” button is clicked, a Jira/Zendesk ticket is created for the marketing design team
But—if the “Reject” button is pushed, colleagues will be alerted via Slack message
Join us to learn more about this new, human-in-the-loop capability, brought to you by Integration Service connectors.
And...
Speakers:
Akshay Agnihotri, Product Manager
Charlie Greenberg, Host
JMeter webinar - integration with InfluxDB and GrafanaRTTS
Watch this recorded webinar about real-time monitoring of application performance. See how to integrate Apache JMeter, the open-source leader in performance testing, with InfluxDB, the open-source time-series database, and Grafana, the open-source analytics and visualization application.
In this webinar, we will review the benefits of leveraging InfluxDB and Grafana when executing load tests and demonstrate how these tools are used to visualize performance metrics.
Length: 30 minutes
Session Overview
-------------------------------------------
During this webinar, we will cover the following topics while demonstrating the integrations of JMeter, InfluxDB and Grafana:
- What out-of-the-box solutions are available for real-time monitoring JMeter tests?
- What are the benefits of integrating InfluxDB and Grafana into the load testing stack?
- Which features are provided by Grafana?
- Demonstration of InfluxDB and Grafana using a practice web application
To view the webinar recording, go to:
https://www.rttsweb.com/jmeter-integration-webinar
Smart TV Buyer Insights Survey 2024 by 91mobiles.pdf91mobiles
91mobiles recently conducted a Smart TV Buyer Insights Survey in which we asked over 3,000 respondents about the TV they own, aspects they look at on a new TV, and their TV buying preferences.
GDG Cloud Southlake #33: Boule & Rebala: Effective AppSec in SDLC using Deplo...James Anderson
Effective Application Security in Software Delivery lifecycle using Deployment Firewall and DBOM
The modern software delivery process (or the CI/CD process) includes many tools, distributed teams, open-source code, and cloud platforms. Constant focus on speed to release software to market, along with the traditional slow and manual security checks has caused gaps in continuous security as an important piece in the software supply chain. Today organizations feel more susceptible to external and internal cyber threats due to the vast attack surface in their applications supply chain and the lack of end-to-end governance and risk management.
The software team must secure its software delivery process to avoid vulnerability and security breaches. This needs to be achieved with existing tool chains and without extensive rework of the delivery processes. This talk will present strategies and techniques for providing visibility into the true risk of the existing vulnerabilities, preventing the introduction of security issues in the software, resolving vulnerabilities in production environments quickly, and capturing the deployment bill of materials (DBOM).
Speakers:
Bob Boule
Robert Boule is a technology enthusiast with PASSION for technology and making things work along with a knack for helping others understand how things work. He comes with around 20 years of solution engineering experience in application security, software continuous delivery, and SaaS platforms. He is known for his dynamic presentations in CI/CD and application security integrated in software delivery lifecycle.
Gopinath Rebala
Gopinath Rebala is the CTO of OpsMx, where he has overall responsibility for the machine learning and data processing architectures for Secure Software Delivery. Gopi also has a strong connection with our customers, leading design and architecture for strategic implementations. Gopi is a frequent speaker and well-known leader in continuous delivery and integrating security into software delivery.
DevOps and Testing slides at DASA ConnectKari Kakkonen
My and Rik Marselis slides at 30.5.2024 DASA Connect conference. We discuss about what is testing, then what is agile testing and finally what is Testing in DevOps. Finally we had lovely workshop with the participants trying to find out different ways to think about quality and testing in different parts of the DevOps infinity loop.
Transcript: Selling digital books in 2024: Insights from industry leaders - T...BookNet Canada
The publishing industry has been selling digital audiobooks and ebooks for over a decade and has found its groove. What’s changed? What has stayed the same? Where do we go from here? Join a group of leading sales peers from across the industry for a conversation about the lessons learned since the popularization of digital books, best practices, digital book supply chain management, and more.
Link to video recording: https://bnctechforum.ca/sessions/selling-digital-books-in-2024-insights-from-industry-leaders/
Presented by BookNet Canada on May 28, 2024, with support from the Department of Canadian Heritage.
Accelerate your Kubernetes clusters with Varnish CachingThijs Feryn
A presentation about the usage and availability of Varnish on Kubernetes. This talk explores the capabilities of Varnish caching and shows how to use the Varnish Helm chart to deploy it to Kubernetes.
This presentation was delivered at K8SUG Singapore. See https://feryn.eu/presentations/accelerate-your-kubernetes-clusters-with-varnish-caching-k8sug-singapore-28-2024 for more details.
5. Background
• Thin film deposition
• Metal Organic Chemical Vapor Deposition
Application
- Solar cell
- Power chip
Process condition
- High temperature
- High vacuum
Deposition
Chemical Vapor Deposition
MOCVD
PECVD
Physical Vapor Deposition
Evaporation
Sputtering
Vapor
Deposition
Liquid Phase
Epitaxy
Wafer
Curvature
Growth
Rate
Film
Uniformity
Wafer
Temperature
Source: itri
6. Literatures review (Growth rate & Temperature)
• Thin film growth rate measurement
Quartz crystal microbalance
a
Reflectance interferometry
b
• Temperature measurement
Two-color and Multi-wavelength pyrometry
c
a: C. S. Lu and O. Lewis, “Investigation of film ‐ thickness determination by oscillating quartz
resonators with large mass load”, 1972.
b: J.A. Dobrowolski, “Optical Properties of Thin Films and Coating” Chap.42 of Handbook of Optics,
McGraw-Hill, Inc, 1995.
c: B. Müller, U. Renz, “Development of a fast fiber-optic two-color pyrometer for the temperature
measurement of surfaces with varying emissivities”, Review of Scientific Instruments, 2001.
Source: ADVANTEST
Source: c
12. Measurement of Growth rate
• Index of refraction and growth rate
nfsolven
nTn
w
G
24
nGw
4
sL RRR 0
T
w
2
2
2
2
0
2
0
)(
)(
)(
)(
s
s
L
nn
nn
nn
nn
R
021214214122f(n)
222234
LsssLssssLsLL RnnnnRnnnnnRnnRnR
)cos(21
)cos(2
00
002
ss
ss
RRRR
RRRR
rR
nGtnd
22
Substrate
Light Ii
Reflected
Light Io
2
22
2
2
0
2
0
2
0
02
00
)(
)(
)(
)(
s
s
s
s
ss
nn
nn
NN
NN
rR
nn
nn
NN
NN
rR
13. Blackbody Radiation Theorem
0 1000 2000 3000 4000 5000 6000 7000
0
5
10
15
20
25
30
600℃
700℃
800℃
900℃
1000℃
1100℃
1200℃
(nm)
E
b
(Wm-2
sr-1
nm-1
)
• Planck’s law
1
1
,
2
5
1
T
cb
e
c
TE
• Kirchhoff’s law
• Real-body radiation
TETE breal ,,
1
1
1c
2c
: Planck’s first constant
: Planck’s second constant
: Absorption
: Reflectance
: Transmittance
: Emissivity
14. Measurement of temperature
• Opaque & Specular substrate
1
T
=
1
Tcal
-
l
c2
ln
s
scal
R 1
• Temperature equation
• Thermal signal
s = C0 eEb = C0 e
c1
l5
exp -
c2
lT
æ
è
ç
ö
ø
÷
r
A
r
s
Filter
Detector
0C : System constant
cal: Calibration parameter
19. ZnO thin film deposition
Index of refraction Thin film thickness (mm)
Reference Measured Reference Measured
1.998 1.96 0.2727 0.272*
Relative difference: 2% Relative difference: 0.3%
Table. 1 Measurement results of the ZnO thin film
Measured thickness = Growth rate × depositing time
= 0.1515 Å /s × 5 hr
• The ZnO thin film deposit on the silicon wafer
• Monitor the growth rate, refractive index, thickness of ZnO
ZnO deposit on the wafer by radio-frequency
sputter
Reflectance Curve of ZnO film
20. Wafer temperature measurement
CP 400 nm 940 nm
(a). (b). (b)-(a) (c). (c)-(a)
455.4 450.5 -4.9 456.5 1.1
542.1 540.4 -2.3 541.3 -0.8
615.5 615.1 -0.4 615.7 0.2
701.7 702.0 0.3 701.8 0.1
781.6 780.8 -0.8 781.2 -0.4
858.5 858.6 0.1 858.6 0.1
943.0 943.2 0.2 943.1 0.1
Table. 2 The Measurement results and compare with
commercial pyrometer, (a) measured by commercial pyrometer,
CP, (b) by 400 nm NBF, and (c) by 940 nm NBF. (unit: °C).
Measurement system set on the heating chamber
600 650 700 750 800 850 900 950 1000
-3
-2
-1
0
1
2
3
Time(s)
Temperature(℃)
System resolution:0.67 ℃ at 580 ℃
• Heating single silicon wafer by the heating
vacuum chamber
• Monitor the wafer surface temperature and
analysis the system resolution
26. Conclusion
• An in-situ monitoring system for MOCVD process
• Performance(compared with commercial pyrometer)
Thin film parameters measurement
» Relative difference of refractive index < 2%
» Relative difference of thickness < 0.3%
Temperature measurement
» Relative difference is less than 1%
» Measurement limit:above 450 ℃
Wafer curvature measurement
» Relative difference is about 1%