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MICRO AND NANO
MANUFACTURING
 “Micro manufacturing is the set of processes or techniques
used to fabricate micro components or to create a micro
features on macro/micro parts”.
 Micro - (symbol μ)Confirmed in 1960, the terms comes from
the Greek μικρός (mikrós), meaning "small".
 There are various types of micro manufacturing process such
as subtractive, additive, mass containing, joining.
 These process are sub divided into various process like,
Diamond turning, laser welding, micro drilling, micro
casting, micro molding.
 Diamond turning is mechanical
machining of precision element
using laths or derivative machine
tool equipped with natural or
synthetic diamond tipped tool bit.
 Diamond turning has been used to
machine microgrooves 2.5-μm
wide by 1.6-μm deep in copper
with 10 mm surface finishing.
 Optical elements produce by the
means of diamond turning are used
in optical assemblies in telescope,
video projector, missile guidance
system, lasers etc.
 There are tow types of laser
beam welding such as surface
heating, TTIR welding.
 Through transmission infrared
(TTIR) welding: It is based on
the concept of passing laser
radiations through one of the
component to be welded while
having the second component
absorb the light at the interface.
 This absorption results in
heating and melting of the
interface and allows the part to
be welded.
 Manufacturing at nano scale is known as Nano manufacturing.
One nanometer is one billionth of a meter i.e. 10−9
 The term Nano was first proposed by K . Eric Drexler in the
1970s.
 There are two basic approaches to nano manufacturing either
“top-down” or “bottom-up”
 Top down approaches is further divided in Focusd beam
lithography and nano imprint lithography
 Bottom down approach is divided into CVD and Dip pen
lithography.
 As the diagram shows, the gallium
(Ga+) primary ion beam hits the
sample surface and sputters a small
amount of material, which leaves
the surface as either secondary ions
(i+ or i-) or neutral atoms (n0).
 The primary beam also produces
secondary electrons (e−). As the
primary beam rosters on the sample
surface, the signal from the
sputtered ions or secondary
electrons is collected to form an
image.
 Nano imprint lithography is a
lithography technique we use to
make nanostructure substrates
 The stamps are pressed into
polymeric material (resist) that
was previously deposited on the
substrate.
 When the stamp is filled with
polymer, it is treated by UV
light through the stamp,
obtaining the stamp shape.
 A residual layer of resist is left
and can be removed
 A metal layer can be deposited
on the sample, when the resist is
removed, the nanoscale metal
structure is left on the substrate.
 Chemical vapor deposition (CVD)
is a chemical process used to
produce high quality, high-
performance, solid materials. The
process is often used in
the semiconductor industry to
produce thin films.
 In typical CVD,
the wafer (substrate) is exposed to
one or more volatile precursors,
which react and/or decompose on
the substrate surface to produce the
desired deposit. Frequently,
volatile by-products are also
produced, which are removed by
gas flow through the reaction
chamber.
 In DPN the tip of AFM
cantilever as a “pen”, which is
coated with chemical compound
acting as an “ink” and put in
contact with substrate, the
“paper”.
 Note that “liquid ink” are
governed by a very different
deposition mechanism when
compared to “molecular ink”.
 Molecular ink diffusing from a
nanoscale tip to a surface
through a water ,meniscus.
Nano
Applications
Nano Robots
 Fig.1 shows an array of
holes, each measuring
approximately 125
nanometers in length,
was precision-drilled with a
computer-controlled focused
ion beam.
 Fig.2 shows, a focused ion
beam created this two-
micron-wide gear, seen here
at 50,000x magnification
Fig.2
 Micromanufacturing Engineering and Technology By Yi Qin.
 Micro and nano manufacturing By Mark J. Jackson.
 Micro fabrication and nano manufacturing By Mark J.
Jackson.
 Images imported from Google images.
Micro and nano manufacturing

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Micro and nano manufacturing

  • 2.  “Micro manufacturing is the set of processes or techniques used to fabricate micro components or to create a micro features on macro/micro parts”.  Micro - (symbol μ)Confirmed in 1960, the terms comes from the Greek μικρός (mikrós), meaning "small".  There are various types of micro manufacturing process such as subtractive, additive, mass containing, joining.  These process are sub divided into various process like, Diamond turning, laser welding, micro drilling, micro casting, micro molding.
  • 3.  Diamond turning is mechanical machining of precision element using laths or derivative machine tool equipped with natural or synthetic diamond tipped tool bit.  Diamond turning has been used to machine microgrooves 2.5-μm wide by 1.6-μm deep in copper with 10 mm surface finishing.  Optical elements produce by the means of diamond turning are used in optical assemblies in telescope, video projector, missile guidance system, lasers etc.
  • 4.  There are tow types of laser beam welding such as surface heating, TTIR welding.  Through transmission infrared (TTIR) welding: It is based on the concept of passing laser radiations through one of the component to be welded while having the second component absorb the light at the interface.  This absorption results in heating and melting of the interface and allows the part to be welded.
  • 5.
  • 6.  Manufacturing at nano scale is known as Nano manufacturing. One nanometer is one billionth of a meter i.e. 10−9  The term Nano was first proposed by K . Eric Drexler in the 1970s.  There are two basic approaches to nano manufacturing either “top-down” or “bottom-up”  Top down approaches is further divided in Focusd beam lithography and nano imprint lithography  Bottom down approach is divided into CVD and Dip pen lithography.
  • 7.  As the diagram shows, the gallium (Ga+) primary ion beam hits the sample surface and sputters a small amount of material, which leaves the surface as either secondary ions (i+ or i-) or neutral atoms (n0).  The primary beam also produces secondary electrons (e−). As the primary beam rosters on the sample surface, the signal from the sputtered ions or secondary electrons is collected to form an image.
  • 8.  Nano imprint lithography is a lithography technique we use to make nanostructure substrates  The stamps are pressed into polymeric material (resist) that was previously deposited on the substrate.  When the stamp is filled with polymer, it is treated by UV light through the stamp, obtaining the stamp shape.  A residual layer of resist is left and can be removed  A metal layer can be deposited on the sample, when the resist is removed, the nanoscale metal structure is left on the substrate.
  • 9.  Chemical vapor deposition (CVD) is a chemical process used to produce high quality, high- performance, solid materials. The process is often used in the semiconductor industry to produce thin films.  In typical CVD, the wafer (substrate) is exposed to one or more volatile precursors, which react and/or decompose on the substrate surface to produce the desired deposit. Frequently, volatile by-products are also produced, which are removed by gas flow through the reaction chamber.
  • 10.  In DPN the tip of AFM cantilever as a “pen”, which is coated with chemical compound acting as an “ink” and put in contact with substrate, the “paper”.  Note that “liquid ink” are governed by a very different deposition mechanism when compared to “molecular ink”.  Molecular ink diffusing from a nanoscale tip to a surface through a water ,meniscus.
  • 12.  Fig.1 shows an array of holes, each measuring approximately 125 nanometers in length, was precision-drilled with a computer-controlled focused ion beam.  Fig.2 shows, a focused ion beam created this two- micron-wide gear, seen here at 50,000x magnification Fig.2
  • 13.  Micromanufacturing Engineering and Technology By Yi Qin.  Micro and nano manufacturing By Mark J. Jackson.  Micro fabrication and nano manufacturing By Mark J. Jackson.  Images imported from Google images.