This document discusses micro and nano manufacturing techniques such as micro turning, micro drilling, and micro milling. Micro turning can produce mirror surfaces with less than 10 nm surface roughness and is used to machine hard materials without subsurface damage. Micro drills as small as 5-50 μm in diameter are used to drill holes in PCBs, inkjet printer nozzles, and other applications. Micro milling is capable of creating 3D features from a few microns to hundreds of microns in size and drilling holes tens of microns in size. Machine tools such as ultra-precision lathes, Swiss-type lathes, and spindles with speeds over 500,000 rpm are used to enable these micro manufacturing processes.

1. Micro and Nano
Manufacturing
(7ME6.1A)- Part I
Mohit Ostwal
Assistant Professor
Department of Mechanical Engineering
Jodhpur Institute of Engineering and Technology- Coed, Jodhpur

2. Nano scale cutting

3. Nano scale cutting

4. Nano scale cutting

5. Chip formation in micro cutting

6. Chip formation in micro cutting

7. Chip formation in micro cutting

8. Diamond cutting tool

9. Example of nano scale cutting

10. Micro turning

11. Micro turning
• Characteristic Features and application
• Swiss-type machine tools, ultra-precision lathes for diamond
turning and miniature desktop machines, are used to perform
micro turning operations on parts made of different materials.
• Maximum Machining Diameter – 7 mm
Maximum Machining Length – 40 mm
• Hard to machine surfaces such as electroless nickel, glass ,
ceramics, quartz etc. without any subsurface damage.
• Mirror surfaces of less than 10 nm surface finish can be obtained.
• Ultra-precision diamond turning – electroless nickel dies – plastic
optical parts for LCD Tv’s (less than 6 nm)

12. Micro turning
• Micro turning tools and tooling system
• Miniaturized tools with clamping – Swiss type lathe or multi
purpose tooling system – Used as a tool block
• Monolithic carbide tools – boring and grooving – smallest
diameter of 0.2 mm to 4 mm maximum.

13. Micro turning
• Micro turning tools and tooling system (contd.)
• Special tooling system – turning, boring, cutt-off and drilling.
• System consists of clamping unit and cutting unit.
• Machine uptime reduce to 25-40%

14. Rotating tool head for micro
turning operation

15. Micro turning
Machine tools for micro turning
• In general – CNC automatic lathe, sliding head mechanism
• Swiss type Lathe
• Swiss type turning centers with milling, drilling, boring – single setup with lower
cost –upto 4mm dia..
• Sliding head stock – 32 mm max. dia. with bar feeder.
• 12000 rpm – with guide bushes and 16000 rpm without guide bushes.
• 10000 rpm – sub spindles for milling, drilling.

16. Micro turning

17. Micro turning

18. Micro turning

19. Micro drilling

20. Micro drilling
• Characteristic Features and application
• Holes – tens of micrometers – PCB
• Inkjet printers – single row of 251 holes – 50 μm dia.
• Used below 0.5 mm.
• Minimum diameter of micro drills -> 5-50 μm.
• Advantages of micro drilling:
1. Metals, plastics and composites can be drilled – electrical
properties do not influence the workpiece (wire EDM).
2. Controllability
• Disadvantages of micro drilling:
1. Inclination of holes
2. Brittle and hard materials – break micro drills – diamond drills.

21. Micro drilling
• Microdrills and tooling system
• HSS(resistant to breaking) to carbide(stiffer but brittle).
• Diameter range – 0.12 mm to 2.8 mm.
• Drilling of Aircraft Al, Titanium, SS, Steel.
• 10 mm length with shank.

22. Micro drilling
• Microdrills and tooling system
• 0.3 mm HSS micro drill

23. Micro drilling (contd.)
Micro drills of the smallest obtainable diameter of approximately 6 μm with a D-shape
cross-section and a cutting edge radius of 0.5 μm can be fabricated by wire
electro-discharge grinding

24. Micro drill
• Machine tools for microdrilling

25. Micro drill
• Machine tools for microdrilling (contd.)
• Precision to eliminate hand finishing – Air bearing spindle –
500000 rpm(max.) – 180000(current) – 160000(ball bearing).

26. Micro drill
• Machine tools for microdrilling (contd.)
• Precision to eliminate hand finishing – Air bearing spindle –
500000 rpm(max.) – 180000(current) – 160000(ball bearing).

27. Micro drill -USM

28. Micro Drilling

29. Burr formation

31. MEMS Parts- silicon mirror
assembly

32. Micro milling example
• Used to create 3D features in the range of a few microns to a few
hundred microns.
• Micro milling is capable of the fabricating holes several tens of
micrometers in size for practical applications.

33. Micro manufacturing example
• A mite measuring 500m long sits on a mirror array used for optical data switching.
• The mirror [flat in the left image, folded in the right] is positioned with a gear mechanism

34. A focused ion beam created this two-micron-wide gear,
seen here at 50,000x magnification