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MOS Capacitor
Arpan Deyasi
Dept of ECE, RCCIIT, Kolkata, India
11/3/2020 1Arpan Deyasi, RCCIIT, India
11/3/2020 Arpan Deyasi, RCCIIT, India 2
Are MOS & MOSFET are same?
No
Let’s make the journey to the world of MOS
11/3/2020 Arpan Deyasi, RCCIIT, India 3
Substrate
Insulator
material
Conducting
Layer
Consider a semiconducting substrate
Formation of MIS structure
Grow insulating material on top of
the substrate
Make a metal layer deposition on the
insulating layer
Apply bias on the two contact layers
11/3/2020 Arpan Deyasi, RCCIIT, India 4
MIS MOS
Semiconductor
substrate
Oxide
Conducting
Layer
Insulating layer will be the oxide layer
Convention:
Conducting layer: Metal (Al)
Insulating layer: Oxide (SiO2)
Substrate layer: Semiconductor (Si)
11/3/2020 Arpan Deyasi, RCCIIT, India 5
To understand its electronic properties,
we need to understand it’s band diagram
Since it is a heterostructure,
we have to consider vacuum level as the reference level
Q: What is heterostructure?
11/3/2020 6
Need to brush up with Band Structure?
Work Function (Φs)
Electron Affinity (χs)
Arpan Deyasi, RCCIIT, India
11/3/2020 Arpan Deyasi, RCCIIT, India 7
Band Diagram of MOS [Al-SiO2-Si(n)]
EFm
χ =
4.25
eV
ECI
χ = 0.9 eV
EVI
Eg =
8.76
eV
ECS
EVS
Eg =
1.12
eV
χ =
4.05
eV
EFS
ΦF
E0
(Al) (SiO2) (Si)
11/3/2020 Arpan Deyasi, RCCIIT, India 8
This is the band diagram at unbiased condition
Q. If bias is applied,
how the band diagram will be deviated?
11/3/2020 Arpan Deyasi, RCCIIT, India 9
Application of bias in MOS Structure
1. Positive bias at metal side
2. Negative bias at metal side
11/3/2020 Arpan Deyasi, RCCIIT, India 10
Property of semiconductor will play a vital role
[i] Al-SiO2-Si(n)
[ii] Al-SiO2-Si(p)
1. Positive bias at metal side
1. Positive bias at metal side
2. Negative bias at metal side
2. Negative bias at metal side
11/3/2020 Arpan Deyasi, RCCIIT, India 11
Al-SiO2-Si(p) under different biasing conditions
Al SiO2 Si
VM < 0
Al SiO2 Si
ΦAl
ΦSi
Ec
EV
EFP
Ei
χSiO2
χSi
Ec
EV
EFP
Ei
Accumulation
ΨF
ΨS
11/3/2020 Arpan Deyasi, RCCIIT, India 12
Al-SiO2-Si(p) under different biasing conditions
Al SiO2 Si
ΦAl
ΦSi
Ec
EV
EFP
Ei
χSiO2
χSi
Al SiO2 Si
VM>0 & small
Ec
EV
EFP
Ei
Depletion
ΨF
ΨS
11/3/2020 Arpan Deyasi, RCCIIT, India 13
Al-SiO2-Si(p) under different biasing conditions
Ec
EV
EFP
Ei
Al SiO2 Si
VM>0 & small
Depletion
VM>0 & large
Al SiO2 Si
1
2
point of
inversion
3
Inversion
ΨF
ΨS
11/3/2020 Arpan Deyasi, RCCIIT, India 14
Relation between ΨS & ΨF for Al-SiO2-Si(p)
Accumulation: ΨS < ΨF & ΨS <0
Depletion: ΨS < ΨF
Point of Inversion: ΨS = ΨF
Inversion: ΨS > ΨF
11/3/2020 Arpan Deyasi, RCCIIT, India 15
Bending of band for Al-SiO2-Si(p)
Accumulation: upward bending
Depletion: Downward bending
(EFp does not cross EFi)
Point of Inversion: Downward bending
(Efp touches Efi)
Inversion: Downward bending
(EFp crosses EFi)

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Foundation of MOS Capacitor

  • 1. MOS Capacitor Arpan Deyasi Dept of ECE, RCCIIT, Kolkata, India 11/3/2020 1Arpan Deyasi, RCCIIT, India
  • 2. 11/3/2020 Arpan Deyasi, RCCIIT, India 2 Are MOS & MOSFET are same? No Let’s make the journey to the world of MOS
  • 3. 11/3/2020 Arpan Deyasi, RCCIIT, India 3 Substrate Insulator material Conducting Layer Consider a semiconducting substrate Formation of MIS structure Grow insulating material on top of the substrate Make a metal layer deposition on the insulating layer Apply bias on the two contact layers
  • 4. 11/3/2020 Arpan Deyasi, RCCIIT, India 4 MIS MOS Semiconductor substrate Oxide Conducting Layer Insulating layer will be the oxide layer Convention: Conducting layer: Metal (Al) Insulating layer: Oxide (SiO2) Substrate layer: Semiconductor (Si)
  • 5. 11/3/2020 Arpan Deyasi, RCCIIT, India 5 To understand its electronic properties, we need to understand it’s band diagram Since it is a heterostructure, we have to consider vacuum level as the reference level Q: What is heterostructure?
  • 6. 11/3/2020 6 Need to brush up with Band Structure? Work Function (Φs) Electron Affinity (χs) Arpan Deyasi, RCCIIT, India
  • 7. 11/3/2020 Arpan Deyasi, RCCIIT, India 7 Band Diagram of MOS [Al-SiO2-Si(n)] EFm χ = 4.25 eV ECI χ = 0.9 eV EVI Eg = 8.76 eV ECS EVS Eg = 1.12 eV χ = 4.05 eV EFS ΦF E0 (Al) (SiO2) (Si)
  • 8. 11/3/2020 Arpan Deyasi, RCCIIT, India 8 This is the band diagram at unbiased condition Q. If bias is applied, how the band diagram will be deviated?
  • 9. 11/3/2020 Arpan Deyasi, RCCIIT, India 9 Application of bias in MOS Structure 1. Positive bias at metal side 2. Negative bias at metal side
  • 10. 11/3/2020 Arpan Deyasi, RCCIIT, India 10 Property of semiconductor will play a vital role [i] Al-SiO2-Si(n) [ii] Al-SiO2-Si(p) 1. Positive bias at metal side 1. Positive bias at metal side 2. Negative bias at metal side 2. Negative bias at metal side
  • 11. 11/3/2020 Arpan Deyasi, RCCIIT, India 11 Al-SiO2-Si(p) under different biasing conditions Al SiO2 Si VM < 0 Al SiO2 Si ΦAl ΦSi Ec EV EFP Ei χSiO2 χSi Ec EV EFP Ei Accumulation ΨF ΨS
  • 12. 11/3/2020 Arpan Deyasi, RCCIIT, India 12 Al-SiO2-Si(p) under different biasing conditions Al SiO2 Si ΦAl ΦSi Ec EV EFP Ei χSiO2 χSi Al SiO2 Si VM>0 & small Ec EV EFP Ei Depletion ΨF ΨS
  • 13. 11/3/2020 Arpan Deyasi, RCCIIT, India 13 Al-SiO2-Si(p) under different biasing conditions Ec EV EFP Ei Al SiO2 Si VM>0 & small Depletion VM>0 & large Al SiO2 Si 1 2 point of inversion 3 Inversion ΨF ΨS
  • 14. 11/3/2020 Arpan Deyasi, RCCIIT, India 14 Relation between ΨS & ΨF for Al-SiO2-Si(p) Accumulation: ΨS < ΨF & ΨS <0 Depletion: ΨS < ΨF Point of Inversion: ΨS = ΨF Inversion: ΨS > ΨF
  • 15. 11/3/2020 Arpan Deyasi, RCCIIT, India 15 Bending of band for Al-SiO2-Si(p) Accumulation: upward bending Depletion: Downward bending (EFp does not cross EFi) Point of Inversion: Downward bending (Efp touches Efi) Inversion: Downward bending (EFp crosses EFi)