The document describes the fabrication of thin films using a modified physical vapor deposition (PVD) module. Titanium dioxide and aluminum thin films were deposited on silicon substrates. The process involved evaporating the materials in a vacuum chamber using a tungsten boat. Samples were characterized using optical microscopy, atomic force microscopy, scanning electron microscopy, X-ray diffraction, and I-V testing. The results showed that the surface morphology and thickness of the thin films changed with increasing evaporation time. Optical microscopy images showed different surface structures after 1, 5, and 15 minutes of evaporation. Atomic force microscopy revealed the topography, thickness, and roughness of the titanium dioxide and aluminum thin films.
Process flow of spray pyrolysis techniqueIOSR Journals
The chemical spray pyrolysis technique (SPT) has been, throughout last 3 decades, one amongst the most important techniques to deposit a large type of materials in thin film kind. The prime requisite for getting sensible quality thin film is that the optimization of propaedeutic conditions viz. substrate temperature, spray rate, concentration of solution etc. However, in recent years a stress has been given to a range of atomization techniques like supersonic nebulisation, improved spray reaction, corona spray transformation, electricity spray transformation and microchip primarily based spray transformation. This is often the foremost crucial parameter because it permits management over the scale of the droplets and their distribution over the preheated substrates. An intensive review of thin film materials ready throughout the last ten years is given to demonstrate the flexibility of the chemical SPT. the assorted conditions to get thin films of metal compound, metallic mineral oxides, binary, ternary and quaternary chalcogenides and superconducting oxides are given. The consequences of precursor, dopants, substrate temperature, post tempering treatments, answer concentration etc., on the physico-chemical properties of those films are given likewise. It’s discovered that the properties of thin films rely significantly on the propaedeutic conditions. The properties of the thin film will be simply tailored by adjusting or optimizing these conditions that successively are appropriate for a specific application.
Process flow of spray pyrolysis techniqueIOSR Journals
The chemical spray pyrolysis technique (SPT) has been, throughout last 3 decades, one amongst the most important techniques to deposit a large type of materials in thin film kind. The prime requisite for getting sensible quality thin film is that the optimization of propaedeutic conditions viz. substrate temperature, spray rate, concentration of solution etc. However, in recent years a stress has been given to a range of atomization techniques like supersonic nebulisation, improved spray reaction, corona spray transformation, electricity spray transformation and microchip primarily based spray transformation. This is often the foremost crucial parameter because it permits management over the scale of the droplets and their distribution over the preheated substrates. An intensive review of thin film materials ready throughout the last ten years is given to demonstrate the flexibility of the chemical SPT. the assorted conditions to get thin films of metal compound, metallic mineral oxides, binary, ternary and quaternary chalcogenides and superconducting oxides are given. The consequences of precursor, dopants, substrate temperature, post tempering treatments, answer concentration etc., on the physico-chemical properties of those films are given likewise. It’s discovered that the properties of thin films rely significantly on the propaedeutic conditions. The properties of the thin film will be simply tailored by adjusting or optimizing these conditions that successively are appropriate for a specific application.
A review on advanced ceramic processing techniquesAlokjyoti Dash
This Presentation enlists and describes most ceramic process and most parameters which affect these ceramic processing. A reader shall understand the basic of these presented process to fabricate unique ceramic materials
Effect of PVD Coating and Carburizing on Wear Characteristics of Low Carbon S...IJERD Editor
Wear is a relative cyclic motion with small amplitude which occurs between two oscillating
surfaces, depending upon the loading conditions, material properties and environment. Surface Engineering
such as surface treatment, coating and surface modifications are employed to minimise the friction and improve
wear resistance of steel. In this work the low carbon steel substrate is coated with Al2O3 by using physical
vapour deposition process and the other sampling material is heat treated by carburizing process. In the present
study, the wear resistance of heat treated and coated steels were evaluated through the pin-on-disk using
variable loads and wear is measured by the wear track width and wear graphs are shown for coated material and
heat treated material. Finally, the comparison is concluded by observing the variations in wear characteristics
between the two samples. Furthermore morphological study of wear is made for in-depth analysis
Fundamentals, synthesis and applications of Al2O3-ZrO2 compositesTANDRA MOHANTA
When the word “Ceramic” comes to our mind, we usually associate them with plates, saucers, cups and mugs. But, the word “Ceramic” encompasses more than just the word “plates” or “saucers”. Indeed, ceramic materials are hard and inherently brittle, but this is just the tip of the iceberg. They have multifarious properties and have acquired a status of high technical importance in the field of scientific research. Ceramics are the soul of the modern day’s structural applications owing to their high mechanical and thermal stability under different challenging conditions. They exhibit remarkable properties such as high hardness, high wear resistance, high corrosion resistance, high elastic modulus, high melting point and the ability to retain high strength at elevated temperatures. Alumina (Al2O3) is one such remarkable ceramic material known for its unique optical, mechanical and electrical properties. But the brittle nature of Al2O3 limits its use in certain engineering applications. Therefore, the strength of Al2O3 and Al2O3- based ceramics can be enhanced by tailoring the microstructural design through the application of strategic techniques that may involve secondary phase particle inclusion (such as Zirconia, ZrO2)
Definition of coating,advantages of coating, types of coating,brief explanation of each type of coating giving process aaplication advatanges about organic coating, inorganic coating,metallic coating,conversion coating, precoated metals coating hot dipping, electroplating
A review on advanced ceramic processing techniquesAlokjyoti Dash
This Presentation enlists and describes most ceramic process and most parameters which affect these ceramic processing. A reader shall understand the basic of these presented process to fabricate unique ceramic materials
Effect of PVD Coating and Carburizing on Wear Characteristics of Low Carbon S...IJERD Editor
Wear is a relative cyclic motion with small amplitude which occurs between two oscillating
surfaces, depending upon the loading conditions, material properties and environment. Surface Engineering
such as surface treatment, coating and surface modifications are employed to minimise the friction and improve
wear resistance of steel. In this work the low carbon steel substrate is coated with Al2O3 by using physical
vapour deposition process and the other sampling material is heat treated by carburizing process. In the present
study, the wear resistance of heat treated and coated steels were evaluated through the pin-on-disk using
variable loads and wear is measured by the wear track width and wear graphs are shown for coated material and
heat treated material. Finally, the comparison is concluded by observing the variations in wear characteristics
between the two samples. Furthermore morphological study of wear is made for in-depth analysis
Fundamentals, synthesis and applications of Al2O3-ZrO2 compositesTANDRA MOHANTA
When the word “Ceramic” comes to our mind, we usually associate them with plates, saucers, cups and mugs. But, the word “Ceramic” encompasses more than just the word “plates” or “saucers”. Indeed, ceramic materials are hard and inherently brittle, but this is just the tip of the iceberg. They have multifarious properties and have acquired a status of high technical importance in the field of scientific research. Ceramics are the soul of the modern day’s structural applications owing to their high mechanical and thermal stability under different challenging conditions. They exhibit remarkable properties such as high hardness, high wear resistance, high corrosion resistance, high elastic modulus, high melting point and the ability to retain high strength at elevated temperatures. Alumina (Al2O3) is one such remarkable ceramic material known for its unique optical, mechanical and electrical properties. But the brittle nature of Al2O3 limits its use in certain engineering applications. Therefore, the strength of Al2O3 and Al2O3- based ceramics can be enhanced by tailoring the microstructural design through the application of strategic techniques that may involve secondary phase particle inclusion (such as Zirconia, ZrO2)
Definition of coating,advantages of coating, types of coating,brief explanation of each type of coating giving process aaplication advatanges about organic coating, inorganic coating,metallic coating,conversion coating, precoated metals coating hot dipping, electroplating
What improvements should be expected in the next generation dioxide grades for the following applications?
• Paint and Coatings;
• Plastics;
• Décor Paper.
Due to what can these results be achieved?
This Presentation of RD Titan Group Innovative TiO2 for TiO2 World Summit in Clevelend (4th-6th October 2016) will give the answers to these questions.
Fabrication of microfluidic channels in glass and siliconYichen Sun
Microfluidic channels in glass and silicon chips are fabricated in the cleanroom. Their acoustic focusing properties are then tested and reported in this project report (MEMS 5801).
Influence of Field Assisted Chemical Spray Pyrolysis Deposition Technique on the Structural and Optical Properties of CdS Thin Films
Original Research Article
Journal of Chemistry and Materials Research Vol. 1 (2), 2014, 23–27
U.U. Iwok*, J.A. Bwamba, N.O. Alu, K.K. Adama, Z. Abdullahi, A.C. Egba, A.A. Oberafo, B.O. Akogwu
Detecting of NH3, CO2 polluted gases by using ZnO- In2O3 thin filmsijceronline
International Journal of Computational Engineering Research (IJCER) is dedicated to protecting personal information and will make every reasonable effort to handle collected information appropriately. All information collected, as well as related requests, will be handled as carefully and efficiently as possible in accordance with IJCER standards for integrity and objectivity.
Detecting of NH3, CO2 polluted gases by using ZnO- In2O3 thin filmsijceronline
International Journal of Computational Engineering Research (IJCER) is dedicated to protecting personal information and will make every reasonable effort to handle collected information appropriately. All information collected, as well as related requests, will be handled as carefully and efficiently as possible in accordance with IJCER standards for integrity and objectivity.
Characterization Studies of CdS Nanocrystalline Film Deposited on Teflon Subs...IJLT EMAS
In this article, different substrates for deposition of
CdS material have been discussed. Till date glass, mica, quartz,
ceramic, etc. are commonly employed substrates in thin film
growth. In the present work, CdS is deposited on Teflon
substrate by chemical bath deposition (CBD) method. Also the
films were deposited on different substrates like glass, copper
and zinc and compared with those prepared on Teflon substrate.
The films prepared on Teflon substrate were uniform, stable and
also showed good radiating property. These films were further
characterized by UV-VIS absorption spectral studies, SEM and
EDS studies.
Applications of SiC-Based Thin Films in Electronic and MEMS DevicesMariana Amorim Fraga
Mariana Amorim Fraga, Rodrigo Sávio Pessoa, Marcos Massi and Homero Santiago Maciel (2012). Applications of SiC-Based Thin Films in Electronic and MEMS Devices, Physics and Technology of Silicon Carbide Devices, Dr. Yasuto Hijikata (Ed.), InTech, DOI: 10.5772/50998. Available from: https://www.intechopen.com/books/physics-and-technology-of-silicon-carbide-devices/applications-of-sic-based-thin-films-in-electronic-and-mems-devices
A micro-electromechanical system (MEMS) gyroscope is commonly used to monitor the angular rate of a moving body due to its benefits. The most promising advantages include its small size, low cost, and a high degree of integration. MEMS gyroscope has different fabrication processes and micromachining techniques. LIGA (Lithography-Galvanoformung-Abformung), bulk micromachining, surface micromachining, Silicon-on-glass (SOG) and Deep Reactive Ion Etching (DRIE) are the known fabrication techniques for MEMS gyroscope. This paper systematically reviewed the fabrication techniques used to fabricate the MEMS gyroscope. The current review paper also focuses on the performance of MEMS gyroscope which included several recent developments. For the conclusion of results, the variable typically used is the rate of turn (°/s) for MEMS angular rate sensors with respect to bandwidth frequency. Finally based on the review some analysis on fabrication technology, key principles, and performance parameters are discussed.
Exploratory study on the use of crushed cockle shell as partial sand replacem...IJRES Journal
The increasing demand for natural river sand supply for the use in construction industry along
with the issue of environmental problem posed by the dumping of cockle shell, a by-product from cockle
business have initiated research towards producing a more environmental friendly concrete. This research
explores the potential use of cockle shell as partial sand replacement in concrete production. Cockle shell used
in this experimental work were crushed to smaller size almost similar to sand before mixed in concrete. A total
of six concrete mixtures were prepared with varying the percentages of cockle shell viz. 0%, 5%, 10%, 15%,
20% and 25%. All the specimens were subjected to continuous water curing. The compressive strength test was
conducted at 28 days in accordance to BS EN 12390. Finding shows that integration of suitable content of
crushed cockle shell of 10% as partial sand replacement able to enhance the compressive strength of concrete.
Adopting crushed cockle shell as partial sand replacement in concrete would reduce natural river sand
consumption as well as reducing the amount of cockle shell disposed as waste.
Congenital Malaria: Correlation of Umbilical Cord Plasmodium falciparum Paras...IJRES Journal
The vertical (trans-placental) transmission of the parasite Plasmodium falciparum from
pregnant mother to fetus during gestational period was investigated in a clinical research involving 43 full term
pregnant women in selected Hospitals in Jimeta Yola, Adamawa State Nigeria. During the observational study,
parasitemia was determined by light microscopic examination of umbilical and maternal peripheral blood film
for the presence of the trophozoites of Plasmodium falciparum. Correlational analysis was then carried on the
result obtained at p<0.05.><0.05) was established between maternal peripheral blood and umbilical cord
blood parasitemia with Pearson’s correlation coefficient of 0.762. Thus, in a malaria endemic area like Yola,
Adamawa State, Nigeria, with a stable transmission of parasite, there is a high probability of vertical
transmission of Plasmodium falciparum parasite from mother to fetus during gestation that can be followed by
the presentation of the symptoms of malaria by the newborn and other malaria related complications. Families
are advised to consistently sleep under appropriately treated insecticide mosquito net to avoid mosquito bite and
subsequent infestation.
Review: Nonlinear Techniques for Analysis of Heart Rate VariabilityIJRES Journal
Heart rate variability (HRV) is a measure of the balance between sympathetic mediators of heart
rate that is the effect of epinephrine and norepinephrine released from sympathetic nerve fibres acting on the
sino-atrial and atrio-ventricular nodes which increase the rate of cardiac contraction and facilitate conduction at
the atrio-ventricular node and parasympathetic mediators of heart rate that is the influence of acetylcholine
released by the parasympathetic nerve fibres acting on the sino-atrial and atrio-ventricular nodes leading to a
decrease in the heart rate and a slowing of conduction at the atrio-ventricular node. Sympathetic mediators
appear to exert their influence over longer time periods and are reflected in the low frequency power(LFP) of
the HRV spectrum (between 0.04Hz and 0.15 Hz).Vagal mediators exert their influence more quickly on the
heart and principally affect the high frequency power (HFP) of the HRV spectrum (between 0.15Hz and 0.4
Hz). Thus at any point in time the LFP:HFP ratio is a proxy for the sympatho- vagal balance. Thus HRV is a
valuable tool to investigate the sympathetic and parasympathetic function of the autonomic nervous system.
Study of HRV enhance our understanding of physiological phenomenon, the actions of medications and disease
mechanisms but large scale prospective studies are needed to determine the sensitivity, specificity and predictive
values of heart rate variability regarding death or morbidity in cardiac and non-cardiac patients. This paper
presents the linear and nonlinear to analysis the HRV.
Dynamic Modeling for Gas Phase Propylene Copolymerization in a Fluidized Bed ...IJRES Journal
A two-phase model is proposed for describing the dynamics of a fluidized bed reactor used for
polypropylene production. In the proposed model, the fluidized bed is divided into an emulsion and bubble
phase where the flow of gas is considered to be plug flow through the bubbles and perfectly mixed through the
emulsion phase. Similar previous models, consider the reaction in the emulsion phase only. In this work the
contribution of reaction in the bubble phase is considered and its effect on the overall polypropylene production
is investigated the kinetic model is combined with hydrodynamic model in order to develop a comprehensive
model for gas-phase propylene copolymerization reactor. Simulation profiles of the proposed model were
compared with those of well mixed model for the emulsion phase temperature. The simulated temperature
profile showed a lower rate of change compared to the previously reported models due to lower polymerization
rate. Model simulation showed that about 13% of the produced polymer comes from the bubble phase and this
considerable amount of polymerization in the bubbles should not be neglected in any modeling attempt.
Study and evaluation for different types of Sudanese crude oil propertiesIJRES Journal
Sudanese crude oil is regarded as one of the sweet types of crude in the world, Sulphur containing
compounds are un desirable in petroleum because they de activate the catalyst during the refining processes and
are the main source of acid rains and environmental pollution.(Mark Cullen 2001),Since it contains considerable
amount of salts and acids, it negatively impact the production facilities and transportation lines with corrosive
materials. However it suffers other problems in flow properties represented by the high viscosity and high
percentage of wax. Samples were collected after the initial and final treatment at CPF, and tested for
physical and chemical properties.wax content is in the range 23-31 weight % while asphalting content is about
0.1 weight% . Resin content is 13-7 weight % and deposits are 0.01 weight%. The carbon number distribution in
the crude is in the range 7-35 carbon atoms. The pour point vary between 39°C-42°C and the boiling point is in
the range 70 °C - 533 °C.
A Short Report on Different Wavelets and Their StructuresIJRES Journal
This article consists of basics of wavelet analysis required for understanding of and use of wavelet
theory. In this article we briefly discuss about HAAR wavelet transform their space and structures.
A Case Study on Academic Services Application Using Agile Methodology for Mob...IJRES Journal
Recently, Mobile Cloud Computing reveals many modern development areas in the Information
Technology industry. Several software engineering frameworks and methodologies have been developed to
provide solutions for deploying cloud computing resources on mobile application development. Agile
methodology is one of the most commonly used methodologies in the field. This paper presents the MCCAS a
Web and Mobile application that provide feature for the Palestinian higher education/academic institutions. An
Agile methodology was used in the development of the MCCAS but in parallel with emphasis on Cloud
computing resources deployment. Also many related issues is discussed such as how software engineering
modern methodologies (advances) influenced the development process.
Wear Analysis on Cylindrical Cam with Flexible RodIJRES Journal
Firstly, the kinetic equation of spatial cylindrical cam with flexible rod has been established. Then, an
accurate cylindrical cam mechanism model has been established based on the spatial modeling software
Solidworks. The dynamic effect of flexible rod on mechanical system was studied in detail based on the
mechanical system dynamics analytical software Adams, and Archard wear model is used to predict the wear of
the cam. We used Ansys to create finite element model of the cam link, extracted the first five order mode to
export into Adams. The simulation results show that the dynamic characteristics of spatial cylindrical cam
mechanical system with flexible rod is closed to ideal mechanism. During the cam rotate one cycle, the collision
in the linkage with a clearance occurs in some special location, others still keep a continuous contact, and the
prediction of wear loss is smaller than rigid body.
DDOS Attacks-A Stealthy Way of Implementation and DetectionIJRES Journal
Cloud Computing is a new paradigm provides various host service [paas, saas, Iaas over the internet.
According to a self-service,on-demand and pay as you use business model,the customers will obtain the cloud
resources and services.It is a virtual shared service.Cloud Computing has three basic abstraction layers System
layer(Virtual Machine abstraction of a server),Platform layer(A virtualized operating system, database and
webserver of a server and Application layer(It includes Web Applications).Denial of Service attack is an attempt
to make a machine or network resource unavailable to the intended user. In DOS a user or organization is
deprived of the services of a resource they would normally expect to have.A Successful DOS attack is a highly
noticeable event impacting the entire online user base.DOS attack is found by First Mathematical Metrical
Method (Rate Controlling,Timing Window,Worst Case and Pattern Matching)DOS attack not only affect the
Quality of the service and also affect the performance of the server. DDOS attacks are launched from Botnet-A
large Cluster of Connected device(cellphone,pc or router) infected with malware that allow remote control by an
attacker. Intruder using SIPDAS in DDOS to perform attack.SIPDAS attack strategies are detected using Heap
Space Monitoring Algorithm.
An improved fading Kalman filter in the application of BDS dynamic positioningIJRES Journal
Aiming at the poor dynamic performance and low navigation precision of traditional fading
Kalman filter in BDS dynamic positioning, an improved fading Kalman filter based on fading factor vector is
proposed. The fading factor is extended to a fading factor vector, and each element of the vector corresponds to
each state component. Based on the difference between the actual observed quantity and the predicted one, the
value of the vector is changed automatically. The memory length of different channel is changed in real time
according to the dynamic property of the corresponding state component. The actual observation data of BDS is
used to test the algorithm. The experimental results show that compared with the traditional fading Kalman filter
and the method of the third references, the positioning precision of the algorithm is improved by 46.3% and
23.6% respectively.
Positioning Error Analysis and Compensation of Differential Precision WorkbenchIJRES Journal
Positioning error is a widely problem exists in mechanism, the important factors affecting machining
precision. In order to reduce the error caused by positioning problem processing, based on the differential
workbench as the research object, using the method of theoretical analysis and experimental verification, the
analysis of positioning error mechanism and source of complete differential precision workbench error
compensation, improve the accuracy of the device, provides a method for the application of modern machine
tools. table.
Status of Heavy metal pollution in Mithi river: Then and NowIJRES Journal
The Mithi River runs through the heart of suburban Mumbai. Its path of flow has been severely
damaged due to industrialization and urbanization. The quality of water has been deteriorating ever since. The
Municipal and industrial effluents are discharged in unchecked amounts. The municipal discharge comprises
untreated domestic and sewage wastes whereas the industries are majorly discharge chemicals and other toxic
effluents which are responsible in increasing the metal load of the river. In the current study, the water is
analysed for heavy metals- Copper, Cadmium, Chromium, Lead and Nickel. It also includes a brief
understanding on the fluctuations that have occurred in the heavy metal pollution, through the compilation of
studies carried out in the area previously.
The Low-Temperature Radiant Floor Heating System Design and Experimental Stud...IJRES Journal
In order to analyze the temperature distribution of the low-temperature radiant floor heating system
that uses the condensing wall-hung boiler as the heat source, the heating system is designed according to a typical
house facing south in Shanghai. The experiments are carried out to study the effects of the supply water
temperature on the thermal comfort of the system. Eventually, the supply water temperature that makes people in
the room feel more comfortable is obtained. The result shows that in the condition of that the outside temperature
is 8~15℃ and the relative humidity is 30~70%RH, the temperature distribution in the room is from high to low
when the height is from bottom to top. The floor surface temperature is highest, but its uniformity is very poor.
When the heating system reaches the steady state, the air temperature of the room is uniform. When the supply
water temperature is 63℃ The room is relatively comfortable at the above experimental condition.
Experimental study on critical closing pressure of mudstone fractured reservoirsIJRES Journal
In the process of oil and gas exploitation of mudstone-fractured reservoir in Daqing oilfield, the
permeability of fracture is easily affected by the influence of stress change, which is shown by the sensitivity of
the permeability to the stress. With the extension of time mining in the fractured mudstone reservoir, fracture
stress sensitivity is obvious in vast decline of production and great influence on reduced yields. In order to
reasonably determine the way of developing method, working system and the exploitation rate of the reservoir,
correspondingly protecting reservoir productivity, improve ultimate recovery. On the basis of the previous
research on the stress sensitivity of fractured mudstone, this essay studied the critical closing pressure of the
simulated underground fractured mudstone under the laboratory condition.
Correlation Analysis of Tool Wear and Cutting Sound SignalIJRES Journal
With the classic signal analysis and processing method, the cutting of the audio signal in time
domain and frequency domain analysis. We reached the following conclusions: in the time domain analysis,
cutting audio signals mean and the variance associated with tool wear state change occurred did not change
significantly, and tool wear is not high degree of correlation, and the mean-square value of the audio signal
changes in the size and tool wear the state has a good relationship.
Reduce Resources for Privacy in Mobile Cloud Computing Using Blowfish and DSA...IJRES Journal
Mobile cloud computing in light of the increasing popularity among users of mobile smart
technology which is the next indispensable that enables users to take advantage of the storage cloud computing
services. However, mobile cloud computing, the migration of information on the cloud is reliable their privacy
and security issues. Moreover, mobile cloud computing has limitations in resources such as power energy,
processor, Memory and storage. In this paper, we propose a solution to the problem of privacy with saving and
reducing resources power energy, processor and Memory. This is done through data encryption in the mobile
cloud computing by symmetric algorithm and sent to the private cloud and then the data is encrypted again and
sent to the public cloud through Asymmetric algorithm. The experimental results showed after a comparison
between encryption algorithms less time and less time to decryption are as follows: Blowfish algorithm for
symmetric and the DSA algorithm for Asymmetric. The analysis results showed a significant improvement in
reducing the resources in the period of time and power energy consumption and processor.
Resistance of Dryland Rice to Stem Borer (Scirpophaga incertulas Wlk.) Using ...IJRES Journal
Rice stem borer is one of the important pests that attack plants so as to reduce production. One way
to control pests is to use organic fertilizers that make the plant stronger and healthier. This study was conducted
to determine the effects of organic fertilizers with various doses without the use of pesticides in controlling stem
borer, Scirpophaga incertulas. Methods using split-split plot design which consists of two levels of the whole
plot factor (solid and liquid organic fertilizers), two levels of the subplot factor (conventional and industry,
Tiens and Mitraflora), and four levels of the sub-subplot factor of conventional and industry (5, 10, 15, 20
tonnes/ha), and one level of the sub-subplot factor of Tiens and Mitraflora (each 2 ml/l). Based on the results
Statistical analysis there were no significant differences among treatments and this shows that the use of organic
fertilizers that only a dose of 5 tonnes/ha is sufficient available nutrients that make plants more robust and
resistant to control stem borer, besides that can reduce production costs and friendly to the environment when
compared with using inorganic fertilizers.
A novel high-precision curvature-compensated CMOS bandgap reference without u...IJRES Journal
A novel high-precision curvature-compensated bandgap reference (BGR) without using op-amp
is presented in this paper. It is based on second-order curvature correction principle, which is a weighted sum of
two voltage curves which have opposite curvature characteristic. One voltage curve is achieved by first-order
curvature-compensated bandgap reference (FCBGR) without using op-amp and the other found by using W
function is achieved by utilizing a positive temperature coefficient (TC) exponential current and a linear
negative TC current to flow a linear resistor. The exponential current is gained by using anegative TC voltage to
control a MOSFET in sub-threshold region. In the temperature ranging from -40℃ to 125℃, experimental
results implemented with SMIC 0.18μm CMOS process demonstrate that the presented BGR can achieve a TC
as low as 2.2 ppm/℃ and power-supply rejection ratio(PSRR)is -69 dB without any filtering capacitor at 2.0 V.
While the range of the supply voltage is from 1.7 to 3.0 V, the output voltage line regulation is about1 mV/ V
and the maximum TC is 3.4 ppm/℃.
Structural aspect on carbon dioxide capture in nanotubesIJRES Journal
In this work we reported the carbon dioxide adsorption (CO2) in six different nanostructures in order
to investigate the capturing capacity of the materials at nanoscale. Here we have considered the three different
nanotubes including zinc oxide nanotube (ZnONT), silicon carbide nanotube (SiCNT) and single walled carbon
nanotube (SWCNT). Three different chiralities such as zigzag (9,0), armchair (5,5) and chiral (6,4) having
approximately same diameter are analyzed. The adsorption binding energy values under various cases are
estimated with density functional theory (DFT). We observed CO2 molecule chemisorbed on ZnONT and
SiCNT’s whereas the physisorption is predominant in CNT. To investigate the structural aspect, the tubes with
defects are studied and compared with defect free tubes. We have also analyzed the electrical properties of tubes
from HOMO, LUMO energies. Our results reveal the defected structure enhance the CO2 capture and is
predicted to be a potential candidate for environmental applications.
Thesummaryabout fuzzy control parameters selected based on brake driver inten...IJRES Journal
In this paper, the brake driving intention identification parameters based on the fuzzy control are
summarized and analyzed, the necessary parameters based on the fuzzy control of the brake driving intention
recognition are found out, and I pointed out the commonly corrupt parameters, and through the relevant
parameters , I establish the corresponding driving intention model.
Hybrid optimization of pumped hydro system and solar- Engr. Abdul-Azeez.pdffxintegritypublishin
Advancements in technology unveil a myriad of electrical and electronic breakthroughs geared towards efficiently harnessing limited resources to meet human energy demands. The optimization of hybrid solar PV panels and pumped hydro energy supply systems plays a pivotal role in utilizing natural resources effectively. This initiative not only benefits humanity but also fosters environmental sustainability. The study investigated the design optimization of these hybrid systems, focusing on understanding solar radiation patterns, identifying geographical influences on solar radiation, formulating a mathematical model for system optimization, and determining the optimal configuration of PV panels and pumped hydro storage. Through a comparative analysis approach and eight weeks of data collection, the study addressed key research questions related to solar radiation patterns and optimal system design. The findings highlighted regions with heightened solar radiation levels, showcasing substantial potential for power generation and emphasizing the system's efficiency. Optimizing system design significantly boosted power generation, promoted renewable energy utilization, and enhanced energy storage capacity. The study underscored the benefits of optimizing hybrid solar PV panels and pumped hydro energy supply systems for sustainable energy usage. Optimizing the design of solar PV panels and pumped hydro energy supply systems as examined across diverse climatic conditions in a developing country, not only enhances power generation but also improves the integration of renewable energy sources and boosts energy storage capacities, particularly beneficial for less economically prosperous regions. Additionally, the study provides valuable insights for advancing energy research in economically viable areas. Recommendations included conducting site-specific assessments, utilizing advanced modeling tools, implementing regular maintenance protocols, and enhancing communication among system components.
About
Indigenized remote control interface card suitable for MAFI system CCR equipment. Compatible for IDM8000 CCR. Backplane mounted serial and TCP/Ethernet communication module for CCR remote access. IDM 8000 CCR remote control on serial and TCP protocol.
• Remote control: Parallel or serial interface.
• Compatible with MAFI CCR system.
• Compatible with IDM8000 CCR.
• Compatible with Backplane mount serial communication.
• Compatible with commercial and Defence aviation CCR system.
• Remote control system for accessing CCR and allied system over serial or TCP.
• Indigenized local Support/presence in India.
• Easy in configuration using DIP switches.
Technical Specifications
Indigenized remote control interface card suitable for MAFI system CCR equipment. Compatible for IDM8000 CCR. Backplane mounted serial and TCP/Ethernet communication module for CCR remote access. IDM 8000 CCR remote control on serial and TCP protocol.
Key Features
Indigenized remote control interface card suitable for MAFI system CCR equipment. Compatible for IDM8000 CCR. Backplane mounted serial and TCP/Ethernet communication module for CCR remote access. IDM 8000 CCR remote control on serial and TCP protocol.
• Remote control: Parallel or serial interface
• Compatible with MAFI CCR system
• Copatiable with IDM8000 CCR
• Compatible with Backplane mount serial communication.
• Compatible with commercial and Defence aviation CCR system.
• Remote control system for accessing CCR and allied system over serial or TCP.
• Indigenized local Support/presence in India.
Application
• Remote control: Parallel or serial interface.
• Compatible with MAFI CCR system.
• Compatible with IDM8000 CCR.
• Compatible with Backplane mount serial communication.
• Compatible with commercial and Defence aviation CCR system.
• Remote control system for accessing CCR and allied system over serial or TCP.
• Indigenized local Support/presence in India.
• Easy in configuration using DIP switches.
Immunizing Image Classifiers Against Localized Adversary Attacksgerogepatton
This paper addresses the vulnerability of deep learning models, particularly convolutional neural networks
(CNN)s, to adversarial attacks and presents a proactive training technique designed to counter them. We
introduce a novel volumization algorithm, which transforms 2D images into 3D volumetric representations.
When combined with 3D convolution and deep curriculum learning optimization (CLO), itsignificantly improves
the immunity of models against localized universal attacks by up to 40%. We evaluate our proposed approach
using contemporary CNN architectures and the modified Canadian Institute for Advanced Research (CIFAR-10
and CIFAR-100) and ImageNet Large Scale Visual Recognition Challenge (ILSVRC12) datasets, showcasing
accuracy improvements over previous techniques. The results indicate that the combination of the volumetric
input and curriculum learning holds significant promise for mitigating adversarial attacks without necessitating
adversary training.
Automobile Management System Project Report.pdfKamal Acharya
The proposed project is developed to manage the automobile in the automobile dealer company. The main module in this project is login, automobile management, customer management, sales, complaints and reports. The first module is the login. The automobile showroom owner should login to the project for usage. The username and password are verified and if it is correct, next form opens. If the username and password are not correct, it shows the error message.
When a customer search for a automobile, if the automobile is available, they will be taken to a page that shows the details of the automobile including automobile name, automobile ID, quantity, price etc. “Automobile Management System” is useful for maintaining automobiles, customers effectively and hence helps for establishing good relation between customer and automobile organization. It contains various customized modules for effectively maintaining automobiles and stock information accurately and safely.
When the automobile is sold to the customer, stock will be reduced automatically. When a new purchase is made, stock will be increased automatically. While selecting automobiles for sale, the proposed software will automatically check for total number of available stock of that particular item, if the total stock of that particular item is less than 5, software will notify the user to purchase the particular item.
Also when the user tries to sale items which are not in stock, the system will prompt the user that the stock is not enough. Customers of this system can search for a automobile; can purchase a automobile easily by selecting fast. On the other hand the stock of automobiles can be maintained perfectly by the automobile shop manager overcoming the drawbacks of existing system.
CFD Simulation of By-pass Flow in a HRSG module by R&R Consult.pptxR&R Consult
CFD analysis is incredibly effective at solving mysteries and improving the performance of complex systems!
Here's a great example: At a large natural gas-fired power plant, where they use waste heat to generate steam and energy, they were puzzled that their boiler wasn't producing as much steam as expected.
R&R and Tetra Engineering Group Inc. were asked to solve the issue with reduced steam production.
An inspection had shown that a significant amount of hot flue gas was bypassing the boiler tubes, where the heat was supposed to be transferred.
R&R Consult conducted a CFD analysis, which revealed that 6.3% of the flue gas was bypassing the boiler tubes without transferring heat. The analysis also showed that the flue gas was instead being directed along the sides of the boiler and between the modules that were supposed to capture the heat. This was the cause of the reduced performance.
Based on our results, Tetra Engineering installed covering plates to reduce the bypass flow. This improved the boiler's performance and increased electricity production.
It is always satisfying when we can help solve complex challenges like this. Do your systems also need a check-up or optimization? Give us a call!
Work done in cooperation with James Malloy and David Moelling from Tetra Engineering.
More examples of our work https://www.r-r-consult.dk/en/cases-en/
Courier management system project report.pdfKamal Acharya
It is now-a-days very important for the people to send or receive articles like imported furniture, electronic items, gifts, business goods and the like. People depend vastly on different transport systems which mostly use the manual way of receiving and delivering the articles. There is no way to track the articles till they are received and there is no way to let the customer know what happened in transit, once he booked some articles. In such a situation, we need a system which completely computerizes the cargo activities including time to time tracking of the articles sent. This need is fulfilled by Courier Management System software which is online software for the cargo management people that enables them to receive the goods from a source and send them to a required destination and track their status from time to time.
Student information management system project report ii.pdfKamal Acharya
Our project explains about the student management. This project mainly explains the various actions related to student details. This project shows some ease in adding, editing and deleting the student details. It also provides a less time consuming process for viewing, adding, editing and deleting the marks of the students.
Explore the innovative world of trenchless pipe repair with our comprehensive guide, "The Benefits and Techniques of Trenchless Pipe Repair." This document delves into the modern methods of repairing underground pipes without the need for extensive excavation, highlighting the numerous advantages and the latest techniques used in the industry.
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1. International Journal of Research in Engineering and Science (IJRES)
ISSN (Online): 2320-9364, ISSN (Print): 2320-9356
www.ijres.org Volume 3 Issue 3 ǁ March. 2015 ǁ PP.17-27
www.ijres.org 17 | Page
FabricationofThin FilmUsing Modified Physical Vapor
Deposition (PVD) Module
Engr. Mohd Khairul Muzhafar Bin Md Nor
Department of Electrical EngineeringPolytechnic Kota Kinabalu
Yasin Bin Yusoff
Department of Electrical Engineering Polytechnic Kota Kinabalu
Abstract
This paper explains the fabrication of thin film using modified Physical Vapor Deposition (PVD) Module.
Physical Vapor Deposition (PVD) is a variety of vacuum deposition and is a general term used to describe any
of a variety of methods to deposit thin films by the condensation of a vaporized form of the material onto various
surfaces. The surface morphology of various such as Titanium Dioxide and Aluminum thin film has been
studied. The Titanium Dioxide and Aluminum thin film has been fabricated on Silicon (Si) substrate using
modified Physical Vapor Deposition (PVD) module system. The process started with the establishment of
process flow, process modules, and process parameters. Two modules were developed. The characteristics prior
to the thin film fabrication namely surface morphology, metal thickness characterization and V-I characteristic
were recorded. The samples were characterized by Optical Microscope, Atomic Force Microscope (AFM),X-ray
diffraction (XRD) and I - V characterization. The result and data were analyzed and applied in the fabrication
of thin film using various materials. The thin film fabrication process used Titanium Dioxide (TiO2) nanopowder
and Aluminum (Al2O3) nanopowder for the coating process. The result for each processes are presented in this
paper.
Keywords:Aluminum Oxide, Titanium Dioxide, OpticalMicroscope, AFM, SEM andXRD.
I. INTRODUCTION
Semiconductor device fabrication is the process used to create chips, the integrated circuits that are present
in everyday electrical and electronic devices. It is a multiple-step sequence of photographic and chemical
processing steps during which electronic circuits are gradually created on a wafer made of pure semiconducting
material. Silicon is the most commonly used semiconductor material today, along with various compound
semiconductors.
Thin films are thin material layers ranging from fractions of a nanometer to several micrometers in
thickness. Electronic semiconductor devices and optical coatings are the main applications benefiting from thin
film construction. Work is being done to fabricate thin films with chemical such as titanium oxide for making a
semiconductor and zinc oxide for application such as gas sensor, piezoelectricity material and many researches
in solar cell.
In particular, the use of such coatings on cutting tools can extend the life of these items by several orders of
magnitude. Research is being done on a new class of thin film inorganic oxide materials, called amorphous
heavy-metal cation multi component oxide, which could be used to make transparent transistors that are
inexpensive, stable, and environmentally benign. Thin-films are applied to surfaces using one of many
techniques of thin-film deposition.
Basically, devices are fabricated on silicon and function as semiconductor because of the unique properties
of this material. There are four main reasons for the selection of silicon as the primary semiconductor material:
i. Abundance of silicon
ii. Higher melting temperature for wider processing range
iii. Wider temperature range of operation
iv. Natural growth of silicon dioxide
Silicon is the second most abundant element on earth and makes up about 25% of the earth’s crust. If
processed properly, silicon can be refined into sample quantities of the very pure form necessary for
semiconductor fabrication which leads to lower costs. Silicon’s melting temperature of 1412°C is much higher
than the melting temperature for germanium which is 937°C. This higher melting temperature permits silicon to
withstand high-temperature processing. Another advantage to using silicon is that a semiconductor device made
2. Fabrication of Thin Film Using Modified Physical Vapor Deposition (PVD) Module
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from silicon can function over a wider temperature range than germanium, which increases the semiconductor’s
application and reliability.
It is found that, a major disadvantage of most ceramic listed above is their high in cost. This factor has led
to a situation of limited use commercially rather for research purpose only. In general, commercial ceramic are
made from starting ceramic powder which will later been shaped to form desired ceramic. The starting powders
are often made by energy – intensity processes or by other expensive methods adapted to produce high purity
starting powders. Higher degree of purity will cause decrease in impurity content which will alter the total
performance of the ceramic. The powders are then used to fabricate thin films on substrate.
In this paper, the Al2O3and TiO2thin film was fabricated on the silicon (Si) substrate. Then, the morphology
of the Al2O3 and TiO2 thin film after evaporationprocess on the surface of the thin film is studied. Thesurface on
the sampleare been characterized by Digital Camera, Optical Microscope (OM), Atomic Force Microscope
(AFM), Scanning Electron Microscope (SEM), Energy Dispersive Spectrometer (EDS),I–Vcharacterization and
X-ray diffraction (XRD). Influence of the evaporation process to the physical and chemical properties of Al2O3
and TiO2 thin film is discussed.
II. METHODOLOGY
Evaporation Process
A. Formation of thin film process
First, aSilicon (Si) substrate wafer is cleaned with the Buffered Oxide-Etch (BOE) is used to remove
organic and inorganic contaminants residue, respectively. It is usually followed byDeionized water (DI). The
substrate was placed in anevaporation chamber which contains mixture of Titanium Dioxide (TiO2)nanopowder
and graphite (CaC6) and mixture of Alumina (Al2O3)nanopowder and graphite (CaC6) as a material source in
tungsten boat. The chamber was pump up to 10-5
Torr using a high vacuum pumping system. It will consist of
45 minutes of waiting. Then, the evaporation process can be started by increasing the voltage of the tungsten
boatabout 10% from its maximum range for 1 minute (tungsten – dark red), then up to 20% about 45 seconds
(tungsten – red) and then to 30% for about 7 minute (tungsten – bright orange). The current range when we
operate the PVD module is 73A until 83A for the maximum power. The colorof the tungsten will change
according to the value of voltage supplied. After 7 minute at 30% of the maximum voltage source, the toggle is
turn back to 0% and let to be cooled for 5 minute before the chamber is opened.
B. Measurement of material
To continuethe experiment, the compound of material must be measured to get a good result. For this
experiment the compound of material were as follows:
C. The experimental parameters
Alumina (Al2O3) Titanium Dioxide (TiO2)
1 spoon of spatula = 50.4 mg 1 spoon of spatula = 96.2 mg
3. Fabrication of Thin Film Using Modified Physical Vapor Deposition (PVD) Module
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Various times
a). Titanium Dioxide (TiO2)
PARAMETER
1 2 3 4 5
Evaporation
time(minutes)
0 1 5 10 15
Quantity of
material
(1 spatula)
1 1 1 1 1
b). Alumina (Al2O3)
PARAMETER
1 2 3 4 5
Evaporation
time(minutes)
0 1 5 10 15
Quantity of material
(1 spatula)
1 1 1 1 1
D. Thin film evaporation process
Figure 1: Evaporation process using PVD module
TheTiO2 and Al2O3 thin film deposited on Si substrate is now already done. The system is located in
Microelectronic Laboratory of FKEE, UTHM. The substrate was cut into several pieces of sample in order to
provide thefundamental thickness (TiO2 and Al2O3thin film). Every sample is characterized using Digital
Camera, Optical Microscope, Atomic Force Microscope (AFM), Scanning Electron Microscope (SEM), Energy
Dispersive Spectrometer (EDS), I – V characterization and X- ray diffraction (XRD).
Figure 2: After evaporation process using tungsten boat
E. Sol-Gel
The sol-gel process is a wet-chemical technique such as chemical solution deposition widely used recently
in the fields of materials science and electrical engineering. Such methods are used primarily for the fabrication
of materials starting from a chemical solution which acts as the precursor for an integrated network (gel) of
either discrete particles or network polymers. Thus, the sol evolves towards the formation of a gel-like diphasic
system containing both a liquid phase and solid phase whose morphologies range from discrete particles to
continuous polymer networks. Research had done using this method and comparing between this method and
evaporation method. The result of the experiment shown that which one is the better method to fabricated a thin
film.
F. Optical Microscope
The use of optical microscope is to magnify the sample up 30X, before having a rough look on surface of
the sample. The sample is been placed on the tray and by varying the focus point of the lens, the optical image
of each sample are recorded.
4. Fabrication of Thin Film Using Modified Physical Vapor Deposition (PVD) Module
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G. Atomic Force Microscope (AFM)
Figure 3: Scan surface morphology using XE-100 AFM
The AFM (PARK SYSTEM - XE-100) system is used to measures the sample surface using atomic force
between tip and sample and also to observe the morphology of the TiO2 and Al2O3 thin film after the
evaporation process. The system is located in Microelectronic and Nanotechnology, Shamsuddin
ResearchCentre (MiNT-SRC), UTHM. Sample is placed on the substrate holder and been inserted into the
AFM. In this project, non- contact cantilever had been used. The non - contact cantilever had been choose
because using this cantilever,sample will not damage and can overview the topology, amplitude and phase on
the surface of the sample. After all the surface area of the sample is scan, we can observe the surface
morphology, roughness and thickness on surface topology. All the result of the sample iscaptured.
H. Scanning Electron Microscope (SEM)
The SEM (JEOL JSM – 6380 LA) system is used to observe the surface morphology of the TiO2 and Al2O3
thin film after the evaporation process. The system is located in Makmal Sains Bahan of FKMP, UTHM.
Sample is placed on the substrate holder and been inserted into the SEM chamber before pumping up the
chamber using turbo and rotary pump. The focus of image appear on the online video of the SEM is adjusted
until clear image is produced. The sample images with the magnification of 100X are recorded.
I. Energy Dispersive Spectrometer (EDS)
The SEM is equipped with EDS system that allows the user to analyze the elements exists by marking the
area in square, point or circle. In the present works, the rectangular type is chosen. EDS will verify and
characterized the sample. The characterized result will appear in form of graph. Every sample will undergo 1
times of test at different areas and every result obtained is recorded.
J. X – Ray Diffraction (XRD)
The X- ray diffraction (XRD) is used to detect any elements on the surface material. The result in form of
graph is compared with the pre-loaded library before assumption of material can be made. The data in form of
graph is recorded.
K. I – V Characterization
The I-V characterization can be used to determine the resistivity of the sample in form of voltage versus
current. Every data of the sample is recorded and been analyzed.
III. RESULT AND DISCUSSION
A. Digital Camera
The Digital Camera is a camera used to capture photographs and stores the images digitally via an
electronic image sensor. From the figure 4 below, the image of digital camera shown that there 2 different layer
on sample surface. The clean side is the hiddenpart of the sample when evaporation process.It is because that
part is hidden by the clip that used to holding the sample. Other part of sample shows a TitaniumDioxide or
Alumina single layer. From general perception, it can prove that existence of thin film.
Figure 4: Thin film of the Mixture ofTitanium Dioxideand graphite.
5. Fabrication of Thin Film Using Modified Physical Vapor Deposition (PVD) Module
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B. Optical microscope test
The Optical Microscope is use to observe the surface area after the evaporation process. The Optical
Microscope is connected with the computer and use IMAPS Version. 4.0 Professional Edition software.Figure 2
shows the Optical Microscope images of the TiO2 and Al2O3 thin film after the evaporation processat various
times.The images clearly show that the surface morphology changed after evaporation process at specific time.
Figure 2(a), 2(b),2(c) and 2(d) show that the images have a different surface morphology. Therefore, it is
interesting to study the evaporation process using the tungsten boat.The image that shows are like below:
Mixture Titanium Dioxide (TiO2) with graphite (CaC6)
(a) 1minute (b) 5minutes
(c) 15 minutes (BF view) (d) 15 minutes (DF view)
Figure 5: The surface morphology of Titanium Dioxide (TiO2) thin film. a) TiO2 thin film after 1 minutes
theevaporation process. b) 5 minutes. c) 15 minutes (BF view). d) 15 minutes (DF view).
Mixture Alumina (Al2O3) with graphite (CaC6)
(a) 1 minute (b) 5minutes
(c) 15 minutes (BF view) (d) 15 minutes (DF view)
Figure 6: The surface morphology of Alumina (Al2O3) thin film. a) Al2O3thin film after 1 minutes
theevaporation process. b) 5 minutes. c) 15 minutes (BF view). d) 15 minutes (DF view).
6. Fabrication of Thin Film Using Modified Physical Vapor Deposition (PVD) Module
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Comparison Sol-Gel and Evaporation Process
Sol- Gel
a). TiO2 and CH3OH b). TiO2 and C2H5OH
Evaporation Process
c). TiO2 and CaC6
Sol- Gel
a). Al2O3 and CH3OH b). Al2O3 and C2H5OH
Evaporation Process
c). Al2O3 and CaC6
Keywords– Titanium Dioxide (TiO2), Methanol (CH3OH)Alumina (Al2O3), Ethanol (C2H5OH), Graphite
(CaC6)
a. Scanning Electron Microscope Test
Figures4a and 4b shows the scanning electron microscope images of the TiO2 and Al2O3thin film before
and after the evaporation processes. From theimages, the evolution of the sample was nearly the same with the
optical microscope images. The growth of the rough image of the sample was observed clearly with the sample
15minutes.
Figure 7a: Surface morphology of TiO2 thin film after theevaporation process.
7. Fabrication of Thin Film Using Modified Physical Vapor Deposition (PVD) Module
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Figure 7b: Surface morphology of Al2O3 thin film after theevaporation process.
b. Atomic Force Microscope Test
By using the AFM, we determine the surface morphology in a particular region of thin film. The XEI
software with the help of AFM unit is used for this analysis. For example, the topography on the surface ofthin
film is been analyzed and shown in the Figures8 and 9. Figure 5a shows that the element of TiO2and graphite
were observed on the topography of thin film.
Figure 8a: 3D-image of surface morphology of TiO2 thin film after theevaporation process using AFM.
Figure 8b: Thickness of TiO2 thin film after the evaporation process using AFM. The cursor pair has shown the
change of X-axis of the surface selected.
Figure 8c: Roughness of TiO2 thin film after the evaporation process using AFM. The cursor pair has shown the
change of Y-axis at the surface selected
Figure 9a: 3D-image of surface morphology of Al2O3 thin film after the evaporation process using AFM.
8. Fabrication of Thin Film Using Modified Physical Vapor Deposition (PVD) Module
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Figure 9b: Thickness of Al2O3 thin film after the evaporation process using AFM. The cursorpair has shown the
change of X-axis of the surface selected.
Figure 9c: Roughness of Al2O3 thin film after the evaporation process using AFM. The cursor pair has shown
the change of Y-axis at the surface selected
C. Energy Dispersive Spectrometer Test
By using the EDS, we determine the composition of element in a particular region of thin film. The
software Analysis Station with the help of SEM unit is used for this analysis. For example, the area from the
sample TiO2 and Al2O3 for 15 minutes are been analyzed and shown in the Figures7 and 8. Figure 8 shows that
the element of oxygen and titaniumdioxide were observed on the surface of thin film.
a)
Figure 10a): The area selected of sample 15 minutes is analysis using EDS. The resultant analysis (graph) is
shown in figure 10b).
b)
c)
Figure 10c: The resultant result of sample 15 minutes at area 003 is shown. b) The resultant graph with label of
related element. c) The resultant element analysis in form of percentage is shown.
9. Fabrication of Thin Film Using Modified Physical Vapor Deposition (PVD) Module
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a)
Figure 11a): The area selected of sample 15 minutes is analysis using EDS. The resultant analysis (graph) is
shown in figure 11b).
b)
c)
Figure 11c: The resultant result of sample 15 minutes at area 003 is shown. b) The resultant graph with label of
related element. c) The resultant element analysis in form of percentage is shown.
a. X – Ray DiffractionTest
The elements compose in the TiO2 thin film after the evaporation process was also evaluated using XRD
analyses. The result is shown in Fig. 6. The peak position is consists of TiO2 composition.
Figure 12:XRD analyses of TiO2 thin film after the evaporation process.
Figure 12shows that the peak of TiO2. The result wasconsistent with the scanning electron and microscope
atomic force microscope images shown in Figs. 4 and 5.
b. I – V Characterization test
Finally, the I-V characteristic of each samples were evaluated used four point probe. From the I-V
characteristic, the resistivity of the TiO2 and Al3O2 thin film after the evaporation processes at various times
were calculated.One important indirect measure of coating technique is the sheet resistivity. Sheet resistivity (ρ)
is a quantity which combines all the material resitivity with some (but not all) of the geometrical factors and has
unit Ω/(ohms persquare).The formula of sheet resistivity and bulk resistivity is shown below:-
Sheet resistivity, 𝜌 =
𝜋
ln 2
×
𝑉
𝐼
(1)
10. Fabrication of Thin Film Using Modified Physical Vapor Deposition (PVD) Module
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= 4.523
I
V
The results were summarized in Table 2.
Table 1: Sheet resistivity calculated from the I-V characteristic of TiO2thin film samples.
Sample
TiO2
Voltage
(V)
Current
(A)
Gradien
t (V/ I)
Sheet resistivity
(Ω∕□)
TiO2 26.4 6.408 e-10
4.11 e10
1.86 e11
Al2O3 26.4 9.55 e-10
2.76 e10
1.25 e11
Silicon
Wafer
26.4 1.295 e-9
2.05 e10
9.27 e10
Figure 13: I-V Characteristic
Using four point probes, the I-V Characteristic of different material is showing in figure 1. From this graph,
the wafer with no evaporation process is above and then followed by the evaporation of Al2O3 and Ti02.
This I-V characteristic graph show that 3 lines which represents the substances used to fabricated a thin
film. The substances that had been used are such as Alumina, Titanium Dioxide and Silicon that does not
contain any types of material. From the graph, show that Alumina have the high current flow rate compare to
Titanium Dioxide Silicon. Refer to the graph, a table for the calculation of sheet resistivity and axial gradient
graph has been build.
Table 2: Sheet resistivity at various time
Time (minutes) Resistance, R = (V/I) Sheet resistivity, ρ = Ω/□
0 4.58x1010
2.07x1011
1 4.16x1010
1.88x1011
5 3.55x1010
1.61x1011
From the table above, it is shown that when the time is increase, the resistance is decrease that means the
sheet resistivity also decrease. When the sheet resistivity is decrease, the conductivity is increase.
Table 1show that the sheet resistivity of TiO2 and Al2O3 thin film. The sheet resistivity of the TiO2 and
Al2O3 thin film evaporate for 15 minutes shows that the value is becoming closer to the sheet resistivity of the Si
wafer before the evaporation of TiO2 and Al2O3. This may be due the deposition of TiO2 and Al2O3thin film
during the evaporation process.
IV. CONCLUSION
After the experiment, we can conclude that the TiO2 and Al3O2thin filmwhich was evaporate in the
modified physical vapor deposition module system shows that there is a component of TiO2 and Al2O3exist on
the surface of the thin film. This was proven from the Optical Microscope, SEM, XRD, EDS andAFM results.
The surface morphology of TiO2 and Al2O3 thin film was changed when the material added and mixture with
CaC6 in the evaporation process. The thin film also shows that, when the mixture of TiO2 nanopowder and
mixture of Al2O3nanopowder added the thickness of the thin film layer also increased.
0
2E-10
4E-10
6E-10
8E-10
1E-09
1.2E-09
1.4E-09
1.6E-09
1.8E-09
0 5 10 15 20 25 30
current (A)
voltage (V)
IV CHARACTERISTIC
Alumina
Titanium
Dioxide
Silicon
Wafer
11. Fabrication of Thin Film Using Modified Physical Vapor Deposition (PVD) Module
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V. SUGGESTION
The research on the particular method can be expand for further analysis using several other advance
equipment such as Atomic Force Microscope (AFM) and Field Emission Scanning Electron Microscope (FE –
SEM) to understand the phenomena happened in atomic scale. Also, it is suggested to havefabricated
moresamplesusing other material such as zinc oxide and etc and to be tested using a more efficient equipment to
understand better the reaction of thin film towards evaporation effect.
VI. ACKNOWLEDGMENT
We would like to thank Universiti Tun Hussein Onn Malaysia for supporting this research by providing
material, equipment and source of reference to accomplish this research.
REFERENCES
[1] W. Scot Ruska, Walter E.W. (1988), “MicroelectronicProcessing”. International edition. McGraw-Hill, Inc.
[2] Peter Van Zant(2004), “Microchip Fabrication”. Fifth Edition.McGraw-Hill Companies, Inc.Sami Franssila, “Introduction To
Micro Fabrication ”. John Wiley & Sons, Inc.
[3] The standard periodic table, Online, http://en.wikipedia.org/wiki/Periodic_table.
[4] Micheal Quirk, Julian Serda, Prentice Hall, “SemiconductorManufacturing Technology”.
[5] Seung – Ki Joo, Tae – Kyung Kim: “Method of Fabricating Thin Film Transistor”, US patent 6511871,
[6] Laboratory Instruction Sheet – Faculty of Electrical andElectronic engineering, University Tun ussein Onn Malaysia,“Integrated
circuit (IC) Fabrication”.
[7] Marc Madou, “Fundamental of Microfabrication”.
[9] Riyaz Ahmad Mohamed Ali(2009), “Investigation on the Thermal Effect of Al Thin Film in the Present of Nitrogen (N2) Gas”,
Universiti Tun Hussein Onn Malaysia.
[10] Donald Cristiansen, Fourth edition, “Electronics Engineers Handbook”.