Coordinate measuring machines from Zeiss use inductive displacement sensors from Micro-Epsilon to achieve high precision and reliability in measurements. The sensors measure probe bending at a resolution of a few tenths of a micrometer and provide correction values to compensate for disturbing influences like applied forces. They fulfill the demanding requirements of having no crosstalk during lateral movement, high dynamic range, high resolution, and small sensor design. This contributes significantly to the success of Zeiss's ScanMax mobile measurement machine.

1. A104_e
Inductive displacement sensors (LVDT)
induSENSOR
Coordinate measuring machine
Coordinate measurement machines from Zeiss have This provides a smooth probe guidance, optimized
for decades been a byword for the highest quality, inertially, with a high mechanical cut-off frequency.
precision and reliability. Also the mobile However, this demands a sensor electrical cut-off
measurement machine, ScanMax® fulfills these frequency which is 100 times higher. For this reason
criteria, in part due to the application of inductive the displacement sensors are supplied with 50 kHz
alternating voltage and deliver a resolution of a few
displacement sensors from Micro-Epsilon.
tenths of a micrometer. The low transverse sensitivity
The accuracy of the measurement result depends
is also decisive: Two sensors measure the probe
decisively on extensive compensation of disturbing
deflection in the x and y directions, whereby a pure
influences. When probing the work piece, for x deflection must not influence the y component.
example, a force is exerted on the probe tip, causing Inductive displacement sensors from Micro-Epsilon
a slight bending. The displacement sensors were able to fulfill these high requirements and
measure the bending of the probe and provide also contribute significantly to the considerable
correction values for the compensation.To achieve a success of the ScanMax® due to a favorable
high scanning speed and simple operation, the price/performance ratio.
articulated arms are of light construction (GRP).
Reasons for choosing the system
- No crosstalk in sensor during lateral movement
- High dynamic, high resolution
- small sensor design
Measuring system requirements
- non-contact and wear-free measuring principle
- measuring range ±0.2 mm
- accuracy <± 0.15 % FSO
- Bandwidth 5 kHz (oscillator 50 kHz)
2 displacement sensors,
90 ° shifted to each other
Gaging
Target ScanMax® is a registered trademark of Carl Zeiss Corporation.
sensor
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