The document describes using eddy current displacement sensors to check the accuracy and reproducibility of robot trajectories. Six sensors mounted on a measuring head are moved along a steel rule by a robot to simultaneously acquire position and orientation deviations, with a measuring range of 0-15mm and accuracy of 10 micrometers. Reasons for selecting this non-contact system include its high accuracy, economical price, and insensitivity to dirt, oil, and electromagnetic fields.

1. A021_e
Eddy current displacement sensors
eddyNCDT
Checking the accuracy of robot trajectories
The measurement of the trajectory accuracy or its Technical details
reproducibility is carried out along a diagonal straight - Measuring range: 0 - 15 mm
line in space. The robot moves the measuring head, - Accuracy: 10 µm
which is fitted with sensors, along a steel rule. The - Band witdh: < 2 kHz
deflection of the 2m long rule due to its own weight is
compensated by software. Through the Ambient conditions
arrangement with six sensors both position and - Temperature: Room temp. 15 -25 °C
orientation deviations are acquired simultaneously. - Medium: Air
- Interference fields: EM fields due to the robot
drive motors
- Measurement object may be slightly oily.
Measurement system setup
RS584 8-channel desktop housing
IEC800 Bus interface.
6 x DL500 Demodulator plug-in module
6 x U15 Unscreened sensor
Reasons for the system selection
- Non-contacting method (preference for non-
contacting systems in ISO 9283)
- High accuracy (bandwidth)
- Economical price
- Insensitive to dirt, oil, electrical and magnetic
fields
Principle Steel ruler
Measuring Head
Roboter
Eddy current
displacement Sensors
Support
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