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Asilicon Design Team
Introduction to VLSI
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Contents Overview
 VLSI Introduction
 Scaling
 Moore’s Law
 IC Technologies
 Design Style (Approach)
 CMOS
 Process Technology
 ASIC Flow
 Technology Summary
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VLSI Introduction
Shockley, Bardeen and Brattain at Bell Labs
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The Integrated Circuit
 1959: Jack Kilby, working at Texas Instruments, invented a
monolithic “integrated circuit”
 Components connected by hand-soldered wiresand isolated by “shaping”,
PN-diodes used as resistors
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Integrated Circuits
 1961: TI and Fairchild introduce the first logic ICs
 1962: RCA develops the first MOS transistor
Fairchild bipolar RTL Flip-Flop RCA 16-transistor MOSFET IC
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Computer-Aided Design
 1967: Fairchild develops the “Micromosaic” IC using CAD
 Final Al layer of interconnect could be customized for different
applications
 1968: Noyce, Moore leave Fairchild, started Intel
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RAMs
 1970: Fairchild introduces 256-bit Static RAMs
 1970: Intel starts selling1K-bit Dynamic RAMs
Fairchild 4100 256-bit SRAM Intel 1103 1K-bit DRAM
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The Microprocessor
 1971: Intel introduces the 4004
 General purpose programmable computer instead of custom chip
for Japanese calculator company
Intel 4004 Microprocessor
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VLSI: Very Large Scale Integration
 Integration: Integrated Circuits
 Multiple devices on one substrate
 Integrated Device
 SSI – Small Scale Integration
 7400 series, 10-100 transistors
 MSI – Medium Scale Integration
 74000 series, 100-1000 transistors
 LSI – Large Scale Integration
 1000-10,000 transistors
 VLSI – > 10,000 transistors
 ULSI/SLSI – (some disagreement)
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CMOS Technology Trends
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Scale Example
 Consider a chip size of 20mm X 20mm
 Consider a transistor size of 1um X 1um
(including area of wires etc.)
 Chip Area: 400sq.mm = 400,000,000sq.um
 Transistor Area: 1sq.um
 400M Transistor in 20mmX20mm Die
 Transistor vs. Gate vs. Instance
 Transistor – 1 MOS device
 Gate – OR, AND, INV [4 Transistor]
 Instance – Standard Cell [3 Gate]
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Scale Example
 In latest technology node, transistors are few microns
wide and approximately 0.1 micron or less in length
 Human hair is 80-90 microns in diameter
 >1000 Times of Actual
Transistor Size
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DesignAbstraction Level
n+n+
S
G
D
+
DEVICE
CIRCUIT
GATE
MODULE
SYSTEM
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Moore’s Law
In 1965, Gordon Moore made a prediction that would set the
place for our modern digital revolution.
Moore extrapolated that computing would dramatically
increase in power, and decrease in relative cost, at an
exponential pace.
In simple form, it stated that number of transistors on
integrated circuits would double every two years.
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Moore’s Law
The number of transistors on integrated circuits would
double every two years.
Play
Video
http://www.intel.com/content/www/us/e
n/silicon-innovations/moores-law-
technology.html
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Technologies
 Bipolar (BJT)
 TTL, Schottky
 ECL
 I^2L
 Dual Junction, Current controlled devices
 MOS (FET unipolar)
 NMOS, PMOS
 CMOS
 Single Junction, voltage controlled devices
 GaAs (Typically JFET’s)
 OEIC’s – MQW’s, Integrated Lasers
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What is “CMOS VLSI”?
 MOS = Metal Oxide Semiconductor (This used to mean
a Metal gate over Oxide insulation).
 Now we use polycrystalline silicon which is deposited
on the surface of the chip as a gate. We call this “poly”
or just “red stuff” to distinguish it from the body of the
chip, the substrate, which is a single crystal of silicon.
 We do use metal (aluminum) for interconnection wires
on the surface of the chip.
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S DG
Poly crossed over Diffusion  Field effect transistor (FET)
Insulated Gate  Metal Oxide Semiconductor FET
Source and Drain are Interchangeable
D
S
G
MOSFET
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N-Channel Enhancement mode MOS FET
 Four Terminal Device - substrate bias
–The “self aligned gate” - key to CMOS
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CMOS: Complementary MOS
 CMOS using both N-channel and P-channel type
enhancement mode Field Effect Transistors (FETs).
 Field Effect- NO current from the controlling electrode
into the output
 FET is a voltage controlled current device
 BJT is a current controlled current device
 N/P Channel - doping of the substrate for increased
carriers (electrons or holes)
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CMOS
Complementary Metal Oxide
Semiconductor
PMOS
NMOS
VSS
VDD
X X’
NMOS
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Four Views
Logic Transistor Layout Physical
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VLSI Design
 The real issue in VLSI is about designing systems on
chips.
 The designs are complex, and we need to use structured
design techniques and sophisticated design tools to
manage the complexity of the design.
 We also accept the fact that any technology we learn the
details of will be out of date soon.
 We are trying to develop and use techniques that will
transcend the technology, but still respect it.
Help from Computer Aided Design tools
 Tools
 Editors
 Simulators
 Libraries
 Module Synthesis
 Place/Route
 Chip Assemblers
 Silicon Compilers
 Experts
 Behavior model &
Circuit design
 Circuit Simulation
 Device physics[Library
Creation]
 Verilog to Gates Level
 Physical Implementation
 Architectures
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Design Approach (Style)
 Full Custom
 Standard Cell Based
 Gate Array
 Macro Cell
 “FPGA”
 Combinations
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Full Custom
 Hand drawn geometry
 All layers customized
 Digital and analog
 Simulation at transistor level (Analog)
 High density
 High performance
 Long design time
Full Custom
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Standard Cells Based
 Standard cells organized in rows (and, or, flip-
flops etc.)
 Cells made as full custom by vendor (not user).
 All layers customized
 Digital with possibility of special analog cells.
 Simulation at gate level (digital)
 Medium density
 Medium-high performance
 Reasonable design time
Standard Cells Based
Routing
Cell
IO cell
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Gate Array
 Predefined transistors connected via metal
 Two types: Channel based
Channel less (sea of gates)
 Only metallization layers customized
 Fixed array sizes (normally 5-10 different)
 Digital cells in library (and, or, flip-flops etc.)
 Simulation at gate level (digital)
 Medium density
 Medium performance
 Reasonable design time
Gate Array
Oxide isolation
Gate isolation
PMOS
NMOS
Vdd
Gnd
B
A
Out
Vdd
Gnd
A
B
Out
Sea of gates Channel based
NAND gate using gate isolation
Can in principle be used by adjacent cell
Sea of gates
Gate Array
RAM
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Macro Cell
 Predefined macro blocks (Processors, RAM,etc)
 Macro blocks made as full custom by vendor
 All layers customized
 Digital and some analog (ADC)
 Simulation at behavioral or gate level (digital)
 High density
 High performance
 Short design time
 Use standard on-chip busses
 “System on a chip”
DSP processor
LCD
cont.
RAM
ROMADC
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FPGA = Field Programmable Gate Array
 Programmable logic blocks
 Programmable connections between logic blocks
 No layers customized (standard devices)
 Digital only
 Low - medium performance (<50 - 100MHz)
 Low - medium density (up to ~100k gates)
 Programmable by: SRAM, EEROM, Anti_fuse, etc
 Cheap design tools on PC’s
 Low development cost
 High device cost
FPGA
Comparison
FPGA Gate array Standard cell Full custom Macro cell
Density Low Medium Medium High High
Flexibility Low (high) Low Medium High Medium
Analog No No No Yes Yes
Performance Low Medium High Very high Very high
Design time Low Medium Medium High Medium
Design costs Low Medium Medium High High
Tools Simple Complex Complex Very complex Complex
Volume Low Medium High High High
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High Performance Devices
 Mixture of full custom, standard cells and macro’s
 Full custom for special blocks: ADC, DAC, DDR,
Serdes etc.
 Macro’s for standard blocks: RAM, ROM, etc.
 Standard cells for non critical digital blocks
Dual port RAM
Full custom
Standard cell
ASIC with mixture of full custom, RAM and standard cells
FIFO
Single port RAM
Pentium Chip
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System-on-Chip
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MOSFET Fundamental
 Process Node: Channel Length
 Example: 0.25um Process
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ON/OFF Current Ratio
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MOSFET: ON State (Vgs > Vth)
Channel
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CMOS Technology Scaling
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Technologies: Process Node
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CMOS Scaling
 The Gap can be filled with DG-FETs [FinFET]
 Key Limitation of CMOS scaling addressed through
 Better control of channel from transistor gates
 Reduced short-channel effects
 Better Ion/Ioff
 Improved sub-threshold slope
 No discrete dopant fluctuations
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Double-Gate MOSFET Structure [FinFET]
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FinFET Structure
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Technology [Process] Types
 BULK CMOS
 SOI
 FDSOI
 FinFET
 BiCMOS
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Bulk vs. SOI
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Bulk vs. FD-SOI
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Bulk vs. FinFET
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ASIC Design Flow
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Design Flow
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Technology Summary: 2015
 Today’s Massive Products getting build in 28nm Bulk
(CMOS) – > 90%
 < 10% Products getting build in 14/16nm FinFET [Huge
Fabrication Cost & Early Technology]
 < 1% Products getting build in 32SOI & 28FDSOI
 Technology in Progress: 10nm Geometry
 Dominant Market: IoT (Internet of Things) & Smart
Phones

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Introduction to VLSI

  • 2. Confidential Information: Do not share or photocopy without prior written approval Contents Overview  VLSI Introduction  Scaling  Moore’s Law  IC Technologies  Design Style (Approach)  CMOS  Process Technology  ASIC Flow  Technology Summary
  • 3. Confidential Information: Do not share or photocopy without prior written approval Confidential Information: Do not share or photocopy without prior written approval VLSI Introduction Shockley, Bardeen and Brattain at Bell Labs
  • 4. Confidential Information: Do not share or photocopy without prior written approval The Integrated Circuit  1959: Jack Kilby, working at Texas Instruments, invented a monolithic “integrated circuit”  Components connected by hand-soldered wiresand isolated by “shaping”, PN-diodes used as resistors
  • 5. Confidential Information: Do not share or photocopy without prior written approval Integrated Circuits  1961: TI and Fairchild introduce the first logic ICs  1962: RCA develops the first MOS transistor Fairchild bipolar RTL Flip-Flop RCA 16-transistor MOSFET IC
  • 6. Confidential Information: Do not share or photocopy without prior written approval Computer-Aided Design  1967: Fairchild develops the “Micromosaic” IC using CAD  Final Al layer of interconnect could be customized for different applications  1968: Noyce, Moore leave Fairchild, started Intel
  • 7. Confidential Information: Do not share or photocopy without prior written approval RAMs  1970: Fairchild introduces 256-bit Static RAMs  1970: Intel starts selling1K-bit Dynamic RAMs Fairchild 4100 256-bit SRAM Intel 1103 1K-bit DRAM
  • 8. Confidential Information: Do not share or photocopy without prior written approval The Microprocessor  1971: Intel introduces the 4004  General purpose programmable computer instead of custom chip for Japanese calculator company Intel 4004 Microprocessor
  • 9. Confidential Information: Do not share or photocopy without prior written approval VLSI: Very Large Scale Integration  Integration: Integrated Circuits  Multiple devices on one substrate  Integrated Device  SSI – Small Scale Integration  7400 series, 10-100 transistors  MSI – Medium Scale Integration  74000 series, 100-1000 transistors  LSI – Large Scale Integration  1000-10,000 transistors  VLSI – > 10,000 transistors  ULSI/SLSI – (some disagreement)
  • 10. Confidential Information: Do not share or photocopy without prior written approval CMOS Technology Trends
  • 11. Confidential Information: Do not share or photocopy without prior written approval Scale Example  Consider a chip size of 20mm X 20mm  Consider a transistor size of 1um X 1um (including area of wires etc.)  Chip Area: 400sq.mm = 400,000,000sq.um  Transistor Area: 1sq.um  400M Transistor in 20mmX20mm Die  Transistor vs. Gate vs. Instance  Transistor – 1 MOS device  Gate – OR, AND, INV [4 Transistor]  Instance – Standard Cell [3 Gate]
  • 12. Confidential Information: Do not share or photocopy without prior written approval Scale Example  In latest technology node, transistors are few microns wide and approximately 0.1 micron or less in length  Human hair is 80-90 microns in diameter  >1000 Times of Actual Transistor Size
  • 13. Confidential Information: Do not share or photocopy without prior written approval DesignAbstraction Level n+n+ S G D + DEVICE CIRCUIT GATE MODULE SYSTEM
  • 14. Confidential Information: Do not share or photocopy without prior written approval Moore’s Law In 1965, Gordon Moore made a prediction that would set the place for our modern digital revolution. Moore extrapolated that computing would dramatically increase in power, and decrease in relative cost, at an exponential pace. In simple form, it stated that number of transistors on integrated circuits would double every two years.
  • 15. Confidential Information: Do not share or photocopy without prior written approval Moore’s Law The number of transistors on integrated circuits would double every two years. Play Video http://www.intel.com/content/www/us/e n/silicon-innovations/moores-law- technology.html
  • 16. Confidential Information: Do not share or photocopy without prior written approval Technologies  Bipolar (BJT)  TTL, Schottky  ECL  I^2L  Dual Junction, Current controlled devices  MOS (FET unipolar)  NMOS, PMOS  CMOS  Single Junction, voltage controlled devices  GaAs (Typically JFET’s)  OEIC’s – MQW’s, Integrated Lasers
  • 17. Confidential Information: Do not share or photocopy without prior written approval What is “CMOS VLSI”?  MOS = Metal Oxide Semiconductor (This used to mean a Metal gate over Oxide insulation).  Now we use polycrystalline silicon which is deposited on the surface of the chip as a gate. We call this “poly” or just “red stuff” to distinguish it from the body of the chip, the substrate, which is a single crystal of silicon.  We do use metal (aluminum) for interconnection wires on the surface of the chip.
  • 18. Confidential Information: Do not share or photocopy without prior written approval S DG Poly crossed over Diffusion  Field effect transistor (FET) Insulated Gate  Metal Oxide Semiconductor FET Source and Drain are Interchangeable D S G MOSFET
  • 19. Confidential Information: Do not share or photocopy without prior written approval N-Channel Enhancement mode MOS FET  Four Terminal Device - substrate bias –The “self aligned gate” - key to CMOS
  • 20. Confidential Information: Do not share or photocopy without prior written approval CMOS: Complementary MOS  CMOS using both N-channel and P-channel type enhancement mode Field Effect Transistors (FETs).  Field Effect- NO current from the controlling electrode into the output  FET is a voltage controlled current device  BJT is a current controlled current device  N/P Channel - doping of the substrate for increased carriers (electrons or holes)
  • 21. Confidential Information: Do not share or photocopy without prior written approval CMOS Complementary Metal Oxide Semiconductor PMOS NMOS VSS VDD X X’ NMOS
  • 22. Confidential Information: Do not share or photocopy without prior written approval Four Views Logic Transistor Layout Physical
  • 23. Confidential Information: Do not share or photocopy without prior written approval VLSI Design  The real issue in VLSI is about designing systems on chips.  The designs are complex, and we need to use structured design techniques and sophisticated design tools to manage the complexity of the design.  We also accept the fact that any technology we learn the details of will be out of date soon.  We are trying to develop and use techniques that will transcend the technology, but still respect it.
  • 24. Help from Computer Aided Design tools  Tools  Editors  Simulators  Libraries  Module Synthesis  Place/Route  Chip Assemblers  Silicon Compilers  Experts  Behavior model & Circuit design  Circuit Simulation  Device physics[Library Creation]  Verilog to Gates Level  Physical Implementation  Architectures
  • 25. Confidential Information: Do not share or photocopy without prior written approval Design Approach (Style)  Full Custom  Standard Cell Based  Gate Array  Macro Cell  “FPGA”  Combinations
  • 26. Confidential Information: Do not share or photocopy without prior written approval Full Custom  Hand drawn geometry  All layers customized  Digital and analog  Simulation at transistor level (Analog)  High density  High performance  Long design time
  • 28. Confidential Information: Do not share or photocopy without prior written approval Standard Cells Based  Standard cells organized in rows (and, or, flip- flops etc.)  Cells made as full custom by vendor (not user).  All layers customized  Digital with possibility of special analog cells.  Simulation at gate level (digital)  Medium density  Medium-high performance  Reasonable design time
  • 30. Confidential Information: Do not share or photocopy without prior written approval Gate Array  Predefined transistors connected via metal  Two types: Channel based Channel less (sea of gates)  Only metallization layers customized  Fixed array sizes (normally 5-10 different)  Digital cells in library (and, or, flip-flops etc.)  Simulation at gate level (digital)  Medium density  Medium performance  Reasonable design time
  • 31. Gate Array Oxide isolation Gate isolation PMOS NMOS Vdd Gnd B A Out Vdd Gnd A B Out Sea of gates Channel based NAND gate using gate isolation Can in principle be used by adjacent cell
  • 32. Sea of gates Gate Array RAM
  • 33. Confidential Information: Do not share or photocopy without prior written approval Macro Cell  Predefined macro blocks (Processors, RAM,etc)  Macro blocks made as full custom by vendor  All layers customized  Digital and some analog (ADC)  Simulation at behavioral or gate level (digital)  High density  High performance  Short design time  Use standard on-chip busses  “System on a chip” DSP processor LCD cont. RAM ROMADC
  • 34. Confidential Information: Do not share or photocopy without prior written approval FPGA = Field Programmable Gate Array  Programmable logic blocks  Programmable connections between logic blocks  No layers customized (standard devices)  Digital only  Low - medium performance (<50 - 100MHz)  Low - medium density (up to ~100k gates)  Programmable by: SRAM, EEROM, Anti_fuse, etc  Cheap design tools on PC’s  Low development cost  High device cost
  • 35. FPGA
  • 36. Comparison FPGA Gate array Standard cell Full custom Macro cell Density Low Medium Medium High High Flexibility Low (high) Low Medium High Medium Analog No No No Yes Yes Performance Low Medium High Very high Very high Design time Low Medium Medium High Medium Design costs Low Medium Medium High High Tools Simple Complex Complex Very complex Complex Volume Low Medium High High High
  • 37. Confidential Information: Do not share or photocopy without prior written approval High Performance Devices  Mixture of full custom, standard cells and macro’s  Full custom for special blocks: ADC, DAC, DDR, Serdes etc.  Macro’s for standard blocks: RAM, ROM, etc.  Standard cells for non critical digital blocks
  • 38. Dual port RAM Full custom Standard cell ASIC with mixture of full custom, RAM and standard cells FIFO Single port RAM
  • 40. Confidential Information: Do not share or photocopy without prior written approval System-on-Chip
  • 41. Confidential Information: Do not share or photocopy without prior written approval MOSFET Fundamental  Process Node: Channel Length  Example: 0.25um Process
  • 42. Confidential Information: Do not share or photocopy without prior written approval ON/OFF Current Ratio
  • 43. Confidential Information: Do not share or photocopy without prior written approval MOSFET: ON State (Vgs > Vth) Channel
  • 44. Confidential Information: Do not share or photocopy without prior written approval CMOS Technology Scaling
  • 45. Confidential Information: Do not share or photocopy without prior written approval Technologies: Process Node
  • 46. Confidential Information: Do not share or photocopy without prior written approval CMOS Scaling  The Gap can be filled with DG-FETs [FinFET]  Key Limitation of CMOS scaling addressed through  Better control of channel from transistor gates  Reduced short-channel effects  Better Ion/Ioff  Improved sub-threshold slope  No discrete dopant fluctuations
  • 47. Confidential Information: Do not share or photocopy without prior written approval Double-Gate MOSFET Structure [FinFET]
  • 48. Confidential Information: Do not share or photocopy without prior written approval FinFET Structure
  • 49. Confidential Information: Do not share or photocopy without prior written approval Technology [Process] Types  BULK CMOS  SOI  FDSOI  FinFET  BiCMOS
  • 50. Confidential Information: Do not share or photocopy without prior written approval Bulk vs. SOI
  • 51. Confidential Information: Do not share or photocopy without prior written approval Bulk vs. FD-SOI
  • 52. Confidential Information: Do not share or photocopy without prior written approval Bulk vs. FinFET
  • 53. Confidential Information: Do not share or photocopy without prior written approval Confidential Information: Do not share or photocopy without prior written approval ASIC Design Flow
  • 54. Confidential Information: Do not share or photocopy without prior written approval Design Flow
  • 55. Confidential Information: Do not share or photocopy without prior written approval Technology Summary: 2015  Today’s Massive Products getting build in 28nm Bulk (CMOS) – > 90%  < 10% Products getting build in 14/16nm FinFET [Huge Fabrication Cost & Early Technology]  < 1% Products getting build in 32SOI & 28FDSOI  Technology in Progress: 10nm Geometry  Dominant Market: IoT (Internet of Things) & Smart Phones