This document analyzes and compares the performance of CMOS and FinFET logic technologies. It discusses key parameters for both technologies including gate area, gate capacitance, channel length, delay, subthreshold leakage current, and power dissipation. CMOS has advantages of low power consumption but suffers from short channel lengths. FinFET addresses this issue with a longer channel gate but higher power. The document provides equations to calculate parameters like power dissipation, delay dependence on input rise/fall time, impact of loading capacitance on gate delay, subthreshold leakage current, and threshold voltage for both CMOS and FinFET technologies.