The document discusses nanofabrication techniques used to design nanomaterials and devices measured in nanometers. It describes common nanofabrication processes like thin film deposition using physical vapor deposition or chemical vapor deposition, patterning using optical or e-beam lithography, and etching using wet or dry methods. Typical applications of nanofabrication include manufacturing printed circuit boards, microcontrollers, and MEMS devices used in smartphones and computers.

1. NANOFABRICATION
TECHNIQUES
PRESENTED BY
MOHSINA AFROOZ
NT/M.TECH/2017-07

2. OUTLINES
• What is Nanofabrication ?
• Nanofabrication process
• Application
• Conclusion
• References

3. WHAT IS NANOFABRICATION?
• Nanofabrication refers to the design process of
nanomaterial and devices that are measured in
nanometers(0.1-100nm).

5. TECHNIQUES OF
NANOFABRICATION
1. Thin Film Deposition
 Physical vapor deposition
 Chemical vapor deposition
2. Patterning i.e. Lithography
 Optical Lithography
 E-beam Lithography
3. Film modification i.e. Etching
 Wet Etching
 Dry Etching

6. Typical nanofabrication
Process

7. THIN FILM DEPOSITION
• A thin film is a layer
of materials ranging
from monolayer to
several micrometer
thickness
• It involves deposition
of individual
molecules or atoms

8. LITHOGRAPHY PROCEDURE
• Lithography consist of patterning substrate by
employing the interaction of beams of photons
or particles with materials

9. PHOTOLITHOGRAPHY
• PHOTO meaning light
• LITHO meaning stone
• GRAPHY meaning write
That is ‘’PRINTING WITH LIGHT’’
Alphonse Poitevin invented this technique in 1855

11. ETCHING
• Process that removes material from surface after
lithography is done
• Etching removes those part of substrate which
was not masked
• It also removes the part of resist which was
exposed to light to give fine patterns.

12. ETCHING

13. Application of nanofabrication
“Size matters”
Use in manufacturing of PCB, Microcontrollers, MOSFET,
MEMS which are used in large scale in smartphones,
computers and other electronic devices

14. References
1. Introduction to Nanofabrication by ErliChen,Center for
Imaging and Mesoscale Structure Harvard University
2. Nano-fabrication,Richard Langford richard.langford@tcd.ie
Ex 2006
3. M.D. Austin H. Ge W. Wu M. Li Z. Yu D. Wasserman S.A.
Lyon S‥Y Chou "Fabrication of 5nm linewidth and 14nm
pitch features by nanoimprint lithography" <em>Appl. Phys.
Lett.</em> vol. 84 no. 26 pp. 5299 2004.