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©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 1
22 Bd Benoni Goullin
44200 NANTES – FRANCE +33 2 40 18 09 16 info@systemplus.fr www.systemplus.fr
Hamamatsu C12880MA
Micro-Spectrometer
MEMS report by Sylvain HALLEREAU
July 2018 – version 1
REVERSE COSTING® – STRUCTURAL, PROCESS & COST REPORT
©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 2
Overview / Introduction 3
o Executive Summary
o Reverse Costing Methodology
Company Profile 7
o Hamamatsu Photonic
o Hamamatsu Revenue Profile
o C12880MA
Physical Analysis 13
o Summary of the Physical Analysis
o Physical Analysis Methodology
o Package 16
 Package Views & Dimensions
 Package Opening
 Package Cross-Section
o Reflective Grating 28
 Dimensions
 Cross-Section
 Grating
o Die 43
 Details View: Flow Chamber, Pixels
 View, Dimensions& Marking
 Color sensor
 Active Area Deprocessing
 Die Process
 Die Cross-Section: Metal Layers, Active Area
 Slit Cross-Section
 Process Characteristics
o Comparison C12880MA and NanoLambda NSP32 and Consumer Physics
SCIO Molecular sensor 71
Table of Contents
Manufacturing Process Flow 76
o Global Overview
o IC Front-End Process
o Wafer Fabrication Unit
o Image Sensor Process Flow
o Reflective Grating Process Flow
o Packaging Process Flow
Cost Analysis 88
o Summary of the cost analysis
o Yields Explanation & Hypotheses
o Image Sensor 86
 IC Wafer Front-End Cost
 Sensor Layers Wafer Front-End Cost
 Sensor Layers Front-End Cost per process steps
 Total Front-End Cost
 Back-End 0 : Probe Test & Dicing
 Wafer & Die Cost
o Reflective Grating
o Component 92
 Back-End : Packaging Cost
 Back-End : Packaging Cost per Process Steps
 Back-End : Final Test Cost
 Component Cost
Estimated Price Analysis 104
Customer Feedback 108
Company services 110
©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 3
Overview / Introduction
o Executive Summary
o Reverse Costing
Methodology
Company Profile & Supply
Chain
Physical Analysis
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
Customer feedback
About System Plus
Executive Summary
• This full reverse costing study has been conducted to provide insight on technology data, manufacturing cost and
selling price of the Hamamatsu C12880MA microspectrometer.
• The micro-spectrometer head of Hamamatsu Photonics of only 2.5cm3 is a real spectrometer with a high sensitivity
CMOS linear image sensor and a reflective grating for the diffraction of the light.
• Function with wavelength between UV and Near IR, 340 to 850nm, the micro-spectrometer can be used for food
inspection, biometry, tester of light, water quality and other light level measurements.
• With a hermetically sealed package, the spectrometer can be used in moist atmosphere.
• A comparison between the C12880MA micro-spectrometer and two another technologies spectrometer, the
NanoLambda NSP32 and Consumer Physics SCiO is performed in this report.
• This report includes a complete analysis of the C12880MAchip from Hamamatsu, featuring Chip disassembly and die
analyses, processes and cross-sections. Finally, it contains a full cost analysis and a selling price estimation of the
component.
©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 4
Overview / Introduction
Company Profile & Supply
Chain
Physical Analysis
o Package Overview
o Package Cross-Section
o Reflective Grating
o Image sensor
o Die Cross-Section
o Comparison
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
Customer feedback
About System Plus
Package View & Dimensions
Package Top View
©2018 by System Plus Consulting
Package Bottom View
©2018 by System Plus Consulting
Package Side View
©2018 by System Plus Consulting
20.1 mm
13.4mm
• Package:Metal Package 10-Leads
• Dimensions: 20.1 x 12.5 x 10.1 mm
• Pin Pitch: 2.5 mm
• Marking:
C12880MA
16L01139
<logo Hamamatsu>
12.5mm
10.1mm
Package Marking
©2018 by System Plus Consulting
©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 5
Overview / Introduction
Company Profile & Supply
Chain
Physical Analysis
o Package Overview
o Package Cross-Section
o Reflective Grating
o Image sensor
o Die Cross-Section
o Comparison
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
Customer feedback
About System Plus
Package Opening
©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 6
Overview / Introduction
Company Profile & Supply
Chain
Physical Analysis
o Package Overview
o Package Cross-Section
o Reflective Grating
o Image sensor
o Die Cross-Section
o Comparison
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
Customer feedback
About System Plus
Reflective Grating
Light diffraction on the grating – Optical View
©2018 by System Plus Consulting
©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 7
Overview / Introduction
Company Profile & Supply
Chain
Physical Analysis
o Package Overview
o Package Cross-Section
o Reflective Grating
o Image sensor
o Die Cross-Section
o Comparison
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
Customer feedback
About System Plus
Grating dimension
©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 8
Overview / Introduction
Company Profile & Supply
Chain
Physical Analysis
o Package Overview
o Package Cross-Section
o Reflective Grating
o Image sensor
o Die Cross-Section
o Comparison
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
Customer feedback
About System Plus
Die Dimensions
©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 9
Overview / Introduction
Company Profile & Supply
Chain
Physical Analysis
o Package Overview
o Package Cross-Section
o Reflective Grating
o Image sensor
o Die Cross-Section
o Comparison
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
Customer feedback
About System Plus
Image Sensor – Through-Hole Slit
Image sensor Cross-Section – SEM View
©2018 by System Plus Consulting
©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 10
Overview / Introduction
Company Profile & Supply
Chain
Physical Analysis
Manufacturing Process Flow
o Front-End Process
o Wafer Fabrication Unit
o Sensor Layers Process Flow
o Reflective Grating
o Packaging Process Flow
Cost Analysis
Selling Price Analysis
Customer feedback
About System Plus
Process Flow (1/2)
drawing not to scale
Silicon
wafer
•Integrated Circuit
Silicon
wafer
Silicon
wafer
Silicon
wafer
©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 11
Overview / Introduction
Company Profile & Supply
Chain
Physical Analysis
Manufacturing Process Flow
Cost Analysis
o Summary of cost analysis
o Yield Explanation
o Front-End Cost
o Image Die Cost
o Reflective Grating
o Packaging Cost
o Component Cost
Selling Price Analysis
Customer feedback
About System Plus
IC Front-End Cost
©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 12
Overview / Introduction
Company Profile & Supply
Chain
Physical Analysis
Manufacturing Process Flow
Cost Analysis
o Summary of cost analysis
o Yield Explanation
o Front-End Cost
o Image Die Cost
o Reflective Grating
o Packaging Cost
o Component Cost
Selling Price Analysis
Customer feedback
About System Plus
Component Cost
©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 13
Overview / Introduction
Company Profile & Supply
Chain
Physical Analysis
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
Customer feedback
About System Plus
o Company services
o Contact
o Legal
o Related reports
MARKET AND TECHNOLOGY REPORTS - YOLE DÉVELOPPEMENT
MEMS
• Status of the MEMS Industry 2018
Related Reports
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• SP17377 – ams multi-spectral sensor apple iphone X
• SP17334 - Nanolambda NSP32-V1 Spectrometer
• SP17304 - Consumer Physics - SCiO Spectrometer
©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 14
COMPANY
SERVICES
©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 15
Overview / Introduction
Company Profile & Supply
Chain
Physical Analysis
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
Customer feedback
About System Plus
o Company services
o Contact
o Legal
o Related reports
Business Models Fields of Expertise
Custom Analyses
(>130 analyses per year)
Reports
(>40 reports per year)
Costing Tools
Trainings
©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 16
Overview / Introduction
Company Profile & Supply
Chain
Physical Analysis
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
Customer feedback
About System Plus
o Company services
o Contact
o Legal
o Related reports
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REVERSE COSTING® – STRUCTURE, PROCESS & COST REPORTHAMAMATSU C12880MAMICRO-SPECTROMETER
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Hamamatsu C12880MA Micro-spectrometer

  • 1. ©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 1 22 Bd Benoni Goullin 44200 NANTES – FRANCE +33 2 40 18 09 16 info@systemplus.fr www.systemplus.fr Hamamatsu C12880MA Micro-Spectrometer MEMS report by Sylvain HALLEREAU July 2018 – version 1 REVERSE COSTING® – STRUCTURAL, PROCESS & COST REPORT
  • 2. ©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 2 Overview / Introduction 3 o Executive Summary o Reverse Costing Methodology Company Profile 7 o Hamamatsu Photonic o Hamamatsu Revenue Profile o C12880MA Physical Analysis 13 o Summary of the Physical Analysis o Physical Analysis Methodology o Package 16  Package Views & Dimensions  Package Opening  Package Cross-Section o Reflective Grating 28  Dimensions  Cross-Section  Grating o Die 43  Details View: Flow Chamber, Pixels  View, Dimensions& Marking  Color sensor  Active Area Deprocessing  Die Process  Die Cross-Section: Metal Layers, Active Area  Slit Cross-Section  Process Characteristics o Comparison C12880MA and NanoLambda NSP32 and Consumer Physics SCIO Molecular sensor 71 Table of Contents Manufacturing Process Flow 76 o Global Overview o IC Front-End Process o Wafer Fabrication Unit o Image Sensor Process Flow o Reflective Grating Process Flow o Packaging Process Flow Cost Analysis 88 o Summary of the cost analysis o Yields Explanation & Hypotheses o Image Sensor 86  IC Wafer Front-End Cost  Sensor Layers Wafer Front-End Cost  Sensor Layers Front-End Cost per process steps  Total Front-End Cost  Back-End 0 : Probe Test & Dicing  Wafer & Die Cost o Reflective Grating o Component 92  Back-End : Packaging Cost  Back-End : Packaging Cost per Process Steps  Back-End : Final Test Cost  Component Cost Estimated Price Analysis 104 Customer Feedback 108 Company services 110
  • 3. ©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 3 Overview / Introduction o Executive Summary o Reverse Costing Methodology Company Profile & Supply Chain Physical Analysis Manufacturing Process Flow Cost Analysis Selling Price Analysis Customer feedback About System Plus Executive Summary • This full reverse costing study has been conducted to provide insight on technology data, manufacturing cost and selling price of the Hamamatsu C12880MA microspectrometer. • The micro-spectrometer head of Hamamatsu Photonics of only 2.5cm3 is a real spectrometer with a high sensitivity CMOS linear image sensor and a reflective grating for the diffraction of the light. • Function with wavelength between UV and Near IR, 340 to 850nm, the micro-spectrometer can be used for food inspection, biometry, tester of light, water quality and other light level measurements. • With a hermetically sealed package, the spectrometer can be used in moist atmosphere. • A comparison between the C12880MA micro-spectrometer and two another technologies spectrometer, the NanoLambda NSP32 and Consumer Physics SCiO is performed in this report. • This report includes a complete analysis of the C12880MAchip from Hamamatsu, featuring Chip disassembly and die analyses, processes and cross-sections. Finally, it contains a full cost analysis and a selling price estimation of the component.
  • 4. ©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 4 Overview / Introduction Company Profile & Supply Chain Physical Analysis o Package Overview o Package Cross-Section o Reflective Grating o Image sensor o Die Cross-Section o Comparison Manufacturing Process Flow Cost Analysis Selling Price Analysis Customer feedback About System Plus Package View & Dimensions Package Top View ©2018 by System Plus Consulting Package Bottom View ©2018 by System Plus Consulting Package Side View ©2018 by System Plus Consulting 20.1 mm 13.4mm • Package:Metal Package 10-Leads • Dimensions: 20.1 x 12.5 x 10.1 mm • Pin Pitch: 2.5 mm • Marking: C12880MA 16L01139 <logo Hamamatsu> 12.5mm 10.1mm Package Marking ©2018 by System Plus Consulting
  • 5. ©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 5 Overview / Introduction Company Profile & Supply Chain Physical Analysis o Package Overview o Package Cross-Section o Reflective Grating o Image sensor o Die Cross-Section o Comparison Manufacturing Process Flow Cost Analysis Selling Price Analysis Customer feedback About System Plus Package Opening
  • 6. ©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 6 Overview / Introduction Company Profile & Supply Chain Physical Analysis o Package Overview o Package Cross-Section o Reflective Grating o Image sensor o Die Cross-Section o Comparison Manufacturing Process Flow Cost Analysis Selling Price Analysis Customer feedback About System Plus Reflective Grating Light diffraction on the grating – Optical View ©2018 by System Plus Consulting
  • 7. ©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 7 Overview / Introduction Company Profile & Supply Chain Physical Analysis o Package Overview o Package Cross-Section o Reflective Grating o Image sensor o Die Cross-Section o Comparison Manufacturing Process Flow Cost Analysis Selling Price Analysis Customer feedback About System Plus Grating dimension
  • 8. ©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 8 Overview / Introduction Company Profile & Supply Chain Physical Analysis o Package Overview o Package Cross-Section o Reflective Grating o Image sensor o Die Cross-Section o Comparison Manufacturing Process Flow Cost Analysis Selling Price Analysis Customer feedback About System Plus Die Dimensions
  • 9. ©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 9 Overview / Introduction Company Profile & Supply Chain Physical Analysis o Package Overview o Package Cross-Section o Reflective Grating o Image sensor o Die Cross-Section o Comparison Manufacturing Process Flow Cost Analysis Selling Price Analysis Customer feedback About System Plus Image Sensor – Through-Hole Slit Image sensor Cross-Section – SEM View ©2018 by System Plus Consulting
  • 10. ©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 10 Overview / Introduction Company Profile & Supply Chain Physical Analysis Manufacturing Process Flow o Front-End Process o Wafer Fabrication Unit o Sensor Layers Process Flow o Reflective Grating o Packaging Process Flow Cost Analysis Selling Price Analysis Customer feedback About System Plus Process Flow (1/2) drawing not to scale Silicon wafer •Integrated Circuit Silicon wafer Silicon wafer Silicon wafer
  • 11. ©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 11 Overview / Introduction Company Profile & Supply Chain Physical Analysis Manufacturing Process Flow Cost Analysis o Summary of cost analysis o Yield Explanation o Front-End Cost o Image Die Cost o Reflective Grating o Packaging Cost o Component Cost Selling Price Analysis Customer feedback About System Plus IC Front-End Cost
  • 12. ©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 12 Overview / Introduction Company Profile & Supply Chain Physical Analysis Manufacturing Process Flow Cost Analysis o Summary of cost analysis o Yield Explanation o Front-End Cost o Image Die Cost o Reflective Grating o Packaging Cost o Component Cost Selling Price Analysis Customer feedback About System Plus Component Cost
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