MEMS Fabry-Perot interferometer in a very tiny NIR spectrometer. More information: https://www.systemplus.fr/reverse-costing-reports/spectral-engines-nirone-sensor-x/

1. ©2020 by System Plus Consulting |SP20558 Spectral Engines Nirone Sensor X | Sample 1
22 bd Benoni Goullin
44200 NANTES - FRANCE +33 2 40 18 09 16 info@systemplus.fr www.systemplus.fr
Spectral Engines Nirone Sensor X
MEMS Fabry-Perot interferometer in a very tiny NIR spectrometer
SP20558 - MEMS report by Sylvain Hallereau
Laboratory Analysis by Nicolas Radufe
May 2020 – Sample
REVERSE COSTING® – STRUCTURAL, PROCESS & COST REPORT

2. ©2020 by System Plus Consulting |SP20558 Spectral Engines Nirone Sensor X | Sample 2
Table of Contents
Overview / Introduction 4
o Executive Summary
o Reverse Costing Methodology
Company Profile 8
o Spectral Engines
o VTT Memsfab
Physical Analysis 14
o Summary of the Physical Analysis
o Nirone Sensor X Spectral Sensor disassembly 17
✓ Module Disassembly and Dimension
✓ Metal Parts
✓ PCB
✓ BOM
o FPI Sensor Component 32
✓ IR Filter
o FPI MEMS Die 39
✓ Die Views and Dimensions
✓ Die Cross-Section
✓ Die Process
✓ Die Process
o InGaAs Photodiode 61
o Comparison Sensor X, Nanolambda NSP32 and the consumer
Physic SCiO 69
Sensor Manufacturing Process 74
o Global Overview
o FPI MEMS Front-End Process and Fabrication Unit
o TO5 Metal Can Package
o PCB and System Assembly Process
o Final Test and Assembly Unit
Cost Analysis 83
o Summary of the Cost Analysis
o Yields Explanation and Hypotheses
o Spectral Engines Nirone Sensor X 86
✓ Wafer Front-end Cost
✓ Die Cost
o InGaAs Photodiode 92
o IR Filters
o NIR FPI Sensor 100
✓ Package Cost
✓ NIR FPI Sensor Cost
o Nirone Sensor X 103
✓ BOM Cost
✓ Summary of the Assembling
✓ Added Value Cost
✓ Nirone Sensor X Cost
o Cost Comparison 114
Selling Price 115
Feedbacks 118
Company Services 120

3. ©2020 by System Plus Consulting |SP20558 Spectral Engines Nirone Sensor X | Sample 3
Overview / Introduction
o Executive Summary
o Reverse Costing Methodology
o Glossary
Company Profile
Physical Analysis
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
Feedbacks
Related Reports
About System Plus
Executive Summary
This full reverse costing study has been conducted to provide insights on technology data, manufacturing cost and selling price of the
Spectral Engines, NIRONE Sensor X a NIR spectrometer.
The Nirone Sensor X module developed by Spectral Engines, is a Near Infra-Red (NIR) spectrometer, covering wavelengths from 1550
nm to 1950 nm. The Nirone Sensor X module has been developed for applications including pharmaceutical composition analysis,
textile, plastic, agriculture and consumer.
In the Nirone Sensor X module, the IR light source is an incandescent lamp. The measurement of the NIR spectrum is performed by an
innovative MEMS Fabry-Perot Interferometer (FPI) developed by the VTT Technical Research Centre of Finland. The electrostatically
controlled FPI is manufactured with thin-film micromachining technology and is compatible with all semiconductor foundries. Today
manufactured on 150mm diameter wafers by VTT MEMSFab, this technology can be manufactured in large volume and for a low cost
in 200mm wafer diameter foundry without important investment. An InGaAs standard photodiode measures the NIR light during the
measurement to create the spectrum.
The module also integrates a color sensor from ams AG and a microcontroller from STMicroelectronics to manage power and
communication.
A comparison between the Nirone Sensor X and two other spectrometers, the NanoLambda NSP32 and Consumer Physics SCiO, is
performed in this report.
This reverse costing study provides insights into technological data, manufacturing cost, and selling price of housing, electronic board,
FPI MEMS and InGaAs photodiode, for the spectral sensor supplied by Spectral Engines.

4. ©2020 by System Plus Consulting |SP20558 Spectral Engines Nirone Sensor X | Sample 4
Overview / Introduction
Company Profile
Physical Analysis
o Nirone Sensor X
o Spectral Sensor
o Disassembly
o Spectral Sensor PCB
o Module BOM
o IR Sensor
o Views & Dimensions
o Sensor Cross-Section
o IR Filter
o FPI MEMS Die
o InGaAs Photodiode
o Comparison
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
Feedbacks
Related Reports
About System Plus
Nirone Sensor X - Overview & Dimensions
1.6 cm
3.2 cm
3.5 cm
Spectral Sensor– Overview
©2020 by System Plus Consulting

5. ©2020 by System Plus Consulting |SP20558 Spectral Engines Nirone Sensor X | Sample 5
Overview / Introduction
Company Profile
Physical Analysis
o Nirone Sensor X
o Spectral Sensor
o Disassembly
o Spectral Sensor PCB
o Module BOM
o IR Sensor
o Views & Dimensions
o Sensor Cross-Section
o IR Filter
o FPI MEMS Die
o InGaAs Photodiode
o Comparison
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
Feedbacks
Related Reports
About System Plus
Electronic Board - Top Side

6. ©2020 by System Plus Consulting |SP20558 Spectral Engines Nirone Sensor X | Sample 6
Overview / Introduction
Company Profile
Physical Analysis
o Nirone Sensor X
o Spectral Sensor
o Disassembly
o Spectral Sensor PCB
o Module BOM
o IR Sensor
o Views & Dimensions
o Sensor Cross-Section
o IR Filter
o FPI MEMS Die
o InGaAs Photodiode
o Comparison
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
Feedbacks
Related Reports
About System Plus
IR Sensor - Package Opening
Top Side of the sensor without the cap – Optical View
©2020 by System Plus Consulting
Backside view of the cap – Optical View
©2020 by System Plus Consulting

7. ©2020 by System Plus Consulting |SP20558 Spectral Engines Nirone Sensor X | Sample 7
Overview / Introduction
Company Profile
Physical Analysis
o Nirone Sensor X
o Spectral Sensor
o Disassembly
o Spectral Sensor PCB
o Module BOM
o IR Sensor
o Views & Dimensions
o Sensor Cross-Section
o IR Filter
o FPI MEMS Die
o InGaAs Photodiode
o Comparison
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
Feedbacks
Related Reports
About System Plus
IR Sensor - Cross-Section

8. ©2020 by System Plus Consulting |SP20558 Spectral Engines Nirone Sensor X | Sample 8
Overview / Introduction
Company Profile
Physical Analysis
o Nirone Sensor X
o Spectral Sensor
o Disassembly
o Spectral Sensor PCB
o Module BOM
o IR Sensor
o Views & Dimensions
o Sensor Cross-Section
o IR Filter
o FPI MEMS Die
o InGaAs Photodiode
o Comparison
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
Feedbacks
Related Reports
About System Plus
Fabry Perot Interferometer - DBR Mirror

9. ©2020 by System Plus Consulting |SP20558 Spectral Engines Nirone Sensor X | Sample 9
Overview / Introduction
Company Profile
Physical Analysis
o Nirone Sensor X
o Spectral Sensor
o Disassembly
o Spectral Sensor PCB
o Module BOM
o IR Sensor
o Views & Dimensions
o Sensor Cross-Section
o IR Filter
o FPI MEMS Die
o InGaAs Photodiode
o Comparison
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
Feedbacks
Related Reports
About System Plus
IR Photodiode – Die Overview & Dimensions

10. ©2020 by System Plus Consulting |SP20558 Spectral Engines Nirone Sensor X | Sample 10
Overview / Introduction
Company Profile
Physical Analysis
Manufacturing Process Flow
Cost Analysis
o Cost Analysis Summary
o Yields Explanation &
Hypotheses
o Spectral Engines FPI MEMSe
o Wafer Cost
o Die Cost
o InGaAs Photodiode
o IR Filters Costs
o NIR FPI Sensor
o Nirone Sensor X
o BOM
o Added Value
o Final Cost
o Cost Comparison
Selling Price Analysis
Feedbacks
Related Reports
About System Plus
Fabry Perot Interferometer Front-End Cost

11. ©2020 by System Plus Consulting |SP20558 Spectral Engines Nirone Sensor X | Sample 11
Overview / Introduction
Company Profile
Physical Analysis
Manufacturing Process Flow
Cost Analysis
o Cost Analysis Summary
o Yields Explanation &
Hypotheses
o Spectral Engines FPI MEMSe
o Wafer Cost
o Die Cost
o InGaAs Photodiode
o IR Filters Costs
o NIR FPI Sensor
o Nirone Sensor X
o BOM
o Added Value
o Final Cost
o Cost Comparison
Selling Price Analysis
Feedbacks
Related Reports
About System Plus
Nirone Sensor X Spectral Sensor Cost Breakdown

12. ©2020 by System Plus Consulting |SP20558 Spectral Engines Nirone Sensor X | Sample 12
Overview / Introduction
Company Profile
Physical Analysis
Manufacturing Process Flow
Cost Analysis
Physical & Cost Comparison
Selling Price Analysis
Feedbacks
Related Reports
About System Plus
o Company Services
o Contacts
REVERSE COSTING ANALYSES - SYSTEM PLUS CONSULTING
Related Reports
MARKET & TECHNOLOGY REPORTS & MONITORS –
YOLE DÉVELOPPEMENT
MEMS, Sensors & Actuators
• Status of the MEMS Industry 2019
REVERSE COSTING ANALYSES - SYSTEM PLUS CONSULTING
MEMS
• Hamamatsu C12880MA Micro-spectrometer
• NanoLambda NSP32-V1 Nano Spectrometer
• SCiO Molecular Sensor from Consumer Physics: Mobile
Spectrometer Dongle

13. ©2020 by System Plus Consulting |SP20558 Spectral Engines Nirone Sensor X | Sample 13
COMPANY
SERVICES

14. ©2020 by System Plus Consulting |SP20558 Spectral Engines Nirone Sensor X | Sample 14
Overview / Introduction
Company Profile
Physical Analysis
Manufacturing Process Flow
Cost Analysis
Physical & Cost Comparison
Selling Price Analysis
Feedbacks
Related Reports
About System Plus
o Company services
o Contact
Business Models Fields of Expertise
Custom Analyses
(>130 analyses per year)
Reports
(>60 reports per year)
Costing Tools
Trainings

15. ©2020 by System Plus Consulting |SP20558 Spectral Engines Nirone Sensor X | Sample 15
Overview / Introduction
Company Profile
Physical Analysis
Manufacturing Process Flow
Cost Analysis
Physical & Cost Comparison
Selling Price Analysis
Feedbacks
Related Reports
About System Plus
o Company services
o Contact
Contact
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sales@systemplus.fr
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