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Sumeet S. ChavanSumeet S. Chavan
MSc.-II, Sem-IVMSc.-II, Sem-IV
Paper-IIIPaper-III
Contents
Introduction.
Principle.
Sample preparation.
Instrumentation and Working.
Applications.
Principles of SEM
When electron beam strikes sample, large number of
signals are generated
- Observe surface topography and morphology at high
resolution.
- Observe rough or raised-feature surface with great
depth-of-field Measure thin film and coating thickness
with calibration standard reference.
- Measure the size of surface features, particle sizes
and determine particle shapes.
- Find number and density of surface defects.
- Examine precipitates at grain boundaries.
Sputter Deposited Platinum
A thick layer of sputter deposited Pt on a curved surface
shows layering with sharp crystallographic separations,
producing an overall “shingled” appearance at relatively
low magnification.  This is a case in which the great
depth of focal field of the SEM compared to optical
microscopy is very useful.
- H.H. Willard, L.L. Merrit, J.A. Dean and F.A. Settle,
Instrumental Methods of Analysis.
scanning electron microscope sumeet

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scanning electron microscope sumeet

  • 1. Sumeet S. ChavanSumeet S. Chavan MSc.-II, Sem-IVMSc.-II, Sem-IV Paper-IIIPaper-III
  • 3.
  • 4.
  • 5.
  • 7.
  • 8.
  • 9.
  • 10.
  • 11.
  • 12.
  • 13.
  • 14.
  • 15.
  • 16.
  • 17. When electron beam strikes sample, large number of signals are generated
  • 18.
  • 19.
  • 20.
  • 21.
  • 22. - Observe surface topography and morphology at high resolution. - Observe rough or raised-feature surface with great depth-of-field Measure thin film and coating thickness with calibration standard reference. - Measure the size of surface features, particle sizes and determine particle shapes. - Find number and density of surface defects. - Examine precipitates at grain boundaries.
  • 23. Sputter Deposited Platinum A thick layer of sputter deposited Pt on a curved surface shows layering with sharp crystallographic separations, producing an overall “shingled” appearance at relatively low magnification.  This is a case in which the great depth of focal field of the SEM compared to optical microscopy is very useful.
  • 24. - H.H. Willard, L.L. Merrit, J.A. Dean and F.A. Settle, Instrumental Methods of Analysis.