This document discusses various electron microscopy techniques used to analyze materials at the nanoscale, including transmission electron microscopy (TEM), scanning electron microscopy (SEM), and scanning transmission electron microscopy (STEM). TEM works by transmitting electrons through a thin sample, allowing analysis of sample structure and crystallography. SEM scans the sample surface with a focused electron beam to produce high-resolution images based on emitted secondary electrons and backscattered electrons. STEM combines TEM and SEM to enable both imaging and elemental analysis using energy-dispersive X-ray spectroscopy (EDS) or electron energy loss spectroscopy (EELS).
The document provides an overview of the transmission electron microscope (TEM). It discusses key components of the TEM including the electron gun, condenser lenses, objective lens, and vacuum system. The document explains that TEM uses electromagnetic lenses to focus a beam of electrons onto a thin specimen, and forms an image from the interaction of electrons transmitted through the specimen. TEM allows higher magnification and resolution than light microscopes, and can be used to investigate the morphology, structure, and composition of materials down to the atomic scale.
Scanning electon microscope. Dr. GAURAV SALUNKHEGaurav Salunkhe
The document discusses the scanning electron microscope (SEM). It describes the history and development of the SEM from the 1930s to its commercialization in the 1960s. It then provides details on the construction of an SEM, including the electron optical system, specimen stage, detectors, and vacuum system. It also discusses specimen preparation techniques such as cleaning, fixation, dehydration and coating samples with metal to increase conductivity and prevent charge buildup.
This document summarizes different imaging modalities, including transmission electron microscopy (TEM), scanning electron microscopy (SEM), and fractal generation. TEM uses a beam of electrons to examine very fine structures within specimens. It provides high magnification and resolution but requires thin sample preparation. SEM scans a beam across surfaces to create 3D topographical images of bulkier samples. Both techniques are expensive and require specialized training. Fractals are self-similar patterns generated through iterative subdivision and pattern matching according to mathematical rules, enabling applications like image enlargement and texture compression.
Electron microscope, principle and applicationKAUSHAL SAHU
Introduction
History
Resolution &Magnification of
Electron microscope
Types of electron microscope
1) Transmission electron microscope (TEM)
- Structural parts of TEM
- Principle & Working of TEM
- Sample preparation for TEM
- Advantages & disadvantages of TEM
Scanning electron microscope (SEM)
- Structural parts of SEM
- Principle & Working of SEM
- Sample preparation for SEM
- Advantages & disadvantages of SEM
3) Scanning transmission electron microscope (STEM)
Applications of electron microscope
Conclusion
References
SEM provides information on a sample's surface composition through backscattered and secondary electrons. It has lower resolution than TEM but requires little sample preparation. TEM uses transmitted electrons to view a sample's inner structure and crystal structure at atomic resolution, but requires complex preparation of very thin samples and specialized grids for mounting. While TEM enables higher magnification and resolution, SEM operation is simpler and provides a larger field of view and depth of field.
This document provides an overview of fiber characterization using scanning electron microscopy (SEM). It outlines the components and working principles of SEM, including the electron gun, electromagnetic lenses, scanning coils, sample chamber, detectors, and vacuum chamber. It describes the signals generated from samples, including secondary electrons, backscattered electrons, and X-rays. The document discusses SEM resolution and sample preparation. It highlights salient features of SEM such as high resolution, 3D imaging capability, and compatibility with digital technologies. Finally, it demonstrates SEM characterization of wool, cotton, and polyester fibers through longitudinal and cross-sectional views.
The document provides an overview of the transmission electron microscope (TEM). It discusses key components of the TEM including the electron gun, condenser lenses, objective lens, and vacuum system. The document explains that TEM uses electromagnetic lenses to focus a beam of electrons onto a thin specimen, and forms an image from the interaction of electrons transmitted through the specimen. TEM allows higher magnification and resolution than light microscopes, and can be used to investigate the morphology, structure, and composition of materials down to the atomic scale.
Scanning electon microscope. Dr. GAURAV SALUNKHEGaurav Salunkhe
The document discusses the scanning electron microscope (SEM). It describes the history and development of the SEM from the 1930s to its commercialization in the 1960s. It then provides details on the construction of an SEM, including the electron optical system, specimen stage, detectors, and vacuum system. It also discusses specimen preparation techniques such as cleaning, fixation, dehydration and coating samples with metal to increase conductivity and prevent charge buildup.
This document summarizes different imaging modalities, including transmission electron microscopy (TEM), scanning electron microscopy (SEM), and fractal generation. TEM uses a beam of electrons to examine very fine structures within specimens. It provides high magnification and resolution but requires thin sample preparation. SEM scans a beam across surfaces to create 3D topographical images of bulkier samples. Both techniques are expensive and require specialized training. Fractals are self-similar patterns generated through iterative subdivision and pattern matching according to mathematical rules, enabling applications like image enlargement and texture compression.
Electron microscope, principle and applicationKAUSHAL SAHU
Introduction
History
Resolution &Magnification of
Electron microscope
Types of electron microscope
1) Transmission electron microscope (TEM)
- Structural parts of TEM
- Principle & Working of TEM
- Sample preparation for TEM
- Advantages & disadvantages of TEM
Scanning electron microscope (SEM)
- Structural parts of SEM
- Principle & Working of SEM
- Sample preparation for SEM
- Advantages & disadvantages of SEM
3) Scanning transmission electron microscope (STEM)
Applications of electron microscope
Conclusion
References
SEM provides information on a sample's surface composition through backscattered and secondary electrons. It has lower resolution than TEM but requires little sample preparation. TEM uses transmitted electrons to view a sample's inner structure and crystal structure at atomic resolution, but requires complex preparation of very thin samples and specialized grids for mounting. While TEM enables higher magnification and resolution, SEM operation is simpler and provides a larger field of view and depth of field.
This document provides an overview of fiber characterization using scanning electron microscopy (SEM). It outlines the components and working principles of SEM, including the electron gun, electromagnetic lenses, scanning coils, sample chamber, detectors, and vacuum chamber. It describes the signals generated from samples, including secondary electrons, backscattered electrons, and X-rays. The document discusses SEM resolution and sample preparation. It highlights salient features of SEM such as high resolution, 3D imaging capability, and compatibility with digital technologies. Finally, it demonstrates SEM characterization of wool, cotton, and polyester fibers through longitudinal and cross-sectional views.
The document discusses the scanning electron microscope (SEM). The SEM uses a focused beam of electrons to scan the surface of a sample and produce images with high magnification and resolution. It has several advantages over optical microscopes, including higher magnification, greater depth of field, and the ability to provide 3D images and determine sample composition. The SEM has many applications in science and industry such as structural analysis, measurements, and failure inspection. It provides valuable but has some limitations like requiring solid samples and being costly.
The document discusses microscopy and different types of microscopes. It begins by defining microscopy as the technology that makes small objects visible to the human eye using microscopes. It then describes different types of microscopes, focusing on light microscopes and electron microscopes. Electron microscopes use a beam of electrons rather than light, allowing them to achieve much higher magnifications and resolving power than light microscopes. The document discusses the basic components and working principles of transmission electron microscopes and scanning electron microscopes. It also covers sample preparation techniques, applications, limitations, and recent research using electron microscopy.
The scanning electron microscope (SEM) uses a focused beam of electrons to generate high-resolution images of surfaces. SEMs can provide information about topography, morphology, and composition through detection of signals from electron interactions with the sample surface. There are two main types: transmission electron microscopes study inner structures while scanning electron microscopes are used to visualize surfaces. SEMs work by scanning a focused electron beam across the sample; electrons interact with atoms and produce signals containing surface and composition data. Proper sample preparation including cleaning, fixation, dehydration and coating with a conductive material is required for clear SEM imaging.
Electron microscopes use electrons instead of light to view specimens. There are two main types: transmission electron microscopes (TEM) and scanning electron microscopes (SEM). TEMs allow electrons to transmit through thin specimens to view internal structures, while SEMs scan specimens with an electron beam to view surface topography. Both require specimens to be placed in a vacuum and provide much higher resolutions than light microscopes. Electron microscopes have enabled novel discoveries in cell biology and other fields by allowing visualization of structures too small to be seen otherwise.
The document discusses electron microscopy. It describes how electron microscopes use electron beams instead of light to image specimens. There are two main types: transmission electron microscopes, which image thin sections, and scanning electron microscopes, which image surfaces. Electron microscopes provide much higher magnification than light microscopes due to the small wavelength of electrons. They have many applications but also limitations such as not being able to image living specimens.
Transmission Electron Microscope (TEM), RESOLVING POWER, Scanning Electron Microscope, PRINCIPLE AND WORKING OF SEM, SEM SAMPLE PREPARATION, Limitations of Scanning Electron Microscopy (SEM), ADVANTAGES & DISADVANTAGES OF SEM, APPLICATIONS OF SEM, PRINCIPLE, AND WORKING OF TEM, SAMPLE PREPARATION FOR TEM, ADVANTAGES & DISADVANTAGES OF TEM, APPLICATIONS OF TEM, Differences between SEM and TEM.
This document describes the Transmission Electron Microscope (TEM). It discusses how TEM uses a beam of electrons instead of light to produce highly magnified images, providing resolution over 2 million times greater than a light microscope. It details the key parts of TEM - the electron gun that produces the electron beam, the image producing system involving lenses, and the image recording system. Specimen preparation and the working principle of TEM are also explained. Applications include visualizing cell structures in biology and microbiology.
The document discusses electron microscopes and their components and operation. Electron microscopes use a beam of electrons instead of light to examine objects at a very fine scale. There are two main types - scanning electron microscopes (SEM) and transmission electron microscopes (TEM). SEMs produce higher resolution images than optical microscopes and work by scanning a focused beam of electrons across a sample. TEMs require electron-transparent samples and work by transmitting electrons through a sample to form an image. Both types of electron microscopes have advanced scientific understanding by allowing observation of microscopic structures.
Examples of Various Imaging Techniques- SEM, AFM, TEM and FluorescenceJacob Feste
This document summarizes an experiment using SEM and AFM microscopy to image and characterize multi-walled carbon nanotubes (MWCNTs). SEM imaging provided estimated diameters of 60.9nm and lengths of 3.21um for the MWCNTs. AFM imaging was unsuccessful likely due to errors in MWCNT preparation that left unwanted material like calcium carbonate binding to the nanotubes, interfering with AFM parameter adjustments needed for clear imaging. While SEM imaging worked as expected for the conductive carbon nanotubes, AFM imaging requires a more uniform sample to produce high-quality images.
The document summarizes electron microscopes. It describes that Ernst Ruska invented the first electron microscope in 1931, which uses a beam of electrons instead of light to magnify objects. It has three main parts - an electron gun that generates electrons, electromagnetic lenses that focus the electron beam, and a specimen holder. Electron microscopes can magnify objects up to two million times, allowing visualization of structures at the nanoscale. There are two main types - transmission electron microscopes (TEM), which produce highly detailed images but require thin specimens, and scanning electron microscopes (SEM) which scan surfaces and provide 3D topographic information.
The document summarizes the key components and operating principles of a scanning electron microscope (SEM). It describes the electron gun that generates the electron beam, the condenser lenses that focus the beam, the scan coils that scan the beam across the sample, and various detectors that detect signals from the sample. It outlines applications in fields like biology, materials science, and forensics. Advantages include detailed imaging and versatile information from detectors, while disadvantages include high costs and specialized training required.
A scanning electron microscope is a type of electron microscope that produces images of a sample by scanning the surface with a focused beam of electrons. The electrons interact with atoms in the sample, producing various signals that contain information about the sample's surface topography and composition.
SEMs can magnify an object from about 10 times up to 300,000 times. A scale bar is often provided on an SEM image. From this the actual size of structures in the image can be calculated.
Powerpoint presentation on electron microscopykumar virbhadra
Electron microscopy is a technique that uses beams of electrons instead of light to view objects. There are two main types: transmission electron microscopy (TEM) and scanning electron microscopy (SEM). TEM uses electrons transmitted through an ultra-thin sample to form magnified images, allowing visualization of structures as small as single atoms. SEM scans a focused beam of electrons across a sample to produce high-resolution 3D images of surface topology and composition. Newer techniques like scanning tunneling microscopy can achieve even higher resolution down to fractions of a nanometer. Electron microscopy has enabled significant advances in fields like materials science, biology, and nanotechnology.
1) CONTENTS:
Introduction
Construction
Working Principle
The Electron Gun And Condenser System
Image Producing & Recording System
TEM Applications
Advantages
Disadvantages
2) INTRODUCTION:
A Transmission Electron Microscope (TEM) utilizes energetic electron beam to provide morphologic, compositional and crystallographic information on samples.TEM produce High-Resolution, 2D images. The first transmission electron microscope was invented in 1933 by Max Knoll and E. Ruska at the Technical College in Berlin.
3) CONSTRUCTION:
Electron Gun – to produce electrons.
Magnetic condensing lens - to condense the electrons and to adjust the spot size of the electron.The specimen is placed in between the condensing lens and the objective lens.
The magnetic objective lens - to block the high angle diffracted
beam.
Aperture - eliminate the diffracted beam (if any) and in turn
increases the contrast of the image.The magnetic projector lens - to achieve higher magnification.
Fluorescent (Phosphor) screen – To record the image.
4)Working Principle: High voltage electron beam is transmitted through a specimen to form an image. Stream of electrons are produced by the electron gun and is made to fall over the specimen using the magnetic condensing lens.Electrons are made to pass through the specimen and the image is formed on the fluorescent screen.
5) The Electron Gun And Condenser System: The image can be manipulated by adjusting the voltage of the gun to accelerate or decrease the speed of electrons as well as changing the electromagnetic wavelength via the solenoids.
6) Image Producing & Recording System:
Air needs to be pumped out of the vacuum chamber, creating a
space where electrons are able to move.The objective lens is used to produces a image and then further magnified by the projector lens. The lighter areas of the image represent the places where a greater number of electrons were able to pass through the sample and the darker areas reflect the dense areas of the object. Monochromatic image is recorded in fluorescent screen or by capturing the image digitally to display on a computer monitor,basically stored in a TIFF or JPEG format.
7)TEM Applications:
It analyze structure, topographical, morphological, compositional and crystalline information. Can be used in semiconductor analysis and production and the manufacturing of computer and silicon chips. To identify fractures and damages.
8)Advantages:
Powerful magnification . It can produce magnification as high as 1,00,000 times as that of the size of the object.
Images are high-quality and detailed.They are easy to operate with proper training.
9)Disadvantages:
Large and very expensive.
Laborious sample preparation.
TEM require special housing and maintenance.
Samples are limited to those that are electron transparent.
10) Thank You
Electron microscopes were developed in the 1930s to see finer cell structures that light microscopes could not due to limitations in magnification and resolution. Transmission electron microscopes (TEM) and scanning electron microscopes (SEM) use electron beams rather than light to image samples. A TEM images a sample by transmitting electrons through it, while an SEM images a sample by scanning it with a high-energy electron beam and detecting signals from the surface. Both types of electron microscopes enabled viewing organic cell structures like the nucleus and mitochondria at much higher magnifications than possible with light microscopes.
Transmission electron microscopy (TEM) uses a beam of electrons to examine objects at a very fine scale. TEM can image at a higher resolution than light microscopes due to the shorter wavelength of electron beams. In TEM, a beam of electrons is transmitted through an ultrathin specimen, interacting with the sample as it passes through. This interaction is used to form an image that is magnified and focused onto a screen, with resolutions down to fractions of a nanometer. TEM is widely used in materials science, biology, and medicine for examining nanostructures.
Presentation on SEM (Scanning Electron Microscope) Farshina Nazrul
The document discusses the scanning electron microscope (SEM). It provides details on:
- The basic components of an SEM including the electron gun, condenser lenses, objective aperture and lenses, scan coils, sample chamber, detectors, and image display unit.
- How an SEM works by scanning a focused beam of electrons across a sample to form images based on signals from electron-sample interactions providing topological, compositional, and crystallographic information.
- Applications of SEM including failure analysis, contaminant detection, material inspection, and biological imaging.
The transmission electron microscope is a very powerful tool for material science. A high energy beam of electrons is shone through a very thin sample, and the interactions between the electrons and the atoms can be used to observe features such as the crystal structure and features in the structure like dislocations and grain boundaries. Chemical analysis can also be performed. TEM can be used to study the growth of layers, their composition and defects in semiconductors. High resolution can be used to analyze the quality, shape, size and density of quantum wells, wires and dots.
Tunneling electron Microscopy, Scanning electron microscopyelminehtsegahun2
- The document discusses transmission electron microscopy (TEM), providing details about its essential parts, operation principles, imaging modes, diffraction techniques, and applications.
- TEM uses electron beams to image nanoscale structures, with key components including an electron gun, condenser lenses, specimen holder, objective lens, and viewing screen. Specimens must be very thin to transmit electrons.
- Imaging modes include bright field, dark field, and high resolution, which produce different image contrasts. Diffraction techniques like selected area diffraction are also described.
- Applications involve characterizing materials structures, layers, interfaces, and chemical composition at the nanoscale. TEM provides both imaging and diffraction/crystallographic information
TEM transmission electron microscopy in depthneeraj952329
Transmission electron microscopy (TEM) uses electrons instead of light to image materials at the nanoscale. Key components of a TEM include an electron gun, condenser lenses, a specimen holder, an objective lens that forms the image, and projector lenses that magnify the image. TEMs can form images of a specimen's internal structure or collect diffraction patterns from which the specimen's crystal structure can be determined. Specimen preparation often involves thinning to less than 100 nm thickness. TEM provides several contrast mechanisms and imaging modes for revealing details about a material's microstructure, defects, and composition.
The document discusses the scanning electron microscope (SEM). The SEM uses a focused beam of electrons to scan the surface of a sample and produce images with high magnification and resolution. It has several advantages over optical microscopes, including higher magnification, greater depth of field, and the ability to provide 3D images and determine sample composition. The SEM has many applications in science and industry such as structural analysis, measurements, and failure inspection. It provides valuable but has some limitations like requiring solid samples and being costly.
The document discusses microscopy and different types of microscopes. It begins by defining microscopy as the technology that makes small objects visible to the human eye using microscopes. It then describes different types of microscopes, focusing on light microscopes and electron microscopes. Electron microscopes use a beam of electrons rather than light, allowing them to achieve much higher magnifications and resolving power than light microscopes. The document discusses the basic components and working principles of transmission electron microscopes and scanning electron microscopes. It also covers sample preparation techniques, applications, limitations, and recent research using electron microscopy.
The scanning electron microscope (SEM) uses a focused beam of electrons to generate high-resolution images of surfaces. SEMs can provide information about topography, morphology, and composition through detection of signals from electron interactions with the sample surface. There are two main types: transmission electron microscopes study inner structures while scanning electron microscopes are used to visualize surfaces. SEMs work by scanning a focused electron beam across the sample; electrons interact with atoms and produce signals containing surface and composition data. Proper sample preparation including cleaning, fixation, dehydration and coating with a conductive material is required for clear SEM imaging.
Electron microscopes use electrons instead of light to view specimens. There are two main types: transmission electron microscopes (TEM) and scanning electron microscopes (SEM). TEMs allow electrons to transmit through thin specimens to view internal structures, while SEMs scan specimens with an electron beam to view surface topography. Both require specimens to be placed in a vacuum and provide much higher resolutions than light microscopes. Electron microscopes have enabled novel discoveries in cell biology and other fields by allowing visualization of structures too small to be seen otherwise.
The document discusses electron microscopy. It describes how electron microscopes use electron beams instead of light to image specimens. There are two main types: transmission electron microscopes, which image thin sections, and scanning electron microscopes, which image surfaces. Electron microscopes provide much higher magnification than light microscopes due to the small wavelength of electrons. They have many applications but also limitations such as not being able to image living specimens.
Transmission Electron Microscope (TEM), RESOLVING POWER, Scanning Electron Microscope, PRINCIPLE AND WORKING OF SEM, SEM SAMPLE PREPARATION, Limitations of Scanning Electron Microscopy (SEM), ADVANTAGES & DISADVANTAGES OF SEM, APPLICATIONS OF SEM, PRINCIPLE, AND WORKING OF TEM, SAMPLE PREPARATION FOR TEM, ADVANTAGES & DISADVANTAGES OF TEM, APPLICATIONS OF TEM, Differences between SEM and TEM.
This document describes the Transmission Electron Microscope (TEM). It discusses how TEM uses a beam of electrons instead of light to produce highly magnified images, providing resolution over 2 million times greater than a light microscope. It details the key parts of TEM - the electron gun that produces the electron beam, the image producing system involving lenses, and the image recording system. Specimen preparation and the working principle of TEM are also explained. Applications include visualizing cell structures in biology and microbiology.
The document discusses electron microscopes and their components and operation. Electron microscopes use a beam of electrons instead of light to examine objects at a very fine scale. There are two main types - scanning electron microscopes (SEM) and transmission electron microscopes (TEM). SEMs produce higher resolution images than optical microscopes and work by scanning a focused beam of electrons across a sample. TEMs require electron-transparent samples and work by transmitting electrons through a sample to form an image. Both types of electron microscopes have advanced scientific understanding by allowing observation of microscopic structures.
Examples of Various Imaging Techniques- SEM, AFM, TEM and FluorescenceJacob Feste
This document summarizes an experiment using SEM and AFM microscopy to image and characterize multi-walled carbon nanotubes (MWCNTs). SEM imaging provided estimated diameters of 60.9nm and lengths of 3.21um for the MWCNTs. AFM imaging was unsuccessful likely due to errors in MWCNT preparation that left unwanted material like calcium carbonate binding to the nanotubes, interfering with AFM parameter adjustments needed for clear imaging. While SEM imaging worked as expected for the conductive carbon nanotubes, AFM imaging requires a more uniform sample to produce high-quality images.
The document summarizes electron microscopes. It describes that Ernst Ruska invented the first electron microscope in 1931, which uses a beam of electrons instead of light to magnify objects. It has three main parts - an electron gun that generates electrons, electromagnetic lenses that focus the electron beam, and a specimen holder. Electron microscopes can magnify objects up to two million times, allowing visualization of structures at the nanoscale. There are two main types - transmission electron microscopes (TEM), which produce highly detailed images but require thin specimens, and scanning electron microscopes (SEM) which scan surfaces and provide 3D topographic information.
The document summarizes the key components and operating principles of a scanning electron microscope (SEM). It describes the electron gun that generates the electron beam, the condenser lenses that focus the beam, the scan coils that scan the beam across the sample, and various detectors that detect signals from the sample. It outlines applications in fields like biology, materials science, and forensics. Advantages include detailed imaging and versatile information from detectors, while disadvantages include high costs and specialized training required.
A scanning electron microscope is a type of electron microscope that produces images of a sample by scanning the surface with a focused beam of electrons. The electrons interact with atoms in the sample, producing various signals that contain information about the sample's surface topography and composition.
SEMs can magnify an object from about 10 times up to 300,000 times. A scale bar is often provided on an SEM image. From this the actual size of structures in the image can be calculated.
Powerpoint presentation on electron microscopykumar virbhadra
Electron microscopy is a technique that uses beams of electrons instead of light to view objects. There are two main types: transmission electron microscopy (TEM) and scanning electron microscopy (SEM). TEM uses electrons transmitted through an ultra-thin sample to form magnified images, allowing visualization of structures as small as single atoms. SEM scans a focused beam of electrons across a sample to produce high-resolution 3D images of surface topology and composition. Newer techniques like scanning tunneling microscopy can achieve even higher resolution down to fractions of a nanometer. Electron microscopy has enabled significant advances in fields like materials science, biology, and nanotechnology.
1) CONTENTS:
Introduction
Construction
Working Principle
The Electron Gun And Condenser System
Image Producing & Recording System
TEM Applications
Advantages
Disadvantages
2) INTRODUCTION:
A Transmission Electron Microscope (TEM) utilizes energetic electron beam to provide morphologic, compositional and crystallographic information on samples.TEM produce High-Resolution, 2D images. The first transmission electron microscope was invented in 1933 by Max Knoll and E. Ruska at the Technical College in Berlin.
3) CONSTRUCTION:
Electron Gun – to produce electrons.
Magnetic condensing lens - to condense the electrons and to adjust the spot size of the electron.The specimen is placed in between the condensing lens and the objective lens.
The magnetic objective lens - to block the high angle diffracted
beam.
Aperture - eliminate the diffracted beam (if any) and in turn
increases the contrast of the image.The magnetic projector lens - to achieve higher magnification.
Fluorescent (Phosphor) screen – To record the image.
4)Working Principle: High voltage electron beam is transmitted through a specimen to form an image. Stream of electrons are produced by the electron gun and is made to fall over the specimen using the magnetic condensing lens.Electrons are made to pass through the specimen and the image is formed on the fluorescent screen.
5) The Electron Gun And Condenser System: The image can be manipulated by adjusting the voltage of the gun to accelerate or decrease the speed of electrons as well as changing the electromagnetic wavelength via the solenoids.
6) Image Producing & Recording System:
Air needs to be pumped out of the vacuum chamber, creating a
space where electrons are able to move.The objective lens is used to produces a image and then further magnified by the projector lens. The lighter areas of the image represent the places where a greater number of electrons were able to pass through the sample and the darker areas reflect the dense areas of the object. Monochromatic image is recorded in fluorescent screen or by capturing the image digitally to display on a computer monitor,basically stored in a TIFF or JPEG format.
7)TEM Applications:
It analyze structure, topographical, morphological, compositional and crystalline information. Can be used in semiconductor analysis and production and the manufacturing of computer and silicon chips. To identify fractures and damages.
8)Advantages:
Powerful magnification . It can produce magnification as high as 1,00,000 times as that of the size of the object.
Images are high-quality and detailed.They are easy to operate with proper training.
9)Disadvantages:
Large and very expensive.
Laborious sample preparation.
TEM require special housing and maintenance.
Samples are limited to those that are electron transparent.
10) Thank You
Electron microscopes were developed in the 1930s to see finer cell structures that light microscopes could not due to limitations in magnification and resolution. Transmission electron microscopes (TEM) and scanning electron microscopes (SEM) use electron beams rather than light to image samples. A TEM images a sample by transmitting electrons through it, while an SEM images a sample by scanning it with a high-energy electron beam and detecting signals from the surface. Both types of electron microscopes enabled viewing organic cell structures like the nucleus and mitochondria at much higher magnifications than possible with light microscopes.
Transmission electron microscopy (TEM) uses a beam of electrons to examine objects at a very fine scale. TEM can image at a higher resolution than light microscopes due to the shorter wavelength of electron beams. In TEM, a beam of electrons is transmitted through an ultrathin specimen, interacting with the sample as it passes through. This interaction is used to form an image that is magnified and focused onto a screen, with resolutions down to fractions of a nanometer. TEM is widely used in materials science, biology, and medicine for examining nanostructures.
Presentation on SEM (Scanning Electron Microscope) Farshina Nazrul
The document discusses the scanning electron microscope (SEM). It provides details on:
- The basic components of an SEM including the electron gun, condenser lenses, objective aperture and lenses, scan coils, sample chamber, detectors, and image display unit.
- How an SEM works by scanning a focused beam of electrons across a sample to form images based on signals from electron-sample interactions providing topological, compositional, and crystallographic information.
- Applications of SEM including failure analysis, contaminant detection, material inspection, and biological imaging.
The transmission electron microscope is a very powerful tool for material science. A high energy beam of electrons is shone through a very thin sample, and the interactions between the electrons and the atoms can be used to observe features such as the crystal structure and features in the structure like dislocations and grain boundaries. Chemical analysis can also be performed. TEM can be used to study the growth of layers, their composition and defects in semiconductors. High resolution can be used to analyze the quality, shape, size and density of quantum wells, wires and dots.
Tunneling electron Microscopy, Scanning electron microscopyelminehtsegahun2
- The document discusses transmission electron microscopy (TEM), providing details about its essential parts, operation principles, imaging modes, diffraction techniques, and applications.
- TEM uses electron beams to image nanoscale structures, with key components including an electron gun, condenser lenses, specimen holder, objective lens, and viewing screen. Specimens must be very thin to transmit electrons.
- Imaging modes include bright field, dark field, and high resolution, which produce different image contrasts. Diffraction techniques like selected area diffraction are also described.
- Applications involve characterizing materials structures, layers, interfaces, and chemical composition at the nanoscale. TEM provides both imaging and diffraction/crystallographic information
TEM transmission electron microscopy in depthneeraj952329
Transmission electron microscopy (TEM) uses electrons instead of light to image materials at the nanoscale. Key components of a TEM include an electron gun, condenser lenses, a specimen holder, an objective lens that forms the image, and projector lenses that magnify the image. TEMs can form images of a specimen's internal structure or collect diffraction patterns from which the specimen's crystal structure can be determined. Specimen preparation often involves thinning to less than 100 nm thickness. TEM provides several contrast mechanisms and imaging modes for revealing details about a material's microstructure, defects, and composition.
TEM uses electron beams to image materials at high magnifications and resolutions. It works by transmitting electrons through a thin sample and forming an image from the electrons. Different imaging modes like bright field and dark field are used by selecting certain electron signals using an aperture. Electron diffraction is also possible, allowing analysis of crystal structures and orientations. Sample preparation into thin foils is important. TEM can reveal details of microstructures like defects, phases, and interfaces.
Federico Forneris is a researcher at the Armenise-Harvard Laboratory of Structural Biology who studies cryo-electron microscopy (cryo-EM). Cryo-EM uses electron microscopes instead of light microscopes to image biological samples at higher resolutions. Electron microscopes require vacuum conditions and use electron beams rather than visible light. Cryo-EM flash freezes samples to image them without distortion at resolutions as high as 4 Angstroms, enabling structure determination of large biomolecules. Forneris' lab in Pavia, Italy uses cryo-EM techniques like single-particle reconstruction to study protein structures important for human health.
This document provides an overview of scanning transmission electron microscopy (STEM). It discusses the history and components of STEM, including the field emission gun, electromagnetic lenses, apertures, specimen stage, vacuum system, and detectors. Specimen preparation techniques like ion milling and electrolytic thinning are described. STEM operates by rastering a focused electron probe across the sample, while different detectors collect transmitted and scattered electrons to form images. Bright field (BF) and annular dark field (ADF) modes are covered, with ADF providing greater atomic number contrast. Advantages of STEM over conventional TEM are also highlighted.
The document discusses the transmission electron microscope (TEM). It begins by providing a brief history and overview, explaining that TEM uses electrons rather than light to image specimens. It then describes the key components and working principles of TEM, including how it produces higher resolution images than light microscopes due to electrons' lower wavelength. Finally, it outlines some common applications of TEM in fields like materials science, biology, and manufacturing, and notes advantages like powerful magnification but also disadvantages like high costs and specialized training needs.
Scanning and transmission electroscopy.pptxNirmal P J
This document provides information about the transmission electron microscope (TEM). It begins by explaining that a TEM uses electron beams to produce highly magnified images of incredibly thin samples, up to 10-50 million times magnification and less than 150nm thick. It describes the basic components and functioning of a TEM, including the electron gun, magnetic lenses, sample stage, imaging system, and detector. Key points are that TEMs allow viewing structures at the molecular level and have a resolution limit of 0.2 micrometers. The document also discusses applications in fields like virology and nanotechnology, and advantages like high magnification and quality images.
This document discusses the transmission electron microscope (TEM). It begins by comparing light microscopes and electron microscopes. It then describes the key components of a TEM, including the electron source, lenses, vacuum chamber, and screen. It explains that TEMs produce high-resolution black and white images through the interaction of electrons with prepared samples. Applications of TEM include studying crystals, metals, and semiconductor analysis. Advantages are high-quality images and structure information, while disadvantages include large size, expense, specialized training and sample preparation.
Transmission electron microscopy (TEM) allows for direct imaging of nanoparticles and provides information about their atom distribution and surface. TEM works by firing electrons through an electron-transparent specimen using electromagnetic lenses, forming a magnified image based on how the specimen interacts with the electrons. Sample preparation is laborious and requires fixation, dehydration, resin infiltration, and ultrathin sectioning. TEM provides nanoscale imaging but requires expensive equipment and specialized facilities.
Electron Microscopy - Scanning electron microscope, Transmission Electron Mic...Sumer Pankaj
The document discusses electron microscopy techniques. It provides an overview of scanning electron microscopy (SEM) and transmission electron microscopy (TEM). SEM uses a beam of electrons to produce images of sample surfaces, while TEM transmits electrons through thin samples to form magnified images. The document outlines the basic components, working principles, and applications of SEM and TEM, such as viewing cell structures and analyzing material properties at high resolutions. Limitations include high costs, specialized training and sample preparation requirements.
This document summarizes an expert presentation on transmission electron microscopy (TEM) applications for biological samples. It discusses various TEM techniques including basic imaging, specimen preparation, energy-filtered TEM, electron energy loss spectroscopy, and scanning TEM with EELS mapping. High-resolution TEM can now achieve resolutions exceeding X-rays. Automated digital montages and low-dose cryo imaging allow capturing thousands of particle images. Spectrum imaging collects spatial and spectral data in a "data cube" enabling extraction of elemental maps. In summary, the presentation covered advanced TEM and STEM techniques for high-resolution imaging and spectroscopy of biological specimens.
An electron microscope uses a beam of accelerated electrons rather than light to illuminate a sample, allowing it to see objects as small as 50 picometers. There are four main types: analytical electron microscopy, scanning transmission electron microscopy, scanning electron microscopy, and transmission electron microscopy. Transmission electron microscopes can magnify up to 10 million times and reveal the structure of smaller objects by transmitting electrons through an ultra-thin sample. Scanning electron microscopes form images by scanning a focused electron beam over a sample and detecting signals from atoms within.
This document discusses the working principles of a scanning electron microscope (SEM) and its use for fiber characterization. It begins with an introduction to SEMs and their components. Key points made include that SEMs use electron beams rather than light to image samples and can achieve higher resolution than light microscopes. The document then covers SEM signals, image formation, resolution factors, sample preparation, and applications for characterizing fibers like wool, cotton and polyester. Limitations discussed include the sample size and need for vacuum and conductive coating. Overall, the document provides a high-level overview of SEM operation and its advantages for examining textile fiber structure and morphology.
The document discusses scanning electron microscopy (SEM). It begins with an overview of SEM including what an SEM is, its working principles, major components and their functions. It then discusses interactions between the electron beam and specimen, including secondary electrons which provide topographic contrast in SEM images due to their dependence on surface angle. Magnification, resolution, depth of field and sources of image contrast are also mentioned. Applications of SEM such as energy dispersive X-ray spectroscopy (EDS) and wavelength dispersive X-ray spectroscopy (WDS) are listed.
The document discusses scanning electron microscopy (SEM). It begins with an overview of SEM including what an SEM is, its working principles, major components and their functions. It then discusses interactions between the electron beam and specimen, including secondary electrons which provide topographic contrast in SEM images due to their dependence on surface angle. Magnification, resolution, depth of field and sources of image contrast are also mentioned. Applications of SEM such as energy dispersive X-ray spectroscopy (EDS) and wavelength dispersive X-ray spectroscopy (WDS) are listed.
The document discusses scanning electron microscopy (SEM). It begins with an overview of SEM including what an SEM is, its working principles, major components and their functions. It then discusses interactions between the electron beam and specimen, including secondary electrons which provide topographic contrast in SEM images due to their dependence on surface angle. Magnification, resolution, depth of field and sources of image contrast are also mentioned. Applications of SEM such as energy dispersive X-ray spectroscopy (EDS) and wavelength dispersive X-ray spectroscopy (WDS) are listed.
This document provides information on nanotechnology and methods for characterizing nanomaterials. It begins with definitions of nanotechnology and a nanometer. It then discusses the history and development of nanotechnology, including Richard Feynman's seminal talk in 1959. The document covers various synthesis methods for nanomaterials, including top-down and bottom-up approaches, and specific techniques like ball milling, physical vapor deposition, sol-gel processing, and others. Finally, it summarizes common characterization techniques for analyzing nanomaterials, such as SEM, TEM, XRD, FT-IR spectroscopy, and their basic principles and applications.
The document discusses electron backscatter diffraction (EBSD), including a brief history, the principal system components, how patterns are formed, operating conditions, and uses. EBSD allows determining crystallographic orientations, misorientations, texture trends, grain size, boundary types, and phases. It works by detecting Kikuchi patterns formed by elastic backscatter of electrons from tilted crystalline samples, and analyzing the patterns to determine crystallographic data. EBSD is now widely used to quantitatively characterize microstructures and textures in materials.
Enhanced Enterprise Intelligence with your personal AI Data Copilot.pdfGetInData
Recently we have observed the rise of open-source Large Language Models (LLMs) that are community-driven or developed by the AI market leaders, such as Meta (Llama3), Databricks (DBRX) and Snowflake (Arctic). On the other hand, there is a growth in interest in specialized, carefully fine-tuned yet relatively small models that can efficiently assist programmers in day-to-day tasks. Finally, Retrieval-Augmented Generation (RAG) architectures have gained a lot of traction as the preferred approach for LLMs context and prompt augmentation for building conversational SQL data copilots, code copilots and chatbots.
In this presentation, we will show how we built upon these three concepts a robust Data Copilot that can help to democratize access to company data assets and boost performance of everyone working with data platforms.
Why do we need yet another (open-source ) Copilot?
How can we build one?
Architecture and evaluation
Global Situational Awareness of A.I. and where its headedvikram sood
You can see the future first in San Francisco.
Over the past year, the talk of the town has shifted from $10 billion compute clusters to $100 billion clusters to trillion-dollar clusters. Every six months another zero is added to the boardroom plans. Behind the scenes, there’s a fierce scramble to secure every power contract still available for the rest of the decade, every voltage transformer that can possibly be procured. American big business is gearing up to pour trillions of dollars into a long-unseen mobilization of American industrial might. By the end of the decade, American electricity production will have grown tens of percent; from the shale fields of Pennsylvania to the solar farms of Nevada, hundreds of millions of GPUs will hum.
The AGI race has begun. We are building machines that can think and reason. By 2025/26, these machines will outpace college graduates. By the end of the decade, they will be smarter than you or I; we will have superintelligence, in the true sense of the word. Along the way, national security forces not seen in half a century will be un-leashed, and before long, The Project will be on. If we’re lucky, we’ll be in an all-out race with the CCP; if we’re unlucky, an all-out war.
Everyone is now talking about AI, but few have the faintest glimmer of what is about to hit them. Nvidia analysts still think 2024 might be close to the peak. Mainstream pundits are stuck on the wilful blindness of “it’s just predicting the next word”. They see only hype and business-as-usual; at most they entertain another internet-scale technological change.
Before long, the world will wake up. But right now, there are perhaps a few hundred people, most of them in San Francisco and the AI labs, that have situational awareness. Through whatever peculiar forces of fate, I have found myself amongst them. A few years ago, these people were derided as crazy—but they trusted the trendlines, which allowed them to correctly predict the AI advances of the past few years. Whether these people are also right about the next few years remains to be seen. But these are very smart people—the smartest people I have ever met—and they are the ones building this technology. Perhaps they will be an odd footnote in history, or perhaps they will go down in history like Szilard and Oppenheimer and Teller. If they are seeing the future even close to correctly, we are in for a wild ride.
Let me tell you what we see.
Beyond the Basics of A/B Tests: Highly Innovative Experimentation Tactics You...Aggregage
This webinar will explore cutting-edge, less familiar but powerful experimentation methodologies which address well-known limitations of standard A/B Testing. Designed for data and product leaders, this session aims to inspire the embrace of innovative approaches and provide insights into the frontiers of experimentation!
STATATHON: Unleashing the Power of Statistics in a 48-Hour Knowledge Extravag...sameer shah
"Join us for STATATHON, a dynamic 2-day event dedicated to exploring statistical knowledge and its real-world applications. From theory to practice, participants engage in intensive learning sessions, workshops, and challenges, fostering a deeper understanding of statistical methodologies and their significance in various fields."
1. 1
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
SEM and TEM
Chapter 7.2 : Semiconductor Science by Tudor E. Jenkins
Saroj Kumar Patra,
Department of Electronics and Telecommunication,
Norwegian University of Science and Technology ( NTNU )
2. 2
Contents
Why use electrons?
• De-Broglie Hypothesis
• Electromagnetic lenses and Numerical Aperture
Transmission Electron Microscopy (TEM)
• Structure
• Use Mode
• Practical complications
Scanning Electron Microscopy (SEM)
• Structure
• Use Mode
Scanning Transmission Electron Microscopy (STEM)
Energy Dispersive X-ray Spectroscopy (EDS)
Electron Energy Loss Spectroscopy (EELS)
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
3. 3
Contents
Why use electrons?
• De-Broglie Hypothesis
• Electromagnetic lenses and Numerical Aperture
Transmission Electron Microscopy (TEM)
• Structure
• Use Mode
• Practical complications
Scanning Electron Microscopy (SEM)
• Structure
• Use Mode
Scanning Transmission Electron Microscopy (STEM)
Energy Dispersive X-ray Spectroscopy (EDS)
Electron Energy Loss Spectroscopy (EELS)
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
4. 4
Why use electrons?
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
• Resolution of the microscope depends
on wavelength .
• Optical microscopy is limited by
wavelength to visible light.
• Maximum resolution of optical
microscopes ~ 200nm.
5. 5
Why use electrons?
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
• Material-wave : Wave particle
duality.
• Short wavelength
6. 6
Why use electrons?
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
For V= 100 keV:
Non-relativistic consideration:
7. 7
Electromagnetic Lenses
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
• Lenses focus poorly even at
moderate angels.
• This causes NAEM ~ 0.01
• This is far worse than optical
microscopy where NAOP ~ 1.0
8. 8
Contents
Why use electrons?
• De-Broglie Hypothesis
• Electromagnetic lenses and Numerical Aperture
Transmission Electron Microscopy (TEM)
• Structure
• Use Mode
• Practical complications
Scanning Electron Microscopy (SEM)
• Structure
• Use Mode
Scanning Transmission Electron Microscopy (STEM)
Energy Dispersive X-ray Spectroscopy (EDS)
Electron Energy Loss Spectroscopy (EELS)
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
9. 9
Transmission Electron Microscopy
(TEM)
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
• Send electrons through a thin (~100 nm) sample.
• Get information about the sample based on what
has happened to the electrons when they come out
the other side of the sample.
11. 11
TEM
Schematic
Diagram
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
Energy-loss
spectrometer
Aperture
Sample stage
Detector
CCD video camera
Fluorescent screen
CRT
Condenser lens
Anode
Lenses
Electron gun
X-ray detector
Objective
aperture
Displayed
sample image
Liquid N2
Dewar
Figure 7.36
12. 12
Bright Field (BF)
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
• Separating out the electrons that are
scattered. i.e., those who have gone
straight through the sample.
• Dark and Bright fields for areas with
high and low degree of electron
absorption respectively (Mass-thickness
contrast).
• Dark and Bright fields for areas with
high and low degree of electron
absorption respectively (Diffraction
contrast).
13. 13
Bright Field (BF)
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
• Separating out the electrons that are
scattered. i.e., those who have gone
straight through the sample.
• Dark and Bright fields for areas with
high and low degree of electron
absorption respectively (Mass-thickness
contrast).
• Dark and Bright fields for areas with
high and low degree of electron
absorption respectively (Diffraction
contrast).
14. 14
Dark Field (DF)
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
• Separating out the electrons that have
been scattered in a particular direction.
• Light fields for areas in which electrons
have been scattered in the direction
chosen (Diffraction contrast).
• Greater chance of spreading to areas
with high mass and thickness ( Mass-
thickness contrast).
15. 15
Dark Field (DF)
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
• Separating out the electrons that have
been scattered in a particular direction.
• Light fields for areas in which electrons
have been scattered in the direction
chosen (Diffraction contrast).
• Greater chance of spreading to areas
with high mass and thickness ( Mass-
thickness contrast).
16. 16
HRTEM ( Lattice Images )
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
• Why ? : To take the “image” of the crystal planes in the
material.
• How ? : Setting out both the non-diffracted beam and
one of the diffracted rays with lens aperture and let
them interfere in the image plane.
Lets go back a little…..
17. 17
HRTEM ( Lattice Images )
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
Test
EM Lens
Diffraction plane
Objective aperture
Image plane
Selected area
aperture
More lenses
Screen / Camera
18. 18
HRTEM ( Lattice Images )
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
Test
EM Lens
Diffraction plane
Objective aperture
Image plane
Selected area
aperture
More lenses
Screen / Camera
Objective aperture
( in Diffraction plane)
19. 19
HRTEM ( Lattice Images )
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
Test
EM Lens
Diffraction plane
Objective aperture
Image plane
Selected area
aperture
More lenses
Screen / Camera
Objective aperture
( in Diffraction plane)
20. 20
HRTEM ( Lattice Images )
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
Test
EM Lens
Diffraction plane
Objective aperture
Image plane
Selected area
aperture
More lenses
Screen / Camera
Objective aperture
( in Diffraction plane)
21. 21
HRTEM ( Lattice Images )
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
Test
EM Lens
Diffraction plane
Objective aperture
Image plane
Selected area
aperture
More lenses
Screen / Camera
Two images of the sample are
brought together
Interference
Phase contrast image of the crystal plane
22. 22
HRTEM ( Lattice Images )
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
Two images of the sample are
brought together
Interference
Phase contrast image of the crystal plane
23. 23
Electron Diffraction
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
• Why ? : To study the crystal structure of the material.
• How ? : Adjusting last lens to diffraction plane (instead
of image plane) which is focused on the screen /
camera
25. 25
Electron Diffraction
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
Test
EM Lens
Diffraction plane
Objective aperture
Image plane
Selected area
aperture
More lenses
Screen / Camera
26. 26
Electron Diffraction
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
Test
EM Lens
Diffraction plane
Objective aperture
Image plane
Selected area
aperture
More lenses
Screen / Camera
Selected Area Aperture
( in Image plane)
27. 27
Electron Diffraction
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
Test
EM Lens
Diffraction plane
Objective aperture
Image plane
Selected area
aperture
More lenses
Screen / Camera
Much information about the
material
28. 28
TEM Practical Complications
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
• Must have thin samples (e.g., ~ 100 nm)
Difficult
Time consuming
Can change the sample
• Damage to the sample
• Narrow view
29. 29
Contents
Why use electrons?
• De-Broglie Hypothesis
• Electromagnetic lenses and Numerical Aperture
Transmission Electron Microscopy (TEM)
• Structure
• Use Mode
• Practical complications
Scanning Electron Microscopy (SEM)
• Structure
• Use Mode
Scanning Transmission Electron Microscopy (STEM)
Energy Dispersive X-ray Spectroscopy (EDS)
Electron Energy Loss Spectroscopy (EELS)
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
31. 31
Why use SEM?
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
• Visual : High Resolution Image of the sample
( but TEM has even better resolution)
• Versatile : Not too picky on the samples.
Bad idea with live test
Samples can be inserted very quickly.
With modern sample holders, more than one sample can be
loaded at the same time.
33. 33
Simple Schematic of SEM
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
X-scan signal
Specimen
Scanning
magnets
Stage
Detector
Y-scan signal
X-scan
Y-scan
Z-axis signal CRT
Condenser
lens
Anode
Electron extractor
Filament (electron
emitter)
Electron beam
Figure 7.20
35. 35
Electron Beam System
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
WD:
• Important Parameters : Condenser aperture and working distance (WD)
• What about Resolution and Depth of Field !
37. 37
Electron Beam System
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
Interaction volume
(Typically ~ 100 nm to 5μm
38. 38
Secondary Electrons
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
- Contrast : Topography
- Secondary – not the same electrons
that were injected.
- Coming from the second upper
layer of the interaction volume.
40. 40
Back Scattered Electrons
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
Contrast : Element
Cause : Coulomb Force
∗
∗ ∗
Resolution : Lower than SE
(Due to large interaction volume)
41. 41
SEM Image using BSE
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
42. 42
Contents
Why use electrons?
• De-Broglie Hypothesis
• Electromagnetic lenses and Numerical Aperture
Transmission Electron Microscopy (TEM)
• Structure
• Use Mode
• Practical complications
Scanning Electron Microscopy (SEM)
• Structure
• Use Mode
Scanning Transmission Electron Microscopy (STEM)
Energy Dispersive X-ray Spectroscopy (EDS)
Electron Energy Loss Spectroscopy (EELS)
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
43. 43
Scanning Transmission Electron
Microscopy (STEM)
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
http://www.ipme.ru/e-journals/RAMS/no_1100/browning/Brow.pdf
• Combining the two techniques
:TEM and SEM.
• Provides opportunity for
element analysis
EDS
EELS
• Annular Dark Field Imaging
(not in syllabus)
44. 44
Contents
Why use electrons?
• De-Broglie Hypothesis
• Electromagnetic lenses and Numerical Aperture
Transmission Electron Microscopy (TEM)
• Structure
• Use Mode
• Practical complications
Scanning Electron Microscopy (SEM)
• Structure
• Use Mode
Scanning Transmission Electron Microscopy (STEM)
Energy Dispersive X-ray Spectroscopy (EDS)
Electron Energy Loss Spectroscopy (EELS)
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
45. 45
Energy Dispersive X-ray
Spectroscopy (EDS)
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
• X-rays emitted from atoms
that have been excited by
the electron radiation.
• The wavelengths of X-rays
are characteristic of atomic
number.
• It works best on heavier
elements.
46. 46
Energy Dispersive X-ray
Spectroscopy (EDS)
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
• X-rays emitted from atoms
that have been excited by
the electron radiation.
• The wavelengths of X-rays
are characteristic of atomic
number.
• It works best on heavier
elements.
47. 47
Contents
Why use electrons?
• De-Broglie Hypothesis
• Electromagnetic lenses and Numerical Aperture
Transmission Electron Microscopy (TEM)
• Structure
• Use Mode
• Practical complications
Scanning Electron Microscopy (SEM)
• Structure
• Use Mode
Scanning Transmission Electron Microscopy (STEM)
Energy Dispersive X-ray Spectroscopy (EDS)
Electron Energy Loss Spectroscopy (EELS)
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
48. 48
Electron Energy Loss Spectroscopy
(EELS)
TFE4180 Semiconductor Manufacturing Technology, TEM and SEM
Plot: Relative intensity against Energy loss.
NB most electrons lose no energy ( elastic
collision)
• Some electrons lose energy due to
inelastic shock.
• The shape of the curve to the right
is characteristic for each element.
• It works best for low mass.