- A MOS capacitor consists of a metal gate separated from a semiconductor substrate by an insulating layer (oxide). The oxide layer acts as a dielectric, allowing the structure to function as a capacitor. - An nMOS transistor uses an n-type semiconductor substrate and contains an embedded n-channel. A pMOS transistor uses a p-type substrate and contains an embedded p-channel. - In a CMOS structure, both nMOS and pMOS transistors are used together. It uses both p-type and n-type substrates which allows for low power consumption and high noise immunity.