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Omid Adljuy
(omid.adljuy@ieee.org)

Faculty of Electrical and Computer Engineering
University of Tabriz, Tabriz, Iran
Dec. 2011
Contents
 Brief Review of Si Crystallographic Planes
 Possible Types of Si Wafers
 <100> Wafer ( Primary Flat : <110> )
 Different Views
 <111> Planes
 Mask Openings for Etching
 More Details in Crystal Level
 <110> Wafer ( Primary Flat : <100> )
 Different Views
 <111> Planes
 Mask Openings for Etching
 More Details in Crystal Level
2
Crystal Planes of Silicon

z

z

z

y
x

(100)

y

y
x

(110)

x

(111)

3
MEMS Course

Dr Steve Beeby
Possible Types of Si Wafers
 <100> Wafer
 Primary Flat : <100>
 Primary Flat : <110>
 Primary Flat : <111>
 <110> Wafer
 Primary Flat : <100>
 Primary Flat : <110>
 Primary Flat : <111>
 <111> Wafer
 Primary Flat : <100>
 Primary Flat : <110>
 Primary Flat : <111>

dfg
OK
OK

dfg
OK
OK
OK

dfg
OK

4
<100> Wafer ( Primary Flat : <110> )

5
<100> Wafer

Top View

6
<100> Wafer

Side View

7
<100> Wafer

8
<100> Wafer

<111> Planes

9
<100> Wafer

<111> Planes

10
<100> Wafer

<111> Planes

11
<100> Wafer

<111> Planes

12
<100> Wafer

<111> Planes

13
<100> Wafer Etched Feature

14
<100> Wafer Etched Feature

15
<100> Wafer

Detailed View

16
<100> Wafer

Detailed View

17
<100> Wafer

Detailed View

18
<100> Wafer

Detailed View

19
<110> Wafer ( Primary Flat : <100> )

20
<110> Wafer

Front View

21
<110> Wafer

22
<110> Wafer

<111> Planes

23
<110> Wafer

<111> Planes

24
<110> Wafer

<111> Planes

25
<110> Wafer

<111> Planes

26
<110> Wafer

<111> Planes

27
<110> Wafer

<111> Planes

28
<110> Wafer

<111> Planes

29
<110> Wafer

<111> Planes

30
<110> Wafer

<111> Planes

31
<110> Wafer

<111> Planes

32
<110> Wafer

<111> Planes

33
<110> Wafer

<111> Planes

34
<110> Wafer Etched Feature

35
<110> Wafer Etched Feature

36
<110> Wafer Etched Feature

37
<110> Wafer Etched Feature

38
<110> Wafer

Detailed View

39
<110> Wafer

Detailed View

40
<110> Wafer

Detailed View

41
<110> Wafer

Detailed View

42
<110> Wafer

Detailed View

43
<110> Wafer

Detailed View

44
Thanks
For Your Attention

45
Omid Adljuy
(omid.adljuy@ieee.org)

Faculty of Electrical and Computer Engineering
University of Tabriz, Tabriz, Iran
Dec. 2011
46

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