Profilograph-profilometr is capable to provide measurement of parameters of surfaces in three-dimensional (3D) the image of their condition to within 1нм on height of a relief. This device allows to receive qualitatively new information which, in turn, will lead to development and creation of the newest technologies in mechanical engineering

1. The Scientific Technical Project:
3D Laser Scanning Differential-
Phase Microscope-Profilometer
LSDPMP
Kiev - 2015
The Project Authors: Zhitnitskiy A.L. and
Stelmakh A.U.
Laboratory Nanotribotechnology

2. 3D Laser Scanning Differential-Phase
Microscope-Profilometer (LSDPMP)
Образец №1
Образец №2
Образец №3

3. Laser Scanning Differential-Phase Microscope-Profilometer (LSDPMP) is an advanced product in nanometry field,
that has the following main competitive advantages:
1. The high sensitivity of the profile height: up to 0.1 nm (estimated theoretical sensitivity can reach 0.005 nanometers)
2. The high performance: high speed linear scanning LSDPMP through acousto-optic deflectors XY-splitters
- about 100,000 points/sec. To get the frame size of 512x512 pixels in sight 1x1 mm takes about 8 seconds.
3. A large field of view with high resolution in the scanning plane: a part of LSDFMP will be included precision automated
mechanical object table that provides frame by frame scanning large surface areas. At this is implemented in LSDFMP crosslinking
datasets each frame using the pledged data redundancy in the frame. Thus, LSDPMP allow maximum attainable resolution of optical
methods in the field of view (about 0.3 mm) to explore objects whose transverse dimensions are limited to a range of mechanical
positioning of the stage in the scanning plane. It is supposed to implement the scanning field of view 25x25 mm and obtaining an
object image with a resolution up to 10,000x10,000 points. For comparison, the device NewView700s provides the measurement
field 10x10 mm by the matrix 1000x1000 points, whereby resolution plane is not more than 10 mkm.
4. The images receiving: in the LSDPMP obtaining images of the object is performed by raster scanning using an acousto-optic high-
speed XY deflector. The number of points in one frame can reach 512x512. In combination with a mechanical precision automated
sample stage that providing the frame scanning the object surface, the number of the image points can be arbitrarily set depending
on the number of points in a frame and the number of scanning frames.
5. The high vibration resistance: LSDPMP practically does not require additional measures for vibration protection as well as the
principle of differential-phase measurements involves scanning the object simultaneously by two laser beams that are distributed in
the optical system in almost the same way (the angular divergence of the scanning laser beams is only 10-5 rad.), and thus, any
change in optical path length occurring during the vibrations affect the phase of each of the scanning beams equally and thus cancel
out of registration with the difference signal detector. At the same time, for the closest analogue NewView700s is required the
protection system against vibration in the range of 1 to 120 Hz using the massive section air cushion.
6. The work in different modes: receiving images an object in both amplitude and differential-phase measurements. It is also possible
to get a photo-response and photo-luminescent images with proper equipment. The device is capable to operate both in the
"reflection" mode and in "transmission“ mode.
The purpose and application of
the 3D Laser Scanning Differential-Phase Microscope-Profilometer (LSDPMP)

4. The use of the Laser Scanning Microscope Profilometer LSDPMP in metrology and standardization significantly raise the level of metrology
and certification centers. This will be possible due to the fact that the device is capable of performing the functions LSDPMP a number of different
instruments. Moreover, its main advantage is the high sensitivity of the profile (from a fraction of an angstrom to 10 nanometers) with almost complete
vibration resistant. Furthermore, LSDPMP provides high speed scanning of the laser beams along the line (X or Y) or the square (X and Y). Software
will allow to present the measurements results in the two- and three-dimensional form, save acquired images in a user-friendly format, with the
possibility of further processing at any time, for example, obtain surface roughness, geometric dimensions of the surface defects, etc.
As demonstrated by testing laboratory model of the device LSDPMP in the microelectronics industry may be used to determine the quality of
produced chips (their structure, surface roughness, thickness of the various layers, paths, etc.). The instrument for its ability to work in a photo-response
mode allows to determine non-contact the current distribution in the chips and solar cells, thus determining their quality.
In biology and medicine laboratory prototype has already been tested LSDPMP in ophthalmology, as well as in the analysis of blood cells,
especially high efficiency of LDFSMPP established in studies of low-contrast various medical and biological products.
Thus the use of LSDPMP depending on configuration "transmission" and / or "reflection" is possible in almost all areas of mechanical
engineering, especially in the creation of highly tribosystems (automotive, engine, aircraft, machine, rocket engineering, in the bearing industry and other
sectors) metrology and standardization, microelectronics, jewelry industry, solid state physics, in the fields of information security in the field of
microbiology and medicine and other industries.
Application of the LSDPMP in configurations "transmission" or "reflection" in mechanical engineering is assumed in the central measuring and /
or industrial laboratories (CYL, CPL), and under workshop conditions in the areas of quality control of surface treatment of machine parts, including
bearings (LSDPMP allow measure the roughness of the ball diameter of 1 mm). The LSDPMP also gives an opportunity to optimize the technology of
surface treatment to improve the efficiency of tribo-nodes.
The LSDPMP will optimize the technology of surface treatment to improve the efficiency of tribo-nodes. This is due to the fact that, as was
found in the course of our research tribological, anti-wear and anti-friction of tribo-nodes characteristics largely depend on the spatial configuration of the
surface microgeometry parts of friction, which is formed during processing.
This issue has received little attention, mainly due to lack of a tool to quickly and accurately determine the parameters of the surface (under the
parameters should be understood not only the standard roughness parameters of the profile, but also the shape and direction of the scratches roughness,
their spatial orientation relative to the direction of operation, the frequency amplitude, frequency etc.). Studies have shown that the optimization
processing technology with a view of the above, but not used in the production of surface parameters, makes it possible to improve the efficiency of
tribosystems (anti-wear and anti-friction properties) several times. Study the effect of spatial micro-geometry of surfaces of turbine blades for aircraft
engines and generators hydro and / or gas-dynamic losses have shown that the proper organization of the configuration of their working surfaces
roughness height also increases the efficiency of the turbine by 2-6%, which is very important in the case of the interaction of the gas (liquid) - metal. It
is obvious that the proper organization of the spatial configuration of the roughness of skin of the aircraft (especially high-speed) will also lead to an
improvement in their aerodynamic characteristics. This will lead to a decrease in resistance in the boundary layers of environment; increase in airspeed
while reducing fuel consumption; improve the stability of the flight; reduce the load on the power components of the wing and tail (stabilizers of aircraft,
ailerons, flaps, spoilers), etc.
The purpose and application of
the 3D Laser Scanning Differential-Phase Microscope-Profilometer (LSDPMP)

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Средняя линия
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
Ra = 0.5 
Средняя линия
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The dispersion distribution σl in the directions for
different values of the base surface length
The variance distribution σs for individual spectral
components of the spatial spectra

6. х, мкм
f (x),
мкм
мкм
Two-dimensional distribution of the dispersion surface areas of
individual spectral components of the spatial spectrum
а)
мкм
, см–1
, мкм
б)
The distribution of the variance
in the direction of the azimuth 0.

7. LSDPMP in the Metrology and Standardization
• Linear-angular
measurement :
- 2D images;
- profile;
- 3D image
- The range of 0.01 mm,
- 40x lens

8. • Standard roughness (Ra = 54 nm).
2D and 3D images of the
reconstructed surface relief

Metrology and Standardization
 Differential-phase image

9. Metrology and Standardization
• Standard spherical indentations on the surface of a flat plate (754 nm)
 Differential-phase image
Profile and 3D reconstructed
image of the surface relief

10. The surface of the turboshaft engine blades

11. The friction surface of artificial human joints

12. Investigation of the Blood cells and plasma by the LSDPMP
The studies by the LDFSMP have shown that human blood erythrocytes has diameter 7-8mkm.
Therefore the minimum clearance for non-contact non-traumatic for cells blood pump
must be at least 15 mkm

13. Sale and Delivery the LSDPMP–2015
The method of differential-phase profilometry and laser scanning differential-
phase microscope reserved and protected by patents of Ukraine and priority
application PCT

14. Roadmap of the project LSDPMP-2015
Calculation of
the LSDPMP
optical scheme
in modern
software
package
Development
the electronic
control unit
LSDPMP
Design units, parts and optical
elements of the LSDPMP
optical-mechanical module
A
ss
e
m
bl
in
g,
a
dj
us
t
m
en
t
be
nc
h
de
b
u
gg
in
g
Development the schematic
diagrams, design the
phototemplates
Development
the Software
LSDPMP
Assembling
and testing
optical-
mechanical
module of
the
LSDPMP
Development the device
drivers and user interface.
Development the algorithms
for post-processing of the
measured data and 3-D
representation of the
information about the object
Design the two-axis acousto-
optic deflector-splitter system
scanning optical-mechanical
module of the LSDPMP
Manufacturing the
parts, assembly the
two-coordinate acousto-
optic deflector-splitter
system scan
Manufacture the parts and
optical components,
equipment standard
products optical-
mechanical module of the
LSDPMP
Manufacturing the parts
of the boards, grade
standard products and
assembling the electronic
control unit LSDPMP.
Testing and debugging
bench the electronic unit
LSDPMP
I-st and II-nd stage
The development and design the LSDPMP
III-rd stage: Manufacture, assembly,
installation and debugging the LSDPMP
Assemb
ling the
electro
nic
module
LSDP
MP
Testing and debugging of the
LSDPMP software module
IV-th stage :
the LSDPMP in
NANOINDUSTRY
Bearing industry
Т-06. Methods and tools for research
and certification of nanomaterials
and nanodevices
A package of agreements
with specific
(acceptances) customers
oftrhe LSDPMP
Metrology and Standardization
Precision machinery hydraulic,
pneumatic, fuel equipment
Micro and Nanoelectronics
Nanomedicine and microbiology
Nanotribology
Development the programs
firmware for boards controllers
LSDPMP
Hydro and Aeromechanics of
nano-surface, nanomechanics

15. Thanks for your kind attention
Invite for the cooperation