This document discusses characterization techniques for biosensors. It describes biosensors and immunosensors, and techniques used to characterize surfaces, including atomic force microscopy (AFM) to measure roughness, X-ray photoelectron spectroscopy (XPS) to determine composition and contamination, and time-of-flight secondary ion mass spectrometry (ToF-SIMS) for molecular fingerprinting and distribution. Self-assembled monolayers (SAMs) are discussed for functionalizing surfaces. Microcantilevers are also described as biological sensors operating in static or dynamic mode.