This document summarizes a student project that aimed to deposit thin aluminum films on glass substrates using thermal evaporation. Specifically, the project sought to characterize aluminum films deposited on both heated and non-heated glass substrates using atomic force microscopy, white light interferometry, and spectral reflectivity measurements. The results showed that heating the glass substrate during deposition reduced the surface roughness and grain size of the aluminum films compared to deposition on non-heated substrates. Heating the substrate also increased the grain sizes by approximately 3.5 times and decreased the roughness by 41.6% compared to non-heated samples.
ophthalmic plastic lens manufacturing, their history, merits, demerits and specifications, difference between CR-39 and Polycarbonate lenses and their durability
ophthalmic plastic lens manufacturing, their history, merits, demerits and specifications, difference between CR-39 and Polycarbonate lenses and their durability
Presentation: Design & fabrication of a low cost Spin CoaterSaurabh Pandey
Spin Coating is basically a procedure which is used to deposit uniform thin films to any flat surface of work piece. Usually a small amount of coating material is applied on the centre of the work piece’s surface when the disk is spinning at very low speed. Here in this process we are using the basic principle of centrifugal force. This is applied due to the spinning of Disk.
1.Silicon Manufacturing
a) Czochralski method.
b) Wafer Manufacturing
c) Crystal structure
2.Photolithography
a) Photoresists
b) Photomask and Reticles
c) Patterning
Business Presentation 1 - Launching a new productIVAN C.
Presentación comercial creada por Iván Corral para la empresa Onyx Solar. El motivo era el lanzamiento de un nuevo producto, el vidrio fotovoltaico de colores, cuyas características y usos se describen en la propia presentación.
Presentation: Design & fabrication of a low cost Spin CoaterSaurabh Pandey
Spin Coating is basically a procedure which is used to deposit uniform thin films to any flat surface of work piece. Usually a small amount of coating material is applied on the centre of the work piece’s surface when the disk is spinning at very low speed. Here in this process we are using the basic principle of centrifugal force. This is applied due to the spinning of Disk.
1.Silicon Manufacturing
a) Czochralski method.
b) Wafer Manufacturing
c) Crystal structure
2.Photolithography
a) Photoresists
b) Photomask and Reticles
c) Patterning
Business Presentation 1 - Launching a new productIVAN C.
Presentación comercial creada por Iván Corral para la empresa Onyx Solar. El motivo era el lanzamiento de un nuevo producto, el vidrio fotovoltaico de colores, cuyas características y usos se describen en la propia presentación.
Slides of invited talk on ALD for MEMS at the AVS-ALD conference ALD 2009 Monterey, California, USA
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Full reference:
R. L. Puurunen, M. Blomberg, H. Kattelus, ALD layer in MEMS fabrication, 9th International Conference on Atomic Layer Deposition “ALD 2009”, Monterey, California, July 19-22, 2009. Invited talk.
It was a project under my course MME 442. In this project, we received a 20*30 square cm glazed wall ceramic tile. We had to its' specifications and the properties of the tile. Then we needed to compare its' properties with the standard,
This is a power point presentation of project work on preparing Zinc oxide thin films by using SILAR technique and CBD technique and studying its characteristics.
Wear and Corrosion Study of Sputtered Zirconium thin films on SS316L for Wind...IJERA Editor
The Aim of this study is to observe the Wear and Corrosion behavior of Zirconium coated 316L stainless steel. After polishing, SS316L was coated with Zirconium employing DC sputtering process (a technique of physical vapor deposition).Structure characterization techniques including Scanning Electron Microscope (SEM) and X-Ray Diffraction (XRD) were utilized to investigate the microstructure and crystallinity of the coating. Salt spray test was performed by spraying Sodium chloride in order to determine corrosion resistance behavior of the coated sample. Pin on disc wear test was performed by hardened and tempered EN31 steel pin in order to determine and compare the Wear resistance behavior of Coated and uncoated samples. The Objective is to recommend the zirconium coated Stainless steel SS316L can be a choice for Off-shore wind mills where the shafts undergo Wear and corrosion problems.
Nanoscience and nanotechnology primarily deal with the synthesis, characterization,
exploration, and exploitation of nanostructures materials. These materials are characterized by at least
one dimension in the nanometer (1nm = 10−9 m) range. In this research project nano materials are
synthesized or deposited by sputtering process. Prior to this sputtering process, the desired specimen and
its pattern is prepared with one of the mask less lithographic techniques such as electron beam
lithography (EBL). In this process, EBL machine is used with 220 KV of power and it is used to write the
pattern with raster scan method. After co-deposition of Al2O3 and SiO2 with the help of sputtering then
finally characterization has taken place. In this characterization, Scanning electron microscope (SEM)
images are taken and then finally atomic force microscope (AFM) images are taken in order to know the
deflection error, adhesiveness, and DMT modulus
1. Deposition of very thin films by
thermal evaporation using a heated
substrate
by
Conor Browne
Supervised by
Dr. Ger O’ Connor
2. Project Aims
• Deposit a range of Aluminium thin films of specific thickness onto a
dielectric (Glass) substrate.
• Characterise these samples using Atomic Force Microscopy (AFM),
White Light Interferometry (WLI) and Spectral Reflectivity (SR).
• Develop a high temperature substrate capability within the thermal
evaporator apparatus.
• Compare and contrast heated and non-heated samples using the
results gathered from the AFM, WLI and SR.
Applications:
Mirrors Space blankets Spaceship insulation
Slide 2
4. K975x Thermal Evaporator set-up Standard method:
• Place mass of Aluminium in the crucible,
place glass slide into the slide holder.
• Begin the vacuum process.
• Increase the current to turn Al into a vapour.
• Upon reaching desired thickness turn down
current.
• Purge the chamber.
0
3
6
9
12
15
18
21
24
27
30
0 10 20 30 40 50 60
DepositedAl
thickness(nm)
Time (s)
Average Deposition Rates
12 Amps
Averaged
11 Amps
Averaged
10 Amps
Averaged
9 Amps
Averaged
Slide 4
Experimental procedure
5. Glass slide heater
Heater method:
• Ramp up the current to 35A over
100s (3-4A every 10s).
• Heat slide for 300s at this current.
• Ramp current down over 100s.
• Begin deposition process.
Improvements made to the standard method:
• Use of a constant mass of Aluminium.
• Steady increase in current supply (One Amp
increase every 10 seconds).
• Cleaning glass slides with Isoclene before
use.
• Handled slides with latex gloves.
• Evaporating off any residual Aluminium that
built up on the crucible.
Thin film sample of
thickness 25.6 ±3.25 nm
Slide 5
Experimental procedure
9. Conclusion
• Roughness and grain size have all been improved upon heating
of the substrate. Reflectivity has decreased due to the grain size.
• Reduction of 41.6% in the roughness of heated samples when
compared to non-heated samples from the results of the AFM.
• WLI measurements of both sets of samples verified a reduction in
the roughness of the heated samples.
• The grain sizes of the heated samples were found to be roughly
3.5 times larger than the grain sizes observed in non-heated
samples from the results of the AFM grain size analysis.
Slide 9
10. Acknowledgements
Thank you for your time.
I would like to thank:
Dr. Ger O’ Connor
James Nallen
Conor Mc Brierty
Clare Mc Daniel
Pinaki Das Gupta
Slide 10