Epitaxy ppt
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Epitaxy is a process for depositing single crystalline films on substrates through chemical vapor deposition. It involves heating substrates and introducing reactant gases to deposit thin films that take on the crystalline structure of the substrate through lattice matching or intentional mismatch. There are three basic reactor configurations for epitaxial growth - horizontal, vertical, and planetary - which differ in how they position and rotate the substrates during deposition to achieve uniform thin film growth.
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