Auo Oled Manufacturing

OLED Manufacturing
Process

宋志峰經理
OLED 技術處, 友達光電
技術處,
Apr. 25th, 2004

AUO Proprietary & Confidential

For example :
CRT vs LCD ; Dram vs Flash
Growth rate

For example :
LCD vs OLED
Growth rate

???

Taiwan’s maker

1

450
400
Revenue (million USD)

350
300
250
200
150
100
50
0
2002 2003 2004 2005 2006
2.1 2.6 3.3 3.3 3.3
Others
2.6 18.5 30.2 52.6 97.1
Industrial
83.7 131.5 190.1 189.4 193.6
Car Audio
26.4 101.4 127.7 108.1 116.4
Mobile phone-Sub
- - 0.8 3.4 3.1
Automotive

Source : Annual Display Search US FPD Conference 2004

Source : iSuppli OLEDs conference 2004

OLED市場是否能繼續成長端看AMOLED何時遞補??


LTPS-OLED LTPS-LCD

曇花一現的AMOLED!

2003 : World First Commercial AMOLED Display
Kodak DSC

2004 : World 2nd Commercial AMOLED Display
Sony Clie PDA


2

“贏利無望！” 先鋒放棄有源型有機EL面板業務
【日經BP社報道】
先鋒將放棄開展有源矩陣型有機EL面板業務。這是2005年12月8日先鋒集團業務結
構改革發佈會宣佈的。今後將研究如何有效利用現有專利，準備繼續進行有源型產
品的研發。

三洋電機退出有機EL業務 “將考慮出售”相關設備
【日經BP社報道】
三洋電機日前宣佈將退出有機EL面板業務。由該公司與美國柯達合資成立的、旨在
生產和銷售有機EL面板的SK顯示器公司將撤銷雙方的合資關係。對於退出有機EL
面板業務的理由，三洋電機解釋說：“這是根據公司中期經營計劃對業務進行選擇
與集中的結果，目的是進一步向核心業務進行集中。”


主角登場了!!
LPL、三星SDI宣佈加碼投資AMOLED產線

近來平面顯示器面板大廠先後發佈，加碼投資主動式有機電激發光顯示器（AMOLED）
的消息，樂金飛利浦（LG. Philips LCD；LPL）計劃在坡州興建1條5.5代AMOLED生
產線，在此同時，三星SDI（Samsung SDI）亦向外界宣佈，將投資4.5億美元擴增
AMOLED產能，顯示儘管在TFT LCD和PDP面板技術成熟並漸成主流之際，廠商對於
AMOLED市場的投資動作仍未停歇。

LPL與柯達合作發展AMOLED面板
【電子時報】
據彭博資訊（Bloomberg）報導，TFT LCD面板大廠樂金飛利浦（LG. Philips LCD；
LPL）與柯達（Eastman Kodak）日前達成初步協議，將合作研發有機電激發光二極體
（OLED）面板。由於三洋電機日前甫宣佈退出OLED市場，而原與三洋電機（Sanyo
Electric）擁有OLED合資關係的柯達，旋即與LPL促成合作契機，OLED面板合縱版圖
勢必將再現變動。


3

友達AMOLED產品明年可望問市
【電子時報 2005/11/25】
友達（2409）2006年主動式有機電激發光顯示器（AMOLED）產品將開始小幅量產，友達副總經
理盧博彥表示，2005年底友達將會有小量的AMOLED產品開始送樣給客戶，2006年開始陸續會有
一些產品開始問市。盧博彥表示，AMOLED顯示效果佳，且不需要背光模組可以做得十分輕薄，在
中小尺寸市場有其利基。不過目前AMOLED量產技術仍需要一段時間的發展，其良率及生產成本才
能與TFT LCD在市場上競爭。

在參加了工研院電子所舉辦的「前瞻顯示技術論壇」上，盧博彥表示，他對於三星SDI
（Samsung SDI）資深研發副總鄭昊鈞所談，關於三星SDI在AMOLED量產技術的努力，覺得心有
戚戚焉，因為雖然每一項有關於技術的改進都只是輕描淡寫地帶過，但是背後事實上都代表了大量
的研發經費與人力，而友達在AMOLED技術的發展過程，確實也遭遇到同樣艱辛的挑戰，因此聽來
特別有感覺。

對於AMOLED受到TFT LCD技術發展快速的威脅，盧博彥認為，倘若AMOLED技術早在10〜15
年前被開發出來，那麼這個技術現在必然會是獨霸市場的顯示技術，因為AMOLED的顯示效果確實
是十分地討人喜歡。不過過去幾年由於TFT LCD的技術快速發展，AMOLED確實也面臨很大的壓力。

盧博彥表示，友達看好AMOLED的技術潛力，但對於AMOLED的發展不敢貪心，先以小量出貨
為主。盧博彥表示，事實上2006年整個AMOLED市場的產品量應該還不是很明顯的起來，畢竟
AMOLED的技術發展完全成熟仍需要一段時間。同時盧博彥也表示，目前AMOLED最重要的課題
仍是在於如何在這幾年趕緊把技術快速提升，否則面臨TFT LCD的追趕，未來市場必然更受擠壓。


Agenda

1. AMOLED v.s. TFT-LCD
2. Manufacturing Process
3. Challenge of OLED
4. AMOLED Development in AUO
5. Summary


4

TFT Request for OLED

q Different pixel design
V2
OLED

Data Data
× LC
V1
Scan Scan
Vcom

q Enough current supply to drive OLED
q Good stability of TFTs


Structure of TFT-LCD & AMOLED

TFT-LCD

AMOLED
Frame
Polarizer
TFT

FPC

Desiccant Cover glass


5

Main Components of AMOLED

Frame
Polarizer
TFT

FPC

Desiccant Cover glass

Ø OLED replaces liquid crystal, color filter and backlight unit

Ø The module thickness of OLED smaller than 2.1 mm.


Circular Polarizer for OLED

Dark Bright

Polarizer
1/4λcircular
polarizer 1/4 λ Retardation Retardation Film
Glass
ITO

Org. Layer

Metallic Pole

Glass


6

Thinner Form Factor

Items Structure Materials Thickness (mm)

0.250
Top PF

HOUSING FRAME
Transflective LCD

Color filter (0.5t) 1.000
TFT glass (0.5t)
0.250
Bottom PF
display

2.3mm
Gap (built up by shielding tap) 0.085
Reverse (downward) prism sheet 0.100
Light guide plate (flat type) 0.550
Reflector 0.065
0.6mm height
Active Matrix OLED

Circular polarizer 0.280
Display

1.48mm
TFT glass (0.5t)
1.200
Cover glass (0.7t)

HOUSING FRAME

è thinner form factor


Wide Viewing Angle & High Contrast
250

1.93 AM LCD
200
Brightness (cd/m )

AU-OLED
2

OLED LCD 150

100

50

0
-80 -60 -40 -20 0 20 40 60 80

View angle

1.E+07

1.E+06
Contrast ratio

1.E+05

1.E+04
1.93 AM LCD
1.E+03 AU-OLED
Virtually no viewing angle problem 1.E+02

1.E+01

Contrast ~2 orders of LCD 1.E+00
-80 -60 -40 -20 0 20 40 60 80

View angle


7

Superior Viewing Angle
AMOLED 90
1
120 60
0. 8
Co n tra st ratio
0.6
150 30
12 00
0.4

10 00
0. 2

LCD
180 0
8 00 OLED

C.R.
6 00

4 00
210 330

2 00
240 300
0
270

-1 0 0 -50 0 50 100
a n g les fro m n o r.

TFTLCD_MVA Int. Vs viewing angles (White)

1.2

1

0.8 LCD

int. (a.u.)
OLED
0.6

0.4

0.2

0
-100 -80 -60 -40 -20 0 20 40 60 80 100
angles to normal( deg.)


Performance Comparison

TFT-LCD AMOLED

Contrast ratio

Thickness& Weight Response time

Cost Viewangle

Lifetime Power consumption

AMOLED only shows few advantage than LCD

8

Agenda

5. Summary


AMOLED Process Flow

OLED process

AMOLED

a-Si
Cell process Module process
TFT array process

TFT-LCD
TFT-

Color Filter
Extra equipment
Backlight module
Liquid Crystal
for LTPS process

Majority of investment (~80%) is in place for AMOLED
manufacturing

9

OLED Process Flow

TFT array
process

Substrate OLED OLED
pre-treating Deposition Encapsulation

Panel
Module


Substrate Pre-treatment
Substrate OLED OLED

Yield Killer – Point Defects

particle
Cathode
Substrate cleaning
OLED
ITO
Baking
Short
circuit
cooling

UV Ozone cleaning
& O2 plasma


10

Substrate Pre-treatment
Substrate OLED OLED

ITO Anode
§ High work function
§ Smooth surface

Substrate cleaning

Baking

Invert and cooling

UV Ozone cleaning 4.7 eV
& O2 plasma
5.1 eV


OLED Deposition
Substrate OLED OLED

Optimized OLED structure

Cathode
HIL deposition
Electron transport layer
HTL deposition
Emitting layer
⊕⊕⊕⊕⊕⊕⊕⊕⊕
EML deposition
Hole transport layer
Hole injection layer
ETL deposition
Anode
Substrate
Cathode deposition

Light emitting


11

Full-color Patterning
White emitter Blue emitter
Separate RGB pixel
+ color change medium
+ color filter

Full color
technology

R G B R G B R G B

Maker Pioneer, SNMD ,Sony, AUO TDK, Sony, Kodak Idemitsu
Higher efficiency than
Low power consumption Easier process
Advantage color filter
Higher color saturation Easier scale up
No differential aging

1. Fine pitch process Red color change material
Problem High efficient white emitter
2. Mass production development


Shadow Masking Process

Evaporator
TFT driver TFT driver TFT driver

Shadow mask



The accuracy of shadow mask and alignment system is very critical


12

Limitations of Resolution

Display pixel

d > 40um
Real
hole

φ > 50 um

Design rule for mask : (traditional pixel design)
Hole width > 50 µm ; Bridge > 40µm è Resolution < 170 ppi


Shadow Mask for OLED
Substrate OLED OLED
Pre-Treating Deposition Encapsulation


Shadow mask issue — Shadow mask

Materials:
HIL deposition Low CTE < 1 ppm/oC
Ex: G 3.5 shadow maskà 610x720
mm
HTL deposition
Temperature variation à < 5oC
Mask expansion è 3.6 µm TFT driver TFT driver TFT driver

EML deposition Process:
Etching type or electron forming
ETL deposition Accuracy < +/- 5µm
Good taper < 45° +/-
Cathode deposition 5µm
For large size:
Mask difficult to manufacture 45º
Alignment accuracy hard to
achieve


13

OLED Encapsulation
Substrate OLED OLED
Pre-Treating Deposition Encapsulation

Cover glass
Desiccant
UV glue

Cover-glass clean

UV clean

Desiccant attach

Glue dispensing
Functions
Encapsulation
• Environmental protection
• Moisture-free cavity
• Mechanical support


Cover-glass for OLED
glass
○
cover
metal X (bending, adhesion)
Manufacturing
Advantages Disadvantages
Process
•High cost
•Suitable for large size
•More micro-crack
Micro blasting
or asymmetric pattern
•Weak strength
•Less micro-crack •Photo mask
Wet etching
•High strength •Cost


14

Cover-glass for OLED

10

10mm
8
Strength(Kg)

6.2
6

10mm
4

32.2mm
2

量測面
0.8
0
F1 F2 M1 M2
The measured sample is
cover-glass only
F1 F2 M1 M2
代號
鈉玻璃量鈉玻璃量 Etch玻璃 Etch玻璃
Condition
噴砂面玻璃面玻璃面
Etch面


Desiccant for OLED

Absorption
Company Material Notes
Type

Dynic Chemical CaO

Gore-Tex Chemical SrO

Saes getter Chemical CaO
Kodak Chemical unknown Liquid

Poor encapsulation


15

New Approach for Encapsulation
Future
requirement

Glass cap Glass or plastic Polymer
UV glue Passivation layer
Insulator
Desiccant UV glue

OLED OLED
OLED

Glass Encapsulation Passivation plus Passivation
Encapsulation
•Feature : •Feature : •Feature :
Stable and reliable process Slim factor ( < 1mm ) Slim factor( < 0.6 mm)
Thickness ~1.61mm Low cost Low cost
potentially flexible Simple manufacture
Potentially flexible


Process Flow for Cell
Enc.
(305x360)

Cutting CT-1 Beveling Clean

Auto Polarizer
Package CT-2 Clave Attach

Module Process


16

Process Flow for Module

OLED Cell

白膠&
Light-on
MCOG Burn-in
Test-1 FPC膠

Outline Light-on
Package Frame
Inspection Test-2

Customer


Agenda

5. Summary


17

Challenge of OLED

q Performance-wise
Differential aging
Image sticking

q Manufacture-wise
Yield : >97% for small size display
Scale-up : G3.5 àG5 à….
Cost : same as LCD


Differential Aging

1.1
Differential Red
0.39
1 Green
aging among
0.37
Brightness (a.u.)

Blue
0.9
RGB
0.35
CIE

0.33
0.8
0.31

0.7
CIE(x)
0.29
CIE(y)
Blue color is the
0.27
0.6
bottleneck
0.25
0.5
0

0
Time (hrs)
Time (hrs)

Color balance shifts with time due to the shorter lifetime of
blue color


18

Differential Aging Improvement

1. Improve blue lifetime
2. Balance RGB lifetime

Change
Emitting area
brightness

brightness
lifetime lifetime


Image Sticking
Images sticking Solutions

AUO AUO 2-line icons
+128x128 pixel

after stress

400 hrs continuously stress

Reduce continuous usage of icons (lower brightness or fixed icons)
Improve display lifetime


19

Yield Killer_Dead Pixel

Because the organic film is very thin,
very small particle still can form the
particle
Cathode
short circuit between anode and
cathode
OLED
For small size panel, any point defect
ITO
can not acceptable
Short
circuit


Redundant Pixel Design

Vdd

particle
Cathode

OLED
ITO
Short
circuit

Vss

With redundant pixel design, single dark defect is negligible


20

Cost Down for Organic Materials
modification of
OLED recipe
recycle of residues
substrate
in chamber

deposited film (OLED)

evaporated
range local material
vendors

evaporating source

new evaporation equipment with
higher material utilization ratio

Materials Utilization Ratio Issue

H/2~2H/3

H
H/3

Material usage ratio: ~3% Material usage ratio: 8~10%
(based on TS)
OLED material is very expensive, and the materials utilization
ratio is low.

21

Agenda

5. Summary


OLED Timeline
PMOLED Product
AMOLED Product

Japan AUO
started
Japan Korea Taiwan entered
started entered entered Sony PDA
SKD-DSC

97 98 99 00 01 02 03 04 05 06

AUO R&D team World first a-Si AMOLED Double Sided AMOLED
established


22

OLED Activities

Location
§ R&D line : 200x200 mm, 100x100mm)
§ L3B Fab (Pilot-line )
§Design center –
AUO Technology Center 5F
§RD Employee : 53

OLED Depositing
Equipment

ATC


1st AMOLED for Mobile-Phone


23

Ultra Fast Speed in AMOLED R&D

10/30/2002
7/19/2001 9/14/2001 12/21/2001
FPD International 2002
4” a-Si prototype 4” a-Si prototype
World First a-Si
AMOLED Prototype

10/20/2004 10/30/2002
[Product: 2004]
2“ DSC FPD International ‘04 FPD International 2005 [Product: 2006]
application
2“ mobile-phone
World First Double 270PPI High
application
Sided AMOLED Resolution AMOLED

Agenda

5. Summary


24

Summary

q Where is the market ?
Small mobile display e.g. cell phone
High end product

q Success in the future
Continuous improvement on lower power consumption
Maturity on manufacture
Lower cost
TV application



25

Auo Oled Manufacturing

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