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Kok Wai Chan
Team Leader in Device Fabrication
kokwai@meetiqm.com
Superconducting qubit devices: fabrication suite
K. W. Chan, T. Li, W. Liu, J. Heinsoo, V. A. Sevriuk, M. Jenei, F. Marxer, C. Ockeloen-
Korppi, J. Tuorila, J. Hassel, J. Vartiainen, K. Y. Tan, J. Goetz, and M. Möttönen
IQM Finland Oy, Espoo Finland
IQM in brief
• Founded in 2018, located in Espoo, Finland
• Seed funding round, 11.5 M€ secured in July 2019
• > 30 employees
• Superconducting qubit design and fabrication
• IP: QCR for fast qubit reset and readout
• Manufacture in-house microwave electronics to control
and readout a quantum processor
2Fast Lane for Quantum Computers
QCR = quantum circuit refrigerator
Outline
3
➢Transmon qubit
➢Fabrication of microwave resonators and 1-qubit gate device
➢Microwave resonators
➢Single qubit gate with on-chip airbridges
➢Other projects
➢Acknowledgement
Fast Lane for Quantum Computers
Transmon Qubit
4Fast Lane for Quantum Computers
• Qubit is a two level system.
• ۧ|0 and ۧ|1 state represented by
the absence and presence of a
single (microwave) photon in the
resonator, respectively
• Control of states via microwave
drive
• Ultra-low temperature to reach ۧ|0
state
𝐶 𝐿
Classical 𝐿𝐶-oscillator
microwave
photon
𝐶coupling
ℏ𝜔o
ℏ = reduced Planck’s constant, 𝜔0 = 2𝜋𝑓0, 𝑓0 = fundemental frequency of resonator/transmon
𝐶
Non-linear
inductor
𝐿(𝑛)
Transmon
microwave
photon
𝐶coupling
ℏ𝜔o
EJ > EC
Ec = e2/2Csum
Csum (geometry)
• Need anharmonicity and less
charge dispersion, not to excite
other transitions.
• Anharmonicity (non-linear
inductor) implementation
–> Josephson junction (JJ)
• JJ is inherently lossless, good for
qubit lifetime.
[1] P. Krantz et al., Appl. Phys. Rev. 6, 021318 (2019)
Transmon Qubit
5Fast Lane for Quantum Computers
𝐶
Non-linear
inductor
𝐿(𝑛)
Transmon
microwave
photon
𝐶coupling
𝐶 𝐿
Readout resonator
𝐶κ
XY drive
SQUID
SQUID = superconducting quantum interference device
• Actual implementation
includes a “dispersive”
readout resonator
• Minimise qubit
perturbation, no energy
exchange
• Readout resonator 𝑓0
changes according to
qubit state
Fabrication - Transmon Qubit
6Fast Lane for Quantum Computers
• Start with a bare ultra high resistivity silicon wafer
• Sputter Nb (TC > 7K)
• Resist coating
• Resist patterning (TL + Resonators)
• Resist development
• Etch Nb film
• Clean / remove resist
• Fabricate Al SIS junctions (Dolan bridge)
• Fabricate Al airbridges
TL = transmission line, PECVD = plasma-enhanced chemical vapour deposition, Nb= niobium, Al = aluminium
SIS = superconducting-insulator-superconducting
Microwave Resonators
7Fast Lane for Quantum Computers
Photograph: Multiplexed 18 resonators
Qubit lifetime, T1
Qtot = f0/Df-3dB
At single photon level
f0,1
f0,18
f0,1
f0,18
T1  Q / wge
T1= coherence time
Microwave Resonators
8Fast Lane for Quantum Computers
Photograph: Multiplexed 18 resonators
Measured internal quality factor
< Qi > > 1e6
Qi > 2e6
Totalqualityfactor,𝑸𝐭𝐨𝐭
Coupling distance, 𝒅
Coupling quality factor, 𝑸 𝐜
Internal quality factor, 𝑸𝐢
Total quality factor, 𝑸𝐭𝐨𝐭
𝐶κ = coupling capacitance (between transmission line and resonator)
𝟏
𝑸𝐭𝐨𝐭
=
𝟏
𝑸 𝐜
+
𝟏
𝑸𝐢
Coupling quality factor, 𝑸 𝐜 ∝
𝟏
𝑪 𝛋
𝟐 ∝ 𝒅
Internal quality factor, 𝑸𝐢 → internal losses
Extracting internal quality factor
At single photon level Ref: Journal of Applied Physics 104, 113904 (2008)
1Qb gate + airbridges
9Fast Lane for Quantum Computers
SEM: 1-qubit gate device + airbridges
SEM = scanning electron micrograph, T1= coherence time, T2
*= Ramsey dephasing time
m-airbridges
Measured specifications
fres 6.204 GHz
fss 5.286 GHz
T1 18 ms
T2
* 22 ms
XY drive
transmon
readout resonators
fres = resonator frequency, fss = qubit frequency at sweet spot
Other projects – 2-qubit gate
10Fast Lane for Quantum Computers
SEM: 2-qubit gate (tunable coupler)
Qubit fres (GHz) fss (GHz) T1 (ms) T2
* (ms)
1 6.2877 6.7865 13 23
2 6.4330 !10.8500 2.5 0.3
3 6.5027 7.0600 20 25 Fluxline cross-talk measurement
fres = resonator frequency, fss = qubit frequency at sweet spot, ! = not at sweet spot
Other projects – fast qubit reset
11Fast Lane for Quantum Computers
SEM: QCR – fast qubit reset
QCR = quantum circuit refrigerator
Presented by Johannes on Monday
Abstract: A36.00008 : Unconditional reset of superconducting
qubits and readout resonators using a quantum-circuit
refrigerator
[1] V. Sevriuk et al., Appl. Phys. Lett. 115, 082601 (2019)
[2] D. Basilewitsch et al., New J. Phys. 21, 093054 (2019)
Acknowledgement
www.meetiqm.com
12

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APS March Meeting - Superconducting qubit devices: fabrication suite

  • 1. Kok Wai Chan Team Leader in Device Fabrication kokwai@meetiqm.com Superconducting qubit devices: fabrication suite K. W. Chan, T. Li, W. Liu, J. Heinsoo, V. A. Sevriuk, M. Jenei, F. Marxer, C. Ockeloen- Korppi, J. Tuorila, J. Hassel, J. Vartiainen, K. Y. Tan, J. Goetz, and M. Möttönen IQM Finland Oy, Espoo Finland
  • 2. IQM in brief • Founded in 2018, located in Espoo, Finland • Seed funding round, 11.5 M€ secured in July 2019 • > 30 employees • Superconducting qubit design and fabrication • IP: QCR for fast qubit reset and readout • Manufacture in-house microwave electronics to control and readout a quantum processor 2Fast Lane for Quantum Computers QCR = quantum circuit refrigerator
  • 3. Outline 3 ➢Transmon qubit ➢Fabrication of microwave resonators and 1-qubit gate device ➢Microwave resonators ➢Single qubit gate with on-chip airbridges ➢Other projects ➢Acknowledgement Fast Lane for Quantum Computers
  • 4. Transmon Qubit 4Fast Lane for Quantum Computers • Qubit is a two level system. • ۧ|0 and ۧ|1 state represented by the absence and presence of a single (microwave) photon in the resonator, respectively • Control of states via microwave drive • Ultra-low temperature to reach ۧ|0 state 𝐶 𝐿 Classical 𝐿𝐶-oscillator microwave photon 𝐶coupling ℏ𝜔o ℏ = reduced Planck’s constant, 𝜔0 = 2𝜋𝑓0, 𝑓0 = fundemental frequency of resonator/transmon 𝐶 Non-linear inductor 𝐿(𝑛) Transmon microwave photon 𝐶coupling ℏ𝜔o EJ > EC Ec = e2/2Csum Csum (geometry) • Need anharmonicity and less charge dispersion, not to excite other transitions. • Anharmonicity (non-linear inductor) implementation –> Josephson junction (JJ) • JJ is inherently lossless, good for qubit lifetime. [1] P. Krantz et al., Appl. Phys. Rev. 6, 021318 (2019)
  • 5. Transmon Qubit 5Fast Lane for Quantum Computers 𝐶 Non-linear inductor 𝐿(𝑛) Transmon microwave photon 𝐶coupling 𝐶 𝐿 Readout resonator 𝐶κ XY drive SQUID SQUID = superconducting quantum interference device • Actual implementation includes a “dispersive” readout resonator • Minimise qubit perturbation, no energy exchange • Readout resonator 𝑓0 changes according to qubit state
  • 6. Fabrication - Transmon Qubit 6Fast Lane for Quantum Computers • Start with a bare ultra high resistivity silicon wafer • Sputter Nb (TC > 7K) • Resist coating • Resist patterning (TL + Resonators) • Resist development • Etch Nb film • Clean / remove resist • Fabricate Al SIS junctions (Dolan bridge) • Fabricate Al airbridges TL = transmission line, PECVD = plasma-enhanced chemical vapour deposition, Nb= niobium, Al = aluminium SIS = superconducting-insulator-superconducting
  • 7. Microwave Resonators 7Fast Lane for Quantum Computers Photograph: Multiplexed 18 resonators Qubit lifetime, T1 Qtot = f0/Df-3dB At single photon level f0,1 f0,18 f0,1 f0,18 T1  Q / wge T1= coherence time
  • 8. Microwave Resonators 8Fast Lane for Quantum Computers Photograph: Multiplexed 18 resonators Measured internal quality factor < Qi > > 1e6 Qi > 2e6 Totalqualityfactor,𝑸𝐭𝐨𝐭 Coupling distance, 𝒅 Coupling quality factor, 𝑸 𝐜 Internal quality factor, 𝑸𝐢 Total quality factor, 𝑸𝐭𝐨𝐭 𝐶κ = coupling capacitance (between transmission line and resonator) 𝟏 𝑸𝐭𝐨𝐭 = 𝟏 𝑸 𝐜 + 𝟏 𝑸𝐢 Coupling quality factor, 𝑸 𝐜 ∝ 𝟏 𝑪 𝛋 𝟐 ∝ 𝒅 Internal quality factor, 𝑸𝐢 → internal losses Extracting internal quality factor At single photon level Ref: Journal of Applied Physics 104, 113904 (2008)
  • 9. 1Qb gate + airbridges 9Fast Lane for Quantum Computers SEM: 1-qubit gate device + airbridges SEM = scanning electron micrograph, T1= coherence time, T2 *= Ramsey dephasing time m-airbridges Measured specifications fres 6.204 GHz fss 5.286 GHz T1 18 ms T2 * 22 ms XY drive transmon readout resonators fres = resonator frequency, fss = qubit frequency at sweet spot
  • 10. Other projects – 2-qubit gate 10Fast Lane for Quantum Computers SEM: 2-qubit gate (tunable coupler) Qubit fres (GHz) fss (GHz) T1 (ms) T2 * (ms) 1 6.2877 6.7865 13 23 2 6.4330 !10.8500 2.5 0.3 3 6.5027 7.0600 20 25 Fluxline cross-talk measurement fres = resonator frequency, fss = qubit frequency at sweet spot, ! = not at sweet spot
  • 11. Other projects – fast qubit reset 11Fast Lane for Quantum Computers SEM: QCR – fast qubit reset QCR = quantum circuit refrigerator Presented by Johannes on Monday Abstract: A36.00008 : Unconditional reset of superconducting qubits and readout resonators using a quantum-circuit refrigerator [1] V. Sevriuk et al., Appl. Phys. Lett. 115, 082601 (2019) [2] D. Basilewitsch et al., New J. Phys. 21, 093054 (2019)