Tribochemical polishing is a technique that utilizes corrosive wear to polish surfaces. It involves chemically reacting the surface material with a corrosive medium like water or chemical reagent under sliding contact. The friction stimulates preferential dissolution of material at asperity peaks, making the surface very smooth after initial wear. It is effective when friction generates tribocorrosion products, mechanical stresses are low to avoid damage, and the corrosive medium is not too aggressive. Tribochemical polishing has been used to create smooth surfaces on materials like silicon nitride, silicon, and silicon carbide.